公开(公告)号：US07737687B2

公开(公告)日：2010-06-15

申请号：US11582357

申请日：2006-10-18

申请人： Kyung-won Na ,  Jingli Yuan ,  Sang-on Choi

发明人： Kyung-won Na ,  Jingli Yuan ,  Sang-on Choi

IPC分类号： G01R33/04 ,  G01R33/02

CPC分类号： G01R33/05

摘要： A fluxgate sensor includes a magnetic core including CoNbZr, an excitation coil, and a magnetic field sensing coil. The fluxgate sensor can use CoNbZr. A low coercivity and high magnetic permeability can be obtained.

摘要翻译： 磁通门传感器包括包括CoNbZr，励磁线圈和磁场感测线圈的磁芯。 磁通门传感器可以使用CoNbZr。 可以获得低矫顽力和高磁导率。

公开(公告)号：US20070085535A1

公开(公告)日：2007-04-19

申请号：US11582357

申请日：2006-10-18

申请人： Kyung-won Na ,  Jingli Yuan ,  Sang-on Choi

发明人： Kyung-won Na ,  Jingli Yuan ,  Sang-on Choi

IPC分类号： G01R33/04

CPC分类号： G01R33/05

摘要： A fluxgate sensor includes a magnetic core including CoNbZr, an excitation coil, and a magnetic field sensing coil. The fluxgate sensor can use CoNbZr. A low coercivity and high magnetic permeability can be obtained.

摘要翻译： 磁通门传感器包括包括CoNbZr，励磁线圈和磁场感测线圈的磁芯。 磁通门传感器可以使用CoNbZr。 可以获得低矫顽力和高磁导率。

公开(公告)号：US07189638B2

公开(公告)日：2007-03-13

申请号：US10739578

申请日：2003-12-19

申请人： Dong-sik Shim ,  Kyung-won Na ,  Sang-on Choi ,  Hae-seok Park

发明人： Dong-sik Shim ,  Kyung-won Na ,  Sang-on Choi ,  Hae-seok Park

IPC分类号： H01L21/4763

CPC分类号： H01L21/76879

摘要： A method for manufacturing a metal structure using a trench includes etching a semiconductor substrate to form a trench, depositing a seed layer over the semiconductor substrate including in the trench, stacking an insulating layer over the seed layer, removing a portion of the insulating layer to expose a portion of the seed layer at a bottom of the trench, filling the trench with a metal material, and removing the seed layer and the insulating layer on the semiconductor substrate. As a result, a subsequent process in forming a multi-layered structure may be easily carried out, thereby simplifying a manufacturing process.

摘要翻译： 使用沟槽制造金属结构的方法包括蚀刻半导体衬底以形成沟槽，在包括沟槽中的半导体衬底上沉积晶种层，在种子层上堆叠绝缘层，去除绝缘层的一部分 在沟槽的底部露出种子层的一部分，用金属材料填充沟槽，以及去除半导体衬底上的晶种层和绝缘层。 结果，可以容易地进行形成多层结构的后续处理，从而简化制造过程。

公开(公告)号：US07071688B2

公开(公告)日：2006-07-04

申请号：US10773456

申请日：2004-02-09

申请人： Hae-seok Park ,  Kyung-won Na ,  Dong-sik Shim ,  Sang-on Choi

发明人： Hae-seok Park ,  Kyung-won Na ,  Dong-sik Shim ,  Sang-on Choi

IPC分类号： G01R33/02

CPC分类号： G01R33/02

摘要： Disclosed is a magnetic field sensor of high sensitivity, and which is power-saving and can be manufactured with low cost in a very small size. The magnetic field sensor includes a soft magnetic core formed to construct a closed-magnetic circuit on a semiconductor substrate, a magnetic field sensing coil formed by a metal film in a shape that winds the soft magnetic core, and a drive line for exciting the soft magnetic core by directly applying an electric current thereto. The drive line is formed in a rectangular angle to the magnetic field sensing coil, and connected to the both ends of the soft magnetic core in a length direction.

公开(公告)号：US20050035761A1

公开(公告)日：2005-02-17

申请号：US10763394

申请日：2004-01-26

申请人： Hae-seok Park ,  Dong-sik Shim ,  Sang-on Choi ,  Kyung-won Na

发明人： Hae-seok Park ,  Dong-sik Shim ,  Sang-on Choi ,  Kyung-won Na

IPC分类号： G01R33/02 ,  G01R33/04 ,  G01R33/05 ,  H01L43/02

CPC分类号： G01R33/04 ,  G01R15/185 ,  G01R33/05

摘要： In a fluxgate sensor integrated in a semiconductor substrate and a method for manufacturing the same, the fluxgate sensor includes a soft magnetic core formed on the semiconductor substrate, an excitation coil winding the soft magnetic core and being insulated by first and second insulating layers deposited above and below the soft magnetic core, respectively, and a pick-up coil, winding the soft magnetic core and being insulated by third and fourth insulating layers deposited above and below the excitation coil, respectively.

