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公开(公告)号：US07307254B2
公开(公告)日：2007-12-11
申请号：US11103654
申请日：2005-04-12
申请人： Kohei Yamaguchi , Kazuo Aoki , Seiji Isogai , Masashi Sakamoto
发明人： Kohei Yamaguchi , Kazuo Aoki , Seiji Isogai , Masashi Sakamoto
CPC分类号： H01J37/28 , H01J37/265 , H01J2237/2817
摘要： This SEM has a capability of preventing shift of a view field of the foreign matters at a stage where no sufficient correction is carried out when obtaining the SEM coordinate values used for transforming the coordinate values of the foreign matters on the sample sent from another device into the SEM coordinate values. The SEM selects the foreign matters closer to the center of the sample at first and then the foreign matters spirally from the center of the sample to the outer periphery.
摘要翻译： 该SEM具有在获得用于将从另一装置发送的样本上的异物的坐标值变换为的变形的SEM坐标值进入到不进行充分校正的阶段时，能够防止异物的视场的偏移 SEM坐标值。 SEM首先从样品的中心选择更接近样品中心的异物，然后从样品的中心向外周螺旋地排列异物。
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公开(公告)号：US20060043294A1
公开(公告)日：2006-03-02
申请号：US11211650
申请日：2005-08-26
申请人： Kohei Yamaguchi , Seiji Isogai , Kazuo Aoki , Masashi Sakamoto
发明人： Kohei Yamaguchi , Seiji Isogai , Kazuo Aoki , Masashi Sakamoto
IPC分类号： G21K7/00
CPC分类号： H01J37/21 , H01J37/222 , H01J37/265 , H01J2237/216 , H01J2237/22 , H01J2237/24578 , H01J2237/24592
摘要： In a scanning electron microscope having the function of observing an attentional object on a specimen, an error in an in-focus position can be corrected at high speeds. When moving the field of view to an object to be observed on a specimen on which an electron beam is scanned, an error between an in-focus position indicated by a mechanism for measuring a height of surface of the specimen and an actual in-focus position is corrected on the basis of information concerning points which are among a plurality of measured points and are adjacent to the target observing point.
摘要翻译： 在具有观察样品上的注意物体的功能的扫描电子显微镜中，可以高速地校正对焦位置的误差。 当将视野移动到要扫描的电子束的样本上的观察对象时，由用于测量样本的表面的高度的机构和实际的聚焦位置所指示的对焦位置之间的误差 基于与多个测量点中的点相邻并且与目标观察点相邻的点的信息来校正位置。
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公开(公告)号：US07307253B2
公开(公告)日：2007-12-11
申请号：US11211650
申请日：2005-08-26
申请人： Kohei Yamaguchi , Seiji Isogai , Kazuo Aoki , Masashi Sakamoto
发明人： Kohei Yamaguchi , Seiji Isogai , Kazuo Aoki , Masashi Sakamoto
IPC分类号： H01J37/256 , G01N23/00
CPC分类号： H01J37/21 , H01J37/222 , H01J37/265 , H01J2237/216 , H01J2237/22 , H01J2237/24578 , H01J2237/24592
摘要： In a scanning electron microscope having the function of observing an attentional object on a specimen, an error in an in-focus position can be corrected at high speeds. When moving the field of view to an object to be observed on a specimen on which an electron beam is scanned, an error between an in-focus position indicated by a mechanism for measuring a height of surface of the specimen and an actual in-focus position is corrected on the basis of information concerning points which are among a plurality of measured points and are adjacent to the target observing point.
摘要翻译： 在具有观察样品上的注意物体的功能的扫描电子显微镜中，可以高速地校正对焦位置的误差。 当将视野移动到要扫描的电子束的样本上的观察对象时，由用于测量样本的表面的高度的机构和实际的聚焦位置所指示的对焦位置之间的误差 基于与多个测量点中的点相邻并且与目标观察点相邻的点的信息来校正位置。
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公开(公告)号：US20050236569A1
公开(公告)日：2005-10-27
申请号：US11103654
申请日：2005-04-12
申请人： Kohei Yamaguchi , Kazuo Aoki , Seiji Isogai , Masashi Sakamoto
发明人： Kohei Yamaguchi , Kazuo Aoki , Seiji Isogai , Masashi Sakamoto
CPC分类号： H01J37/28 , H01J37/265 , H01J2237/2817
摘要： This SEM has a capability of preventing shift of a view field of the foreign matters at a stage where no sufficient correction is carried out when obtaining the SEM coordinate values used for transforming the coordinate values of the foreign matters on the sample sent from another device into the SEM coordinate values. The SEM selects the foreign matters closer to the center of the sample at first and then the foreign matters spirally from the center of the sample to the outer periphery.
