公开(公告)号：US20150036969A1

公开(公告)日：2015-02-05

申请号：US13956166

申请日：2013-07-31

Applicant: LGS Innovations LLC

Inventor： Hugo Safar ,  Mike Santo ,  Brijesh Vyas

IPC: C23C16/455 ,  G02B6/12

CPC classification number: C23C16/45565 ,  G02B6/132

Abstract: An apparatus comprising a dispersion plate, a dispersion plate, the dispersion plate including input side openings connected to holes therein, the holes following a torturous path through the dispersion plate and configured to deliver dopants through output side openings of the dispersion plate.

Abstract translation: 一种包括分散板，分散板的分散板，所述分散板包括连接到其中的孔的输入侧开口，所述分隔板沿着经过所述分散板的折痕路径，并且构造成通过所述分散板的输出侧开口输送掺杂剂。

公开(公告)号：US20150079283A1

公开(公告)日：2015-03-19

申请号：US14026953

申请日：2013-09-13

Applicant: LGS Innovations LLC

Inventor： Brijesh Vyas ,  Mike Santo ,  Hugo Safar

IPC: C23C16/448

CPC classification number: C23C16/4481 ,  C23C16/52

Abstract: A deposition apparatus comprising a vaporizer chamber configured to hold a solid precursor of a dopant element therein. Gas input and output lines are connected to the vaporizer chamber and flow rate controllers are coupled to each of the gas input and output lines. The flow rate controllers are configured to adjust a rate of carrier gas flow into and out of the vaporizer chamber through the gas input and output lines. The vaporizer chamber has a temperature controller and pressure controller to produce vapors of the solid precursor in the vaporizer chamber that can be carried with the carrier gas flow through the output line.

Abstract translation: 一种沉积设备，包括配置成将掺杂剂元素的固体前体保持在其中的蒸发器室。 气体输入和输出线路连接到蒸发器室，并且流量控制器耦合到气体输入和输出线路中的每一个。 流量控制器被配置为通过气体输入和输出线调节载气流入和离开蒸发器室的速率。 蒸发器室具有温度控制器和压力控制器，用于产生蒸发器室中的固体前体的蒸汽，其可以承载气体流过输出线。

公开(公告)号：US20140158786A1

公开(公告)日：2014-06-12

申请号：US13708028

申请日：2012-12-07

Applicant: LGS INNOVATIONS LLC

Inventor： Mike Santo ,  Hugo Safar

IPC: B05B1/00

CPC classification number: H01J37/32853 ,  C23C16/45565 ,  H01J37/3244 ,  H01J37/32449 ,  H01J37/3288

Abstract: An apparatus includes a gas dispersal plate and an adapter structure. The gas dispersal plate has a plurality of gas dispersion orifices, wherein one or more of the gas dispersion orifices have a first portion with a first cross-section configured to allow entry of gas and a second portion having a second cross-section configured to allow exit of gas, the first cross-section being smaller than the second cross-section.

Abstract translation: 一种装置包括气体分散板和适配器结构。 气体扩散板具有多个气体分散孔，其中一个或多个气体分散孔具有第一部分，第一部分具有构造成允许气体进入的第一横截面，并且具有第二横截面的第二部分被配置为允许 气体的出口，第一横截面小于第二横截面。

公开(公告)号：US09362092B2

公开(公告)日：2016-06-07

申请号：US13708028

申请日：2012-12-07

Applicant: LGS Innovations LLC

Inventor： Mike Santo ,  Hugo Safar

IPC: B05B1/00 ,  H01J37/32 ,  C23C16/455

CPC classification number: H01J37/32853 ,  C23C16/45565 ,  H01J37/3244 ,  H01J37/32449 ,  H01J37/3288

Abstract: An apparatus includes a gas dispersal plate and an adapter structure. The gas dispersal plate has a plurality of gas dispersion orifices, wherein one or more of the gas dispersion orifices have a first portion with a first cross-section configured to allow entry of gas and a second portion having a second cross-section configured to allow exit of gas, the first cross-section being smaller than the second cross-section.

Abstract translation: 一种装置包括气体分散板和适配器结构。 气体扩散板具有多个气体分散孔，其中一个或多个气体分散孔具有第一部分，第一部分具有构造成允许气体进入的第一横截面，并且具有第二横截面的第二部分被配置成允许 气体的出口，第一横截面小于第二横截面。

公开(公告)号：US09029782B2

公开(公告)日：2015-05-12

申请号：US13653630

申请日：2012-10-17

Applicant: LGS Innovations LLC

Inventor： Ashok J. Maliakal ,  Brijesh Vyas ,  Hugo Safar

IPC: G01J5/02 ,  G02B6/10 ,  G02B6/12

CPC classification number: G02B6/10 ,  G01N21/7703 ,  G01N2021/7709 ,  G01N2021/7783 ,  G02B6/122 ,  G02B2006/12035

Abstract: A chemical sensor is provided. The sensor includes at least one lightguiding element having an optical core. The lightguiding element comprises a layer of graphene situated in sufficient proximity to the core to exhibit evanescent wave absorption of optical energy in at least one optical mode guided in the core.

Abstract translation: 提供化学传感器。 传感器包括至少一个具有光学芯的光导元件。 光导元件包括位于芯附近的石墨烯层，以在芯中引导的至少一种光学模式中呈现光能的ev逝波吸收。