摘要:
A semiconductor wafer (W) where circuits are formed in the area divided by streets is split into semiconductor chips having individual circuits. By interposing an adhesive sheet, whose adhesive force is lowered by stimulation, between the semiconductor wafer (W) and the support plate (13), the front side of the semiconductor wafer (W) is adhered to the support plate (13), thereby exposing the rear face (10) of the semiconductor wafer (W). The rear face (10) of the semiconductor wafer (W) with the support plate (13) is ground. After the grinding is finished, the semiconductor wafer (W) held with the rear face (10) up is diced into semiconductor chips (C). The adhesive sheet is given stimulus to lower the adhesive force and the semiconductor chips (C) are removed from the support plate (13). The semiconductor wafer and semiconductor chips are always supported by the support plate, avoiding damage and deformation.
摘要:
A permanent magnet which contains R, T and B as main ingredients wherein R is Y or a rare earth element and T is Fe or Fe and Co and has a primary phase of R.sub.2 T.sub.14 B is produced by compacting a mixture of 60 to 95 wt % of a primary phase-forming master alloy and a grain boundary phase-forming master alloy both in powder form and sintering the compact. The primary phase-forming master alloy has columnar crystal grains of R.sub.2 T.sub.14 B with a mean grain size of 3-50 .mu.m and grain boundaries of an R rich phase and contains 26-32 wt % of R. The grain boundary phase-forming master alloy is a crystalline alloy consisting essentially of 32-60 wt % of R and the balance of Co or Co and Fe. In anther form, a permanent magnet which contains R, T and B as main ingredients wherein R is yttrium or a rare earth element, T is Fe or Fe+Co/Ni and has a primary phase of R.sub.2 T.sub.14 B is produced by compacting a mixture of a primary phase-forming master alloy and a grain boundary-forming master alloy both in powder form and sintering the compact. The primary phase-forming master alloy has a primary phase of R.sub.2 T.sub.14 B and grain boundaries of an R rich phase. The grain boundary-forming master alloy contains 40-65 wt % of R, 30-60 wt % of Fe, Co or Ni and 1-12 wt % of Sn, In or Ga.
摘要:
In the rotating connector wherein the rotor having the inner tube is rotatably coupled with the stator having the outer tube, and the flat cable is contained in the annular space defined between the outer tube and the inner tube, the cable winding direction is reversed at the intermediate section, and the intermediate reversing section of the flat cable is passed through the opening of the holder that is rotatably arranged in the annular space. A guiding wall having the outer surface eccentric to the rotating axis of the rotor is provided on the annular flat plate of the holder, and the flat cable is wound on the outer surface of the guiding wall in the wound-back state.
摘要:
A semiconductor wafer is applied to a support disk via an intervening adhesive layer with the front side of the semiconductor wafer facing the adhesive layer, which is sensitive to a certain exterior factor for reducing its adhesive force; the semiconductor wafer is ground on the rear side; the wafer-and-support combination is applied to a dicing adhesive tape with the so ground rear side facing the dicing adhesive tape, which is surrounded and supported by the circumference by a dicing frame; the certain exterior factor is effected on the intervening adhesive layer to reduce its adhesive force; and the intervening adhesive layer and support disk are removed from the semiconductor wafer or chips without the possibility of damaging the same.
摘要:
A water jet processing method for cutting a workpiece having a first group composed of first plural cutting lines extending in a predetermined direction and a second group composed of second plural cutting lines formed perpendicular to the plural cutting lines of the first group along the plural cutting lines of the first group and the plural cutting lines of the second group formed on the workpiece by injecting a water jet, which comprises a first cutting step for injecting a water jet to the cutting lines of the first group continuously and a second cutting step for injecting a water jet to the cutting lines of the second group continuously while the workpiece is supported by a support member.
