公开(公告)号：US20050053848A1

公开(公告)日：2005-03-10

申请号：US10878490

申请日：2004-06-29

申请人： Kurt Wampler ,  Douglas Van Den Broeke ,  Uwe Hollerbach ,  Xuelong Shi ,  Jang Chen

发明人： Kurt Wampler ,  Douglas Van Den Broeke ,  Uwe Hollerbach ,  Xuelong Shi ,  Jang Chen

IPC分类号： G03F1/00 ,  G03F1/36 ,  G03F7/20 ,  G03F9/00 ,  G06F17/00 ,  H01L21/00 ,  H01L21/027

CPC分类号： G03F1/36 ,  G03F7/70433 ,  G03F7/70441

摘要： Disclosed concepts include a method, program product and apparatus for generating assist features for a pattern to be formed on the surface of a substrate by generating an image field map corresponding to the pattern. Characteristics are extracted from the image field map, and assist features are generated for the pattern in accordance with the characteristics extracted in step. The assist features may be oriented relative to a dominant axis of a contour of the image field map. Also, the assist features may be polygon-shaped and sized to surround the contour or relative to the inside of the contour. Moreover, the assist features may be placed in accordance with extrema identified from the image field map. Utilizing the image field map, a conventional and complex two-dimensional rules-based approach for generating assist feature can be obviated.

摘要翻译： 所公开的概念包括通过产生对应于图案的图像场图来产生要形成在基板的表面上的图案的辅助特征的方法，程序产品和装置。 从图像场图中提取特征，并根据步骤中提取的特征为图案生成辅助特征。 辅助特征可以相对于图像场图的轮廓的主轴定向。 此外，辅助特征可以是多边形形状并且尺寸设计成围绕轮廓或相对于轮廓的内部。 此外，可以根据从图像场地图识别的极值放置辅助特征。 利用图像场图，可以避免用于产生辅助特征的常规和复杂的基于二维规则的方法。

公开(公告)号：US07376930B2

公开(公告)日：2008-05-20

申请号：US10878490

申请日：2004-06-29

申请人： Kurt E. Wampler ,  Douglas Van Den Broeke ,  Uwe Hollerbach ,  Xuelong Shi ,  Jang Fung Chen

发明人： Kurt E. Wampler ,  Douglas Van Den Broeke ,  Uwe Hollerbach ,  Xuelong Shi ,  Jang Fung Chen

IPC分类号： G06F17/50 ,  G03F1/00

CPC分类号： G03F1/36 ,  G03F7/70433 ,  G03F7/70441

摘要： Disclosed concepts include a method, program product and apparatus for generating assist features for a pattern to be formed on the surface of a substrate by generating an image field map corresponding to the pattern. Characteristics are extracted from the image field map, and assist features are generated for the pattern in accordance with the characteristics extracted in step. The assist features may be oriented relative to a dominant axis of a contour of the image field map. Also, the assist features may be polygon-shaped and sized to surround the contour or relative to the inside of the contour. Moreover, the assist features may be placed in accordance with extrema identified from the image field map. Utilizing the image field map, a conventional and complex two-dimensional rules-based approach for generating assist feature can be obviated.

摘要翻译： 所公开的概念包括通过产生对应于图案的图像场图来产生要形成在基板的表面上的图案的辅助特征的方法，程序产品和装置。 从图像场图中提取特征，并根据步骤中提取的特征为图案生成辅助特征。 辅助特征可以相对于图像场图的轮廓的主轴定向。 此外，辅助特征可以是多边形形状并且尺寸设计成围绕轮廓或相对于轮廓的内部。 此外，可以根据从图像场地图识别的极值放置辅助特征。 利用图像场图，可以避免用于产生辅助特征的常规和复杂的基于二维规则的方法。

公开(公告)号：US20070117030A1

公开(公告)日：2007-05-24

申请号：US11655868

申请日：2007-01-22

申请人： Thomas Laidig ,  Jang Chen ,  Xuelong Shi ,  Ralph Schlief ,  Uwe Hollerbach ,  Kurt Wampler

发明人： Thomas Laidig ,  Jang Chen ,  Xuelong Shi ,  Ralph Schlief ,  Uwe Hollerbach ,  Kurt Wampler

