-
公开(公告)号:US20240071500A1
公开(公告)日:2024-02-29
申请号:US18234046
申请日:2023-08-15
Applicant: MICRON TECHNOLOGY, INC.
Inventor: Jae Kyu Choi , Jin Yue , Kyubong Jung , Albert Fayrushin , Jae Young Ahn , Jun Kyu Yang
CPC classification number: G11C16/0483 , H10B41/10 , H10B41/27 , H10B41/35 , H10B43/10 , H10B43/27 , H10B43/35
Abstract: Memory array structures, and methods of their formation, might include a first memory cell having a first control gate and an adjacent first portion of a charge-blocking structure, a second memory cell having a second control gate and an adjacent second portion of the charge-blocking structure, and a first dielectric material between the first control gate and the second control gate, and adjacent to a third portion of the charge-blocking structure that is between the first and second portions of the charge-blocking structure. The third portion of the charge-blocking structure might include a second dielectric material and a third dielectric material different than the second dielectric material, and the first portion of the charge-blocking structure and the second portion of the charge-blocking structure might each include the third dielectric material and a fourth dielectric material different than the second dielectric material. Apparatus might include such memory array structures.
-
公开(公告)号:US20230395672A1
公开(公告)日:2023-12-07
申请号:US17830013
申请日:2022-06-01
Applicant: Micron Technology, Inc.
Inventor: Jae Young Ahn , Terry Hyunsik Kim , Manzar Siddik
IPC: H01L29/423 , H01L29/51 , H01L27/11582
CPC classification number: H01L29/4234 , H01L29/513 , H01L29/518 , H01L27/11582
Abstract: A variety of applications can include memory devices having memory cells, where each memory cell can have an engineered tunnel region between a channel structure of the memory cell and a charge storage region of the memory cell. The engineered tunnel region can be directed to improved read, program, and retention operations of the memory region. In various embodiments, the engineered tunnel region can have multiple dielectric regions with a dielectric constant modulation by inserting material having a dielectric constant that is low relative to silicon nitride and material having a dielectric constant that is high relative to silicon nitride. In various embodiments, the engineered tunnel region of a memory cell can have multiple dielectric regions with material having deep traps near the charge storage region of the memory cell. Other engineered tunnel regions are disclosed.
-