Method for producing ceramic joined body
    4.
    发明授权
    Method for producing ceramic joined body 有权
    陶瓷接合体的制造方法

    公开(公告)号:US08728261B2

    公开(公告)日:2014-05-20

    申请号:US13115870

    申请日:2011-05-25

    IPC分类号: C03B29/00 B29C65/00 B41J2/16

    摘要: This producing method includes: a preparing step of preparing a pair of ceramic sintered bodies at least one of which is formed by a reaction sintering method and contains free silicon; a forming step of interposing a joining slurry between the joined surfaces of the pair of ceramic sintered bodies and thereafter drying the joining slurry, to form a fine particle layer, the joining slurry obtained by dispersing fine particles containing a carbon element in an organic solvent; and a joining step of heating the pair of ceramic sintered bodies in an inert atmosphere with the pair of ceramic sintered bodies held so that the fine particle layer is pressurized, to introduce the free silicon into the fine particle layer, thereby forming a joining layer containing at least silicon carbide so that the pair of ceramic sintered bodies are joined to each other, to obtain the ceramic joined body.

    摘要翻译: 该制造方法包括:制备一对陶瓷烧结体的制备步骤,其中至少一个通过反应烧结法形成,并含有游离硅; 在所述一对陶瓷烧结体的接合面之间插入接合浆料,然后干燥所述接合浆料,形成微粒层的形成工序,将通过将含有碳元素的微粒分散在有机溶剂中而得到的接合浆料; 以及在惰性气氛下加热一对陶瓷烧结体的接合步骤,使一对陶瓷烧结体保持为使微粒层被加压,将游离硅引入微粒层,从而形成含有 至少碳化硅使得一对陶瓷烧结体彼此接合,以获得陶瓷接合体。

    Rare-earth oxide sintered body and manufacturing method
    6.
    发明申请
    Rare-earth oxide sintered body and manufacturing method 失效
    稀土氧化物烧结体及其制造方法

    公开(公告)号:US20090029844A1

    公开(公告)日:2009-01-29

    申请号:US12283507

    申请日:2008-09-12

    IPC分类号: C04B35/50

    摘要: A rare-earth oxide sintered body, or corrosion-resistant material, having low sintering temperature and high density is prepared by adding a boron compound at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (B2O3) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, after which the mixed powder is formed and sintered. The sintered body comprises at least one of La2O3, Nd2O3, Sm2O3, Eu2O3, Gd2O3, Dy2O3, Ho2O3, Er2O3, Tm2O3, Yb2O3, Lu2O3, and Sc2O3, and at least one of Ln3BO6 (Ln=La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Lu), and Sc3BO6 as a main constituent crystal thereof.

    摘要翻译: 通过在转化为氧化硼(B 2 O 3)中添加比例为0.06摩尔%以上且小于25摩尔%的硼化合物,制备具有低烧结温度和高密度的稀土氧化物烧结体或耐腐蚀材料 )到La,Nd,Sm,Eu,Gd,Dy,Ho,Er,Tm,Yb,Lu和Sc中的至少一种的氧化物粉末,之后形成混合粉末并烧结。 烧结体包括La 2 O 3,Nd 2 O 3,Sm 2 O 3,Eu 2 O 3,Gd 2 O 3,Dy 2 O 3,Ho 2 O 3,Er 2 O 3,Tm 2 O 3,Yb 2 O 3,Lu 2 O 3和Sc 2 O 3中的至少一种,Ln 3 BO 6(L n = La,Nd,Sm, Gd,Dy,Ho,Er,Tm,Yb和Lu)和Sc3BO6作为其主要构成晶体。

    Ceramic member and corrosion-resisting member
    7.
    发明申请
    Ceramic member and corrosion-resisting member 失效
    陶瓷构件和耐腐蚀构件

    公开(公告)号:US20080176735A1

    公开(公告)日:2008-07-24

    申请号:US12009146

    申请日:2008-01-16

    IPC分类号: C04B35/50

    摘要: A ceramic member having a high density, small grain diameter, and excellent plasma resistance is provided. The ceramic member is constituted of a fine structure composed of fine grains, which is a ceramic member comprising an yttria as a main component and obtained through firing, wherein the ceramic member has an open porosity, as determined through a measurement by the Archimedes method, of less than 0.5%. By diminishing open voids, sites which is an origin of plasma erosion can be diminished. Thus, a ceramic member having excellent plasma resistance can be provided. By inhibiting abnormal grain growth to form a ceramic member constituted of stall grains, particle contamination by dusting can be reduced. Thus, plasma resistance and preventing particulate contamination can be improved.