IPC分类号： G03F1/00

CPC分类号： G03F1/36 ,  G03F1/68

摘要： A method for generating a photolithography mask for optically transferring a pattern formed in the mask onto a substrate utilizing an imaging system. The method includes the steps of: (a) defining a set of calibration patterns, which are represented in a data format; (b) printing the calibration patterns on a substrate utilizing the given imaging system; (c) determining a first set of contour patterns corresponding to the calibration patterns imaged on the substrate; (d) generating a system pseudo-intensity function, which approximates the imaging performance of the imaging system; (e) determining a second set of contour patterns by utilizing the system pseudo-intensity function to define how the calibration patterns will be imaged in the substrate; (f) comparing the first set of contour patterns and the second set of contour patterns to determine the difference therebetween; (g) adjusting the system pseudo-intensity function until the difference between the first set of contour patterns and the second set of contour patterns is below a predefined criteria; and (h) utilizing the adjusted system pseudo-intensity function to modify the mask so as to provide for optical proximity correction.

摘要翻译： 一种用于产生用于使用成像系统将形成在掩模中的图案光学转印到基板上的光刻掩模的方法。 该方法包括以下步骤：（a）定义以数据格式表示的一组校准图案; （b）使用给定的成像系统在校准图案上印刷校准图案; （c）确定与在所述基板上成像的所述校准图案相对应的第一组轮廓图案; （d）产生近似成像系统的成像性能的系统伪强度函数; （e）通过利用所述系统伪强度函数来确定所述校准图案将如何在所述衬底中成像而确定第二组轮廓图案; （f）比较第一组轮廓图案和第二组轮廓图案以确定它们之间的差异; （g）调整所述系统伪强度函数，直到所述第一组轮廓图案与所述第二组轮廓图案之间的差低于预定标准; 和（h）利用调整后的系统伪强度函数来修改掩模，以提供光学邻近校正。

公开(公告)号：US20080068668A1

公开(公告)日：2008-03-20

申请号：US11889587

申请日：2007-08-14

申请人： Xuelong Shi ,  Jang Chen ,  Douglas Van Den Broeke

发明人： Xuelong Shi ,  Jang Chen ,  Douglas Van Den Broeke

IPC分类号： G10K7/06

CPC分类号： G03F7/705

摘要： A method of determining calibration test patterns to be utilized to calibrate a model for simulating the imaging performance of an optical imaging system. The method includes the steps of defining design rules associated with a given imaging process; defining a model equation representing the imaging performance of the optical imaging system; determining a boundary of an imaging signal space based on the design rules; selecting calibration patterns based on the boundary of the imaging signal space such that the calibration patterns are on the boundary or within the boundary of the imaging signal space; and storing the selected calibration test patterns, where the calibration test patterns are utilized to calibrate the model for simulating the imaging performance of the optical imaging system.

摘要翻译： 确定用于校准用于模拟光学成像系统的成像性能的模型的校准测试图案的方法。 该方法包括定义与给定成像过程相关联的设计规则的步骤; 定义表示光学成像系统的成像性能的模型方程; 基于设计规则确定成像信号空间的边界; 基于成像信号空间的边界选择校准图案，使得校准图案位于成像信号空间的边界或边界内; 并存储所选择的校准测试图案，其中使用校准测试图案来校准用于模拟光学成像系统的成像性能的模型。

公开(公告)号：US20050196682A1

公开(公告)日：2005-09-08

申请号：US10981762

申请日：2004-11-05

申请人： Stephen Hsu ,  Jang Chen ,  Xuelong Shi ,  Douglas Van Den Broeke

发明人： Stephen Hsu ,  Jang Chen ,  Xuelong Shi ,  Douglas Van Den Broeke

IPC分类号： G03F1/08 ,  G03B27/72 ,  G03F1/14 ,  G03F7/20 ,  G03F9/00 ,  G06F17/50 ,  H01L21/027

CPC分类号： G03F1/36 ,  G03F7/70125 ,  G03F7/70425 ,  G03F7/70441

摘要： A method of generating a mask for use in a photolithography process. The method includes the steps of determining a target mask pattern having a plurality of features to be imaged and an illumination system to be utilized to image the mask; identifying a critical pitch within the target pattern and optimizing illumination settings of the illumination system for imaging the critical pitch; identifying a forbidden pitch within the target pattern; and modifying the transmittance of the features having a pitch equal to or substantially equal to the forbidden pitch such that the exposure latitude of the features equal to or substantially equal to the forbidden pitch is increased.

