公开(公告)号：US20200064729A1

公开(公告)日：2020-02-27

申请号：US16535183

申请日：2018-02-09

申请人： Mitsui Chemicals, Inc.

发明人： Kazuo KOHMURA ,  Yosuke ONO ,  Atsushi OKUBO ,  Daiki TANEICHI ,  Hisako ISHIKAWA ,  Tsuneaki BIYAJIMA

IPC分类号： G03F1/64 ,  H01L21/027 ,  G03F7/20

摘要： A pellicle for EUV exposure that has a high transmittance to EUV light, causes little outgassing, and is not much contaminated, and a method for manufacturing the same are provided. A pellicle (100) includes a pellicle film (101); a support frame (103); and a first adhesive layer (109) provided at an end of the support frame, the end being opposite to an end on which the pellicle film is extended. The pellicle further includes an inorganic layer (111) on a side surface of the first adhesive layer, the side surface extending in a direction crossing a surface of the pellicle film, and the pellicle film being extended on the side surface. The inorganic layer has a mass absorption coefficient (μm) in the range of 5×103 cm2/g to 2×105 cm2/g.

公开(公告)号：US20180046071A1

公开(公告)日：2018-02-15

申请号：US15794420

申请日：2017-10-26

申请人： MITSUI CHEMICALS, INC. ,  TAZMO CO., LTD.

发明人： Kazuo KOHMURA ,  Daiki TANEICHI ,  Yosuke ONO ,  Hisako ISHIKAWA ,  Tsuneaki BIYAJIMA ,  Yasuyuki SATO ,  Toshiaki HIROTA

IPC分类号： G03F1/24 ,  G03F1/54 ,  C09J7/02 ,  G03F1/80 ,  G03F1/64 ,  G03F1/60

CPC分类号： G03F1/24 ,  B23K26/0006 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/52 ,  B23K2103/56 ,  C09J7/38 ,  G03F1/54 ,  G03F1/60 ,  G03F1/62 ,  G03F1/64 ,  G03F1/76 ,  G03F1/80 ,  G03F1/82

摘要： A method for producing a pellicle according to the one embodiment of the present invention produces a pellicle including a pellicle film and a pellicle frame supporting an outer peripheral portion of the pellicle film. The method includes forming the pellicle film on a substrate, and bonding a pressure-sensitive adhesive sheet, that is elastic and has a pressure-sensitive adhesive force thereof decreased upon receipt of external stimulation, to each of two surfaces of the substrate; making a notch inside a part of the substrate, the part having the pressure-sensitive adhesive sheets bonded thereto; separating a substrate outer peripheral portion outer to the notch of the substrate, in a state where the pressure-sensitive adhesive sheets are bonded to the substrate, to form a pellicle frame; and stimulating the pressure-sensitive adhesive sheets to peel off the pressure-sensitive adhesive sheets.

公开(公告)号：US20180239242A1

公开(公告)日：2018-08-23

申请号：US15753211

申请日：2016-08-15

申请人： MITSUI CHEMICALS, INC.

发明人： Kazuo KOHMURA ,  Takashi KOZEKI ,  Daiki TANEICHI ,  Shintaro MAEKAWA ,  Yosuke ONO ,  Tsuneaki BIYAJIMA

IPC分类号： G03F1/64 ,  B32B15/08

CPC分类号： G03F1/64 ,  B32B15/08 ,  B32B2311/24 ,  B32B2379/08 ,  C25D11/22

摘要： The purpose of the present invention is to provide: a pellicle frame which is not susceptible to deterioration even if irradiated with short-wavelength light such as excimer light, and which is not susceptible to generation of an outgas or foreign substance; and a pellicle which uses this pellicle frame. In order to achieve the above-described purpose, this pellicle frame for supporting the outer periphery of a pellicle film is configured to comprise a frame and a film that is formed on the surface of the frame and contains a polyimide resin.

公开(公告)号：US20170184957A1

公开(公告)日：2017-06-29

申请号：US15454631

申请日：2017-03-09

申请人： MITSUI CHEMICALS, INC.

