公开(公告)号：US08305686B2

公开(公告)日：2012-11-06

申请号：US12510462

申请日：2009-07-28

申请人： Kazuhiro Arai ,  Junji Terada ,  Masahide Iwakata

发明人： Kazuhiro Arai ,  Junji Terada ,  Masahide Iwakata

IPC分类号： G02B5/30

CPC分类号： G02B6/13 ,  B82Y20/00 ,  G02B1/005 ,  G02B5/1847 ,  G02B5/30 ,  G02B6/1225

摘要： A method for producing an optical element having a three-dimensional structural part that can resolve problems associated with deterioration of optical characteristics that is caused by variations in the element shape in the conventional process and poor endurance caused by insufficient joining strength and the optical element produced by the method are provided. A method for producing an optical element configured by joining at least a first optical member and a second optical member formed from an oxide material includes the processes of forming a refractive index periodic structural part with a period equal to or less than a visible light wavelength on at least one of the first optical member and the second optical member, forming a joining layer composed of an oxygen-deficient oxide on the first optical member and the second optical member, tightly joining the first optical member and the second optical member by the joining layer, and oxidizing the joining layer after the tight joining.

摘要翻译： 一种具有三维结构部件的光学元件的制造方法，其能够解决由于常规工艺中的元件形状的变化引起的光学特性的劣化以及由于不足的接合强度而引起的差的耐久性和产生的光学元件的问题 通过该方法提供。 一种通过将至少由第一光学构件和由氧化物材料形成的第二光学构件接合而构成的光学元件的方法包括：将等于或小于可见光波长的周期的折射率周期性结构部分形成 所述第一光学构件和所述第二光学构件中的至少一个在所述第一光学构件上形成由氧缺失氧化物构成的接合层和所述第二光学构件，通过所述接合将所述第一光学构件和所述第二光学构件紧密接合 层，并且在紧密接合之后氧化接合层。

公开(公告)号：US20100020397A1

公开(公告)日：2010-01-28

申请号：US12510462

申请日：2009-07-28

申请人： Kazuhiro Arai ,  Junji Terada ,  Masahide Iwakata

发明人： Kazuhiro Arai ,  Junji Terada ,  Masahide Iwakata

IPC分类号： G02B5/30 ,  G02B6/26

CPC分类号： G02B6/13 ,  B82Y20/00 ,  G02B1/005 ,  G02B5/1847 ,  G02B5/30 ,  G02B6/1225

摘要： A method for producing an optical element having a three-dimensional structural part that can resolve problems associated with deterioration of optical characteristics that is caused by variations in the element shape in the conventional process and poor endurance caused by insufficient joining strength and the optical element produced by the method are provided. A method for producing an optical element configured by joining at least a first optical member and a second optical member formed from an oxide material includes the processes of forming a refractive index periodic structural part with a period equal to or less than a visible light wavelength on at least one of the first optical member and the second optical member, forming a joining layer composed of an oxygen-deficient oxide on the first optical member and the second optical member, tightly joining the first optical member and the second optical member by the joining layer, and oxidizing the joining layer after the tight joining.

摘要翻译： 一种具有三维结构部件的光学元件的制造方法，其能够解决由于常规工艺中的元件形状的变化引起的光学特性的劣化以及由于不足的接合强度而引起的差的耐久性和产生的光学元件的问题 通过该方法提供。 一种通过将至少由第一光学构件和由氧化物材料形成的第二光学构件接合而构成的光学元件的方法包括：将等于或小于可见光波长的周期的折射率周期性结构部分形成 所述第一光学构件和所述第二光学构件中的至少一个在所述第一光学构件上形成由氧缺失氧化物构成的接合层和所述第二光学构件，通过所述接合将所述第一光学构件和所述第二光学构件紧密接合 层，并且在紧密接合之后氧化接合层。

