PCM switch and method of making the same

    公开(公告)号:US10700270B2

    公开(公告)日:2020-06-30

    申请号:US15188754

    申请日:2016-06-21

    IPC分类号: H01H11/00 H01L45/00 G11C13/00

    摘要: One example includes a method for making a switch. The method includes forming an insulating layer over a substrate. The method also includes forming a resistive heating material over the insulating layer. The method also includes depositing a thermally conductive electrically insulating barrier layer over the heating material. The method also includes forming a phase-change material (PCM) component over the barrier layer spaced apart and proximal to the resistive heating material. The method also includes forming a quench layer proximal to at least one of the resistive heating material and the PCM component. The method further includes forming conductive lines from ends of the PCM component and control lines from ends of the resistive heating material.