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    SYSTEMS AND METHODS FOR VAPOR DELIVERY
    1.
    发明申请
    SYSTEMS AND METHODS FOR VAPOR DELIVERY 有权
    蒸汽交付系统和方法

    公开(公告)号：US20160032453A1

    公开(公告)日：2016-02-04

    申请号：US14798652

    申请日：2015-07-14

    Applicant: Lam Research Corporation

    Inventor： Jun Qian ,  Hu Kang ,  Purushottam Kumar ,  Chloe Baldasseroni ,  Heather Landis ,  Andrew Kenichi Duvall ,  Mohamed Sabri ,  Ramesh Chandrasekharan ,  Karl Leeser ,  Shankar Swaminathan ,  David Smith ,  Jeremiah Baldwin ,  Eashwar Ranganathan ,  Adrien LaVoie ,  Frank Pasquale ,  Jeongseok Ha ,  lngi Bae

    IPC: C23C16/455 ,  C23C16/505 ,  C23C16/46

    CPC classification number: C23C16/45544 ,  C23C16/4481 ,  C23C16/4554

    Abstract: A vapor delivery system includes an ampoule to store liquid precursor and a heater to partially vaporize the liquid precursor. A first valve communicates with a push gas source and the ampoule. A second valve supplies vaporized precursor to a heated injection manifold. A valve manifold includes a first node in fluid communication with an outlet of the heated injection manifold, a third valve having an inlet in fluid communication with the first node and an outlet in fluid communication with vacuum, a fourth valve having an inlet in fluid communication with the first node and an outlet in fluid communication with a second node, a fifth valve having an outlet in fluid communication with the second node, and a sixth valve having an outlet in fluid communication with the second node. A gas distribution device is in fluid communication with the second node.

    Abstract translation: 蒸气输送系统包括用于储存液体前体的安瓿和用于部分蒸发液体前体的加热器。 第一阀与推气源和安瓿连通。 第二个阀将蒸发的前体供应到加热的注入歧管。 阀歧管包括与加热的喷射歧管的出口流体连通的第一节点，具有与第一节点流体连通的入口和与真空流体连通的出口的第三阀，具有流体连通的入口的第四阀 其中第一节点和与第二节点流体连通的出口，具有与第二节点流体连通的出口的第五阀以及具有与第二节点流体连通的出口的第六阀。 气体分配装置与第二节点流体连通。

    Connector backshell
    4.
    外观设计
    Connector backshell 有权

    公开(公告)号：USD986825S1

    公开(公告)日：2023-05-23

    申请号：US29713163

    申请日：2019-11-14

    Applicant: Lam Research Corporation

    Designer： Jeremiah Baldwin ,  Sudarshan Manjunath ,  Samuel Jacob Monroe

    Abstract: FIG. 1 is an isometric view of a first embodiment of a connector backshell.
    FIG. 2 is another isometric view thereof.
    FIG. 3 is a bottom isometric view thereof.
    FIG. 4 is another bottom isometric view thereof.
    FIG. 5 is a top view thereof.
    FIG. 6 is a bottom view thereof.
    FIG. 7 is a front view thereof.
    FIG. 8 is a rear view thereof.
    FIG. 9 is a right side view thereof.
    FIG. 10 is a left side view thereof.
    FIG. 11 is an isometric sectional view thereof taken from line 11-11 in FIG. 10.
    FIG. 12 is an isometric sectional view thereof taken from line 12-12 in FIG. 9.
    FIG. 13 is an isometric view of a second embodiment of a connector backshell.
    FIG. 14 is another isometric view thereof.
    FIG. 15 is a bottom isometric view thereof.
    FIG. 16 is another bottom isometric view thereof.
    FIG. 17 is a top view thereof.
    FIG. 18 is a bottom thereof.
    FIG. 19 is a front view thereof.
    FIG. 20 is a rear view thereof.
    FIG. 21 is a right side view thereof.
    FIG. 22 is a left side view thereof.
    FIG. 23 is an isometric sectional view thereof taken from line 23-23 in FIG. 22.
    FIG. 24 is an isometric sectional view thereof taken from line 24-24 in FIG. 21.
    FIG. 25 shows the first embodiment of the connector backshell in a state of use; and,
    FIG. 26 shows the second embodiment of the connector backshell in a state of use.
    The short dashed lines in the drawings depict portions of the connector back shell that form no part of the claimed design. The broken lines in FIGS. 25 and 26 that show an extension of the article depict environment that forms no part of the claimed design. The heavy dash-dot-dash lines on the article itself depict the bounds of the claimed design. The heavy dash-dot-dash lines in FIGS. 9, 10, 21, and 22 depict the cut lines of the sectional views. The very fine solid lines depict 3-dimensional contours of the connector back shell and are not intended to be construed as visible seams or edges. The heavier solid lines depict edges of the article. The stippling in the drawing shows the contour of the design.

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