Spectroscopy Method and Spectroscope
    1.
    发明申请
    Spectroscopy Method and Spectroscope 失效
    光谱法和光谱仪

    公开(公告)号:US20090122317A1

    公开(公告)日:2009-05-14

    申请号:US11991542

    申请日:2006-09-06

    IPC分类号: G01N21/31 G02B6/26

    摘要: To achieve an apparatus capable of measuring a light absorption coefficient f a sample with high sensitivity. A ring down spectroscope uses a wavelength-variable femtosecond soliton pulse light source 1. Pulse light is input to a loop optical fiber 6 through a first light waveguide 4 and a wavelength selective switch 5. Ring down pulse light is input to a homodyne detector through the wavelength selective switch 5. On the other hand, pulse light propagating in the first light waveguide 4 is split and input to light waveguides constituting a second light waveguide 20 through an optical directional coupler 8 and a first optical switching element 12. The pulse light propagating in the second light waveguide 20 is input to the homodyne detector as reference light and used for synchronous detection. The plural light waveguides constituting the second light waveguide 20 differ in optical length in accordance with the length of the optical fiber 6, and can slightly change the optical length.

    摘要翻译: 实现能够以高灵敏度测量样品的光吸收系数f的装置。 环形光谱仪使用波长可变飞秒激光脉冲光源1.脉冲光通过第一光波导4和波长选择开关5输入到环形光纤6中。环形脉冲光通过 波长选择开关5.另一方面,在第一光波导4中传播的脉冲光通过光学定向耦合器8和第一光开关元件12被分离并输入到构成第二光波导20的光波导上。脉冲光 在第二光波导20中传播的信号被输入到零差检测器作为参考光,并用于同步检测。 构成第二光波导路20的多个光波导根据光纤6的长度的光学长度不同,并且可以稍微改变光学长度。

    Spectroscopy method and spectroscope
    2.
    发明授权
    Spectroscopy method and spectroscope 有权
    光谱法和光谱仪

    公开(公告)号:US08351039B2

    公开(公告)日:2013-01-08

    申请号:US12926027

    申请日:2010-10-21

    IPC分类号: G01N21/00

    摘要: A spectroscopy method, includes guiding pulse laser light to an optical fiber, which mutually reacts with a sample to be measured of a light absorptance characteristic, outputting ring down pulse light obtained through light absorption of the sample, measuring an absorptance characteristic of the sample based on an attenuation characteristic of the ring down pulse light, and setting the pulse laser light as wide-spectrum laser light, setting the optical fiber as a strong dispersive optical fiber, and increasing a pulse width of the ring down pulse light to measure a wavelength absorptance characteristic based on a ring down attenuation constant of a pulse train with respect to a time sequence corresponding to a wavelength.

    摘要翻译: 光谱学方法包括将脉冲激光引导到与待测样品相互反应的光吸收特性的光纤,输出通过样品的光吸收获得的环形脉冲光,测量样品的吸收特性 根据环形脉冲光的衰减特性,将脉冲激光设定为宽光谱激光,将光纤设为强分散光纤,增加环形脉冲光的脉冲宽度,测定波长 基于相对于对应于波长的时间序列的脉冲序列的衰减衰减常数的吸收特性。

    Spectroscopy method and spectroscope
    3.
    发明申请
    Spectroscopy method and spectroscope 有权
    光谱法和光谱仪

    公开(公告)号:US20110063609A1

    公开(公告)日:2011-03-17

    申请号:US12926027

    申请日:2010-10-21

    IPC分类号: G01J3/42 G01N21/25

    摘要: A spectroscopy method, includes guiding pulse laser light to an optical fiber, which mutually reacts with a sample to be measured of a light absorptance characteristic, outputting ring down pulse light obtained through light absorption of the sample, measuring an absorptance characteristic of the sample based on an attenuation characteristic of the ring down pulse light, and setting the pulse laser light as wide-spectrum laser light, setting the optical fiber as a strong dispersive optical fiber, and increasing a pulse width of the ring down pulse light to measure a wavelength absorptance characteristic based on a ring down attenuation constant of a pulse train with respect to a time sequence corresponding to a wavelength.

    摘要翻译: 光谱学方法包括将脉冲激光引导到与待测样品相互反应的光吸收特性的光纤,输出通过样品的光吸收获得的环形脉冲光,测量样品的吸收特性 根据环形脉冲光的衰减特性,将脉冲激光设定为宽光谱激光,将光纤设为强分散光纤,增加环形脉冲光的脉冲宽度,测定波长 基于相对于对应于波长的时间序列的脉冲序列的衰减衰减常数的吸收特性。

    Spectroscopy method and spectroscope
    4.
    发明授权
    Spectroscopy method and spectroscope 失效
    光谱法和光谱仪

    公开(公告)号:US07855788B2

    公开(公告)日:2010-12-21

    申请号:US11991542

    申请日:2006-09-06

    IPC分类号: G01B9/02 G01J3/45

    摘要: To achieve an apparatus capable of measuring a light absorption coefficient f a sample with high sensitivity. A ring down spectroscope uses a wavelength-variable femtosecond soliton pulse light source 1. Pulse light is input to a loop optical fiber 6 through a first light waveguide 4 and a wavelength selective switch 5. Ring down pulse light is input to a homodyne detector through the wavelength selective switch 5. On the other hand, pulse light propagating in the first light waveguide 4 is split and input to light waveguides constituting a second light waveguide 20 through an optical directional coupler 8 and a first optical switching element 12. The pulse light propagating in the second light waveguide 20 is input to the homodyne detector as reference light and used for synchronous detection. The plural light waveguides constituting the second light waveguide 20 differ in optical length in accordance with the length of the optical fiber 6, and can slightly change the optical length.

