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公开(公告)号：US5434901A
公开(公告)日：1995-07-18
申请号：US162470
申请日：1993-12-07
IPC分类号： G21K7/00
CPC分类号： G21K7/00
摘要： In a soft X-ray microscope including a soft X-ray source for emitting soft X-rays, a condenser lens for focusing the soft X-rays onto a specimen under inspection, an objective lens for focusing soft X-rays emanating from the specimen, a soft X-ray detector for receiving the soft X-rays focused by the objective lens, and a visually observing optical system for forming a visible image of the specimen by converting an optical property of the specimen other than contrast and color into a contrast in brightness or color. The visually observing optical system may be formed as phase contrast microscope, dark field microscope, polarizing microscope, differential interference microscope, or fluorescent microscope. Then, alignment and focus adjustment can be performed by observing the visible image of the specimen without irradiating the specimen with the soft X-rays even if the specimen has substantially no contrast and color.
摘要翻译： 在包括用于发射软X射线的软X射线源的软X射线显微镜中，用于将软X射线聚焦到检查样本上的聚光透镜，用于聚焦从样本发出的软X射线的物镜 用于接收由物镜聚焦的软X射线的软X射线检测器，以及用于通过将除了对比度和颜色之外的样本的光学性质转换成对比度而形成样本的可见图像的目视观察光学系统 亮度或颜色。 视觉观察光学系统可以形成为相差显微镜，暗视野显微镜，偏光显微镜，微分干涉显微镜或荧光显微镜。 然后，即使样本基本上没有对比度和颜色，也可以通过观察样本的可见图像而不用软X射线照射样本来进行对准和聚焦调整。
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公开(公告)号：US5528646A
公开(公告)日：1996-06-18
申请号：US425233
申请日：1995-04-18
IPC分类号： G21K7/00
CPC分类号： G21K7/00
摘要： A sample vessel for X-ray microscopes comprising a first silicon base plate having an entrance window covered with a thin film of silicon nitride, and a second silicon base plate which has an exit window covered with a thin film of silicon nitride and matched with the entrance window. The second silicon base plate being connected the first base plate by way of a spacer so as to form a sealed space capable of accommodating samples to be observed. Disposed in the space is a mesh member made of a wire material having an angle of contact with water smaller than 90.degree. at a location adjacent to the thin film of silicon nitride covering the entrance window or a thin film of aluminium is evaporation-coated over the thin film of silicon nitride. This sample vessel makes it possible to enhance mechanical strength of the thin film of silicon nitride and limits shifting of samples within very narrow ranges with water films formed in meshes of the mesh member, thereby remarkably facilitating observation of the samples with X-rays and soft X-rays.
摘要翻译： 一种用于X射线显微镜的样品容器，包括具有覆盖有氮化硅薄膜的入口窗口的第一硅基板和具有覆盖有氮化硅薄膜的出射窗口的第二硅基板，并与 入口窗口 第二硅基板通过间隔件连接第一基板，以便形成能够容纳观察样品的密封空间。 在该空间中设置的是由与覆盖入口窗口的氮化硅薄膜相邻的位置处的与水接触的角度小于90°的网状构件，或者薄膜的铝被蒸发涂覆 氮化硅薄膜。 该样品容器使得可以提高氮化硅薄膜的机械强度，并且通过在网状构件的网眼中形成的水膜限制样品在非常窄的范围内的移动，从而显着地促进了用X射线和软的样品的观察 X光片。
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公开(公告)号：US5352897A
公开(公告)日：1994-10-04
申请号：US31470
申请日：1993-03-15
IPC分类号： G01T1/24 , H01L27/146 , H01L31/115
CPC分类号： H01L27/14665 , G01T1/24 , H01L27/146 , H01L31/115
摘要： A soft X-ray detector includes a surface electrode layer, a photoelectric conversion layer, and a semiconductor detector having an electrode connected to the photoelectric conversion layer, for detecting an electric charge produced In the photoelectric conversion layer. The photoelectric conversion layer and the surface electrode layer have thicknesses satisfying conditionsdA.gtoreq.0.183.lambda./KAdB.ltoreq.0.183.lambda./KBwhere dA is a thickness of the photoelectric conversion layer, dB is a thickness of the surface electrode layer, KA is an extinction coefficient of radiation of a wavelength .lambda. in a substance constituting the photoelectric conversion layer, and KB is an extinction coefficient of radiation of the wavelength .lambda.in a substance constituting the surface electrode layer. Thus, the soft X-ray detector has a high sensitivity to soft X rays and a lower sensitivity to visible light, so that only soft X rays can be selectively detected. Further, the detector has two kinds of pixels, with one kind sensitive to soft X-rays and the other kind sensitive to visible light. In addition, the detector includes a plurality of pixels, to which the surface electrode layer is divided to correspond so that it has a plurality of regions to obtain a desired wavelength.
