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1.发明授权Non-planarized, self-aligned, non-volatile phase-change memory array and method of formation 有权非平面化，自对准，非易失性相变存储器阵列和形成方法公开(公告)号：US07682866B2
公开(公告)日：2010-03-23
申请号：US11335329
申请日：2006-01-19
申请人： Mark W. Hart , Christie R. K. Marrian , Gary M. McClelland , Charles T. Rettner , Hemantha K. Wickramasinghe
发明人： Mark W. Hart , Christie R. K. Marrian , Gary M. McClelland , Charles T. Rettner , Hemantha K. Wickramasinghe
CPC分类号： H01L27/2409 , H01L27/2472 , H01L45/06 , H01L45/1233 , H01L45/126 , H01L45/144 , H01L45/1675
摘要： A method for fabrication and a structure of a self-aligned (crosspoint) memory device comprises lines (wires) in a first direction and in a second direction. The wires in the first direction are formed using a hard mask material that is resistant to the pre-selected etch processes used for creation of the lines in both the first and the second direction. Consequently, the hard mask material for the lines in the first direction form part of the memory stack.
摘要翻译： 用于制造的方法和自对准（交叉点）存储器件的结构包括在第一方向和第二方向上的线（线）。 使用硬掩模材料形成第一方向上的导线，该硬掩模材料抵抗用于在第一和第二方向上产生线的预选蚀刻工艺。 因此，用于沿第一方向的线的硬掩模材料形成存储器堆叠的一部分。
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公开(公告)号：US07009694B2
公开(公告)日：2006-03-07
申请号：US10856547
申请日：2004-05-28
申请人： Mark W. Hart , Chung H. Lam , Christie R. K. Marrian , Gary M. McClelland , Simone Raoux , Charles T. Rettner , Hemantha K. Wickramasinghe
发明人： Mark W. Hart , Chung H. Lam , Christie R. K. Marrian , Gary M. McClelland , Simone Raoux , Charles T. Rettner , Hemantha K. Wickramasinghe
IPC分类号： G11C11/00
CPC分类号： H01L27/24 , G11C13/0004 , G11C13/0069 , G11C2013/008 , G11C2213/72 , H01L27/2463 , H01L45/06 , H01L45/124 , H01L45/1286 , H01L45/144 , H01L45/1666
摘要： A method and structure for a memory cell comprising a phase change material; a heating element in thermal contact with the phase change material, wherein the heating element is adapted to induce a phase change in the phase change material; and electrical lines configured to pass current through the heating element, wherein the phase change material and the heating element are arranged in a configuration other than being electrically connected in series. The memory cell further comprises a sensing element in thermal contact with the phase change material, wherein the sensing element is adapted to detect a change in at least one physical property of the phase change material, wherein the sensing element is adapted to detect a change in a thermal conductivity of the phase change material.
摘要翻译： 一种包括相变材料的存储单元的方法和结构; 与所述相变材料热接触的加热元件，其中所述加热元件适于引起所述相变材料的相变; 以及配置为使电流通过所述加热元件的电线，其中所述相变材料和所述加热元件被布置成不是串联电连接的构造。 存储单元还包括与相变材料热接触的感测元件，其中感测元件适于检测相变材料的至少一个物理特性的变化，其中感测元件适于检测相变材料的变化 相变材料的导热性。
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3.发明授权Non-planarized, self-aligned, non-volatile phase-change memory array and method of formation 有权非平面化，自对准，非易失性相变存储器阵列和形成方法公开(公告)号：US07038231B2
公开(公告)日：2006-05-02
申请号：US10835814
申请日：2004-04-30
申请人： Mark W. Hart , Christie R. K. Marrian , Gary M. McClelland , Charles T. Rettner , Hermantha K. Wickramasinghe
发明人： Mark W. Hart , Christie R. K. Marrian , Gary M. McClelland , Charles T. Rettner , Hermantha K. Wickramasinghe
IPC分类号： H01L47/00
CPC分类号： H01L27/2409 , H01L27/2472 , H01L45/06 , H01L45/1233 , H01L45/126 , H01L45/144 , H01L45/1675
摘要： A method for fabrication and a structure of a self-aligned (crosspoint) memory device comprises lines (wires) in a first direction and in a second direction. The wires in the first direction are formed using a hard mask material that is resistant to the pre-selected etch processes used for creation of the lines in both the first and the second direction. Consequently, the hard mask material for the lines in the first direction form part of the memory stack.
