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公开(公告)号:US20100081557A1
公开(公告)日:2010-04-01
申请号:US12584063
申请日:2009-08-28
申请人: Takayuki Ide , Masami Ando , Hiromi Arimitsu
发明人: Takayuki Ide , Masami Ando , Hiromi Arimitsu
IPC分类号: C04B35/505 , C04B35/64
CPC分类号: C04B35/6455 , C04B35/50 , C04B35/505 , C04B2235/3225 , C04B2235/3229 , C04B2235/3409 , C04B2235/5409 , C04B2235/5436 , C04B2235/5445 , C04B2235/652 , C04B2235/656 , C04B2235/658 , C04B2235/77 , C04B2235/9669 , Y10T279/23
摘要: A corrosion-resistant member includes a ceramic member containing yttrium oxide as a main component, containing cerium element, and obtained by firing under a nonoxidizing atmosphere. The corrosion-resistant member that has high corrosion-resistant characteristics and includes a ceramic member having a low volume resitivity can be provided.
摘要翻译: 耐腐蚀构件包括含有氧化钇作为主要成分的含有铈元素并通过在非氧化气氛下烧制获得的陶瓷构件。 可以提供具有高耐腐蚀特性并且包括具有低体积电阻率的陶瓷构件的耐腐蚀构件。
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公开(公告)号:US08178459B2
公开(公告)日:2012-05-15
申请号:US12584063
申请日:2009-08-28
申请人: Takayuki Ide , Masami Ando , Hiromi Arimitsu
发明人: Takayuki Ide , Masami Ando , Hiromi Arimitsu
IPC分类号: C04B35/505
CPC分类号: C04B35/6455 , C04B35/50 , C04B35/505 , C04B2235/3225 , C04B2235/3229 , C04B2235/3409 , C04B2235/5409 , C04B2235/5436 , C04B2235/5445 , C04B2235/652 , C04B2235/656 , C04B2235/658 , C04B2235/77 , C04B2235/9669 , Y10T279/23
摘要: A corrosion-resistant member includes a ceramic member containing yttrium oxide as a main component, containing cerium element, and obtained by firing under a nonoxidizing atmosphere. The corrosion-resistant member that has high corrosion-resistant characteristics and includes a ceramic member having a low volume resistivity can be provided.
摘要翻译: 耐腐蚀构件包括含有氧化钇作为主要成分的含有铈元素并通过在非氧化气氛下烧制获得的陶瓷构件。 可以提供具有高耐腐蚀特性并且包括具有低体积电阻率的陶瓷构件的耐腐蚀构件。
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公开(公告)号:US20100067165A1
公开(公告)日:2010-03-18
申请号:US12584064
申请日:2009-08-28
申请人: Masami Ando , Takayuki Ide , Hiromi Arimitsu
发明人: Masami Ando , Takayuki Ide , Hiromi Arimitsu
IPC分类号: H01L21/683 , C04B35/64
CPC分类号: H02N13/00 , C04B35/50 , C04B35/505 , C04B35/6455 , C04B2235/3225 , C04B2235/3229 , C04B2235/3409 , C04B2235/3804 , C04B2235/3821 , C04B2235/44 , C04B2235/442 , C04B2235/443 , C04B2235/444 , C04B2235/449 , C04B2235/5409 , C04B2235/5445 , C04B2235/652 , C04B2235/658 , C04B2235/6582 , C04B2235/762 , C04B2235/77 , H01L21/6831
摘要: An electrostatic chuck includes a ceramic member containing yttrium oxide as a main component, containing cerium element and obtained by firing under a nonoxidizing atmosphere. The electrostatic chuck that has high corrosion resistant characteristics and includes a ceramic member having a low volume resistivity with a strong attracting force that utilize the Johnsen-Rahbeck force can be obtained.