摘要:
It is an object of the invention to provide a method for manufacturing an IC chip wherein a wafer is prevented from being damaged and the ease of handling thereof is improved so that the wafer can be appropriately processed into IC chips, even if a thickness of the wafer is extremely reduced to approximately 50 μm.The invention provides a method for manufacturing an IC chip comprising, at least: the step of securing a wafer to a support plate via a support tape having a surface layer comprising an adhesive (A) containing a gas generating agent for generating a gas due to stimulation and a surface layer comprising an adhesive (B); the step of polishing said wafer with securing said wafer to said support plate via said support tape; the step of adhering a dicing tape to said polished wafer; the step of providing said stimulation to said adhesive (A) layer; the step of removing said support tape from said wafer; and the step of dicing said wafer, which comprises adhering said surface layer comprising adhesive (A) to said wafer and adhering said surface layer comprising adhesive (B) to said support plate in the step of securing said wafer to said support plate via said support tape, providing said stimulation while uniformly sucking under reduced pressure the entirety of said wafer from the dicing tape side thereof, and then removing said support tape from said wafer in the step of providing stimulation to said adhesive (A) layer and in the step of removing said support tape from said wafer.
摘要:
An alloy used for the production of a rare-earth magnet alloy, particularly the boundary-phase alloy in the two-alloy method is provided to improve the crushability.The alloy consists of (a) from 35 to 60% of Nd, Dy and/or Pr, 1% or less of B, and the balance being Fe, or (b) from 35 to 60% of Nd, Dy and/or Pr, 1% or less of B, and at least one element selected from the group consisting of 35% by weight or less of Co, 4% by weight or less of Cu, 3% by weight or less of Al and 3% by weight or less of Ga, and the balance being Fe. The total volume fraction of R.sub.2 Fe.sub.17 and R.sub.2 Fe.sub.14 B phases (Fe may be replaced with Cu, Co, Al or Ga) is 25% or more in the alloy. The average size of each of the R.sub.2 Fe.sub.17 and R.sub.2 Fe.sub.14 B phases is 20 .mu.m or less. The alloy can be produced by a centrifugal casting at an average accumulating rate of melt at 0.1 cm/second or less.
摘要:
There is provided a method of manufacturing a lead block for a rotary connector. The rotary connector includes stationary and movable housings, a flexible cable, and lead blocks. The method includes forming a connection terminal connecting body, where connection terminals are connected to each other by connection parts, by performing blanking and bending on a metal plate, forming a base body made of an insulating resin by performing insert molding so that the connection terminal connecting body is embedded in the base body except for at least of the connection parts and first and second connection terminal portions, and making the connection terminals be electrically isolated from each other by removing predetermined portions of the connection parts. The second connection terminal portions of the connection terminals are arranged on parallel planes.
摘要:
In manufacturing thinned semiconductor chips by grinding a semiconductor wafer supported on a rigid support substrate, in order to remove the semiconductor wafer or semiconductor chips from the support substrate without damage to the semiconductor wafer or semiconductor chips, a semiconductor wafer at its surface is bonded on a light-transmissive support substrate through an adhesive layer having an adhesion force that is reduced upon exposure to light radiation, thereby exposing the back surface of the semiconductor wafer. A tape is bonded to the backside of the semiconductor wafer integrated with the support substrate after grinding, wherein the tape is supported at the periphery. Before or after bonding of the tape, light radiation is applied to the adhesive layer at a side close to the support substrate to reduce the adhesion force in the adhesion layer. Thereafter, the support substrate and adhesive layer is removed from the surface of the semiconductor wafer, leaving the semiconductor wafer held by the tape and frame. The semiconductor wafer supported by the tape and frame is cut at streets into individual semiconductor chips.
摘要:
A wafer support plate comprises a support surface on which a semiconductor wafer is supported, and a crystal orientation mark which indicates the crystal orientation of the semiconductor wafer. Even the semiconductor wafer thinned by grinding can be stably held on the support surface, and the crystal orientation can be recognized even when the outer periphery of the semiconductor wafer has chipped.