公开(公告)号：US20050006556A1

公开(公告)日：2005-01-13

申请号：US10618187

申请日：2003-07-10

申请人： Kirby Floyd ,  Adrian Montgomery ,  Jennifer Gonzales ,  Won Bang ,  Rong Pan ,  Amna Mohammed ,  Yen-Kung Wang

发明人： Kirby Floyd ,  Adrian Montgomery ,  Jennifer Gonzales ,  Won Bang ,  Rong Pan ,  Amna Mohammed ,  Yen-Kung Wang

IPC分类号： C23C16/455 ,  C23C16/458 ,  H01L21/00 ,  H01L21/316 ,  H01L21/68 ,  F16M13/00

CPC分类号： H01L21/67259 ,  C23C16/455 ,  C23C16/4583 ,  H01L21/02129 ,  H01L21/02271 ,  H01L21/31625 ,  H01L21/68

摘要： Embodiments of the present invention are directed to adjusting the spacing between the substrate support and the faceplate of the gas distribution member to achieve improved uniformity of the layer formed on the substrate. One embodiment of the present invention is directed to a method of adjusting a spacing between a gas distribution member and a substrate support disposed generally opposite from the gas distribution member, wherein the substrate support is configured to support a substrate on which to form a layer with improved thickness uniformity. The method comprises forming a layer on the substrate disposed on the substrate support; measuring a thickness of the layer on the substrate; and calculating differences in thickness between a reference location on the substrate and a plurality of remaining locations on the substrate. The method further comprises computing spacing adjustment amounts for the remaining locations relative to the reference location based on the differences in thickness between the reference location and the remaining locations. The spacing adjustment amount is positive to increase the spacing between the substrate support at the location and the gas distribution member if the thickness is greater at the location than at the reference location. The spacing adjustment amount is negative to decrease the spacing between the substrate support at the location if the thickness is smaller at the location than at the reference location.

摘要翻译： 本发明的实施例涉及调整衬底支撑件和气体分配构件的面板之间的间隔，以实现在衬底上形成的层的改进的均匀性。 本发明的一个实施例涉及一种调节气体分配构件和大致与气体分配构件相对设置的衬底支撑件之间的间隔的方法，其中衬底支撑件构造成支撑衬底，以在其上形成具有 改善厚度均匀性。 该方法包括在设置在基板支撑件上的基板上形成一层; 测量衬底上的层的厚度; 并且计算衬底上的参考位置与衬底上的多个剩余位置之间的厚度差异。 该方法还包括基于参考位置和其余位置之间的厚度差来计算相对于参考位置的剩余位置的间隔调整量。 如果位置处的厚度大于在参考位置处的厚度，则间距调节量是正的以增加位置处的衬底支撑件与气体分配构件之间的间隔。 如果在位置处的厚度小于在参考位置处的厚度，则间距调节量是负的，以减小位置处的衬底支撑件之间的间隔。

公开(公告)号：US20080286444A1

公开(公告)日：2008-11-20

申请号：US12182345

申请日：2008-07-30

申请人： Kirby Floyd ,  Adrian Q. Montgomery ,  Jennifer Gonzales ,  Won Bang ,  Rong Pan ,  Amna Mohammed ,  Yen-Kung Victor Wang

发明人： Kirby Floyd ,  Adrian Q. Montgomery ,  Jennifer Gonzales ,  Won Bang ,  Rong Pan ,  Amna Mohammed ,  Yen-Kung Victor Wang

IPC分类号： C23C16/52

CPC分类号： H01L21/67259 ,  C23C16/455 ,  C23C16/4583 ,  H01L21/02129 ,  H01L21/02271 ,  H01L21/31625 ,  H01L21/68

摘要： Embodiments of the present invention are directed to adjusting the spacing between the substrate support and the faceplate of the gas distribution member to achieve improved uniformity of the layer formed on the substrate. One embodiment of the present invention is directed to a method of adjusting a spacing between a gas distribution member and a substrate support disposed generally opposite from the gas distribution member, wherein the substrate support is configured to support a substrate on which to form a layer with improved thickness uniformity. The method comprises forming a layer on the substrate disposed on the substrate support; measuring a thickness of the layer on the substrate; and calculating differences in thickness between a reference location on the substrate and a plurality of remaining locations on the substrate. The method further comprises computing spacing adjustment amounts for the remaining locations relative to the reference location based on the differences in thickness between the reference location and the remaining locations. The spacing adjustment amount is positive to increase the spacing between the substrate support at the location and the gas distribution member if the thickness is greater at the location than at the reference location. The spacing adjustment amount is negative to decrease the spacing between the substrate support at the location if the thickness is smaller at the location than at the reference location.

