DIELECTRIC ENGINEERED TUNNEL REGION IN MEMORY CELLS

    公开(公告)号:US20230395672A1

    公开(公告)日:2023-12-07

    申请号:US17830013

    申请日:2022-06-01

    CPC classification number: H01L29/4234 H01L29/513 H01L29/518 H01L27/11582

    Abstract: A variety of applications can include memory devices having memory cells, where each memory cell can have an engineered tunnel region between a channel structure of the memory cell and a charge storage region of the memory cell. The engineered tunnel region can be directed to improved read, program, and retention operations of the memory region. In various embodiments, the engineered tunnel region can have multiple dielectric regions with a dielectric constant modulation by inserting material having a dielectric constant that is low relative to silicon nitride and material having a dielectric constant that is high relative to silicon nitride. In various embodiments, the engineered tunnel region of a memory cell can have multiple dielectric regions with material having deep traps near the charge storage region of the memory cell. Other engineered tunnel regions are disclosed.

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