公开(公告)号：US20070020125A1

公开(公告)日：2007-01-25

申请号：US10569712

申请日：2004-09-02

申请人： Makio Oyama ,  Hiroaki Atsushi ,  Manabu Saitoh

发明人： Makio Oyama ,  Hiroaki Atsushi ,  Manabu Saitoh

IPC分类号： F04B35/04

CPC分类号： F16C3/04 ,  B60T8/4022 ,  B60T8/4031 ,  F04B1/0413 ,  F04B9/042 ,  F16C19/50 ,  F16C33/58 ,  H02K7/003 ,  H02K7/083 ,  H02K7/14

摘要： In the present invention, without forming a rotational shaft (30) per se in an eccentric manner, the eccentric structure is provided to the whole structure including a ball bearing (50). Accordingly, in place of cutting a side of the rotational shaft (30), the eccentric ball bearing (50) is joined to a shaft portion of the straight rotational shaft (30) so as to obtain an eccentric portion. That is, the eccentric portion is constituted of the shaft portion which has an axis aligned with an axis of the rotational shaft (30) and the eccentric ball bearing (50) which is joined to the shaft portion. As the eccentric ball bearing, it is optimum to adopt a mode in which an inner side thereof having a smaller diameter is formed in an eccentric manner. The eccentric ball bearing (50) is constituted of an inner lace (52) which is arranged eccentric with respect to the axis of the rotational shaft (30), an outer lace (54) which surrounds an outside of the inner lace (52) and balls (55) which are supported between the outer lace (54) and the inner lace (52).

摘要翻译： 在本发明中，不偏心地形成旋转轴（30）本身的偏心结构设置在包括滚珠轴承（50）的整个结构中。 因此，代替切断旋转轴（30）的一侧，将偏心球轴承（50）与直旋转轴（30）的轴部接合，得到偏心部。 也就是说，偏心部分由轴部分组成，其轴线与旋转轴（30）的轴线和与轴部分接合的偏心球轴承（50）对齐。 作为偏心球轴承，采用以偏心方式形成具有较小直径的内侧的方式是最佳的。 所述偏心球轴承（50）由相对于所述旋转轴（30）的轴线偏心配置的内花边（52）构成，围绕所述内花边（52）的外侧的外花边（54） 和支撑在外花边（54）和内花边（52）之间的球（55）。

公开(公告)号：US20050035290A1

公开(公告)日：2005-02-17

申请号：US10916007

申请日：2004-08-11

申请人： Manabu Saitoh

发明人： Manabu Saitoh

IPC分类号： G03F7/207 ,  H01J37/153 ,  H01J37/21 ,  H01J37/22 ,  H01J37/256 ,  H01J37/28 ,  H01L21/027

CPC分类号： H01J37/21 ,  H01J37/153 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/216

摘要： Automatic methods for focus and astigmatism corrections in a charged-particle beam instrument find an amount of excitation of the objective lens that provides the position of a circle of least confusion and can perform accurate automatic corrections of focus and astigmatism. The edge components of the original image along the X- and Y-directions are extracted separately, using respective filters. Noise reduction and normalization of numerical values are performed for each of the resulting two sets of data. Two-dimensional matrices of numerical values indicating the edge components in the X- and Y-directions, respectively, are found independently. The sums of the elements of the matrices are taken as focus evaluation values of the original image in the X- and Y-directions, respectively.

摘要翻译： 带电粒子束仪器中的聚焦和散光校正的自动方法可以找到提供最小混乱圈位置的物镜的激发量，并可以对焦点和像散进行精确的自动校正。 使用相应的滤光片分别提取沿X和Y方向的原始图像的边缘分量。 对于所得到的两组数据，对数值进行降噪和归一化。 独立地找到分别表示X方向和Y方向上的边缘分量的数值的二维矩阵。 将矩阵的元素的和分别作为原始图像在X方向和Y方向上的焦点评估值。

公开(公告)号：US20130085623A1

公开(公告)日：2013-04-04

申请号：US13567190

申请日：2012-08-06

申请人： Naotoku Izumisawa ,  Yohichi Miwa ,  Manabu Saitoh

发明人： Naotoku Izumisawa ,  Yohichi Miwa ,  Manabu Saitoh

IPC分类号： G06F1/26

CPC分类号： G06F1/3203 ,  G06F1/263 ,  H02J1/102 ,  H02J9/062 ,  H02M2001/0048 ,  Y02B70/1491

摘要： A power supply device includes two or more power supply units connected in parallel with each other, each of which includes a rectifier for converting DC power from a DC power source or AC power from an AC power source into predetermined rated DC power. The device further includes a sensor for detecting a load current rate of each of the power supply units, and a controller. The controller controls the operation of the power supply units to reduce the total amount of power consumption per power supply unit calculated based on the rated DC power and the efficiency of each of the power supply units corresponding to the load current rate. As a result, the power consumption of the power supply device can be reduced more appropriately according to the load state and the efficiency of the power supply units.