摘要翻译： 本发明的实施例涉及调整衬底支撑件和气体分配构件的面板之间的间隔，以实现在衬底上形成的层的改进的均匀性。 本发明的一个实施例涉及一种调节气体分配构件和大致与气体分配构件相对设置的衬底支撑件之间的间隔的方法，其中衬底支撑件构造成支撑衬底，以在其上形成具有 改善厚度均匀性。 该方法包括在设置在基板支撑件上的基板上形成一层; 测量衬底上的层的厚度; 并且计算衬底上的参考位置与衬底上的多个剩余位置之间的厚度差异。 该方法还包括基于参考位置和其余位置之间的厚度差来计算相对于参考位置的剩余位置的间隔调整量。 如果位置处的厚度大于在参考位置处的厚度，则间距调节量是正的以增加位置处的衬底支撑件与气体分配构件之间的间隔。 如果在位置处的厚度小于在参考位置处的厚度，则间距调节量是负的，以减小位置处的衬底支撑件之间的间隔。

公开(公告)号：US07413612B2

公开(公告)日：2008-08-19

申请号：US10618187

申请日：2003-07-10

申请人： Kirby Floyd ,  Adrian Q. Montgomery ,  Jennifer Gonzales ,  Won Bang ,  Rong Pan ,  Amna Mohammed ,  Yen-Kung Victor Wang

发明人： Kirby Floyd ,  Adrian Q. Montgomery ,  Jennifer Gonzales ,  Won Bang ,  Rong Pan ,  Amna Mohammed ,  Yen-Kung Victor Wang

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306

CPC分类号： H01L21/67259 ,  C23C16/455 ,  C23C16/4583 ,  H01L21/02129 ,  H01L21/02271 ,  H01L21/31625 ,  H01L21/68

摘要： Embodiments of the present invention are directed to adjusting the spacing between the substrate support and the faceplate of the gas distribution member to achieve improved uniformity of the layer formed on the substrate. One embodiment of the present invention is directed to a method of adjusting a spacing between a gas distribution member and a substrate support disposed generally opposite from the gas distribution member, wherein the substrate support is configured to support a substrate on which to form a layer with improved thickness uniformity. The method comprises forming a layer on the substrate disposed on the substrate support; measuring a thickness of the layer on the substrate; and calculating differences in thickness between a reference location on the substrate and a plurality of remaining locations on the substrate. The method further comprises computing spacing adjustment amounts for the remaining locations relative to the reference location based on the differences in thickness between the reference location and the remaining locations. The spacing adjustment amount is positive to increase the spacing between the substrate support at the location and the gas distribution member if the thickness is greater at the location than at the reference location. The spacing adjustment amount is negative to decrease the spacing between the substrate support at the location if the thickness is smaller at the location than at the reference location.

摘要翻译： 本发明的实施例涉及调整衬底支撑件和气体分配构件的面板之间的间隔，以实现在衬底上形成的层的改进的均匀性。 本发明的一个实施例涉及一种调节气体分配构件和大致与气体分配构件相对设置的衬底支撑件之间的间隔的方法，其中衬底支撑件构造成支撑衬底，以在其上形成具有 改善厚度均匀性。 该方法包括在设置在基板支撑件上的基板上形成一层; 测量衬底上的层的厚度; 并且计算衬底上的参考位置与衬底上的多个剩余位置之间的厚度差异。 该方法还包括基于参考位置和其余位置之间的厚度差来计算相对于参考位置的剩余位置的间隔调整量。 如果位置处的厚度大于在参考位置处的厚度，则间距调节量是正的以增加位置处的衬底支撑件与气体分配构件之间的间隔。 如果在位置处的厚度小于在参考位置处的厚度，则间距调节量是负的，以减小位置处的衬底支撑件之间的间隔。