摘要翻译： 一种生成用于光刻工艺的掩模的方法。 该方法包括以下步骤：确定具有要成像的多个特征的目标掩模图案和要用于对掩模进行成像的照明系统; 识别所述目标图案内的临界音调并且优化所述照明系统的照明设置以对所述关键音调成像; 识别目标模式内的禁止音高; 以及修改具有等于或基本上等于禁止间距的间距的特征的透射率，使得等于或基本上等于禁止间距的特征的曝光宽容度增加。

公开(公告)号：US08040573B2

公开(公告)日：2011-10-18

申请号：US11889587

申请日：2007-08-14

申请人： Xuelong Shi ,  Jang Fung Chen ,  Douglas Van Den Broeke

发明人： Xuelong Shi ,  Jang Fung Chen ,  Douglas Van Den Broeke

IPC分类号： G10K7/06 ,  H04N1/00

CPC分类号： G03F7/705

摘要： A method of determining calibration test patterns to be utilized to calibrate a model for simulating the imaging performance of an optical imaging system. The method includes the steps of defining design rules associated with a given imaging process; defining a model equation representing the imaging performance of the optical imaging system; determining a boundary of an imaging signal space based on the design rules; selecting calibration patterns based on the boundary of the imaging signal space such that the calibration patterns are on the boundary or within the boundary of the imaging signal space; and storing the selected calibration test patterns, where the calibration test patterns are utilized to calibrate the model for simulating the imaging performance of the optical imaging system.

摘要翻译： 确定用于校准用于模拟光学成像系统的成像性能的模型的校准测试图案的方法。 该方法包括定义与给定成像过程相关联的设计规则的步骤; 定义表示光学成像系统的成像性能的模型方程; 基于设计规则确定成像信号空间的边界; 基于成像信号空间的边界选择校准图案，使得校准图案位于成像信号空间的边界或边界内; 并存储所选择的校准测试图案，其中使用校准测试图案来校准用于模拟光学成像系统的成像性能的模型。

公开(公告)号：US07594199B2

公开(公告)日：2009-09-22

申请号：US10756829

申请日：2004-01-14

申请人： Robert John Socha ,  Xuelong Shi ,  Douglas Van Den Broeke ,  Jang Fung Chen

发明人： Robert John Socha ,  Xuelong Shi ,  Douglas Van Den Broeke ,  Jang Fung Chen

IPC分类号： G06F17/50

CPC分类号： G03F7/70441 ,  G03F1/36 ,  G03F7/70125

摘要： Disclosed concepts include a method of optimizing an illumination profile of a pattern to be formed in a surface of a substrate. Illumination is optimized by defining a transmission cross coefficient (“TCC”) function determined in accordance with an illumination pupil and a projection pupil corresponding to an illuminator, representing at least one resolvable feature of a mask to be printed on the substrate by at least one impulse function, and creating an interference map of a predetermined order based on the at least one impulse function and the TCC function, wherein the interference map represents the at least one resolvable feature to be printed on the substrate and areas of destructive interference.

摘要翻译： 公开的概念包括优化待形成在基板的表面中的图案的照明轮廓的方法。 通过定义根据照明光瞳确定的透射交叉系数（“TCC”）函数和对应于照明器的投影光瞳来优化照明，其表示待印刷在基板上的掩模的至少一个可分辨特征至少一个 脉冲功能，以及基于所述至少一个脉冲功能和所述TCC功能创建预定顺序的干涉图，其中所述干涉图表示要印刷在所述基板上的所述至少一个可分辨特征以及相消干涉区域。

公开(公告)号：US07514183B2

公开(公告)日：2009-04-07

申请号：US10981762

申请日：2004-11-05

申请人： Stephen D. Hsu ,  Jang Fung Chen ,  Xuelong Shi ,  Douglas Van Den Broeke

发明人： Stephen D. Hsu ,  Jang Fung Chen ,  Xuelong Shi ,  Douglas Van Den Broeke

IPC分类号： G03F1/00 ,  G06F17/50

CPC分类号： G03F1/36 ,  G03F7/70125 ,  G03F7/70425 ,  G03F7/70441

摘要： A method of generating a mask for use in a photolithography process. The method includes the steps of determining a target mask pattern having a plurality of features to be imaged and an illumination system to be utilized to image the mask; identifying a critical pitch within the target pattern and optimizing illumination settings of the illumination system for imaging the critical pitch; identifying a forbidden pitch within the target pattern; and modifying the transmittance of the features having a pitch equal to or substantially equal to the forbidden pitch such that the exposure latitude of the features equal to or substantially equal to the forbidden pitch is increased.