摘要翻译: 静电吸盘包括含有氧化钇作为主要成分的陶瓷构件,其含有铈元素并通过在非氧化气氛下烧结获得。 可以获得具有高耐腐蚀特性的静电卡盘,并且可以获得具有利用约翰森 - 拉贝克力的强吸引力的低体积电阻率的陶瓷构件。
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公开(公告)号:US08728261B2
公开(公告)日:2014-05-20
申请号:US13115870
申请日:2011-05-25
申请人: Takayuki Ide , Masami Ando
发明人: Takayuki Ide , Masami Ando
CPC分类号: C04B35/573 , B82Y30/00 , C04B35/563 , C04B35/65 , C04B37/005 , C04B2235/3821 , C04B2235/3826 , C04B2235/422 , C04B2235/424 , C04B2235/428 , C04B2235/5436 , C04B2235/5445 , C04B2235/5454 , C04B2235/6027 , C04B2237/083 , C04B2237/36 , C04B2237/365
摘要: This producing method includes: a preparing step of preparing a pair of ceramic sintered bodies at least one of which is formed by a reaction sintering method and contains free silicon; a forming step of interposing a joining slurry between the joined surfaces of the pair of ceramic sintered bodies and thereafter drying the joining slurry, to form a fine particle layer, the joining slurry obtained by dispersing fine particles containing a carbon element in an organic solvent; and a joining step of heating the pair of ceramic sintered bodies in an inert atmosphere with the pair of ceramic sintered bodies held so that the fine particle layer is pressurized, to introduce the free silicon into the fine particle layer, thereby forming a joining layer containing at least silicon carbide so that the pair of ceramic sintered bodies are joined to each other, to obtain the ceramic joined body.
摘要翻译: 该制造方法包括:制备一对陶瓷烧结体的制备步骤,其中至少一个通过反应烧结法形成,并含有游离硅; 在所述一对陶瓷烧结体的接合面之间插入接合浆料,然后干燥所述接合浆料,形成微粒层的形成工序,将通过将含有碳元素的微粒分散在有机溶剂中而得到的接合浆料; 以及在惰性气氛下加热一对陶瓷烧结体的接合步骤,使一对陶瓷烧结体保持为使微粒层被加压,将游离硅引入微粒层,从而形成含有 至少碳化硅使得一对陶瓷烧结体彼此接合,以获得陶瓷接合体。
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公开(公告)号:US07435698B2
公开(公告)日:2008-10-14
申请号:US11487956
申请日:2006-07-17
申请人: Takayuki Ide , Masakatsu Kiyohara , Masami Ando
发明人: Takayuki Ide , Masakatsu Kiyohara , Masami Ando
IPC分类号: C04B35/50
CPC分类号: C04B35/50 , C04B35/505 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3229 , C04B2235/3409 , C04B2235/386 , C04B2235/9607
摘要: The object of the present invention is to provide a rare-earth oxide sintered body having low sintering temperature and high density. A boron compound is added at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (B2O3) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, the mixed powder is formed and sintered.
摘要翻译: 本发明的目的是提供一种具有低烧结温度和高密度的稀土氧化物烧结体。 当将氧化硼(B 2 O 3 O 3)转化为氧化硼(B 2 O 3 O 3)时,以0.06mol%以上且小于25mol%的比例加入硼化合物 La,Nd,Sm,Eu,Gd,Dy,Ho,Er,Tm,Yb,Lu和Sc中的至少一种,形成并烧结混合粉末。
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公开(公告)号:US20090029844A1
公开(公告)日:2009-01-29
申请号:US12283507
申请日:2008-09-12
申请人: Takayuki Ide , Masakatsu Kiyohara , Masami Ando
发明人: Takayuki Ide , Masakatsu Kiyohara , Masami Ando
IPC分类号: C04B35/50
CPC分类号: C04B35/50 , C04B35/505 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3229 , C04B2235/3409 , C04B2235/386 , C04B2235/9607
摘要: A rare-earth oxide sintered body, or corrosion-resistant material, having low sintering temperature and high density is prepared by adding a boron compound at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (B2O3) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, after which the mixed powder is formed and sintered. The sintered body comprises at least one of La2O3, Nd2O3, Sm2O3, Eu2O3, Gd2O3, Dy2O3, Ho2O3, Er2O3, Tm2O3, Yb2O3, Lu2O3, and Sc2O3, and at least one of Ln3BO6 (Ln=La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Lu), and Sc3BO6 as a main constituent crystal thereof.