公开(公告)号：US07754282B2

公开(公告)日：2010-07-13

申请号：US12182345

申请日：2008-07-30

申请人： Kirby Floyd ,  Adrian Q. Montgomery ,  Jennifer Gonzales ,  Won Bang ,  Rong Pan ,  Amna Mohammed ,  Yen-Kun Victor Wang

发明人： Kirby Floyd ,  Adrian Q. Montgomery ,  Jennifer Gonzales ,  Won Bang ,  Rong Pan ,  Amna Mohammed ,  Yen-Kun Victor Wang

IPC分类号： C23C16/52

CPC分类号： H01L21/67259 ,  C23C16/455 ,  C23C16/4583 ,  H01L21/02129 ,  H01L21/02271 ,  H01L21/31625 ,  H01L21/68

摘要： A method of adjusting a spacing between a gas distribution member and a substrate support includes forming a layer on a substrate disposed on the substrate support; measuring a thickness of the layer on the substrate; and calculating differences in thickness between a reference location on the substrate and a plurality of remaining locations on the substrate. The method further comprises computing spacing adjustment amounts for the remaining locations relative to the reference location based on the differences in thickness between the reference location and the remaining locations.

摘要翻译： 调整气体分配构件和基板支撑件之间的间隔的方法包括在设置在基板支撑件上的基板上形成层; 测量衬底上的层的厚度; 并且计算衬底上的参考位置与衬底上的多个剩余位置之间的厚度差异。 该方法还包括基于参考位置和其余位置之间的厚度差来计算相对于参考位置的剩余位置的间隔调整量。

公开(公告)号：US20070169694A1

公开(公告)日：2007-07-26

申请号：US11701401

申请日：2007-02-02

申请人： Alexander Schwarm ,  Arulkumar Shanmugasundram ,  Rong Pan ,  Manuel Hernzndez ,  Amna Mohammed

发明人： Alexander Schwarm ,  Arulkumar Shanmugasundram ,  Rong Pan ,  Manuel Hernzndez ,  Amna Mohammed

IPC分类号： G06F19/00 ,  B05C11/00 ,  C23C16/00

CPC分类号： H01L22/20 ,  C23C16/52 ,  G05B19/00 ,  G05B19/19 ,  G05B19/41865 ,  G05B2219/32053 ,  G05B2219/32065 ,  G05B2219/45031 ,  H01L21/67253 ,  Y02P90/20

摘要： A method of film deposition in a sub-atmospheric chemical vapor deposition (CVD) process includes (a) providing a model for sub-atmospheric CVD deposition of a film that identifies one or more film properties of the film and at least one deposition model variable that correlates with the one or more film properties; (b) depositing a film onto a wafer using a first deposition recipe comprising at least one deposition recipe parameter that corresponds to the at least one deposition variable; (c) measuring a film property of at least one of said one or more film properties for the deposited film of step (b); (d) calculating an updated deposition model based upon the measured film property of step (c) and the model of step (a); and (e) calculating an updated deposition recipe based upon the updated model of step (d) to maintain a target film property. The method can be used to provide feedback to a plurality of deposition chambers or to control a film property other than film thickness.

摘要翻译： 在亚大气压化学气相沉积（CVD）方法中的膜沉积方法包括（a）提供用于识别膜的一个或多个膜性质的薄膜的亚常气氛CVD沉积模型和至少一个沉积模型变量 这与一个或多个膜性质相关; （b）使用包括对应于所述至少一个沉积变量的至少一个沉积配方参数的第一沉积配方将膜沉积在晶片上; （c）测量步骤（b）的沉积膜的所述一种或多种膜性质中的至少一种的膜性质; （d）基于步骤（c）的测量的膜性质和步骤（a）的模型计算更新的沉积模型; 以及（e）基于步骤（d）的更新模型来计算更新的沉积配方以维持目标膜特性。 该方法可用于向多个沉积室提供反馈或控制除膜厚度之外的膜性质。

