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公开(公告)号：US20050140972A1
公开(公告)日：2005-06-30
申请号：US10977757
申请日：2004-10-28
申请人： Kwang Bum Park , Joon Shik Park , Kyu Sik Shin , Hyo Derk Park
发明人： Kwang Bum Park , Joon Shik Park , Kyu Sik Shin , Hyo Derk Park
CPC分类号： B01F5/0646 , B01F5/0647 , B01F13/0059 , B01L3/502707 , B01L2300/0654 , B01L2300/0816 , B01L2300/0867 , B01L2300/0887 , B01L2300/1827 , G01N2201/08
摘要： The present invention provides an apparatus for solution component analysis and fabricating method thereof, by which a mixing channel, reaction channel, and measurement channel are formed as continuous micro-grooves on one substrate to implement the miniature apparatus for analyzing solution components, by which the apparatus is provided with portability facilitating access to a spot outside a laboratory to perform an instant sample analysis, and by which an optical system configuration for sample analysis can be simplified in a manner of facilitating an optical transfer by forming a transparent silicon oxide (SiO2) layer between a micro channel of the apparatus and an optical fiber to insert the optical fiber therein.
摘要翻译： 本发明提供了一种溶液成分分析装置及其制造方法，通过该装置将混合通道，反应通道和测量通道形成为一个基板上的连续微槽，以实现用于分析溶液成分的微型装置， 设备具有便于访问实验室外的点的便携性，以进行即时样本分析，并且可以通过形成透明氧化硅（SiO 2）促进光学转移的方式来简化用于样本分析的光学系统配置， 在装置的微通道和光纤之间插入光纤。
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公开(公告)号：US08065920B2
公开(公告)日：2011-11-29
申请号：US12364460
申请日：2009-02-02
申请人： Kwang Bum Park , Joon Shik Park , Hyo Derk Park
发明人： Kwang Bum Park , Joon Shik Park , Hyo Derk Park
IPC分类号： G01N3/02
CPC分类号： B25J7/00 , B25J13/085 , B25J15/12
摘要： A gripper and a driving method using the same are disclosed, wherein an actuator has a configuration combined with a piezoelectric operating unit and a bending structure, whereby an amount of variation of a gap between fingers are amplified more than that of the piezoelectric operating unit by generating a movement of the fingers perpendicular to a movement direction of the piezoelectric operating unit, and wherein the gripper having arms including a strain gauge sensor can precisely measure a force applied to a micro object.
摘要翻译： 公开了一种夹持器和使用其的驱动方法，其中致动器具有与压电操作单元和弯曲结构组合的配置，由此通过以下方式，手指之间的间隙的变化量被放大得比压电操作单元的间隙大 产生垂直于压电操作单元的运动方向的手指的运动，并且其中具有包括应变计传感器的臂的夹具可以精确地测量施加到微物体的力。
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公开(公告)号：US20090199651A1
公开(公告)日：2009-08-13
申请号：US12364460
申请日：2009-02-02
申请人： Kwang Bum Park , Joon Shik Park , Hyo Derk Park
发明人： Kwang Bum Park , Joon Shik Park , Hyo Derk Park
IPC分类号： G01N3/08
CPC分类号： B25J7/00 , B25J13/085 , B25J15/12
摘要： A gripper and a driving method using the same are disclosed, wherein an actuator has a configuration combined with a piezoelectric operating unit and a bending structure, whereby an amount of variation of a gap between fingers are amplified more than that of the piezoelectric operating unit by generating a movement of the fingers perpendicular to a movement direction of the piezoelectric operating unit, and wherein the gripper having arms including a strain gauge sensor can precisely measure a force applied to a micro object.