发明人： Kazuo KOHMURA ,  Daiki TANEICHI ,  Takashi KOZEKI ,  Yosuke ONO ,  Hisako ISHIKAWA ,  Tsuneaki BIYAJIMA ,  Atsushi OKUBO ,  Yasuyuki SATO ,  Toshiaki HIROTA

IPC分类号： G03F1/64 ,  G03F7/20

摘要： Provided are a pellicle for extreme ultraviolet light lithography, a method for producing the same, and an exposure method. A pellicle according to the present invention includes a first frame having a pellicle film located thereon; a second frame supporting the first frame; a through-hole running through the first frame; and a filter covering the through-hole on the side of a surface of the first frame on which the pellicle film is located. The through-hole may run through the pellicle film; and the filter may be located on the pellicle film. The filter may be located, adjacent to the pellicle film, on the first frame.

公开(公告)号：US20210024791A1

公开(公告)日：2021-01-28

申请号：US16982624

申请日：2019-03-27

申请人： MITSUI CHEMICALS, INC.

发明人： Tsuneaki BIYAJIMA ,  Daiki TANEICHI

IPC分类号： C09J153/02 ,  G03F1/64 ,  C09J123/02

摘要： The present invention provides a mask adhesive that plastically deforms easily, no adhesive residue remains after peeling from the mask, ease of handling is excellent, and haze on a pellicle film is unlikely to be increased. A mask adhesive resolving this problem contains a thermoplastic elastomer (A) for which the temperature at which the loss tangent measured at a frequency of 1 Hz is at a maximum value is −20 to 30° C., a tackifier resin (B), and a process oil (C). The total of the proportion (% CP) of paraffin carbon and the proportion (% CN) of naphthene carbon in the process oil (C) is 50% or more. The temperature of the mask adhesive at which the loss tangent measured at a frequency of 1 Hz is at a maximum value is −10 to 30° C., and the sulfur content of the mask adhesive is 300 μg/g or less.

公开(公告)号：US20170285461A1

公开(公告)日：2017-10-05

申请号：US15629085

申请日：2017-06-21

申请人： MITSUI CHEMICALS, INC.

发明人： Atsushi OKUBO ,  Tsuneaki BIYAJIMA ,  Yosuke ONO ,  Kazuo KOHMURA ,  Yasuhisa FUJII ,  Nobuko MATSUMOTO

IPC分类号： G03F1/64 ,  G03F1/66 ,  G03F7/20

CPC分类号： G03F1/64 ,  G03F1/62 ,  G03F1/66 ,  G03F7/2004 ,  G03F7/70983

摘要： A pellicle is contaminated with dust or the like for various reasons during the production thereof. Especially, there is a problem that the risk that the dust or the like is attached is high during trimming or various other processes performed on a pellicle film. The present invention provides a method for producing a pellicle for EUV that decreases the attachment of dust or the like. A method for producing a pellicle includes forming a pellicle film on a substrate; trimming the substrate; and removing at least a part of the substrate after trimming the substrate. Before the part of the substrate is removed, at least particles attached to a surface of the pellicle film are removed.

公开(公告)号：US20170184956A1

公开(公告)日：2017-06-29

申请号：US15454555

申请日：2017-03-09

申请人： MITSUI CHEMICALS, INC.

发明人： Kazuo KOHMURA ,  Daiki TANEICHI ,  Yosuke ONO ,  Hisako ISHIKAWA ,  Tsuneaki BIYAJIMA ,  Atsushi OKUBO ,  Yasuyuki SATO ,  Toshiaki HIROTA

IPC分类号： G03F1/64 ,  G03F7/20

CPC分类号： G03F1/64 ,  G03F1/62 ,  G03F1/68 ,  G03F7/2008 ,  H01L21/027

摘要： Provided are a pellicle for extreme ultraviolet light lithography, a production method thereof, and an exposure method. A pellicle according to the present invention includes a first frame having a pellicle film located thereon; a second frame including a thick portion including a first surface carrying a surface of the first frame opposite to a surface on which the pellicle film is located, and also including a second surface connected with the first surface and carrying a side surface of the first frame, the second frame enclosing the pellicle film and the first frame; a through-hole provided in the thick portion of the second frame; and a filter located on an outer side surface of the second frame and covering the through-hole, the outer side surface crossing the surface of the first frame on which the pellicle film is located.