摘要翻译： 该SEM具有在获得用于将从另一装置发送的样本上的异物的坐标值变换为的变形的SEM坐标值进入到不进行充分校正的阶段时，能够防止异物的视场的偏移 SEM坐标值。 SEM首先从样品的中心选择更接近样品中心的异物，然后从样品的中心向外周螺旋地排列异物。
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公开(公告)号：US07075077B2
公开(公告)日：2006-07-11
申请号：US11020265
申请日：2004-12-27
IPC分类号： H01J37/21
CPC分类号： H01J37/21 , H01J37/28 , H01J2237/216 , H01J2237/2817
摘要： A method of observing a specimen using a scanning electron microscope, makes it possible to shorten the time required to perform automatic focusing at the time of semiconductor defect automatic review and improves the throughput in the processing in which the specimen is observed. In the above method, the specimen is imaged at a low resolution by the scanning electron microscope to obtain an image, an area for imaging the specimen at a high resolution is specified from the image acquired at the low resolution, the specimen is imaged at a high resolution by the scanning electron microscope to determine a focus position, a focal point of the scanning electron microscope is set to the determined focus position, and a high resolution image in the specified area is acquired in a state in which the focus position has been set to the determined focus position.
摘要翻译： 使用扫描电子显微镜观察样本的方法可以缩短在半导体缺陷自动检查时进行自动聚焦所需的时间，并且提高了观察样本的处理中的通过量。 在上述方法中，通过扫描电子显微镜以低分辨率对样本进行成像以获得图像，从以低分辨率获取的图像指定用于以高分辨率成像试样的区域，将样品在 通过扫描电子显微镜的高分辨率来确定聚焦位置，将扫描电子显微镜的焦点设置为确定的聚焦位置，并且在聚焦位置已经被处理的状态下获取指定区域中的高分辨率图像 设置为确定的焦点位置。
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公开(公告)号：US20050194533A1
公开(公告)日：2005-09-08
申请号：US11020265
申请日：2004-12-27
IPC分类号： G21K7/00
CPC分类号： H01J37/21 , H01J37/28 , H01J2237/216 , H01J2237/2817
摘要： A method of observing a specimen using a scanning electron microscope, makes it possible to shorten the time required to perform automatic focusing at the time of semiconductor defect automatic review and improves the throughput in the processing in which the specimen is observed. In the above method, the specimen is imaged at a low resolution by the scanning electron microscope to obtain an image, an area for imaging the specimen at a high resolution is specified from the image acquired at the low resolution, the specimen is imaged at a high resolution by the scanning electron microscope to determine a focus position, a focal point of the scanning electron microscope is set to the determined focus position, and a high resolution image in the specified area is acquired in a state in which the focus position has been set to the determined focus position.
摘要翻译： 使用扫描电子显微镜观察样本的方法可以缩短在半导体缺陷自动检查时进行自动聚焦所需的时间，并且提高了观察样本的处理中的通过量。 在上述方法中，通过扫描电子显微镜以低分辨率对样本进行成像以获得图像，从以低分辨率获取的图像指定用于以高分辨率成像试样的区域，将样品在 通过扫描电子显微镜的高分辨率来确定聚焦位置，将扫描电子显微镜的焦点设置为确定的聚焦位置，并且在聚焦位置已经被处理的状态下获取指定区域中的高分辨率图像 设置为确定的焦点位置。
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7.发明申请公开(公告)号：US20120327212A1
公开(公告)日：2012-12-27
申请号：US13580259
申请日：2010-12-01
IPC分类号： H04N7/18
CPC分类号： H01J37/28 , G06T7/001 , G06T2207/10061 , G06T2207/30148 , H01J2237/221 , H01J2237/2817
摘要： The present invention enables provision of a defect observation device that reduces wait time from an end of pickup of a reference image and accompanying processing to a start of pickup of a defect image compared to conventional ones by making a pixel count resolution of the reference image be low compared to a pixel count of the defect image in an image pickup unit using an electronic microscope for automatic fine defect classification, whereby a throughput enhanced compared to those of conventional ones can be achieved.
