Capacitive pressure sensor and method for manufacturing same
    1.
    发明授权
    Capacitive pressure sensor and method for manufacturing same 有权
    电容式压力传感器及其制造方法

    公开(公告)号:US08754453B2

    公开(公告)日:2014-06-17

    申请号:US13814304

    申请日:2011-07-21

    IPC分类号: H01L21/48

    摘要: The capacitive pressure sensor comprises: a substrate functioning as a lower electrode; a first insulating film formed on the substrate; a cavity formed on the first insulating film; a second insulating film formed on the first insulating film to have openings communicated with the cavity and to cover the cavity; a sealing film formed of a conductive material to seal the openings and to extend partially into the cavity through the openings; and an upper electrode formed on the second insulating film to be electrically separated from the sealing film and to overlap the cavity.

    摘要翻译: 电容式压力传感器包括:用作下电极的基板; 形成在所述基板上的第一绝缘膜; 形成在所述第一绝缘膜上的空腔; 第二绝缘膜,形成在所述第一绝缘膜上,以具有与所述空腔连通并覆盖所述空腔的开口; 由导电材料形成的密封膜,以密封开口并通过开口部分地延伸到空腔中; 以及形成在所述第二绝缘膜上以与所述密封膜电分离并与所述腔重叠的上电极。

    CAPACITIVE PRESSURE SENSOR AND METHOD FOR MANUFACTURING SAME
    2.
    发明申请
    CAPACITIVE PRESSURE SENSOR AND METHOD FOR MANUFACTURING SAME 有权
    电容式压力传感器及其制造方法

    公开(公告)号:US20130126994A1

    公开(公告)日:2013-05-23

    申请号:US13814304

    申请日:2011-07-21

    IPC分类号: G01L9/12 H01L29/66 H01L29/84

    摘要: The capacitive pressure sensor comprises: a substrate functioning as a lower electrode; a first insulating film formed on the substrate; a cavity formed on the first insulating film; a second insulating film formed on the first insulating film to have openings communicated with the cavity and to cover the cavity; a sealing film formed of a conductive material to seal the openings and to extend partially into the cavity through the openings; and an upper electrode formed on the second insulating film to be electrically separated from the sealing film and to overlap the cavity.

    摘要翻译: 电容式压力传感器包括:用作下电极的基板; 形成在所述基板上的第一绝缘膜; 形成在所述第一绝缘膜上的空腔; 第二绝缘膜,形成在所述第一绝缘膜上,以具有与所述空腔连通并覆盖所述空腔的开口; 由导电材料形成的密封膜,以密封开口并通过开口部分地延伸到空腔中; 以及形成在所述第二绝缘膜上以与所述密封膜电分离并与所述腔重叠的上电极。

    METHODS OF FORMING METAL OR METAL NITRIDE PATTERNS AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES
    3.
    发明申请
    METHODS OF FORMING METAL OR METAL NITRIDE PATTERNS AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES 审中-公开
    形成金属或金属氮化物图案的方法和制造半导体器件的方法

    公开(公告)号:US20130040448A1

    公开(公告)日:2013-02-14

    申请号:US13570812

    申请日:2012-08-09

    IPC分类号: H01L21/312 H01L21/336

    摘要: In a method of forming a metal or metal nitride pattern, a metal or metal nitride layer is formed on a substrate, and a photoresist pattern is formed on the metal or metal nitride layer. An over-coating composition is coated on the metal or metal nitride layer and on the photoresist pattern to form a capping layer on the photoresist pattern. The over-coating composition includes a polymer having amine groups as a side chain or a branch and a solvent. A remaining portion of the over-coating composition is removed by washing with a hydrophilic solution. The metal or metal nitride layer is partially removed using the capping layer and the photoresist pattern as an etching mask.

    摘要翻译: 在形成金属或金属氮化物图形的方法中,在基板上形成金属或金属氮化物层,并且在金属或金属氮化物层上形成光刻胶图案。 在金属或金属氮化物层和光致抗蚀剂图案上涂覆过涂层组合物以在光致抗蚀剂图案上形成覆盖层。 该覆盖组合物包括具有侧基或分支和溶剂的胺基的聚合物。 通过用亲水溶液洗涤除去剩余部分的外涂层组合物。 使用覆盖层和光致抗蚀剂图案作为蚀刻掩模来部分去除金属或金属氮化物层。

    Apparatus for solution component analysis and fabricating method thereof
    4.
    发明授权
    Apparatus for solution component analysis and fabricating method thereof 有权
    溶液成分分析装置及其制造方法

    公开(公告)号:US07050163B2

    公开(公告)日:2006-05-23

    申请号:US10977757

    申请日:2004-10-28

    IPC分类号: G01N1/10

    摘要: The present invention provides an apparatus for solution component analysis and fabricating method thereof, by which a mixing channel, reaction channel, and measurement channel are formed as continuous micro-grooves on one substrate to implement the miniature apparatus for analyzing solution components, by which the apparatus is provided with portability facilitating access to a spot outside a laboratory to perform an instant sample analysis, and by which an optical system configuration for sample analysis can be simplified in a manner of facilitating an optical transfer by forming a transparent silicon oxide (SiO2) layer between a micro channel of the apparatus and an optical fiber to insert the optical fiber therein.

