Laminated film for head applications
    1.
    发明授权
    Laminated film for head applications 有权
    用于头部应用的层压膜

    公开(公告)号:US07773341B2

    公开(公告)日:2010-08-10

    申请号:US11825034

    申请日:2007-07-03

    IPC分类号: G11B5/33

    CPC分类号: G11B5/3116 G11B5/1278

    摘要: A laminated main pole layer is disclosed in which a non-AFC scheme is used to break the magnetic coupling between adjacent high moment layers and reduce remanence in a hard axis direction while maintaining a high magnetic moment and achieving low values for Hch, Hce, and Hk. An amorphous material layer with a thickness of 3 to 20 Angstroms and made of an oxide, nitride, or oxynitride of one or more of Hf, Zr, Ta, Al, Mg, Zn, or Si is inserted between adjacent high moment stacks. The laminated structure also includes an alignment layer below each high moment layer within each stack. In one embodiment, a Ru coupling layer is inserted between two high moment layers in each stack to introduce an AFC scheme. An uppermost Ru layer is used as a CMP stop layer. A post annealing process may be employed to further reduce the anisotropy field (Hk).

    摘要翻译: 公开了一种层叠主极层,其中使用非AFC方案来破坏相邻的高力矩层之间的磁耦合,并且在保持高磁矩的同时降低硬轴方向的剩磁,并实现Hch,Hce和 Hk。 由Hf,Zr,Ta,Al,Mg,Zn或Si中的一种或多种的氧化物,氮化物或氧氮化物形成的厚度为3〜20埃的无定形材料层插入相邻的高强度叠层之间。 层叠结构还包括在每个堆叠内的每个高力矩层下面的对准层。 在一个实施例中,Ru耦合层插入每个堆叠中的两个高矩层之间以引入AFC方案。 使用最上层的Ru层作为CMP停止层。 可以采用后退火工艺来进一步降低各向异性场(Hk)。

    Laminated film for head applications
    2.
    发明申请
    Laminated film for head applications 有权
    用于头部应用的层压膜

    公开(公告)号:US20090009907A1

    公开(公告)日:2009-01-08

    申请号:US11825034

    申请日:2007-07-03

    IPC分类号: G11B5/127 G11B5/147

    CPC分类号: G11B5/3116 G11B5/1278

    摘要: A laminated main pole layer is disclosed in which a non-AFC scheme is used to break the magnetic coupling between adjacent high moment layers and reduce remanence in a hard axis direction while maintaining a high magnetic moment and achieving low values for Hch, Hce, and Hk. An amorphous material layer with a thickness of 3 to 20 Angstroms and made of an oxide, nitride, or oxynitride of one or more of Hf, Zr, Ta, Al, Mg, Zn, or Si is inserted between adjacent high moment stacks. The laminated structure also includes an alignment layer below each high moment layer within each stack. In one embodiment, a Ru coupling layer is inserted between two high moment layers in each stack to introduce an AFC scheme. An uppermost Ru layer is used as a CMP stop layer. A post annealing process may be employed to further reduce the anisotropy field (Hk).

    摘要翻译: 公开了一种层叠主极层,其中使用非AFC方案来破坏相邻的高力矩层之间的磁耦合,并且在保持高磁矩的同时降低硬轴方向的剩磁,并实现Hch,Hce和 Hk。 由Hf,Zr,Ta,Al,Mg,Zn或Si中的一种或多种的氧化物,氮化物或氧氮化物形成的厚度为3〜20埃的无定形材料层插入相邻的高强度叠层之间。 层叠结构还包括在每个堆叠内的每个高力矩层下面的对准层。 在一个实施例中,Ru耦合层插入每个堆叠中的两个高矩层之间以引入AFC方案。 使用最上层的Ru层作为CMP停止层。 可以采用后退火工艺来进一步降低各向异性场(Hk)。

    Ultra thin seed layer for CPP or TMR structure
    4.
    发明申请
    Ultra thin seed layer for CPP or TMR structure 有权
    用于CPP或TMR结构的超薄种子层

    公开(公告)号:US20070146928A1

    公开(公告)日:2007-06-28

    申请号:US11317598

    申请日:2005-12-23

    IPC分类号: G11B5/127

    摘要: Improved magnetic devices have been fabricated by replacing the conventional seed layer (typically Ta) with a bilayer of Ru on Ta. Although both Ru and Ta layers are ultra thin (between 5 and 20 Angstroms), good exchange bias between the seed and the AFM layer (IrMn about 70 Angstroms thick) is retained. This arrangement facilitates minimum shield-to-shield spacing and gives excellent performance in CPP, CCP-CPP, or TMR configurations.

    摘要翻译: 已经通过用Ta上的Ru的双层代替常规种子层(通常为Ta)来制造改进的磁性器件。 虽然Ru和Ta层都是超薄的(5到20埃之间),但保留种子和AFM层之间良好的交换偏差(约为70埃的IrMn)。 这种安排有助于最小的屏蔽间隔,并在CPP,CCP-CPP或TMR配置中提供出色的性能。

    Ultra thin seed layer for CPP or TMR structure
    5.
    发明授权
    Ultra thin seed layer for CPP or TMR structure 有权
    用于CPP或TMR结构的超薄种子层

    公开(公告)号:US07646568B2

    公开(公告)日:2010-01-12

    申请号:US11317598

    申请日:2005-12-23

    IPC分类号: G11B5/127

    摘要: Improved magnetic devices have been fabricated by replacing the conventional seed layer (typically Ta) with a bilayer of Ru on Ta. Although both Ru and Ta layers are ultra thin (between 5 and 20 Angstroms), good exchange bias between the seed and the AFM layer (IrMn about 70 Angstroms thick) is retained. This arrangement facilitates minimum shield-to-shield spacing and gives excellent performance in CPP, CCP-CPP, or TMR configurations.

    摘要翻译: 已经通过用Ta上的Ru的双层代替常规种子层(通常为Ta)来制造改进的磁性器件。 虽然Ru和Ta层都是超薄的(5到20埃之间),但保留种子和AFM层之间良好的交换偏差(约为70埃的IrMn)。 这种安排有助于最小的屏蔽间隔,并在CPP,CCP-CPP或TMR配置中提供出色的性能。