THREE AXIS MAGNETIC SENSOR DEVICE AND METHOD USING FLEX CABLES
    2.
    发明申请
    THREE AXIS MAGNETIC SENSOR DEVICE AND METHOD USING FLEX CABLES 有权
    三轴磁传感器装置及使用柔性电缆的方法

    公开(公告)号:US20150137806A1

    公开(公告)日:2015-05-21

    申请号:US14606909

    申请日:2015-01-27

    Applicant: mCube Inc.

    CPC classification number: G01R33/093 G01R33/0206 G01R33/096 G01R33/098

    Abstract: A method and structure for a three-axis magnetic field sensing device. An IC layer having first bond pads and second bond pads can be formed overlying a substrate/SOI member with a first, second, and third magnetic sensing element coupled the IC layer. One or more conductive cables can be formed to couple the first and second bond pads of the IC layer. A portion of the substrate member and IC layer can be removed to separate the first and second magnetic sensing elements on a first substrate member from the third sensing element on a second substrate member, and the third sensing element can be coupled to the side-wall of the first substrate member.

    Abstract translation: 一种三轴磁场感测装置的方法和结构。 具有第一接合焊盘和第二接合焊盘的IC层可以形成为覆盖在衬底/ SOI部件上,其中第一,第二和第三磁感应元件耦接于IC层。 可以形成一个或多个导电电缆以连接IC层的第一和第二接合焊盘。 可以去除衬底构件和IC层的一部分,以将第一衬底构件上的第一和第二磁感应元件与第二衬底构件上的第三感测元件分离,并且第三感测元件可以联接到侧壁 的第一衬底构件。

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