摘要翻译： 软X射线检测器包括表面电极层，光电转换层和具有连接到光电转换层的电极的半导体检测器，用于检测在光电转换层中产生的电荷。 光电转换层和表面电极层具有满足条件dA> / =0.183λ/ KA dB
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公开(公告)号：US5432831A
公开(公告)日：1995-07-11
申请号：US118246
申请日：1993-09-09
CPC分类号： B82Y10/00 , G02B21/26 , G03F7/70033 , G03F7/70233 , G03F7/70841 , G03F7/70916 , G21K7/00
摘要： A vacuum optical system has a vacuum chamber for housing an optical system used in a vacuum. The vacuum chamber is equipped with a member, on which the optical system is at least mounted, supported by such parts that when a pressure in the vacuum chamber changes to deform the vacuum chamber, the amount of displacement transmitted to the optical system is smaller than a predetermined tolerance depending on an accuracy necessary for the optical system. Thus, the vacuum optical system can be obtained which does away with the need for readjustment of optical alignment and is compact.
摘要翻译： 真空光学系统具有用于容纳在真空中使用的光学系统的真空室。 真空室配备有一个部件，光学系统至少安装在该部件上，由这些部件支撑，当真空室中的压力变化使真空室发生变形时，传递到光学系统的位移量小于 取决于光学系统所需的精度的预定公差。 因此，可以获得不需要重新调整光学对准的真空光学系统，并且紧凑。
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公开(公告)号：US5533083A
公开(公告)日：1996-07-02
申请号：US431325
申请日：1995-04-28
CPC分类号： B82Y10/00 , G02B21/26 , G03F7/70033 , G03F7/70233 , G03F7/70841 , G03F7/70916 , G21K7/00
摘要： A vacuum optical system has a vacuum chamber for housing an optical system used In a vacuum. The vacuum chamber is equipped with a member, on which the optical system is at least mounted, supported by such parts that when a pressure in the vacuum chamber changes to deform the vacuum chamber, the amount of displacement transmitted to the optical system is smaller than a predetermined tolerance depending on an accuracy necessary for the optical system. Thus, the vacuum optical system can be obtained which does away with the need for readjustment of optical alignment and is compact.
摘要翻译： 真空光学系统具有用于容纳在真空中使用的光学系统的真空室。 真空室配备有一个部件，光学系统至少安装在该部件上，由这些部件支撑，当真空室中的压力变化使真空室发生变形时，传递到光学系统的位移量小于 取决于光学系统所需的精度的预定公差。 因此，可以获得不需要重新调整光学对准的真空光学系统，并且紧凑。
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公开(公告)号：US5291339A
公开(公告)日：1994-03-01
申请号：US800236
申请日：1991-11-29
CPC分类号： G02B21/04 , G02B17/061 , G21K7/00
摘要： A Schwarzschild optical system comprising a concave mirror having an opening formed at the center thereof and a convex mirror arranged in opposite to the opening of the concave mirror, and has a numerical aperture of at least 0.25 on the object side, the concave mirror being formed to have an aspherical surface. This Schwarzschild optical system has a relatively large numerical aperture, a relatively large departure between the centers of curvature of the concave mirror and the convex mirror, and favorably corrected aberrations.
摘要翻译： 一种施瓦茨光学系统，包括：凹面镜，其具有形成在其中心的开口和与所述凹面镜的开口相对设置的凸面镜，并且在物体侧具有至少0.25的数值孔径，所述凹面镜形成 具有非球面。 该Schwarzschild光学系统具有相对较大的数值孔径，凹面镜和凸面镜的曲率中心之间的相对大的偏离以及有利地校正的像差。
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公开(公告)号：US5241426A
公开(公告)日：1993-08-31
申请号：US872072
申请日：1992-04-22
CPC分类号： G02B5/10
摘要： A condenser optical system is provided for bringing a beam of light from a light source to a focus at a desired position. The condenser optical system has a reflecting surface including a quadric surface of revolution represented by Equation (1) described below. The reflecting surface satisfies the conditions of Equations (2) and (3) described below when the condenser optical system is disposed so that the light beam from the light source is incident, substantially parallel to a rotary axis of the quadric surface, on the reflecting surface:z=Cy.sup.2 /{1+(1-pC.sup.2 y.sup.2).sup.1/2 } (1)Ch
摘要翻译： 提供一种聚光器光学系统，用于将来自光源的光束在期望位置处聚焦。 聚光镜系统具有包括由下述等式（1）表示的旋转二次曲面的反射表面。 反射面满足下述等式（2）和（3）的条件，当聚光系统被设置为使得来自光源的光束基本上平行于二次曲面的旋转轴线入射到反射面 表面：z = Cy2 / {1+（1-pC2y2）1/2}（1）Ch <22（2）78-4 theta N
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公开(公告)号：US20120195519A1
公开(公告)日：2012-08-02
申请号：US13443488
申请日：2012-04-10
申请人： Yoshiaki Horikawa
发明人： Yoshiaki Horikawa
CPC分类号： G09G3/3648 , G02F1/133526 , G06T5/002 , G06T5/20
摘要： There is provided a method of generating corrected image data and a display apparatus which is capable of displaying a pre-corrected image which is corrected in advance, which enables to carry out diopter adjustment for farsightedness due to old age at a practically sufficient level.In the method of generating corrected image data, the pre-corrected image data consists of amplitude information and phase information, is generated. The display apparatus includes a processing section which generates the pre-corrected image data consists of the amplitude information and the phase information, by a predetermined method of generating corrected image data, and a display section which controls and displays the amplitude information and the phase information of the corrected image data which has been generated.