公开(公告)号：US08585220B2

公开(公告)日：2013-11-19

申请号：US12937384

申请日：2009-05-26

申请人： Masahide Iwakata ,  Kazuhiro Arai ,  Junji Terada

发明人： Masahide Iwakata ,  Kazuhiro Arai ,  Junji Terada

IPC分类号： G02B23/16 ,  G02B5/124

CPC分类号： G02B5/3025 ,  B29D11/00365 ,  B29D11/00634 ,  B29D11/0073 ,  G02B5/1809 ,  G02B5/1857

摘要： Provided is a method of producing an optical element, including: forming a frame portion on a substrate and forming a structural body in a space portion surrounded by the frame portion to thereby form a first optical member; disposing a second optical member on the first optical member in a reduced pressure environment to form an optical element in which the space portion is sealed in a pressure-reduced state; and exposing the optical element to the atmosphere to thereby bring the structural body and the second optical member into close contact with each other by a differential pressure between the atmosphere and the space portion sealed in the pressure-reduced state. Accordingly, it is possible to, when the optical element is bonded, suppress damage to the optical element during the bonding and further improve the function and strength of the optical element without use of an adhesive.

摘要翻译： 提供了一种制造光学元件的方法，包括：在基板上形成框架部分，并在由框架部分包围的空间部分中形成结构体，从而形成第一光学部件; 在减压环境下在第一光学构件上设置第二光学构件以形成其中空间部分被压缩的状态密封的光学元件; 并将该光学元件暴露在大气中，从而使结构体和第二光学构件通过在减压状态下密封的气氛和空间部分之间的压差彼此紧密接触。 因此，当接合光学元件时，可以抑制在接合期间对光学元件的损坏，并且进一步提高光学元件的功能和强度而不使用粘合剂。

公开(公告)号：US20110032613A1

公开(公告)日：2011-02-10

申请号：US12937384

申请日：2009-05-26

申请人： Masahide Iwakata ,  Kazuhiro Arai ,  Junji Terada

发明人： Masahide Iwakata ,  Kazuhiro Arai ,  Junji Terada

IPC分类号： G02B5/30 ,  B32B38/10

CPC分类号： G02B5/3025 ,  B29D11/00365 ,  B29D11/00634 ,  B29D11/0073 ,  G02B5/1809 ,  G02B5/1857

摘要： Provided is a method of producing an optical element, including: forming a frame portion on a substrate and forming a structural body in a space portion surrounded by the frame portion to thereby form a first optical member; disposing a second optical member on the first optical member in a reduced pressure environment to form an optical element in which the space portion is sealed in a pressure-reduced state; and exposing the optical element to the atmosphere to thereby bring the structural body and the second optical member into close contact with each other by a differential pressure between the atmosphere and the space portion sealed in the pressure-reduced state. Accordingly, it is possible to, when the optical element is bonded, suppress damage to the optical element during the bonding and further improve the function and strength of the optical element without use of an adhesive.

摘要翻译： 提供了一种制造光学元件的方法，包括：在基板上形成框架部分，并在由框架部分包围的空间部分中形成结构体，从而形成第一光学部件; 在减压环境下在第一光学构件上设置第二光学构件以形成其中空间部分被压缩的状态密封的光学元件; 并将该光学元件暴露在大气中，从而通过在减压状态下密封的气氛与空间部之间的压差使结构体和第二光学构件相互紧密接触。 因此，当接合光学元件时，可以抑制在接合期间对光学元件的损坏，并且进一步提高光学元件的功能和强度而不使用粘合剂。

公开(公告)号：US08941920B2

公开(公告)日：2015-01-27

申请号：US13055663

申请日：2009-07-07

申请人： Kazuhiro Arai ,  Jun-ichi Sakamoto ,  Junji Terada ,  Noriyuki Nakai

发明人： Kazuhiro Arai ,  Jun-ichi Sakamoto ,  Junji Terada ,  Noriyuki Nakai

IPC分类号： G02B5/30 ,  G02B5/18 ,  G02B27/28

CPC分类号： G02B5/1809 ,  G02B5/30 ,  G02B27/28 ,  Y10T428/24322 ,  Y10T428/24562 ,  Y10T428/24942

摘要： Provided are an optical element and a method of producing an optical element in which sufficient adhesion with an upper layer can be secured without damaging spectral characteristics. The production method includes the step of forming a first structural body in which a space part and a structural part are alternately and repeatedly arranged, the step of forming an etching stopper layer on an upper part of the structural part, and the step of forming a second structural body on the etching stopper layer by etching.