摘要翻译: 通过在转化为氧化硼(B 2 O 3)中添加比例为0.06摩尔%以上且小于25摩尔%的硼化合物,制备具有低烧结温度和高密度的稀土氧化物烧结体或耐腐蚀材料 )到La,Nd,Sm,Eu,Gd,Dy,Ho,Er,Tm,Yb,Lu和Sc中的至少一种的氧化物粉末,之后形成混合粉末并烧结。 烧结体包括La 2 O 3,Nd 2 O 3,Sm 2 O 3,Eu 2 O 3,Gd 2 O 3,Dy 2 O 3,Ho 2 O 3,Er 2 O 3,Tm 2 O 3,Yb 2 O 3,Lu 2 O 3和Sc 2 O 3中的至少一种,Ln 3 BO 6(L n = La,Nd,Sm, Gd,Dy,Ho,Er,Tm,Yb和Lu)和Sc3BO6作为其主要构成晶体。
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公开(公告)号:US20080176735A1
公开(公告)日:2008-07-24
申请号:US12009146
申请日:2008-01-16
申请人: Takayuki Ide , Masami Ando
发明人: Takayuki Ide , Masami Ando
IPC分类号: C04B35/50
CPC分类号: C04B35/505 , C04B35/01 , C04B35/6455 , C04B2235/3225 , C04B2235/3409 , C04B2235/5409 , C04B2235/5436 , C04B2235/656 , C04B2235/77 , C04B2235/785 , C04B2235/786 , C04B2235/80 , C04B2235/94 , C04B2235/95
摘要: A ceramic member having a high density, small grain diameter, and excellent plasma resistance is provided. The ceramic member is constituted of a fine structure composed of fine grains, which is a ceramic member comprising an yttria as a main component and obtained through firing, wherein the ceramic member has an open porosity, as determined through a measurement by the Archimedes method, of less than 0.5%. By diminishing open voids, sites which is an origin of plasma erosion can be diminished. Thus, a ceramic member having excellent plasma resistance can be provided. By inhibiting abnormal grain growth to form a ceramic member constituted of stall grains, particle contamination by dusting can be reduced. Thus, plasma resistance and preventing particulate contamination can be improved.
摘要翻译: 提供了具有高密度,小粒径和优异的等离子体电阻的陶瓷构件。 陶瓷构件由微细晶粒构成,微细晶粒是以氧化钇为主要成分并通过烧成获得的陶瓷构件,其中陶瓷构件具有通过阿基米德法测量确定的开孔率, 小于0.5%。 通过减少开放空隙,可以减少等离子体侵蚀的原因。 因此,可以提供具有优异等离子体电阻的陶瓷构件。 通过抑制异常晶粒生长以形成由失速颗粒构成的陶瓷构件,可以减少由粉尘引起的颗粒污染。 因此,可以提高等离子体电阻和防止颗粒污染。
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公开(公告)号:US20070072763A1
公开(公告)日:2007-03-29
申请号:US11487956
申请日:2006-07-17
申请人: Takayuki Ide , Masakatsu Kiyohara , Masami Ando
发明人: Takayuki Ide , Masakatsu Kiyohara , Masami Ando
IPC分类号: C04B35/505
CPC分类号: C04B35/50 , C04B35/505 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3229 , C04B2235/3409 , C04B2235/386 , C04B2235/9607
摘要: The object of the present invention is to provide a rare-earth oxide sintered body having low sintering temperature and high density. A boron compound is added at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (B2O3) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, the mixed powder is formed and sintered.