摘要翻译： 公开了一种夹持器和使用其的驱动方法，其中致动器具有与压电操作单元和弯曲结构组合的配置，由此通过以下方式，手指之间的间隙的变化量被放大得比压电操作单元的间隙大 产生垂直于压电操作单元的运动方向的手指的运动，并且其中具有包括应变计传感器的臂的夹具可以精确地测量施加到微物体的力。
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公开(公告)号：US07050163B2
公开(公告)日：2006-05-23
申请号：US10977757
申请日：2004-10-28
申请人： Kwang Bum Park , Joon Shik Park , Kyu Sik Shin , Hyo Derk Park
发明人： Kwang Bum Park , Joon Shik Park , Kyu Sik Shin , Hyo Derk Park
IPC分类号： G01N1/10
CPC分类号： B01F5/0646 , B01F5/0647 , B01F13/0059 , B01L3/502707 , B01L2300/0654 , B01L2300/0816 , B01L2300/0867 , B01L2300/0887 , B01L2300/1827 , G01N2201/08
摘要： The present invention provides an apparatus for solution component analysis and fabricating method thereof, by which a mixing channel, reaction channel, and measurement channel are formed as continuous micro-grooves on one substrate to implement the miniature apparatus for analyzing solution components, by which the apparatus is provided with portability facilitating access to a spot outside a laboratory to perform an instant sample analysis, and by which an optical system configuration for sample analysis can be simplified in a manner of facilitating an optical transfer by forming a transparent silicon oxide (SiO2) layer between a micro channel of the apparatus and an optical fiber to insert the optical fiber therein.
摘要翻译： 本发明提供了一种溶液成分分析装置及其制造方法，通过该装置将混合通道，反应通道和测量通道形成为一个基板上的连续微槽，以实现用于分析溶液成分的微型装置， 设备具有便于访问实验室外的点的便携性，以进行即时样本分析，并且可以通过形成透明氧化硅（SiO 2）促进光学转移的方式来简化用于样本分析的光学系统配置， 在装置的微通道和光纤之间插入光纤。
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公开(公告)号：US20100314700A1
公开(公告)日：2010-12-16
申请号：US12810850
申请日：2008-12-26
申请人： Kwang Bum Park , Seong Dong Kim , Joon Shik Park , Min Ho Lee
发明人： Kwang Bum Park , Seong Dong Kim , Joon Shik Park , Min Ho Lee
CPC分类号： G01N27/128
摘要： There are provided a micro gas sensor and a method for fabricating the same that comprises a micro heater formed inside a polysilicon membrane by doping impurities into a specific region of the polysilicon membrane positioned under a gas sensing substance, thereby improving thermal structural stability and making it easy to form the gas sensing substance. The micro gas sensor comprises: a micro heater formed by doping impurities into polysilicon vapor-deposited on a substrate on which a first insulating layer is formed; a polysilicon membrane for decreasing a heat loss of the micro heater; a power electrode for supplying power and a temperature measurement electrode for measuring a temperature, positioned at both ends of the micro heater; a second insulating layer formed on the micro heater; a sensing substance formed on the second insulating layer, for sensing a gas; and a sensing electrode for measuring a change in properties of the sensing substance. The method for fabricating a micro gas sensor comprises steps of: forming polysilicon on a substrate on which a first insulating layer is formed; forming a micro heater by doping impurities into the polysilicon; forming electrodes at both ends of the micro heater; forming a second insulating layer on the micro heater; forming a sensing substance on the second insulating layer; and forming a sensing electrode on the sensing substance.