    摘要翻译: 实现能够以高灵敏度测量样品的光吸收系数f的装置。 环形光谱仪使用波长可变飞秒激光脉冲光源1.脉冲光通过第一光波导4和波长选择开关5输入到环形光纤6中。环形脉冲光通过 波长选择开关5.另一方面,在第一光波导4中传播的脉冲光通过光学定向耦合器8和第一光开关元件12被分离并输入到构成第二光波导20的光波导上。脉冲光 在第二光波导20中传播的信号被输入到零差检测器作为参考光,并用于同步检测。 构成第二光波导路20的多个光波导根据光纤6的长度的光学长度不同,并且可以稍微改变光学长度。

    Plasma deposition apparatus and method with controller
    5.
    发明授权
    Plasma deposition apparatus and method with controller 失效
    等离子体沉积设备及方法与控制器

    公开(公告)号:US06501082B1

    公开(公告)日:2002-12-31

    申请号:US09527562

    申请日:2000-03-16

    IPC分类号: G21K510

    摘要: A controlled plasma deposition system and method are provided including a vacuum vessel. An electron adding mass spectrometer is connected to a vacuum vessel for carrying out a gas treatment for a semi-conductor wafer. In the mass spectrometer, a gas in the vacuum vessel is incorporated, and electrons are added to the particles in the gas. Then the value of negative ions obtained by ionizing the particles, for example specific radicals, is measured. Once measured, the information is forwarded to a controller that may optimize the plasma deposition method.

    摘要翻译: 提供了包括真空容器的受控等离子体沉积系统和方法。 将电子加入质谱仪连接到用于对半导体晶片进行气体处理的真空容器。 在质谱仪中,并入真空容器中的气体,并将电子加到气体中的颗粒中。 然后测量通过电离粒子,例如特定基团获得的负离子的值。 一旦测量,信息被转发到可优化等离子体沉积方法的控制器。

    Broadband optical spectrum generating apparatus and pulsed light generating apparatus
    6.
    发明申请
    Broadband optical spectrum generating apparatus and pulsed light generating apparatus 有权
    宽带光谱发生装置和脉冲发光装置

    公开(公告)号:US20050226289A1

    公开(公告)日:2005-10-13

    申请号:US11156462

    申请日:2005-06-21

    摘要: A broadband optical spectrum generating apparatus 20 includes a ultrashort pulsed fiber laser 22 that generates pulsed light having a pulse width in the unit of picosecond to femtosecond, and broadband optical spectrum-generating optical fibers 24 that are connected with the ultrashort pulse fiber laser 22 via a lens 26 and have characteristics of normal dispersion, that is, a nonlinear coefficient of not less than 10 [W−1km−1] and a magnitude of wavelength dispersion of not greater than a value 0 [ps/km/nm] with regard to a wavelength of the pulsed light. The resulting output is super continuum that is widely broadened to a wavelength band of 1400 nm to 1750 nm and is chirped to a linear characteristic.

    摘要翻译: 宽带光谱发生装置20包括产生具有以皮秒为单位的脉冲宽度的脉冲光的超短脉冲光纤激光器22以及与超短脉冲光纤激光器22连接的宽带光谱产生光纤24,经由 透镜26具有正常色散的特性,也就是说,非线性系数不小于10 [W -1 -1]]>,并且波长色散的大小 不大于相对于脉冲光的波长的值0 [ps / km / nm]。 所得到的输出是超连续谱,其广泛地扩展到1400nm至1750nm的波长带,并被啁啾成线性特征。

    Wavelength-variable short pulse generating device and method
    7.
    发明授权
    Wavelength-variable short pulse generating device and method 失效
    波长可变短脉冲发生装置及方法

    公开(公告)号:US07346247B2

    公开(公告)日:2008-03-18

    申请号:US10523080

    申请日:2003-07-22

    IPC分类号: G02B6/00

    摘要: An apparatus and method for generating a wavelength-tunable short pulse that can generate wavelength-tunable short pulsed light in the visible-light wavelength band are provided. When ultrashort pulsed light is introduced into an optical fiber (3), a wavelength-tunable ultrashort soliton pulse is generated by a nonlinear optical effect through the soliton effect and Raman scattering. When the soliton pulse has a short duration and high peak intensity, a third harmonic having one-third of the wavelength of the soliton pulsed light is generated by a third nonlinear optical effect. This third harmonic has a short wavelength in the visible light band.