摘要翻译： 用于制造的方法和自对准（交叉点）存储器件的结构包括在第一方向和第二方向上的线（线）。 使用硬掩模材料形成第一方向上的导线，该硬掩模材料抵抗用于在第一和第二方向上产生线的预选蚀刻工艺。 因此，用于沿第一方向的线的硬掩模材料形成存储器堆叠的一部分。
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4.发明授权
公开(公告)号：US6125687A
公开(公告)日：2000-10-03
申请号：US137353
申请日：1998-08-20
摘要： An apparatus for measuring material outgassed from an object. The apparatus has a chamber containing the object, a condensed material detector (e.g. a quartz microbalance), a heater for heating the object and chamber, and a cooler for cooling the detector. The chamber is sealed from the ambient atmosphere and the detector is located within the chamber. The chamber may contain a vacuum or a gas at ambient atmospheric pressure. Material outgassed from the object is distributed throughout the chamber by vapor transport and is incident upon the detector, where it condenses. Since the detector is the only cooled surface in contact with the vapors, it collects nearly all the outgassed material. This provides high sensitivity to outgassing. The chamber may also include a mechanical stirring device for aiding vapor transport, or may be oriented so that a thermal convection current is established. Preferably, the chamber includes a snout for thermally isolating the detector and chamber so that a steep temperature gradient exists close to the detector surface. Alternatively, the detector has a coating with a high affinity for outgassed materials of interest. The chamber, detector, and object are at nearly the same temperature and the outgassed materials preferentially condense on the detector due to the high affinity of the coating for the outgassed materials.
摘要翻译： 一种用于测量从物体排出的物质的装置。 该装置具有容纳物体的室，冷凝材料检测器（例如石英微量天平），用于加热物体和室的加热器和用于冷却检测器的冷却器。 该室与环境大气密封，检测器位于室内。 室可以在环境大气压下容纳真空或气体。 从物体排出的物质通过蒸气传输分布在整个室中，并入射到检测器上，在那里冷凝。 由于检测器是与蒸气接触的唯一冷却表面，因此几乎可以收集所有脱气的物质。 这为除气提供了高灵敏度。 腔室还可以包括用于辅助蒸汽输送的机械搅拌装置，或者可以被定向成使得形成热对流。 优选地，腔室包括用于热隔离检测器和腔室的鼻孔，使得靠近检测器表面存在陡峭的温度梯度。 或者，检测器具有对所关注出气的材料具有高亲和力的涂层。 室，检测器和物体处于几乎相同的温度，由于涂层对脱气材料的高亲合力，脱气材料优先冷凝在检测器上。
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公开(公告)号：US08494674B2
公开(公告)日：2013-07-23
申请号：US13217181
申请日：2011-08-24
申请人： Gary M. McClelland
发明人： Gary M. McClelland
IPC分类号： G06F7/00
CPC分类号： G11B15/6895 , B65G1/1371 , G11B15/66 , G11B15/674 , G11B15/6835 , Y10S901/01
摘要： In some embodiments, a system includes a plurality of tape reels positioned on a lower surface, a tape drive for reading data from a tape on one of the plurality of tape reels, and at least one mobile robot configured for selectively retrieving at least one of the plurality of tape reels and transporting the at least one retrieved tape reel to the tape drive.
摘要翻译： 在一些实施例中，系统包括位于下表面上的多个磁带盘，用于从多个磁带卷轴之一上的磁带读取数据的磁带驱动器，以及至少一个移动机器人，被配置为选择性地检索至少一个 多个磁带盘，并将至少一个检索到的磁带卷盘传送到磁带驱动器。
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公开(公告)号：US20130054007A1
公开(公告)日：2013-02-28
申请号：US13558232
申请日：2012-07-25
申请人： Gary M. McClelland
发明人： Gary M. McClelland
IPC分类号： G06F7/00
CPC分类号： G11B15/6895 , B65G1/1371 , G11B15/66 , G11B15/674 , G11B15/6835 , Y10S901/01
摘要： In some embodiments, a system includes a plurality of tape reels positioned on a lower surface; and a tape drive for reading data from a tape on one of the plurality of tape reels. At least one mobile robot is configured for: selectively retrieving at least one of the plurality of tape reels; and transporting the at least one retrieved tape reel to the tape drive. The at least one mobile robot moves unconstrained along an upper surface that overlies the plurality of tape reels. A controller directs movement of the at least one mobile robot.