摘要翻译： 在集成在半导体衬底中的磁通门传感器及其制造方法中，磁通门传感器包括形成在半导体衬底上的软磁芯，缠绕软磁芯的励磁线圈，并由上述第一和第二绝缘层绝缘 并且分别在软磁芯和拾取线圈之下，缠绕软磁芯并且分别由激励线圈上方和下方沉积的第三绝缘层和第四绝缘层绝缘。

公开(公告)号：US07208947B2

公开(公告)日：2007-04-24

申请号：US10763394

申请日：2004-01-26

申请人： Hae-seok Park ,  Dong-sik Shim ,  Sang-on Choi ,  Kyung-won Na

发明人： Hae-seok Park ,  Dong-sik Shim ,  Sang-on Choi ,  Kyung-won Na

IPC分类号： G01R33/04 ,  G01R33/02

CPC分类号： G01R33/04 ,  G01R15/185 ,  G01R33/05

摘要： In a fluxgate sensor integrated in a semiconductor substrate and a method for manufacturing the same, the fluxgate sensor includes a soft magnetic core formed on the semiconductor substrate, an excitation coil winding the soft magnetic core and being insulated by first and second insulating layers deposited above and below the soft magnetic core, respectively, and a pick-up coil, winding the soft magnetic core and being insulated by third and fourth insulating layers deposited above and below the excitation coil, respectively.

摘要翻译： 在集成在半导体衬底中的磁通门传感器及其制造方法中，磁通门传感器包括形成在半导体衬底上的软磁芯，缠绕软磁芯的励磁线圈，并由上述第一和第二绝缘层绝缘 并且分别在软磁芯和拾取线圈之下，缠绕软磁芯并且分别由激励线圈上下沉积的第三绝缘层和第四绝缘层绝缘。

公开(公告)号：US20060202690A1

公开(公告)日：2006-09-14

申请号：US11433570

申请日：2006-05-15

申请人： Hae-seok Park ,  Kyung-won Na ,  Dong-sik Shim ,  Sang-on Choi

发明人： Hae-seok Park ,  Kyung-won Na ,  Dong-sik Shim ,  Sang-on Choi

IPC分类号： G01R33/02

CPC分类号： G01R33/02

摘要： Disclosed is a magnetic field sensor of high sensitivity, and which is power-saving and can be manufactured with low cost in a very small size. The magnetic field sensor includes a soft magnetic core formed to construct a closed-magnetic circuit on a semiconductor substrate, a magnetic field sensing coil formed by a metal film in a shape that winds the soft magnetic core, and a drive line for exciting the soft magnetic core by directly applying an electric current thereto. The drive line is formed in a rectangular angle to the magnetic field sensing coil, and connected to the both ends of the soft magnetic core in a length direction.

公开(公告)号：US07041526B2

公开(公告)日：2006-05-09

申请号：US10784479

申请日：2004-02-23

申请人： Dong-sik Shim ,  Kyung-won Na ,  Sang-on Choi ,  Hae-seok Park ,  Jun-sik Hwang

发明人： Dong-sik Shim ,  Kyung-won Na ,  Sang-on Choi ,  Hae-seok Park ,  Jun-sik Hwang

IPC分类号： G01R33/02 ,  H01L21/00

CPC分类号： G01R33/02 ,  G01R33/04 ,  G01R33/05 ,  H01F17/0006 ,  H01F41/046

摘要： A method for manufacturing a magnetic field detecting element having a soft magnetic core formed on a substrate, first and second coils, each having coil lines, arranged above and below the core, the method including forming a seed film on the substrate, removing a portion of the seed film using a predetermined pattern so that coil lines constituting the first coil subsequently formed on the seed film are separated, forming a first plating mold having grooves corresponding to the predetermined pattern on an upper portion of the seed film, forming coil lines constituting the first coil by filling the grooves of the first plating mold with metal, forming the soft magnetic core and the second coil on an upper portion of the substrate and on the seed film where the first coil is formed, and cutting off edges of the substrate so that the separated coil lines are insulated.