摘要翻译: 本发明的目的是提供一种具有低烧结温度和高密度的稀土氧化物烧结体。 当将氧化硼(B 2 O 3 O 3)转化为氧化硼(B 2 O 3 O 3)时,以0.06mol%以上且小于25mol%的比例加入硼化合物 La,Nd,Sm,Eu,Gd,Dy,Ho,Er,Tm,Yb,Lu和Sc中的至少一种,形成并烧结混合粉末。
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公开(公告)号:US07799719B2
公开(公告)日:2010-09-21
申请号:US12009146
申请日:2008-01-16
申请人: Takayuki Ide , Masami Ando
发明人: Takayuki Ide , Masami Ando
IPC分类号: C04B35/505
CPC分类号: C04B35/505 , C04B35/01 , C04B35/6455 , C04B2235/3225 , C04B2235/3409 , C04B2235/5409 , C04B2235/5436 , C04B2235/656 , C04B2235/77 , C04B2235/785 , C04B2235/786 , C04B2235/80 , C04B2235/94 , C04B2235/95
摘要: A ceramic member having a high density, small grain diameter, and excellent plasma resistance is provided. The ceramic member is constituted of a fine structure composed of fine grains, which is a ceramic member comprising an yttria as a main component and obtained through firing, wherein the ceramic member has an open porosity, as determined through a measurement by the Archimedes method, of less than 0.5%. By diminishing open voids, sites which is an origin of plasma erosion can be diminished. Thus, a ceramic member having excellent plasma resistance can be provided. By inhibiting abnormal grain growth to form a ceramic member constituted of stall grains, particle contamination by dusting can be reduced. Thus, plasma resistance and preventing particulate contamination can be improved.
摘要翻译: 提供了具有高密度,小粒径和优异的等离子体电阻的陶瓷构件。 陶瓷构件由微细晶粒构成,微细晶粒是以氧化钇为主要成分并通过烧制获得的陶瓷构件,其中陶瓷构件具有通过阿基米德法测定的孔隙率, 小于0.5%。 通过减少开放空隙,可以减少等离子体侵蚀的原因。 因此,可以提供具有优异等离子体电阻的陶瓷构件。 通过抑制异常晶粒生长以形成由失速颗粒构成的陶瓷构件,可以减少由粉尘引起的颗粒污染。 因此,可以提高等离子体电阻和防止颗粒污染。
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公开(公告)号:US07670982B2
公开(公告)日:2010-03-02
申请号:US12283507
申请日:2008-09-12
申请人: Takayuki Ide , Masakatsu Kiyohara , Masami Ando
发明人: Takayuki Ide , Masakatsu Kiyohara , Masami Ando
IPC分类号: C04B35/50
CPC分类号: C04B35/50 , C04B35/505 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3229 , C04B2235/3409 , C04B2235/386 , C04B2235/9607
摘要: A rare-earth oxide sintered body, or corrosion-resistant material, having low sintering temperature and high density is prepared by adding a boron compound at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (B2O3) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, after which the mixed powder is formed and sintered. The sintered body comprises at least one of La2O3, Nd2O3, Sm2O3, Eu2O3, Gd2O3, Dy2O3, Ho2O3, Er2O3, Tm2O3, Yb2O3, Lu2O3, and Sc2O3, and at least one of Ln3BO6 (Ln=La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Lu), and Sc3BO6 as a main constituent crystal thereof.
摘要翻译: 通过在转化为氧化硼(B 2 O 3)中添加比例为0.06摩尔%以上且小于25摩尔%的硼化合物,制备具有低烧结温度和高密度的稀土氧化物烧结体或耐腐蚀材料 )到La,Nd,Sm,Eu,Gd,Dy,Ho,Er,Tm,Yb,Lu和Sc中的至少一种的氧化物粉末,之后形成混合粉末并烧结。 烧结体包括La 2 O 3,Nd 2 O 3,Sm 2 O 3,Eu 2 O 3,Gd 2 O 3,Dy 2 O 3,Ho 2 O 3,Er 2 O 3,Tm 2 O 3,Yb 2 O 3,Lu 2 O 3和Sc 2 O 3中的至少一种,Ln 3 BO 6(L n = La,Nd,Sm, Gd,Dy,Ho,Er,Tm,Yb和Lu)和Sc3BO6作为其主要构成晶体。
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