公开(公告)号：USRE34634E

公开(公告)日：1994-06-07

申请号：US924789

申请日：1992-08-06

申请人： Kunio Konno ,  Masashi Okada

发明人： Kunio Konno ,  Masashi Okada

IPC分类号： F21S8/00 ,  G03F7/20 ,  F21V7/04

CPC分类号： G03F7/70075 ,  F21W2131/402

摘要： A device for providing an illumination of an object includes first and second optical integrators disposed on an optical axis in spaced-apart relationship. Light rays emitted from a point light source formed by an elliptical reflector mirror having a light-emitting source are incident on the first optical integrator, which forms a plurality of secondary images of the point light source. The second optical integrator receives luminous fluxes emitted from the secondary light source images to form a multiplicity of secondary images of the secondary light source images formed by the first optical integrator. Luminous fluxes from the secondary images formed by the second optical integrator are superimposed by a condenser lens on the object for illuminating the latter with light beams of uniform intensity.

摘要翻译： 用于提供对象的照明的装置包括以间隔关系设置在光轴上的第一和第二光学积分器。 从由具有发光源的椭圆反射镜形成的点光源发射的光线入射到形成点光源的多个二次图像的第一光学积分器上。 第二光学积分器接收从二次光源图像发射的光束，以形成由第一光学积分器形成的二次光源图像的多个二次图像。 来自由第二光学积分器形成的二次图像的光通量由聚光透镜叠加在物体上，以用均匀强度的光束照射该物体。

公开(公告)号：US4497015A

公开(公告)日：1985-01-29

申请号：US468551

申请日：1983-02-22

申请人： Kunio Konno ,  Masashi Okada

发明人： Kunio Konno ,  Masashi Okada

IPC分类号： G02B19/00 ,  F21S8/00 ,  G02B27/00 ,  G02B27/18 ,  G03B27/32 ,  G03F7/20 ,  H01L21/027 ,  F21V7/04

CPC分类号： G03F7/70075 ,  F21W2131/402

摘要： A device for providing an illumination of an object includes first and second optical integrators disposed on an optical axis in spaced-apart relationship. Light rays emitted from a point light source formed by an elliptical reflector mirror having a light-emitting source are incident on the first optical integrator, which forms a plurality of secondary images of the point light source. The second optical integrator receives luminous fluxes emitted from the secondary light source images to form a multiplicity of secondary images of the secondary light source images formed by the first optical integrator. Luminous fluxes from the secondary images formed by the second optical integrator are superimposed by a condenser lens on the object for illuminating the latter with light beams of uniform intensity.

摘要翻译： 用于提供对象的照明的装置包括以间隔关系设置在光轴上的第一和第二光学积分器。 从由具有发光源的椭圆反射镜形成的点光源发射的光线入射到形成点光源的多个二次图像的第一光学积分器上。 第二光学积分器接收从二次光源图像发射的光束，以形成由第一光学积分器形成的二次光源图像的多个二次图像。 来自由第二光学积分器形成的二次图像的光通量由聚光透镜叠加在物体上，以用均匀强度的光束照射该物体。

公开(公告)号：US4529447A

公开(公告)日：1985-07-16

申请号：US495833

申请日：1983-05-18

申请人： Masashi Okada ,  Yasushi Nishigakiuchi ,  Yoichi Tominaga

发明人： Masashi Okada ,  Yasushi Nishigakiuchi ,  Yoichi Tominaga

IPC分类号： C08G65/331 ,  C08G65/332 ,  C08G65/333 ,  D21H17/06 ,  D21H17/09 ,  D21H17/15 ,  D21H17/16 ,  D21H17/53 ,  D21D5/12 ,  C09K3/00

CPC分类号： C08G65/331 ,  C08G65/3322 ,  C08G65/33344 ,  D21H17/06 ,  D21H17/09 ,  D21H17/15 ,  D21H17/16 ,  D21H17/53

摘要： A sizing composition comprises a carboxylic acid anhydride and a polyoxyalkylene nonionic surfactant blocked with a lower alkyl, acyl or carbamoyl group and/or an alkaline earth metal salt of a sulphur-containing anionic surfactant. The composition can be easily emulsified to form an aqueous emulsion useful for paper sizing.