摘要翻译： 提供一种微气体传感器及其制造方法，其包括通过将杂质掺杂到位于气体感测物质下方的多晶硅膜的特定区域中而形成在多晶硅膜内部的微加热器，从而提高热结构稳定性并使其成为 容易形成气体传感物质。 微气体传感器包括：通过将杂质掺杂到形成有第一绝缘层的基板上的多晶硅中形成的微加热器; 用于减少微加热器的热损失的多晶硅膜; 用于供电的电源电极和位于微加热器两端的用于测量温度的温度测量电极; 形成在所述微加热器上的第二绝缘层; 形成在所述第二绝缘层上的用于检测气体的感测物质; 以及用于测量感测物质的性质变化的感测电极。 制造微气体传感器的方法包括以下步骤：在其上形成有第一绝缘层的基板上形成多晶硅; 通过将杂质掺杂到多晶硅中形成微加热器; 在微加热器的两端形成电极; 在所述微加热器上形成第二绝缘层; 在所述第二绝缘层上形成感测物质; 以及在感测物质上形成感测电极。
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公开(公告)号：US07770951B2
公开(公告)日：2010-08-10
申请号：US11278066
申请日：2006-03-30
申请人： Kyu Sik Shin , Joon Shik Park , Kwang Bum Park , Chan Woo Moon
发明人： Kyu Sik Shin , Joon Shik Park , Kwang Bum Park , Chan Woo Moon
IPC分类号： B25J7/00
CPC分类号： B81C99/002 , B25J7/00 , B25J15/0616
摘要： A micro gripper and a method for manufacturing the same are disclosed. The manufacturing method of the micro gripper supplies a fluid to a penetration hole of a gripper jaw, and discharges the fluid from opposite surfaces of the first and second structures of the micro gripper, thereby completely detaching the object attached on the opposite surfaces of the first and second structures by electrostatic force and removing the stiction. Furthermore, the present invention can grip the object more strongly by sucking the fluid from the penetration hole of the gripper jaw, when the first and second structures of the gripper jaw grip the object.
摘要翻译： 公开了一种微型夹具及其制造方法。 微型夹具的制造方法将流体供给到夹爪的贯通孔，并且从微型夹持器的第一和第二结构的相对表面排出流体，从而完全分离附着在第一和第二结构的相对表面上的物体 并通过静电力和第二结构去除静电。 此外，当夹爪的第一和第二结构夹持物体时，本发明可以通过从夹爪的穿透孔吸入流体而更牢固地抓握物体。
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公开(公告)号：US08293556B2
公开(公告)日：2012-10-23
申请号：US12810850
申请日：2008-12-26
申请人： Kwang Bum Park , Seong Dong Kim , Joon Shik Park , Min Ho Lee
发明人： Kwang Bum Park , Seong Dong Kim , Joon Shik Park , Min Ho Lee
CPC分类号： G01N27/128
摘要： There are provided a micro gas sensor and a method for fabricating the same that comprises a micro heater formed inside a polysilicon membrane by doping impurities into a specific region of the polysilicon membrane positioned under a gas sensing substance, thereby improving thermal structural stability and making it easy to form the gas sensing substance. The micro gas sensor comprises: a micro heater formed by doping impurities into polysilicon vapor-deposited on a substrate on which a first insulating layer is formed; a polysilicon membrane for decreasing a heat loss of the micro heater; a power electrode for supplying power and a temperature measurement electrode for measuring a temperature, positioned at both ends of the micro heater; a second insulating layer formed on the micro heater; a sensing substance formed on the second insulating layer, for sensing a gas; and a sensing electrode for measuring a change in properties of the sensing substance. The method for fabricating a micro gas sensor comprises steps of: forming polysilicon on a substrate on which a first insulating layer is formed; forming a micro heater by doping impurities into the polysilicon; forming electrodes at both ends of the micro heater; forming a second insulating layer on the micro heater; forming a sensing substance on the second insulating layer; and forming a sensing electrode on the sensing substance.
摘要翻译： 提供一种微气体传感器及其制造方法，其包括通过将杂质掺杂到位于气体感测物质下方的多晶硅膜的特定区域中而形成在多晶硅膜内部的微加热器，从而提高热结构稳定性并使其成为 容易形成气体传感物质。 微气体传感器包括：通过将杂质掺杂到形成有第一绝缘层的基板上的多晶硅中形成的微加热器; 用于减少微加热器的热损失的多晶硅膜; 用于供电的电源电极和位于微加热器两端的用于测量温度的温度测量电极; 形成在所述微加热器上的第二绝缘层; 形成在所述第二绝缘层上的用于检测气体的感测物质; 以及用于测量感测物质的性质变化的感测电极。 制造微气体传感器的方法包括以下步骤：在其上形成有第一绝缘层的基板上形成多晶硅; 通过将杂质掺杂到多晶硅中形成微加热器; 在微加热器的两端形成电极; 在所述微加热器上形成第二绝缘层; 在所述第二绝缘层上形成感测物质; 以及在感测物质上形成感测电极。
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