摘要:
To achieve an apparatus capable of measuring a light absorption coefficient f a sample with high sensitivity. A ring down spectroscope uses a wavelength-variable femtosecond soliton pulse light source 1. Pulse light is input to a loop optical fiber 6 through a first light waveguide 4 and a wavelength selective switch 5. Ring down pulse light is input to a homodyne detector through the wavelength selective switch 5. On the other hand, pulse light propagating in the first light waveguide 4 is split and input to light waveguides constituting a second light waveguide 20 through an optical directional coupler 8 and a first optical switching element 12. The pulse light propagating in the second light waveguide 20 is input to the homodyne detector as reference light and used for synchronous detection. The plural light waveguides constituting the second light waveguide 20 differ in optical length in accordance with the length of the optical fiber 6, and can slightly change the optical length.
摘要:
A spectroscopy method, includes guiding pulse laser light to an optical fiber, which mutually reacts with a sample to be measured of a light absorptance characteristic, outputting ring down pulse light obtained through light absorption of the sample, measuring an absorptance characteristic of the sample based on an attenuation characteristic of the ring down pulse light, and setting the pulse laser light as wide-spectrum laser light, setting the optical fiber as a strong dispersive optical fiber, and increasing a pulse width of the ring down pulse light to measure a wavelength absorptance characteristic based on a ring down attenuation constant of a pulse train with respect to a time sequence corresponding to a wavelength.
摘要:
A spectroscopy method, includes guiding pulse laser light to an optical fiber, which mutually reacts with a sample to be measured of a light absorptance characteristic, outputting ring down pulse light obtained through light absorption of the sample, measuring an absorptance characteristic of the sample based on an attenuation characteristic of the ring down pulse light, and setting the pulse laser light as wide-spectrum laser light, setting the optical fiber as a strong dispersive optical fiber, and increasing a pulse width of the ring down pulse light to measure a wavelength absorptance characteristic based on a ring down attenuation constant of a pulse train with respect to a time sequence corresponding to a wavelength.
摘要:
To achieve an apparatus capable of measuring a light absorption coefficient f a sample with high sensitivity. A ring down spectroscope uses a wavelength-variable femtosecond soliton pulse light source 1. Pulse light is input to a loop optical fiber 6 through a first light waveguide 4 and a wavelength selective switch 5. Ring down pulse light is input to a homodyne detector through the wavelength selective switch 5. On the other hand, pulse light propagating in the first light waveguide 4 is split and input to light waveguides constituting a second light waveguide 20 through an optical directional coupler 8 and a first optical switching element 12. The pulse light propagating in the second light waveguide 20 is input to the homodyne detector as reference light and used for synchronous detection. The plural light waveguides constituting the second light waveguide 20 differ in optical length in accordance with the length of the optical fiber 6, and can slightly change the optical length.
摘要:
A controlled plasma deposition system and method are provided including a vacuum vessel. An electron adding mass spectrometer is connected to a vacuum vessel for carrying out a gas treatment for a semi-conductor wafer. In the mass spectrometer, a gas in the vacuum vessel is incorporated, and electrons are added to the particles in the gas. Then the value of negative ions obtained by ionizing the particles, for example specific radicals, is measured. Once measured, the information is forwarded to a controller that may optimize the plasma deposition method.
摘要:
A broadband optical spectrum generating apparatus 20 includes a ultrashort pulsed fiber laser 22 that generates pulsed light having a pulse width in the unit of picosecond to femtosecond, and broadband optical spectrum-generating optical fibers 24 that are connected with the ultrashort pulse fiber laser 22 via a lens 26 and have characteristics of normal dispersion, that is, a nonlinear coefficient of not less than 10 [W−1km−1] and a magnitude of wavelength dispersion of not greater than a value 0 [ps/km/nm] with regard to a wavelength of the pulsed light. The resulting output is super continuum that is widely broadened to a wavelength band of 1400 nm to 1750 nm and is chirped to a linear characteristic.
摘要:
An apparatus and method for generating a wavelength-tunable short pulse that can generate wavelength-tunable short pulsed light in the visible-light wavelength band are provided. When ultrashort pulsed light is introduced into an optical fiber (3), a wavelength-tunable ultrashort soliton pulse is generated by a nonlinear optical effect through the soliton effect and Raman scattering. When the soliton pulse has a short duration and high peak intensity, a third harmonic having one-third of the wavelength of the soliton pulsed light is generated by a third nonlinear optical effect. This third harmonic has a short wavelength in the visible light band.
摘要:
In a distance measurement device of the invention, a light divider separates pulsed light emitted from an ultrashort pulse fiber laser into reference light A and signal light. A scanning mirror unit irradiates an object with the signal light as a division of the pulsed light and receives scattered light B, which is reflected from the object irradiated with the signal light. An optical path length adjustment unit adjusts an optical path length of the reference light A as a division of the pulsed light. A differential detector included in an interference signal generator detects the degree of interference of the reference light A having the adjusted optical path length with the scattered light B and outputs the detected degree of interference as an interference signal. A computer specifies an adjustment value set in the optical path length adjustment unit to attain a specific optical path length maximizing the interference signal and uses the specified adjustment value to compute a distance from a reference position of the scanning mirror unit to the object. The distance measurement device of the invention thus enables high-speed and highly-accurate measurement of the object.
摘要:
An apparatus and method for generating a wavelength-tunable short pulse that can generate wavelength-tunable short pulsed light in the visible-light wavelength band are provided. When ultrashort pulsed light is introduced into an optical fiber (3), a wavelength-tunable ultrashort soliton pulse is generated by a nonlinear optical effect through the soliton effect and Raman scattering. When the soliton pulse has a short duration and high peak intensity, a third harmonic having one-third of the wavelength of the soliton pulsed light is generated by a third nonlinear optical effect. This third harmonic has a short wavelength in the visible light band.
摘要:
A broadband optical spectrum generating apparatus 20 includes an ultra-short pulse fiber laser 22 that generates pulsed light having a pulse width in a unit of picosecond to femtosecond, and a broadband optical spectrum-generating optical fiber 24 that is connected with the ultra-short pulse fiber laser 22 via a lens 26 and has a non-linear coefficient of not less than 10 [W−1m−1] at a wavelength of the pulsed light and a magnitude of chromatic dispersion of not greater than 2 [ps/km/nm]. The pulsed light emitted from the ultra-short pulse fiber laser 22 is converted into a relatively flat super continuum over a broad band of approximately 1200 nm to 2000 nm by chromatic dispersion in the course of transmission through the broadband optical spectrum-generating optical fiber 24.