摘要翻译： 电源装置包括彼此并联连接的两个或更多个电源单元，每个电源单元包括用于将来自直流电源的直流电力或交流电源的交流电力转换为预定额定直流电力的整流器。 该装置还包括用于检测每个电源单元的负载电流速率的传感器和控制器。 控制器控制电源单元的操作，以减少基于额定直流功率计算的每个电源单元的功耗总量和与负载电流速率对应的每个电源单元的效率。 结果，可以根据负载状态和电力供应单元的效率，更适当地降低供电装置的功耗。

公开(公告)号：US20050122088A1

公开(公告)日：2005-06-09

申请号：US10709519

申请日：2004-05-11

申请人： Manabu Saitoh

发明人： Manabu Saitoh

IPC分类号： H02M3/155 ,  G05F1/40 ,  H02M1/36 ,  H02M3/158

CPC分类号： H02M1/36 ,  H02M3/1588 ,  H02M2001/322 ,  Y02B70/1466

摘要： A power supply apparatus is provided, which reduces undershoot of a DC source voltage when a power supply interrupt occurs. The power supply apparatus supplies a DC voltage to an output of the power supply apparatus, an output capacitor is provided between the power supply output and ground, and a resistor controls the discharge time constant when the supply of source voltage is temporarily halted. The resistor is coupled in series with a switch, forming a discharge path to ground for the output capacitor. A discharge path switch disables the discharge path when source voltage is supplied. The discharge path is enabled in the event of a power supply interrupt and disabled during normal power supply operation.

摘要翻译： 提供电源装置，当电源中断发生时，可减少直流电源电压的下冲。 电源装置向电源装置的输出提供直流电压，在电源输出与地之间设置输出电容器，电源电压暂时停止时，电阻控制放电时间常数。 电阻器与开关串联耦合，形成用于输出电容器的地的放电路径。 当提供电源电压时，放电路径开关禁止放电路径。 在电源中断的情况下，放电路径被使能，并且在正常供电操作期间被禁用。

公开(公告)号：US07141958B2

公开(公告)日：2006-11-28

申请号：US10709519

申请日：2004-05-11

申请人： Manabu Saitoh

发明人： Manabu Saitoh

IPC分类号： G05F5/00 ,  G05F1/652

CPC分类号： H02M1/36 ,  H02M3/1588 ,  H02M2001/322 ,  Y02B70/1466

摘要： A power supply apparatus is provided, which reduces undershoot of a DC source voltage when a power supply interrupt occurs. The power supply apparatus supplies a DC voltage to an output of the power supply apparatus, an output capacitor is provided between the power supply output and ground, and a resistor controls the discharge time constant when the supply of source voltage is temporarily halted. The resistor is coupled in series with a switch, forming a discharge path to ground for the output capacitor. A discharge path switch disables the discharge path when source voltage is supplied. The discharge path is enabled in the event of a power supply interrupt and disabled during normal power supply operation.

摘要翻译： 提供电源装置，当电源中断发生时，可减少直流电源电压的下冲。 电源装置向电源装置的输出提供直流电压，在电源输出与地之间设置输出电容器，电源电压暂时停止时，电阻控制放电时间常数。 电阻器与开关串联耦合，形成用于输出电容器的接地放电路径。 当提供电源电压时，放电路径开关禁止放电路径。 在电源中断的情况下，放电路径被使能，并且在正常供电操作期间被禁用。

公开(公告)号：US07026614B2

公开(公告)日：2006-04-11

申请号：US10916007

申请日：2004-08-11

申请人： Manabu Saitoh

发明人： Manabu Saitoh

IPC分类号： G01N23/225 ,  H01J37/153 ,  H01J37/28

CPC分类号： H01J37/21 ,  H01J37/153 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/216

摘要： Automatic methods for focus and astigmatism corrections in a charged-particle beam instrument find an amount of excitation of the objective lens that provides the position of a circle of least confusion and can perform accurate automatic corrections of focus and astigmatism. The edge components of the original image along the X- and Y-directions are extracted separately, using respective filters. Noise reduction and normalization of numerical values are performed for each of the resulting two sets of data. Two-dimensional matrices of numerical values indicating the edge components in the X- and Y-directions, respectively, are found independently. The sums of the elements of the matrices are taken as focus evaluation values of the original image in the X- and Y-directions, respectively.

摘要翻译： 带电粒子束仪器中的聚焦和散光校正的自动方法可以找到提供最小混乱圈位置的物镜的激发量，并可以对焦点和像散进行精确的自动校正。 使用相应的滤光片分别提取沿X和Y方向的原始图像的边缘分量。 对于所得到的两组数据，对数值进行降噪和归一化。 独立地找到分别表示X方向和Y方向上的边缘分量的数值的二维矩阵。 将矩阵的元素的和分别作为原始图像在X方向和Y方向上的焦点评估值。

公开(公告)号：US20050122089A1

公开(公告)日：2005-06-09

申请号：US10709520

申请日：2004-05-11

申请人： Manabu Saitoh

发明人： Manabu Saitoh

IPC分类号： H02M3/155 ,  G05F1/40 ,  H02M1/36 ,  H02M3/158

CPC分类号： H02M1/36 ,  H02M3/1588 ,  H02M2001/322 ,  Y02B70/1466

摘要： A power supply apparatus is provided, which reduces undershoot of a DC source voltage when a power supply interrupt occurs. The power supply apparatus supplies a DC voltage to an output of the power supply apparatus, an output capacitor is provided between the power supply output and ground, and a resistor controls the discharge time constant when the supply of source voltage is temporarily halted. The resistor is coupled in series with a switch, forming a discharge path to ground for the output capacitor. A discharge path switch disables the discharge path when source voltage is supplied. The discharge path is enabled in the event of a power supply interrupt and disabled during normal power supply operation.