摘要翻译： 在一些实施例中，系统包括位于下表面上的多个磁带盘; 以及用于从所述多个磁带卷轴中的一个上的磁带读取数据的磁带驱动器。 至少一个移动机器人被配置用于：选择性地检索所述多个磁带盘中的至少一个; 以及将所述至少一个检索到的带卷轴传送到所述带驱动器。 所述至少一个移动机器人沿着覆盖所述多个磁带卷轴的上表面移动而不受约束。 控制器引导至少一个移动机器人的移动。
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公开(公告)号：US08773810B2
公开(公告)日：2014-07-08
申请号：US13010731
申请日：2011-01-20
CPC分类号： G11B5/584 , G11B5/00826
摘要： In one general embodiment, a system includes a module having multiple transducers; and a sizing mechanism for actively applying a force to at least one lateral side of the module for selectively compressing the module, thereby adjusting a pitch between the transducers, wherein the lateral side of the module intersects an axis of the module oriented parallel to the direction of the force. Additional systems and methods are also presented.
摘要翻译： 在一个一般实施例中，系统包括具有多个换能器的模块; 以及用于主动地将力施加到模块的至少一个横向侧的尺寸调节机构，用于选择性地压缩模块，从而调节换能器之间的间距，其中模块的侧面与模块的轴线相交平行于方向 的力量。 还介绍了其他系统和方法。
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公开(公告)号：US07862989B2
公开(公告)日：2011-01-04
申请号：US12228010
申请日：2008-08-07
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , H01L21/76807 , H01L21/76817 , H01L2924/0002 , Y10S425/81 , Y10T428/16 , Y10T428/24851 , Y10T428/31504 , H01L2924/00
摘要： The process of producing a dual damascene structure used for the interconnect architecture of semiconductor chips. More specifically the use of imprint lithography to fabricate dual damascene structures in a dielectric and the fabrication of dual damascene structured molds.
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9.发明申请Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning 有权使用光刻印刷法制造双镶嵌结构的方法，用于制造用于双镶嵌结构的压印光刻模具的方法，用于可压印电介质的材料和用于双重镶嵌图案中的光刻印刷光刻设备公开(公告)号：US20080303160A1
公开(公告)日：2008-12-11
申请号：US12222000
申请日：2008-08-07
IPC分类号： H01L23/52
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , H01L21/76807 , H01L21/76817 , H01L2924/0002 , Y10S425/81 , Y10T428/16 , Y10T428/24851 , Y10T428/31504 , H01L2924/00
摘要： The process of producing a dual damascene structure used for the interconnect architecture of semiconductor chips. More specifically the use of imprint lithography to fabricate dual damascene structures in a dielectric and the fabrication of dual damascene structured molds.
摘要翻译： 制造用于半导体芯片的互连架构的双镶嵌结构的过程。 更具体地说，使用压印光刻法在电介质中制造双镶嵌结构以及制造双镶嵌结构的模具。
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公开(公告)号：US20120188665A1
公开(公告)日：2012-07-26
申请号：US13010731
申请日：2011-01-20
CPC分类号： G11B5/584 , G11B5/00826
摘要： In one general embodiment, a system includes a module having multiple transducers; and a sizing mechanism for actively applying a force to at least one lateral side of the module for selectively compressing the module, thereby adjusting a pitch between the transducers, wherein the lateral side of the module intersects an axis of the module oriented parallel to the direction of the force. Additional systems and methods are also presented.
摘要翻译： 在一个一般实施例中，系统包括具有多个换能器的模块; 以及用于主动地将力施加到模块的至少一个横向侧的尺寸调节机构，用于选择性地压缩模块，从而调节换能器之间的间距，其中模块的侧面与模块的轴线相交平行于方向 的力量。 还介绍了其他系统和方法。
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