公开(公告)号：US09633117B2

公开(公告)日：2017-04-25

申请号：US12430411

申请日：2009-04-27

申请人： Martin B. Scholz ,  Rong Pan ,  Rajan Lukose

发明人： Martin B. Scholz ,  Rong Pan ,  Rajan Lukose

IPC分类号： G06F17/30 ,  G06Q30/06

CPC分类号： G06Q30/0631 ,  G06F17/30345 ,  G06F17/30861 ,  G06F17/30867 ,  H04L67/025 ,  H04L67/22

摘要： There is described a system and computer-implemented method for providing a recommendation based on a sparse pattern of data. An exemplary method comprises determining a likelihood that an item for which no user preference data is available will be preferred. The exemplary method also comprises determining a likelihood that an item for which user preference data is available for users other than a particular user will be preferred based on the likelihood that the item for which no user preference data is available will be preferred. The exemplary method additionally comprises predicting that an item for which no user preference data relative to the particular user is available will be preferred if the likelihood that the particular user will prefer the item exceeds a certain level.

公开(公告)号：US20140215085A1

公开(公告)日：2014-07-31

申请号：US13750223

申请日：2013-01-25

申请人： Zhi Li ,  Xiaoqing Zhu ,  Rong Pan ,  Joshua B. Gahm ,  Ali C. Begen ,  David R. Oran

发明人： Zhi Li ,  Xiaoqing Zhu ,  Rong Pan ,  Joshua B. Gahm ,  Ali C. Begen ,  David R. Oran

IPC分类号： H04L29/06

CPC分类号： H04L65/4084 ,  H04L65/4092 ,  H04L65/80 ,  H04L67/02

摘要： A method is provided in one example embodiment and includes receiving media data at an adaptive streaming client; updating an estimated available bandwidth associated with a media stream associated with the media data; filtering the estimated available bandwidth; mapping the filtered estimated available bandwidth to a media bitrate for the media stream; and updating a target segment delay that is to control time intervals between consecutive segment downloads of the media stream.

摘要翻译： 在一个示例实施例中提供了一种方法，并且包括在自适应流客户端处接收媒体数据; 更新与与所述媒体数据相关联的媒体流相关联的估计可用带宽; 过滤估计的可用带宽; 将所过滤的估计可用带宽映射到媒体流的媒体比特率; 以及更新用于控制媒体流的连续段下载之间的时间间隔的目标段延迟。

公开(公告)号：US08792352B2

公开(公告)日：2014-07-29

申请号：US13101870

申请日：2011-05-05

申请人： Davide Bergamasco ,  Andrea Baldini ,  Valentina Alaria ,  Flavio Bonomi ,  Rong Pan

发明人： Davide Bergamasco ,  Andrea Baldini ,  Valentina Alaria ,  Flavio Bonomi ,  Rong Pan

IPC分类号： H04J1/16

CPC分类号： H04L43/0882 ,  H04L43/062 ,  H04L47/10 ,  H04L47/11 ,  H04L47/263 ,  H04L47/30

摘要： The present invention provides improved methods and devices for managing network congestion. Preferred implementations of the invention allow congestion to be pushed from congestion points in the core of a network to reaction points, which may be edge devices, host devices or components thereof. Preferably, rate limiters shape individual flows of the reaction points that are causing congestion. Parameters of these rate limiters are preferably tuned based on feedback from congestion points, e.g., in the form of backward congestion notification (“BCN”) messages. In some implementations, such BCN messages include congestion change information and at least one instantaneous measure of congestion. The instantaneous measure(s) of congestion may be relative to a threshold of a particular queue and/or relative to a threshold of a buffer that includes a plurality of queues.