    摘要翻译: 提供一种用于产生可在可见光波长带中产生波长可调短脉冲光的波长可调短脉冲的装置和方法。 当超短脉冲光被引入到光纤(3)中时,通过孤子效应和拉曼散射,通过非线性光学效应产生波长可调的超短孤子脉冲。 当孤子脉冲具有短持续时间和高峰值强度时,具有三分之一波长的孤子脉冲光的三次谐波由第三非线性光学效应产生。 该三次谐波在可见光带中具有短波长。

    Distance measurement device and distance measurement method
    8.
    发明申请
    Distance measurement device and distance measurement method 失效
    距离测量装置和距离测量方法

    公开(公告)号:US20070024842A1

    公开(公告)日:2007-02-01

    申请号:US11384296

    申请日:2006-03-21

    IPC分类号: G01C3/08

    摘要: In a distance measurement device of the invention, a light divider separates pulsed light emitted from an ultrashort pulse fiber laser into reference light A and signal light. A scanning mirror unit irradiates an object with the signal light as a division of the pulsed light and receives scattered light B, which is reflected from the object irradiated with the signal light. An optical path length adjustment unit adjusts an optical path length of the reference light A as a division of the pulsed light. A differential detector included in an interference signal generator detects the degree of interference of the reference light A having the adjusted optical path length with the scattered light B and outputs the detected degree of interference as an interference signal. A computer specifies an adjustment value set in the optical path length adjustment unit to attain a specific optical path length maximizing the interference signal and uses the specified adjustment value to compute a distance from a reference position of the scanning mirror unit to the object. The distance measurement device of the invention thus enables high-speed and highly-accurate measurement of the object.

    摘要翻译: 在本发明的距离测量装置中,分光器将从超短脉冲光纤激光器发射的脉冲光分离成参考光A和信号光。 扫描反射镜单元用信号光照射物体作为脉冲光的分割,并且接收从被信号光照射的物体反射的散射光B. 光路长度调节单元调整参考光A的光路长度作为脉冲光的除法。 包括在干扰信号发生器中的差分检测器检测具有调整光程长度的参考光A与散射光B的干涉程度,并将检测到的干扰信号作为干扰信号输出。 计算机指定设置在光程长度调整单元中的调整值,以获得使干扰信号最大化的特定光程长度,并使用指定的调整值来计算从扫描反射镜单元的参考位置到物体的距离。 因此,本发明的距离测量装置能够高速且高精度地测量物体。

    Wavelenght-variable short pulse generating device and method
    9.
    发明申请
    Wavelenght-variable short pulse generating device and method 失效
    波长可变短脉冲发生装置及方法

    公开(公告)号:US20060051037A1

    公开(公告)日:2006-03-09

    申请号:US10523080

    申请日:2003-07-22

    IPC分类号: G02B6/26

    摘要: An apparatus and method for generating a wavelength-tunable short pulse that can generate wavelength-tunable short pulsed light in the visible-light wavelength band are provided. When ultrashort pulsed light is introduced into an optical fiber (3), a wavelength-tunable ultrashort soliton pulse is generated by a nonlinear optical effect through the soliton effect and Raman scattering. When the soliton pulse has a short duration and high peak intensity, a third harmonic having one-third of the wavelength of the soliton pulsed light is generated by a third nonlinear optical effect. This third harmonic has a short wavelength in the visible light band.

    摘要翻译: 提供一种用于产生可在可见光波长带中产生波长可调短脉冲光的波长可调短脉冲的装置和方法。 当超短脉冲光被引入到光纤(3)中时,通过孤子效应和拉曼散射,通过非线性光学效应产生波长可调的超短孤子脉冲。 当孤子脉冲具有短持续时间和高峰值强度时,具有三分之一波长的孤子脉冲光的三次谐波由第三非线性光学效应产生。 该三次谐波在可见光带中具有短波长。

    Broadband optical spectrum generating apparatus and pulsed light generating apparatus

    公开(公告)号:US06813423B2

    公开(公告)日:2004-11-02

    申请号:US10647293

    申请日:2003-08-26

    IPC分类号: G02B600

    CPC分类号: G02F1/365 G02F2001/3528

    摘要: A broadband optical spectrum generating apparatus 20 includes an ultra-short pulse fiber laser 22 that generates pulsed light having a pulse width in a unit of picosecond to femtosecond, and a broadband optical spectrum-generating optical fiber 24 that is connected with the ultra-short pulse fiber laser 22 via a lens 26 and has a non-linear coefficient of not less than 10 [W−1m−1] at a wavelength of the pulsed light and a magnitude of chromatic dispersion of not greater than 2 [ps/km/nm]. The pulsed light emitted from the ultra-short pulse fiber laser 22 is converted into a relatively flat super continuum over a broad band of approximately 1200 nm to 2000 nm by chromatic dispersion in the course of transmission through the broadband optical spectrum-generating optical fiber 24.