公开(公告)号：US11798789B2

公开(公告)日：2023-10-24

申请号：US16960818

申请日：2018-09-10

Applicant: LAM RESEARCH CORPORATION

Inventor： Alejandro Sanchez ,  Grayson Ford ,  Darrell Ehrlich ,  Aravind Alwan ,  Kevin Leung ,  Anthony Contreras ,  Zhumin Han ,  Raphael Casaes ,  Joanna Wu

IPC: H01J37/32 ,  H01L21/67 ,  H01L21/687

CPC classification number: H01J37/32642 ,  H01J37/32715 ,  H01L21/67069 ,  H01L21/68735 ,  H01L21/68742 ,  H01J2237/20235

Abstract: A first edge ring for a substrate support is provided. The first edge ring includes an annular-shaped body and one or more lift pin receiving elements. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines an upper surface, a lower surface, a radially inner surface, and a radially outer surface. The one or more lift pin receiving elements are disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three or more lift pins.