摘要翻译： 提供一种光学元件和制造光学元件的方法，其中可以确保与上层具有足够的粘合性而不损害光谱特性。 制造方法包括形成空间部和结构部交替重复排列的第一结构体的工序，在结构部的上部形成蚀刻停止层的工序，以及形成工序 蚀刻停止层上的第二结构体。

公开(公告)号：US20110114598A1

公开(公告)日：2011-05-19

申请号：US13013882

申请日：2011-01-26

申请人： Jun-ichi Sakamoto ,  Junji Terada ,  Noriyuki Nakai ,  Kazuhiro Arai

发明人： Jun-ichi Sakamoto ,  Junji Terada ,  Noriyuki Nakai ,  Kazuhiro Arai

IPC分类号： B29D11/00

CPC分类号： G02B1/002 ,  B82Y20/00 ,  G02B5/1809 ,  G02B6/126 ,  G02B6/136 ,  G02B27/42 ,  G02B27/4261

摘要： An optical element having a three-dimensional structure which can function in a visible range and can improve adherence at a structural interface of the element, and a method of manufacturing the optical element. The optical element includes a substrate, and at least a first layer and a second layer on the substrate are manufactured such that each of the first layer and the second layer has a repetition structure of spaces and structural parts at a pitch equal to or less than a wavelength of visible light, and at an interface between the first layer and the second layer, overlapped structures are provided in which the repetition structure of the first layer and the repetition structure of the second layer overlap in a stack direction of the layers.

摘要翻译： 具有三维结构的光学元件，其可以在可见光范围内起作用并且能够提高元件的结构界面处的粘附性，以及制造该光学元件的方法。 所述光学元件包括基板，并且所述基板上的至少第一层和第二层被制造为使得所述第一层和所述第二层中的每一个具有空间的重复结构和等于或小于 可见光的波长，并且在第一层和第二层之间的界面处，提供重叠结构，其中第一层的重复结构和第二层的重复结构在层的堆叠方向上重叠。

公开(公告)号：US07929209B2

公开(公告)日：2011-04-19

申请号：US11677235

申请日：2007-02-21

申请人： Jun-ichi Sakamoto ,  Junji Terada ,  Noriyuki Nakai ,  Kazuhiro Arai

发明人： Jun-ichi Sakamoto ,  Junji Terada ,  Noriyuki Nakai ,  Kazuhiro Arai

IPC分类号： G02B5/30

CPC分类号： G02B1/002 ,  B82Y20/00 ,  G02B5/1809 ,  G02B6/126 ,  G02B6/136 ,  G02B27/42 ,  G02B27/4261

摘要： An optical element having a three-dimensional structure which can function in a visible range and can improve adherence at a structural interface of the element, and a method of manufacturing the optical element. The optical element includes a substrate, and at least a first layer and a second layer on the substrate are manufactured such that each of the first layer and the second layer has a repetition structure of spaces and structural parts at a pitch equal to or less than a wavelength of visible light, and at an interface between the first layer and the second layer, overlapped structures are provided in which the repetition structure of the first layer and the repetition structure of the second layer overlap in a stack direction of the layers.

摘要翻译： 具有三维结构的光学元件，其可以在可见光范围内起作用并且能够提高元件的结构界面处的粘附性，以及制造该光学元件的方法。 所述光学元件包括基板，并且所述基板上的至少第一层和第二层被制造为使得所述第一层和所述第二层中的每一个具有空间的重复结构和等于或小于 可见光的波长，并且在第一层和第二层之间的界面处，提供重叠结构，其中第一层的重复结构和第二层的重复结构在层的堆叠方向上重叠。

