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公开(公告)号：US20150348819A1
公开(公告)日：2015-12-03
申请号：US14654961
申请日：2013-10-09
Applicant: LINTEC CORPORATION
Inventor： Naoki TAYA , Masashi UEDA , Masaharu ITO
CPC classification number: H01L21/6836 , B32B27/08 , B32B27/308 , B32B2307/54 , C08G2261/3324 , C08G2261/3325 , C08G2261/418 , C08G2261/724 , C08L23/06 , C08L23/12 , C08L45/00 , C08L47/00 , C09J7/24 , C09J7/29 , C09J2201/162 , C09J2201/606 , C09J2203/326 , C09J2423/006 , C09J2423/046 , C09J2433/006 , C09J2453/006 , H01L21/683 , H01L2221/68327 , H01L2221/68336 , H01L2221/68381 , Y10T428/28 , Y10T428/31913 , C08L65/00 , C08L53/02
Abstract: A dicing sheet base film includes a resin layer (A). The resin layer (A) contains: a norbornene-based resin (a1) that is a thermoplastic resin containing a structural unit derived from a norbornene-based compound; a styrene-based elastomer (a2); and an olefin-based thermoplastic resin (a3) other than the norbornene-based resin (a1) and other than the styrene-based elastomer (a2). The dicing sheet base film suppresses the occurrence of dicing debris, in particular filament-like dicing debris, during the dicing of a cut object without imparting physical energy such as electron rays and γ rays, and has sufficient expandability in the expanding process.
Abstract translation: 切割片基膜包括树脂层（A）。 树脂层（A）含有作为含有来自降冰片烯系化合物的结构单元的热塑性树脂的降冰片烯系树脂（a1） 苯乙烯类弹性体（a2）; 以及除了降冰片烯系树脂（a1）以外的烯烃类热塑性树脂（a3），而不是苯乙烯系弹性体（a2）。 切割片基膜在切割物体的切割期间抑制切割碎屑，特别是丝状切割碎屑的发生，而不会施加诸如电子射线和γ射线的物理能量，并且在膨胀过程中具有足够的可扩展性。
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公开(公告)号：US20150357225A1
公开(公告)日：2015-12-10
申请号：US14760220
申请日：2013-03-04
Applicant: LINTEC CORPORATION
Inventor： Naoki TAYA , Masashi UEDA , Masaharu ITO
IPC: H01L21/683 , C09J7/02 , C08L23/06
CPC classification number: H01L21/6836 , C08L23/06 , C09J7/243 , C09J7/29 , C09J2201/162 , C09J2201/606 , C09J2203/326 , C09J2205/114 , C09J2423/046 , C09J2433/006 , H01L21/68 , H01L2221/68327 , Y10T428/28 , Y10T428/31938
Abstract: A base film for a dicing sheet is provided which can suppress dicing debris from generating during the dicing of a cut object in the full-cut dicing without imparting physical energy, such as electron beam or γ ray, and which has an enhanced expanding property in the expanding process. The base film for a dicing sheet comprises a resin layer that contains a polyethylene and an ethylene-tetracyclododecene copolymer. A dicing sheet that comprises the base film for a dicing sheet is also provided.
Abstract translation: 提供了一种用于切割片的基膜，其能够抑制在全切割切割中的切割物体的切割期间产生的切割屑，而不会施加诸如电子束或γ射线的物理能量，并且其具有增强的膨胀性能 扩大的过程。 用于切割片的基膜包括含有聚乙烯和乙烯 - 四环十二碳烯共聚物的树脂层。 还提供了包括用于切割片的基底膜的切割片。
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公开(公告)号：US20150348820A1
公开(公告)日：2015-12-03
申请号：US14654967
申请日：2013-10-09
Applicant: LINTEC CORPORATION
Inventor： Naoki TAYA , Masashi UEDA , Masaharu ITO
IPC: H01L21/683 , B32B27/30 , B32B27/32 , C08J5/18 , B32B27/08
CPC classification number: H01L21/6836 , B32B27/08 , B32B27/308 , B32B27/32 , B32B2405/00 , C08J5/18 , C08J2309/06 , C08J2323/06 , C09J7/29 , C09J2201/162 , C09J2201/606 , C09J2203/326 , C09J2205/114 , C09J2423/046 , C09J2425/006 , C09J2433/006 , H01L21/683 , Y10T428/31913
Abstract: A dicing sheet base film includes a resin layer (A). The resin layer (A) contains: a polyethylene (a1) that has a density of 0.900 g/cm3 or more; and a styrene-based elastomer (a2). The polyethylene (a1) has a content of 50 mass % or more and 90 mass % or less to a total resin component contained in the resin layer (A), while the styrene-based elastomer (a2) has a content of 10 mass % or more and 50 mass % or less to the total resin component. The dicing sheet base film suppresses the occurrence of dicing debris during the dicing of a cut object without imparting physical energy such as electron rays and γ rays, and has sufficient expandability in the expanding process.
Abstract translation: 切割片基膜包括树脂层（A）。 树脂层（A）含有：密度为0.900g / cm 3以上的聚乙烯（a1） 和苯乙烯系弹性体（a2）。 聚乙烯（a1）相对于树脂层（A）中含有的树脂成分总含量为50质量％以上90质量％以下，苯乙烯系弹性体（a2）的含量为10质量％ 以上且50质量％以下。 切割片基膜在切割物体切割时抑制切割碎屑的发生，而不会施加诸如电子射线和γ射线的物理能量，并且在膨胀过程中具有充分的可扩展性。
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