    摘要翻译: 提供了具有高密度,小粒径和优异的等离子体电阻的陶瓷构件。 陶瓷构件由微细晶粒构成,微细晶粒是以氧化钇为主要成分并通过烧成获得的陶瓷构件,其中陶瓷构件具有通过阿基米德法测量确定的开孔率, 小于0.5%。 通过减少开放空隙,可以减少等离子体侵蚀的原因。 因此,可以提供具有优异等离子体电阻的陶瓷构件。 通过抑制异常晶粒生长以形成由失速颗粒构成的陶瓷构件,可以减少由粉尘引起的颗粒污染。 因此,可以提高等离子体电阻和防止颗粒污染。

    Ceramic member and corrosion-resisting member
    9.
    发明授权
    Ceramic member and corrosion-resisting member 失效
    陶瓷构件和耐腐蚀构件

    公开(公告)号:US07799719B2

    公开(公告)日:2010-09-21

    申请号:US12009146

    申请日:2008-01-16

    IPC分类号: C04B35/505

    摘要: A ceramic member having a high density, small grain diameter, and excellent plasma resistance is provided. The ceramic member is constituted of a fine structure composed of fine grains, which is a ceramic member comprising an yttria as a main component and obtained through firing, wherein the ceramic member has an open porosity, as determined through a measurement by the Archimedes method, of less than 0.5%. By diminishing open voids, sites which is an origin of plasma erosion can be diminished. Thus, a ceramic member having excellent plasma resistance can be provided. By inhibiting abnormal grain growth to form a ceramic member constituted of stall grains, particle contamination by dusting can be reduced. Thus, plasma resistance and preventing particulate contamination can be improved.

    摘要翻译: 提供了具有高密度,小粒径和优异的等离子体电阻的陶瓷构件。 陶瓷构件由微细晶粒构成,微细晶粒是以氧化钇为主要成分并通过烧制获得的陶瓷构件,其中陶瓷构件具有通过阿基米德法测定的孔隙率, 小于0.5%。 通过减少开放空隙,可以减少等离子体侵蚀的原因。 因此,可以提供具有优异等离子体电阻的陶瓷构件。 通过抑制异常晶粒生长以形成由失速颗粒构成的陶瓷构件,可以减少由粉尘引起的颗粒污染。 因此,可以提高等离子体电阻和防止颗粒污染。

    Rare-earth oxide sintered body and manufacturing method
    10.
    发明授权
    Rare-earth oxide sintered body and manufacturing method 失效
    稀土氧化物烧结体及其制造方法

    公开(公告)号:US07670982B2

    公开(公告)日:2010-03-02

    申请号:US12283507

    申请日:2008-09-12

    IPC分类号: C04B35/50

    摘要: A rare-earth oxide sintered body, or corrosion-resistant material, having low sintering temperature and high density is prepared by adding a boron compound at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (B2O3) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, after which the mixed powder is formed and sintered. The sintered body comprises at least one of La2O3, Nd2O3, Sm2O3, Eu2O3, Gd2O3, Dy2O3, Ho2O3, Er2O3, Tm2O3, Yb2O3, Lu2O3, and Sc2O3, and at least one of Ln3BO6 (Ln=La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Lu), and Sc3BO6 as a main constituent crystal thereof.

    摘要翻译: 通过在转化为氧化硼(B 2 O 3)中添加比例为0.06摩尔%以上且小于25摩尔%的硼化合物,制备具有低烧结温度和高密度的稀土氧化物烧结体或耐腐蚀材料 )到La,Nd,Sm,Eu,Gd,Dy,Ho,Er,Tm,Yb,Lu和Sc中的至少一种的氧化物粉末,之后形成混合粉末并烧结。 烧结体包括La 2 O 3,Nd 2 O 3,Sm 2 O 3,Eu 2 O 3,Gd 2 O 3,Dy 2 O 3,Ho 2 O 3,Er 2 O 3,Tm 2 O 3,Yb 2 O 3,Lu 2 O 3和Sc 2 O 3中的至少一种,Ln 3 BO 6(L n = La,Nd,Sm, Gd,Dy,Ho,Er,Tm,Yb和Lu)和Sc3BO6作为其主要构成晶体。