公开(公告)号：US20070201135A1

公开(公告)日：2007-08-30

申请号：US11677235

申请日：2007-02-21

申请人： Jun-ichi Sakamoto ,  Junji Terada ,  Noriyuki Nakai ,  Kazuhiro Arai

发明人： Jun-ichi Sakamoto ,  Junji Terada ,  Noriyuki Nakai ,  Kazuhiro Arai

IPC分类号： G03C5/00 ,  G02B5/18

CPC分类号： G02B1/002 ,  B82Y20/00 ,  G02B5/1809 ,  G02B6/126 ,  G02B6/136 ,  G02B27/42 ,  G02B27/4261

摘要： The present invention provides an optical element having a three-dimensional structure which can function in a visible range and can improve adherence at a structural interface of the element, and a method of manufacturing the optical element. The optical element including a substrate and at least a first layer and a second layer on the substrate is manufactured such that each of the first layer and the second layer has a repetition structure of spaces and structural parts at a pitch equal to or less than a wavelength of visible light, and at an interface between the first layer and the second layer, overlapped structures are provided in which the repetition structure of the first layer and the repetition structure of the second layer overlap in a stack direction of the layers.

摘要翻译： 本发明提供一种具有三维结构的光学元件，其可以在可见光范围内起作用并且可以提高元件的结构界面处的粘附性，以及制造该光学元件的方法。 制造包括基板和基板上的至少第一层和第二层的光学元件，使得第一层和第二层中的每一个具有空间的重复结构和等于或小于 可见光的波长，并且在第一层和第二层之间的界面处，提供重叠结构，其中第一层的重复结构和第二层的重复结构在层的堆叠方向上重叠。

公开(公告)号：US20110123765A1

公开(公告)日：2011-05-26

申请号：US13055663

申请日：2009-07-07

申请人： Kazuhiro Arai ,  Jun-ichi Sakamoto ,  Junji Terada ,  Noriyuki Nakai

发明人： Kazuhiro Arai ,  Jun-ichi Sakamoto ,  Junji Terada ,  Noriyuki Nakai

IPC分类号： B32B3/10 ,  B32B7/02 ,  B32B3/00 ,  B29D11/00

CPC分类号： G02B5/1809 ,  G02B5/30 ,  G02B27/28 ,  Y10T428/24322 ,  Y10T428/24562 ,  Y10T428/24942

摘要： Provided are an optical element and a method of producing an optical element in which sufficient adhesion with an upper layer can be secured without damaging spectral characteristics. The production method includes the step of forming a first structural body in which a space part and a structural part are alternately and repeatedly arranged, the step of forming an etching stopper layer on an upper part of the structural part, and the step of forming a second structural body on the etching stopper layer by etching.

摘要翻译： 提供一种光学元件和制造光学元件的方法，其中可以确保与上层具有足够的粘合性而不损害光谱特性。 制造方法包括形成空间部和结构部交替重复排列的第一结构体的工序，在结构部的上部形成蚀刻停止层的工序，以及形成工序 蚀刻停止层上的第二结构体。

公开(公告)号：US08715516B2

公开(公告)日：2014-05-06

申请号：US13013882

申请日：2011-01-26

申请人： Jun-ichi Sakamoto ,  Junji Terada ,  Noriyuki Nakai ,  Kazuhiro Arai

发明人： Jun-ichi Sakamoto ,  Junji Terada ,  Noriyuki Nakai ,  Kazuhiro Arai

IPC分类号： B29D11/00 ,  B44C1/22

CPC分类号： G02B1/002 ,  B82Y20/00 ,  G02B5/1809 ,  G02B6/126 ,  G02B6/136 ,  G02B27/42 ,  G02B27/4261

摘要： An optical element having a three-dimensional structure which can function in a visible range and can improve adherence at a structural interface of the element, and a method of manufacturing the optical element. The optical element includes a substrate, and at least a first layer and a second layer on the substrate are manufactured such that each of the first layer and the second layer has a repetition structure of spaces and structural parts at a pitch equal to or less than a wavelength of visible light, and at an interface between the first layer and the second layer, overlapped structures are provided in which the repetition structure of the first layer and the repetition structure of the second layer overlap in a stack direction of the layers.

摘要翻译： 具有三维结构的光学元件，其可以在可见光范围内起作用并且能够提高元件的结构界面处的粘附性，以及制造该光学元件的方法。 所述光学元件包括基板，并且所述基板上的至少第一层和第二层被制造为使得所述第一层和所述第二层中的每一个具有空间的重复结构和等于或小于 可见光的波长，并且在第一层和第二层之间的界面处，提供重叠结构，其中第一层的重复结构和第二层的重复结构在层的堆叠方向上重叠。