公开(公告)号：US20170248415A1

公开(公告)日：2017-08-31

申请号：US15433234

申请日：2017-02-15

Applicant: MITUTOYO CORPORATION

Inventor： Sadayuki MATSUMIYA ,  Shuichi KAMIYAMA ,  Hidemitsu ASANO ,  Hiroshi SAKAI ,  Hiromu MAIE ,  Yoshihiko TAKAHASHI ,  Masanori ARAI ,  Ken MOTOHASHI

IPC: G01B11/30 ,  G01B5/012 ,  G01B9/02

CPC classification number: G01B11/30 ,  G01B5/003 ,  G01B5/012 ,  G01B5/061 ,  G01B5/12 ,  G01B9/02 ,  G01B9/02041 ,  G01B11/0608 ,  G01B11/12 ,  G01B11/2441 ,  G01B11/303

Abstract: A surface texture measuring apparatus includes an X axis displacement mechanism and a Y axis displacement mechanism displacing a measurable object having an interior wall along an XY plane; a measurement sensor measuring a surface texture of the interior wall without contact; a Z axis displacement mechanism displacing the measurement sensor in a Z axis direction orthogonal to the XY plane and bringing the measurement sensor to face the interior wall; a W axis displacement mechanism displacing the measurement sensor facing the interior wall in a normal direction of the interior wall; and a θ axis displacement mechanism displacing the measurement sensor facing the interior wall along the interior wall.