摘要翻译： 本发明能够提供一种缺陷观察装置，其通过使参考图像的像素数分辨率为比较，从而将参考图像的拾取结束的等待时间和伴随处理缩短到与传统缺陷图像相比的缺陷图像的开始拾取 与使用电子显微镜进行自动精细缺陷分类的图像拾取单元中的缺陷图像的像素数相比较低，从而可以实现与常规相比增加的吞吐量。
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公开(公告)号：US07847249B2
公开(公告)日：2010-12-07
申请号：US12068417
申请日：2008-02-06
申请人： Noritsugu Takahashi , Muneyuki Fukuda , Hiroyuki Ito , Atsuko Fukada , Masashi Sakamoto , Satoshi Takada
发明人： Noritsugu Takahashi , Muneyuki Fukuda , Hiroyuki Ito , Atsuko Fukada , Masashi Sakamoto , Satoshi Takada
IPC分类号： H01J3/14
CPC分类号： G01N23/225 , H01J37/09 , H01J37/265 , H01J37/28 , H01J2237/14 , H01J2237/2817
摘要： A technology whereby removal of magnetic hysteresis is enabled in short time in parallel with a process for stage transfer, and so forth. There is executed a magnetic hysteresis removal sequence whereby current for exciting an electromagnetic coil prior to acquisition of an image is always set to a predetermined variation value against a target value, thereby obtaining information on an image, and so forth, when a diameter of a primary electron beam, converged on the specimen, becomes smaller than dimensions displayed by one pixel of an image to be acquired.
摘要翻译： 与阶段转移的过程并行地在短时间内实现磁滞的消除的技术等等。 执行磁滞去除序列，其中在获取图像之前激励电磁线圈的电流总是被设置为相对于目标值的预定变化值，从而获得关于图像的信息，等等 会聚在样本上的一次电子束变得小于要获取的图像的一个像素显示的尺寸。
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公开(公告)号：US07569116B2
公开(公告)日：2009-08-04
申请号：US11350090
申请日：2006-02-09
申请人： Yoshiki Ono , Masashi Sakamoto
发明人： Yoshiki Ono , Masashi Sakamoto
摘要： A Co—Cr—Mo-based alloy includes: 63 mass %≦Co
摘要翻译： Co-Cr-Mo基合金包括：63质量％<= Co <68质量％ 15质量％<= Cr <26质量％ 10质量％<= Mo <19质量％ 和不可避免的杂质的平衡，其中Cr和Mo的总量为32质量％至37％。 合金的质磁化率在室温下为7×4pi×10-9 m3 / kg或更低，合金的维氏硬度（Hv）为400以上。
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10.发明申请Fiber Treatment Agent, Fiber Treated With Such Fiber Treatment Agent, Fiber Fabric, Laminate And Method For Treating Fiber 有权纤维处理剂，纤维处理剂，纤维织物，层压材料及纤维处理方法公开(公告)号：US20090149095A1
公开(公告)日：2009-06-11
申请号：US11909851
申请日：2006-03-27
申请人： Masahiro Sano , Masashi Sakamoto , Shigeru Oyama , Takaharu Yasue
发明人： Masahiro Sano , Masashi Sakamoto , Shigeru Oyama , Takaharu Yasue
IPC分类号： D06M15/01 , D06M15/643
CPC分类号： D06N3/0056 , D06M11/78 , D06M15/00 , D06M15/01 , D06M15/263 , D06M15/564 , D06N3/042 , D06N3/14 , Y10T442/20
摘要： A fiber treatment agent contains components (a) and (b). A fiber treated with the fiber treatment agent and a fiber fabric including the fiber are also provided. The component (a) an insoluble egg-shell membrane fine powder with a mean particle size of 0.1 to 10 μm while the component (b) is a synthetic resin emulsion or a synthetic resin solution.
摘要翻译： 纤维处理剂含有（a）和（b）成分。 还提供了用纤维处理剂处理的纤维和包括纤维的纤维织物。 组分（a）组分（b）是合成树脂乳液或合成树脂溶液，平均粒径为0.1-10μm的不溶性蛋壳膜细粉末。
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