摘要翻译： 提供了一种产生校正图像数据的方法和能够显示预先校正的预校正图像的显示装置，其能够以实际足够的水平执行由于老年而导致的远视度的屈光度调节。 在生成校正图像数据的方法中，生成预校正图像数据由幅度信息和相位信息组成。 显示装置包括：处理部，其通过产生校正图像数据的预定方法生成由振幅信息和相位信息组成的预校正图像数据;以及显示部，其控制并显示振幅信息和相位信息 已经生成的校正图像数据。
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公开(公告)号：US07826128B2
公开(公告)日：2010-11-02
申请号：US12231708
申请日：2008-09-04
申请人： Akira Shirai , Hirokazu Nishino , Yoshiaki Horikawa , Fusao Ishii
发明人： Akira Shirai , Hirokazu Nishino , Yoshiaki Horikawa , Fusao Ishii
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G09G3/2011 , G09G3/346 , H04N9/312 , H04N9/3155
摘要： The present invention provides a projection apparatus, comprising: a light source for emitting illumination light; at least one spatial light modulator with a plurality of movable mirrors corresponding to pixels to be displayed, for performing a modulation of the illumination light through operation of the movable mirrors; a light source control unit performing a modulation control of the light source; and a spatial light modulator control unit generating, from an input image signal, a control signal for driving the spatial light modulator, wherein: the light source control unit adjusts a pulse emission frequency of an emission pulse of the illumination light emitted from the light source while corresponding to an oscillation frequency of the movable mirrors.
摘要翻译： 本发明提供一种投影装置，包括：用于发射照明光的光源; 至少一个空间光调制器，具有对应于要显示的像素的多个可移动镜，用于通过可移动镜的操作来执行照明光的调制; 执行光源的调制控制的光源控制单元; 以及空间光调制器控制单元，从输入图像信号生成用于驱动空间光调制器的控制信号，其中：所述光源控制单元调节从所述光源发射的照明光的发射脉冲的脉冲发射频率 同时对应于可移动反射镜的振荡频率。
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10.发明授权Imaging type x-ray microscope apparatus with Schwarzschild optical system 失效具有Schwarzschild光学系统的成像型x射线显微镜装置
公开(公告)号：US5131023A
公开(公告)日：1992-07-14
申请号：US659871
申请日：1991-02-22
申请人： Mikiko Yasugaki , Yoshiaki Horikawa
发明人： Mikiko Yasugaki , Yoshiaki Horikawa
CPC分类号： G21K7/00
摘要： An imaging X-ray microscope having an X-ray radiation source, a condenser for condensing X-rays radiated from the X-ray source on an object, an objective for forming an image of the object by the X-rays transmitted through or diffracted by the object, and an X-ray detector for receiving the image formed by the objective, the objective comprising a Schwarzschild optical system in which a concave mirror with an opening in the center thereof and a convex mirror are coaxially arranged in such a manner that the convex mirror opposes to the opening of the concave mirror, the object-side numerical aperture is at least 0.24, and the following condition is satisfied:(N.A.-0.6)/12.ltoreq.(W.sub.2 -W.sub.1)/f.ltoreq.-0.005where N.A. is the object-side numerical aperture of the Schwarzschild optical system, W.sub.1 is the distance from the object to the center of curvature of the concave mirror, W.sub.2 is the distance from the object to the center of curvature of the convex mirror, and f is the focal length of the Schwarzschild optical system.
摘要翻译： 一种具有X射线辐射源的成像X射线显微镜，用于将从X射线源辐射的X射线聚焦在物体上的冷凝器，用于通过透射或衍射的X射线形成物体的图像的目的 以及用于接收由该物镜形成的图像的X射线检测器，该目标包括施瓦茨尔光学系统，其中具有其中心具有开口的凹面镜和凸面镜同轴地布置，使得 凸镜与凹面镜的开口相对，物侧数值孔径至少为0.24，满足以下条件：（NA-0.6）/ 12（W2-W1）/ f -0.005其中NA是Schwarzschild光学系统的物体侧数值孔径，W1是从物体到凹面镜的曲率中心的距离，W2是从物体到凸面镜的中心的距离 ，f是施瓦茨的焦距 ild光学系统。
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