摘要翻译： 一种用于制造具有形成在基板上的软磁芯的磁场检测元件的方法，所述方法包括在所述基板上方和下方形成具有线圈的第一和第二线圈，所述方法包括在所述基板上形成种子膜， 的种子薄膜，使得构成在种子薄膜上随后形成的第一线圈的线圈线分离，在种子薄膜的上部形成具有对应于预定图案的槽的第一电镀模，形成线圈线， 第一线圈通过用金属填充第一电镀模具的凹槽，在基板的上部和形成第一线圈的种子膜上形成软磁芯和第二线圈，并切断基板的边缘 使分离的线圈线绝缘。

公开(公告)号：US20050172480A1

公开(公告)日：2005-08-11

申请号：US11061611

申请日：2005-02-22

申请人： Won-youl Choi ,  Keon-yang Park ,  Byeong-cheon Koh ,  Myung-sam Kang ,  Kyung-won Na ,  Sang-on Choi

发明人： Won-youl Choi ,  Keon-yang Park ,  Byeong-cheon Koh ,  Myung-sam Kang ,  Kyung-won Na ,  Sang-on Choi

IPC分类号： G01R33/02 ,  G01R33/04 ,  G01R33/05 ,  H01L43/00 ,  H01L21/00 ,  B32B31/26 ,  G01R31/00 ,  H01F7/06

CPC分类号： G01R33/05 ,  G01R15/185 ,  G01R33/04 ,  Y10T29/49073 ,  Y10T29/49075

摘要： A fluxgate sensor integrated in a printed circuit board. The fluxgate sensor has soft magnetic cores having a lower core and an upper core mounted on the lower core, for forming a closed magnetic path on a printed circuit board, an excitation coil formed as a metal film, alternately winding the upper and the lower soft magnetic cores substantially in a number ‘8’ pattern, and a pick-up coil formed as a metal film, having a structure of winding the upper and the lower soft magnetic cores substantially in a solenoid pattern, the pick-up coil being placed on the same plane as an external contour of the excitation coil.

摘要翻译： 集成在印刷电路板中的磁通门传感器。 磁通门传感器具有软磁芯，其具有安装在下芯上的下芯和上芯，用于在印刷电路板上形成闭合磁路，形成为金属膜的励磁线圈，交替地卷绕上软和下软 基本上为“8”图案的磁芯和形成为金属膜的拾取线圈，其具有将上下软磁芯卷绕成螺线管图案的结构，拾取线圈被放置在 与激励线圈的外部轮廓相同的平面。

公开(公告)号：US07557571B2

公开(公告)日：2009-07-07

申请号：US10241558

申请日：2002-09-12

申请人： Won-youl Choi ,  Kyung-won Na ,  Sang-on Choi

发明人： Won-youl Choi ,  Kyung-won Na ,  Sang-on Choi

IPC分类号： G01R33/04 ,  G01R33/02

CPC分类号： G01R33/05 ,  G01R15/185 ,  G01R33/04

摘要： A fluxgate sensor is integrated in a semiconductor substrate. The fluxgate sensor has two bar type soft magnetic cores, or a rectangular-ring type soft magnetic core to form a closed magnetic path on the semiconductor substrate, with an excitation coil formed of a metal layer either of the united structure winding the two bar-type cores or two longer sides of the rectangular-ring type core altogether and substantially in a number ‘8’ pattern, or of a separated structure winding the two bar type cores or two longer sides of the rectangular-ring type core, respectively, in a number ‘8’ pattern. Also, a pick-up coil is formed on the two bar-type cores or two longer sides of the rectangular-ring type core, either of the united structure winding the two bar-type cores or two longer sides of the rectangular-type core altogether in a solenoid pattern, or of the separated structure winding the two bar type cores or two longer sides of the rectangular-ring type core, respectively, in a solenoid pattern.

摘要翻译： 磁通门传感器集成在半导体衬底中。 磁通门传感器具有两个棒型软磁芯或矩形环型软磁芯，以在半导体衬底上形成封闭的磁路，其中由一个金属层组成的激励线圈组成， 型芯或矩形环芯的两个较长的边，总体上基本为“8”形，或分别结构地将矩形环型芯的两个棒型芯或两个较长边分别缠绕在 数字“8”模式。 此外，在矩形环形芯的两个棒状芯或两个长边上形成一个拾取线圈，其中两个棒型芯的两个长边或矩形芯的两个长边 或分离结构分别以螺线管图案缠绕矩形环型芯的两个棒状芯或两个较长边。