摘要翻译： 上浆组合物包含羧酸酐和用含硫阴离子表面活性剂的低级烷基，酰基或氨基甲酰基和/或碱土金属盐封闭的聚氧化烯非离子表面活性剂。 组合物可以容易地乳化以形成用于纸张施胶的水性乳液。

公开(公告)号：US4624551A

公开(公告)日：1986-11-25

申请号：US793474

申请日：1985-10-28

申请人： Satoru Anzai ,  Masashi Okada

发明人： Satoru Anzai ,  Masashi Okada

IPC分类号： G03F7/20 ,  G03B27/42 ,  G03B27/72

CPC分类号： G03F7/70058 ,  G03F7/70241 ,  G03F7/70891

摘要： A control method for the projection optical system of a projection exposure apparatus used in the fabrication of LSIs. The amount of energy incident to the projection optical system during each unit time is maintained constant at all times including each projection and the intervals between the projection operations. This has the effect of cancelling any error in the projected image, particularly any variation of the magnification error with time due to any variation of the optical performance of the projection optical system caused by the illuminating energy.

摘要翻译： 用于制造LSI的投影曝光装置的投影光学系统的控制方法。 在每个单位时间内入射到投影光学系统的能量的量始终保持恒定，包括每个投影和投影操作之间的间隔。 这具有消除投影图像中的任何误差的效果，特别是由于由照明能量引起的投影光学系统的光学性能的任何变化，放大误差随时间的任何变化。

公开(公告)号：US06849197B2

公开(公告)日：2005-02-01

申请号：US09912895

申请日：2001-07-25

申请人： Masashi Okada ,  Koji Matsumoto

发明人： Masashi Okada ,  Koji Matsumoto

IPC分类号： F25D3/00 ,  C09K5/06 ,  F28D20/02 ,  C09K3/18

CPC分类号： C09K5/066 ,  F28D20/02 ,  Y02E60/145

摘要： An ice thermal storage medium comprises water and a water-soluble additive, in which an amount of the additive is 1-8% by weight.

摘要翻译： 冰蓄热介质包括水和水溶性添加剂，其中添加剂的量为1-8重量％。

公开(公告)号：US06637273B2

公开(公告)日：2003-10-28

申请号：US09998540

申请日：2001-11-29

申请人： Masashi Okada

发明人： Masashi Okada

IPC分类号： G01L1500

CPC分类号： G01N15/1456 ,  G01L5/0047 ,  G01N2203/0075

摘要： Methods and apparatus are disclosed for accurately measuring stresses in respective membrane regions of segmented mask blanks destined to be made into masks or reticles for use in microlithography. A mask blank is held to a securing plate, e.g., by electrostatic attraction. The mask blank is held such that the struts of the mask blank contact the surface of the securing plate. The securing plate defines an array of through holes that are aligned with individual subfields of the mask blank. A pressure differential is applied across the membrane via the through-holes, causing the membrane regions to bulge. While measuring the pressure, the magnitude of bulge of individual membrane regions is measured using a displacement-measuring device. From data concerning the magnitude of bulge, membrane stress and Young's modulus are determined.

公开(公告)号：US4877941A

公开(公告)日：1989-10-31

申请号：US192622

申请日：1988-05-11

申请人： Masahiro Honma ,  Maruyama Tokuji ,  Masashi Okada ,  Yukio Hida

发明人： Masahiro Honma ,  Maruyama Tokuji ,  Masashi Okada ,  Yukio Hida

IPC分类号： B23K9/10

CPC分类号： B23K9/1075 ,  B23K9/1056

摘要： A power supply system for consumable electrode arc welding alternately switches between the reverse polarity and the straight polarity. The formation of an arc is detected. A polarity change control signal is generated when the arc duration reaches a predetermined time or when the quantity of charge reaches a predetermined value. The predetermined value of the welding current or voltage is reduced either immediately before or after the change in polarity.