    摘要翻译: 本发明提供了一种溶液成分分析装置及其制造方法,通过该装置将混合通道,反应通道和测量通道形成为一个基板上的连续微槽,以实现用于分析溶液成分的微型装置, 设备具有便于访问实验室外的点的便携性,以进行即时样本分析,并且可以通过形成透明氧化硅(SiO 2)促进光学转移的方式来简化用于样本分析的光学系统配置, 在装置的微通道和光纤之间插入光纤。

    Micro gripper and method for manufacturing the same
    5.
    发明授权
    Micro gripper and method for manufacturing the same 失效
    微型夹具及其制造方法

    公开(公告)号:US07770951B2

    公开(公告)日:2010-08-10

    申请号:US11278066

    申请日:2006-03-30

    IPC分类号: B25J7/00

    摘要: A micro gripper and a method for manufacturing the same are disclosed. The manufacturing method of the micro gripper supplies a fluid to a penetration hole of a gripper jaw, and discharges the fluid from opposite surfaces of the first and second structures of the micro gripper, thereby completely detaching the object attached on the opposite surfaces of the first and second structures by electrostatic force and removing the stiction. Furthermore, the present invention can grip the object more strongly by sucking the fluid from the penetration hole of the gripper jaw, when the first and second structures of the gripper jaw grip the object.

    摘要翻译: 公开了一种微型夹具及其制造方法。 微型夹具的制造方法将流体供给到夹爪的贯通孔,并且从微型夹持器的第一和第二结构的相对表面排出流体,从而完全分离附着在第一和第二结构的相对表面上的物体 并通过静电力和第二结构去除静电。 此外,当夹爪的第一和第二结构夹持物体时,本发明可以通过从夹爪的穿透孔吸入流体而更牢固地抓握物体。

    Capsule Type Endoscope with an Insertion Tube
    6.
    发明申请
    Capsule Type Endoscope with an Insertion Tube 审中-公开
    胶囊型内窥镜带插管

    公开(公告)号:US20080154093A1

    公开(公告)日:2008-06-26

    申请号:US11941476

    申请日:2007-11-16

    IPC分类号: A61B1/01

    摘要: Disclosed is a capsule type endoscope with an insertion tube, which is capable of improving diagnosis and treatment of a patient's disease by attaching manipulation wires, an electric power line, and a signal line to a conventional capsule type endoscope. A specific embodiment of the present invention comprises and is characterized by a capsule containing a photographic system for acquiring images from the internal cavities of the human body; at least one manipulation wire connected to the capsule; an electric power line and a signal line connected to the capsule; an insertion tube for protecting the manipulation wire, the electric power line and the signal line; and a connection section for connecting the capsule with the insertion tube.

    摘要翻译: 公开了一种具有插入管的胶囊型内窥镜,其能够通过将操作线,电力线和信号线附接到常规胶囊型内窥镜来改善对患者疾病的诊断和治疗。 本发明的具体实施例包括并且其特征在于包含用于从人体的内腔获取图像的照相系统的胶囊; 连接到胶囊的至少一个操作线; 连接到胶囊的电力线和信号线; 用于保护操作线,电力线和信号线的插入管; 以及用于将胶囊与插入管连接的连接部。

    Capsule Type Endoscope with Embedded Memory
    7.
    发明申请
    Capsule Type Endoscope with Embedded Memory 审中-公开
    胶囊型内窥镜与嵌入式存储器

    公开(公告)号:US20080154092A1

    公开(公告)日:2008-06-26

    申请号:US11964124

    申请日:2007-12-26

    IPC分类号: A61B1/04

    CPC分类号: A61B1/041 A61B2560/0242

    摘要: The present invention relates to a capsule type endoscope with embedded memory. More specifically, the present invention relates to a capsule type endoscope with embedded memory, which is equipped with flash memory and does not need a transmitter for wireless communication or a receiver, to reduce power consumption of the capsule type endoscope and improve convenience in use.

    摘要翻译: 本发明涉及具有嵌入式存储器的胶囊型内窥镜。 更具体地说,本发明涉及具有嵌入式存储器的胶囊型内窥镜,其配备有闪存,并且不需要用于无线通信的发送器或接收器,以减少胶囊型内窥镜的功耗并提高使用方便性。