摘要翻译： 本发明提供了用于管理网络拥塞的改进的方法和设备。 本发明的优选实现允许将拥塞从网络核心中的拥塞点推送到可以是边缘设备，主机设备或其组件的反应点。 优选地，速率限制器形成引起堵塞的反应点的各个流。 这些速率限制器的参数优选地基于来自拥塞点的反馈来调整，例如以后向拥塞通知（“BCN”）消息的形式。 在一些实现中，这样的BCN消息包括拥塞变化信息和至少一个拥塞的瞬时测量。 拥塞的瞬时测量可以是相对于特定队列的阈值和/或相对于包括多个队列的缓冲器的阈值。

公开(公告)号：US20110106817A1

公开(公告)日：2011-05-05

申请号：US12609327

申请日：2009-10-30

申请人： Rong Pan ,  Martin B. Scholz

发明人： Rong Pan ,  Martin B. Scholz

IPC分类号： G06F17/30 ,  G06N7/02

CPC分类号： G06Q30/02 ,  G06Q30/0282

摘要： Embodiments of the present invention are directed to methods and systems for determining unknowns in rating matrices. In one embodiment, a method comprises forming a rating matrix, where each matrix element corresponds to a known favorable user rating associated with an item or an unknown user rating associated with an item. The method includes determining a weight matrix configured to assign a weight value to each of the unknown matrix elements, and sampling the rating matrix to generate an ensemble of training matrices. Weighted maximum-margin matrix factorization is applied to each training matrix to obtain corresponding sub-rating matrix, the weights based on the weight matrix. The sub-rating matrices are combined to obtain an approximate rating matrix that can be used to recommend items to users based on the rank ordering of the corresponding matrix elements.

摘要翻译： 本发明的实施例涉及用于确定评级矩阵中的未知数的方法和系统。 在一个实施例中，一种方法包括形成评级矩阵，其中每个矩阵元素对应于与项目相关联的已知有利用户评级或与项目相关联的未知用户评级。 该方法包括确定权重矩阵，其被配置为向每个未知矩阵元素分配权重值，以及对该等级矩阵进行采样以生成训练矩阵的集合。 加权最大边缘矩阵因子分解被应用于每个训练矩阵以获得相应的次级矩阵，权重基于权重矩阵。 将子评级矩阵组合以获得可以用于基于相应矩阵元素的秩排序向用户推荐项目的近似等级矩阵。

公开(公告)号：US07817556B2

公开(公告)日：2010-10-19

申请号：US11408293

申请日：2006-04-20

申请人： Rong Pan ,  Flavio Bonomi ,  George Varghese

发明人： Rong Pan ,  Flavio Bonomi ,  George Varghese

IPC分类号： G01R31/08

CPC分类号： H04L47/215 ,  H04L47/193 ,  H04L47/20

摘要： Various improvements are provided for prior art policing methods, including token bucket methods and virtual time policing methods. Some preferred methods of the invention involve assigning a non-zero drop probability even when the packet would otherwise have been transmitted according to a prior art policing method. For example, a non-zero drop probability may be assigned even when there are sufficient tokens in a token bucket to allow transmission of the packet. A non-zero drop probability may be assigned, for example, when a token bucket level is at or below a predetermined threshold or according to a rate at which a token bucket is being emptied. Some implementations involve treating a token bucket as a virtual queue wherein the number of free elements in the virtual queue is proportional to the number of remaining tokens in the token bucket. Such implementations may involve predicting a future virtual queue size according to a previous virtual queue size and using this predicted value to calculate a drop probability.

摘要翻译： 为现有技术的管理方法提供了各种改进，包括令牌桶方法和虚拟时间监管方法。 本发明的一些优选方法涉及分配非零丢弃概率，即使当根据现有技术的监管方法将分组以其他方式传输时也是如此。 例如，即使在令牌桶中有足够的令牌来允许分组的传输，也可以分配非零丢弃概率。 例如，当令牌桶级别等于或低于预定阈值时或者根据令牌桶被清空的速率时，可以分配非零丢弃概率。 一些实现涉及将令牌桶视为虚拟队列，其中虚拟队列中的空闲元素的数量与令牌桶中剩余令牌的数量成正比。 这样的实现可以涉及根据先前的虚拟队列大小预测未来的虚拟队列大小，并且使用该预测值来计算丢弃概率。