摘要翻译： 用于消耗电极电弧焊的电源系统交替地在反极性和直极性之间切换。 检测出弧的形成。 当电弧持续时间达到预定时间时或当电荷量达到预定值时，产生极性变化控制信号。 在极性变化之前或之后，焊接电流或电压的预定值减小。

公开(公告)号：US4034993A

公开(公告)日：1977-07-12

申请号：US633212

申请日：1975-11-19

申请人： Masashi Okada ,  Takeshi Aoki

发明人： Masashi Okada ,  Takeshi Aoki

IPC分类号： F16J15/10 ,  F16J15/16 ,  F16L23/18 ,  F16J15/24

CPC分类号： F16J15/166 ,  F16L23/18

摘要： Sealing apparatus used for sealing the gap between flanges which comprises an O-ring engaged with a circular groove formed in the coupling surface of one of the flanges and two backup rings engaged with the groove and the O-ring, each of the backup rings having an inclined surface to be axially urged by the O-ring whereby the upper backup ring is moved according to the gap to close it.

摘要翻译： 用于密封凸缘之间的间隙的密封装置，其包括与形成在其中一个法兰的联接表面中的圆形槽接合的O形环和与凹槽接合的两个支撑环和O形环，每个支撑环具有 倾斜表面由O形环轴向推压，由此上支撑环根据间隙移动以使其闭合。

公开(公告)号：US08796905B2

公开(公告)日：2014-08-05

申请号：US13064545

申请日：2011-03-30

申请人： Takashi Nagase ,  Masashi Okada ,  Akimitsu Ebihara

发明人： Takashi Nagase ,  Masashi Okada ,  Akimitsu Ebihara

IPC分类号： H02N2/12

CPC分类号： H02N2/101 ,  Y10T29/49009

摘要： A motor device includes a base portion; a transmission portion that is formed with the base portion as one member and is wound around at least a part of an outer periphery of a rotator; and a driving portion which is supported by the base portion, moves the transmission portion by a certain distance in a state in which a rotational force is transmitted between the rotator and the transmission portion, and returns the transmission portion to a predetermined position in a state in which the rotation force transmission state is released.

摘要翻译： 电动机装置包括：基部; 传动部分，其形成有基部作为一个部件，并缠绕在旋转体的外周的至少一部分上; 以及由所述基部支撑的驱动部，在所述旋转体与所述传递部之间传递旋转力的状态下，使所述透射部移动一定距离，并且将所述透射部返回至所述状态下的规定位置 旋转力传递状态被释放。

公开(公告)号：US06563570B1

公开(公告)日：2003-05-13

申请号：US09570161

申请日：2000-05-11

申请人： Masashi Okada

发明人： Masashi Okada

IPC分类号： G01B902

CPC分类号： G01B11/16

摘要： Apparatus are disclosed for evaluating a thin film of a sample such as a reticle blank. A representative embodiment includes a chamber defining an opening over which the sample, mounted in the sample-support mechanism, is placed such that a pneumatic pressure established in the chamber is transmitted to the thin film of the sample. A deflection-measuring device measures an amount of deflection exhibited by the thin film whenever the pressure is being applied from the chamber to the sample. An optical system irradiates the thin film of the sample, mounted to the chamber, with light to cause light reflected from the thin film to be incident on the deflection-measuring device. The sample-support mechanism includes a substrate that contacts the sample in a manner allowing access of a desired region of the thin film to the pressure, and a retainer that secures the sample and substrate to the opening in the chamber in a manner such that substrate and sample are sandwiched between the retainer and the chamber.

摘要翻译： 公开了用于评估样品（例如掩模版坯料）的薄膜的装置。 代表性的实施例包括限定开口的室，安装在样品支撑机构中的样品置于其上，使得建立在室中的气动压力传递到样品的薄膜。 每当压力从室施加到样品时，偏转测量装置测量薄膜所呈现的偏转量。 光学系统用光照射安装到室上的样品的薄膜，使得从薄膜反射的光入射到偏转测量装置上。 样品支撑机构包括以允许薄膜的期望区域进入压力的方式接触样品的基底，以及将样品和基底固定到腔室中的开口的保持器，使得基底 并且样品夹在保持器和腔室之间。