摘要翻译： 一种生成用于光刻工艺的掩模的方法。 该方法包括以下步骤：确定具有要成像的多个特征的目标掩模图案和要用于对掩模进行成像的照明系统; 识别所述目标图案内的临界音调并且优化所述照明系统的照明设置以对所述关键音调成像; 识别目标模式内的禁止音高; 以及修改具有等于或基本上等于禁止间距的间距的特征的透射率，使得等于或基本上等于禁止间距的特征的曝光宽容度增加。

公开(公告)号：US07398508B2

公开(公告)日：2008-07-08

申请号：US10981750

申请日：2004-11-05

申请人： Xuelong Shi ,  Robert J. Socha ,  Thomas Laidig ,  Douglas Van Den Broeke

发明人： Xuelong Shi ,  Robert J. Socha ,  Thomas Laidig ,  Douglas Van Den Broeke

IPC分类号： G06F17/50

CPC分类号： G03F1/36 ,  G03F7/705

摘要： Model OPC is developed based on eigen decomposition of an aerial image expected to be produced by a mask pattern on a surface of a resist. With the eigen decomposition method the aerial image intensity distribution around a point (x, y) is accurately described in the model. A scalar approach may be used in the eigen decomposition model which treats the light wave through the mask as a scalar quantity. A eigen decomposition alternatively may use a vector approach which utilizes a vector to describe the light wave and the pupil function. A predicted SPIF may be generated from the aerial image which may be used to verify the mask modeling process by comparing the predicted SPIF to an experimentally determined SPIF. The model OPC, once calibrated, may be used to evaluate performance of a mask and refine features of the mask.

摘要翻译： 基于通过抗蚀剂表面上的掩模图案预期产生的空间图像的特征分解开发OPC模型。 利用特征分解方法，在模型中准确描述了点（x，y）周围的空间图像强度分布。 在本征分解模型中可以使用标量法，其将通过掩模的光波视为标量。 本征分解可以使用向量来描述光波和瞳孔函数的矢量方法。 可以从空间图像生成预测的SPIF，其可以用于通过将预测的SPIF与实验确定的SPIF进行比较来验证掩模建模过程。 模型OPC，一旦校准，可以用于评估掩模的性能和细化掩模的特征。

公开(公告)号：US07550235B2

公开(公告)日：2009-06-23

申请号：US10933496

申请日：2004-09-03

申请人： Xuelong Shi ,  Jang Fung Chen ,  Thomas Laidig ,  Kurt E. Wampler ,  Douglas Van Den Broeke

发明人： Xuelong Shi ,  Jang Fung Chen ,  Thomas Laidig ,  Kurt E. Wampler ,  Douglas Van Den Broeke

IPC分类号： G03F1/02

CPC分类号： G03F7/705 ,  G03F1/36

摘要： A method of generating a mask design having optical proximity correction features disposed therein. The methods includes the steps of obtaining a desired target pattern having features to be imaged on a substrate; determining a first interference map based on the target pattern, which defines areas of constructive interference between at least one of the features to be imaged and a field area adjacent the at least one feature; placing a first set of assist features having a first phase in the mask design based on the areas of constructive interference defined by the first interference map; determining a second interference map based on the first set of assist features, which defines areas of constructive interference between assist features of the first set of assist features and a field area adjacent at least one of the assist features of the first set of assist features; and placing a second set of assist features having a second phase in the mask design based on the areas of constructive interference defined by the second interference map, wherein the first phase does not equal the second phase.

摘要翻译： 一种产生具有设置在其中的光学邻近校正特征的掩模设计的方法。 所述方法包括以下步骤：获得具有要在基底上成像的特征的期望目标图案; 基于所述目标图案来确定第一干涉图，所述目标图案定义要成像的至少一个要素与邻近所述至少一个特征的场区域之间的建构性干扰的区域; 基于由第一干涉图定义的建构性干扰的区域，在掩模设计中放置具有第一相位的第一组辅助特征; 基于所述第一组辅助特征确定第二干涉图，所述第一组辅助特征限定所述第一组辅助特征的辅助特征之间的建构性干扰的区域和与所述第一组辅助特征的所述辅助特征中的至少一个邻近的场区域; 以及基于由所述第二干涉图定义的构成性干扰的区域，将具有第二相位的第二组辅助特征放置在所述掩模设计中，其中所述第一相位不等于所述第二相位。