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公开(公告)号：US4176034A
公开(公告)日：1979-11-27
申请号：US896378
申请日：1978-04-14
申请人： Klaus Stoger , Richard Dotzer , Josef Stadter , Johann Gehring
发明人： Klaus Stoger , Richard Dotzer , Josef Stadter , Johann Gehring
摘要： Above the electroplating trough, a lock chamber is arranged which can be flooded with protective gas and is subdivided by means of an intermediate door into an outer chamber and a main chamber. The outer chamber has an outer lock door while the main chamber is connected to the electroplating trough by an inner lock opening. In addition, a work piece transfer device is provided which can be moved between the outer chamber and the main chamber and can be operated from the outside.
摘要翻译： 在电镀槽的上方，设置有可以被保护气体充满的锁定室，并且通过中间门细分成外室和主室。 外部室具有外部锁定门，而主室通过内部锁定开口连接到电镀槽。 此外，设置有能够在外室和主室之间移动的工件传送装置，并且可以从外部进行操作。
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公开(公告)号：US4053383A
公开(公告)日：1977-10-11
申请号：US713983
申请日：1976-08-12
申请人： Richard Dotzer , Klaus Stoger , Josef Stadter
发明人： Richard Dotzer , Klaus Stoger , Josef Stadter
摘要： Apparatus for electrodepositing aluminum in which an electroplating trough, which contains aprotic oxygen-free and water-free organo-aluminum electrolyte, is closed off in an airtight manner and is accessible only via a lock chamber disposed thereabove and which uses, for inserting and removing the work pieces, a detachable coupling rod carrying a frame with the articles to be electroplated permitting a strongly adhering aluminum layer to be deposited onto work pieces of any design desired with the exclusion of air.
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公开(公告)号：US4018566A
公开(公告)日：1977-04-19
申请号：US559016
申请日：1975-03-17
申请人： Klaus Zeuch , Josef Stadter
发明人： Klaus Zeuch , Josef Stadter
CPC分类号： C30B13/28 , C30B13/00 , C30B29/44 , Y10T117/1004 , Y10T117/1012
摘要： In apparatus for the preparation of a semiconductor compound such as gallium phosphide using the Bridgman method in a horizontal system equipped with a heating device and disposed in a pressure vessel, the reaction tube is mounted in a stationary fashion in a reaction boat and the heating device supported so that it is moveable in the direction of the horizontal axis of the system to permit synthesis of the semiconductor compound along with zone melting and drawing of single crystals. A light guide having its free end arranged below the reaction tube is mounted to the heating device for movement therewith and is used to measure the temperature at the reaction boat.
摘要翻译： 在装备有加热装置的水平系统中，使用布里奇曼法（Bridgman method）制备半导体化合物如磷化镓的设备，并设置在压力容器中，反应管以静止的方式安装在反应舟皿和加热装置 支撑使得其可以在系统的水平轴线的方向上移动，以允许半导体化合物的合成以及单晶的区域熔融和拉伸。 将其自由端布置在反应管下方的导光体安装到加热装置上以与其一起运动，并用于测量反应舟皿的温度。
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公开(公告)号：US3981196A
公开(公告)日：1976-09-21
申请号：US561342
申请日：1975-03-24
申请人： Klaus Zeuch , Josef Stadter
发明人： Klaus Zeuch , Josef Stadter
摘要： Apparatus for measuring the temperature of a granular semiconductor material of the type which is evaporated when manufacturing a semiconductor such as gallium phosphide within an ampoule or reaction tube, in which a temperature sensor is installed in a measuring tube having a closed end extending into the ampoule and the semiconductor material therein and an opened end which is sealed into a suitable opening in the end of the ampoule with the electrical leads for the temperature sensor being brought out from the measuring tube through the opening in the ampoule.
摘要翻译： 用于测量在安瓿或反应管内制造诸如磷化镓之类的半导体时被蒸发的类型的颗粒状半导体材料的温度的装置，其中温度传感器安装在具有延伸到安瓿中的封闭端的测量管中 其中的半导体材料和开口端，其封闭在安瓿端部的合适开口中，用于温度传感器的电引线通过安瓿的开口从测量管出来。
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