Method for producing ceramic joined body
    1.
    发明授权
    Method for producing ceramic joined body 有权
    陶瓷接合体的制造方法

    公开(公告)号:US08728261B2

    公开(公告)日:2014-05-20

    申请号:US13115870

    申请日:2011-05-25

    IPC分类号: C03B29/00 B29C65/00 B41J2/16

    摘要: This producing method includes: a preparing step of preparing a pair of ceramic sintered bodies at least one of which is formed by a reaction sintering method and contains free silicon; a forming step of interposing a joining slurry between the joined surfaces of the pair of ceramic sintered bodies and thereafter drying the joining slurry, to form a fine particle layer, the joining slurry obtained by dispersing fine particles containing a carbon element in an organic solvent; and a joining step of heating the pair of ceramic sintered bodies in an inert atmosphere with the pair of ceramic sintered bodies held so that the fine particle layer is pressurized, to introduce the free silicon into the fine particle layer, thereby forming a joining layer containing at least silicon carbide so that the pair of ceramic sintered bodies are joined to each other, to obtain the ceramic joined body.

    摘要翻译: 该制造方法包括:制备一对陶瓷烧结体的制备步骤,其中至少一个通过反应烧结法形成,并含有游离硅; 在所述一对陶瓷烧结体的接合面之间插入接合浆料,然后干燥所述接合浆料,形成微粒层的形成工序,将通过将含有碳元素的微粒分散在有机溶剂中而得到的接合浆料; 以及在惰性气氛下加热一对陶瓷烧结体的接合步骤,使一对陶瓷烧结体保持为使微粒层被加压,将游离硅引入微粒层,从而形成含有 至少碳化硅使得一对陶瓷烧结体彼此接合,以获得陶瓷接合体。

    Nondestructive analysis method, nondestructive analysis device, and specific object analyzed by the method/device
    2.
    发明授权
    Nondestructive analysis method, nondestructive analysis device, and specific object analyzed by the method/device 失效
    非破坏性分析方法,非破坏性分析装置,以及通过方法/装置分析的具体对象

    公开(公告)号:US07817779B2

    公开(公告)日:2010-10-19

    申请号:US12073976

    申请日:2008-03-12

    申请人: Masami Ando

    发明人: Masami Ando

    IPC分类号: G01N23/20 G01N23/207

    CPC分类号: G01N23/207 G01N23/04

    摘要: Non-destructive analysis is carried out by irradiating an object with X-rays, for example, so that the X-rays from the object are incident on an analyzer crystal. The analyzer crystal can be of a transmission-type or a reflection-type. A pre-crystal device is used to make the radiation monochromated and parallelized. Atomic lattice planes of the pre-crystal device are approximately parallel with the atomic lattice planes of the analyzer crystal so as to use the angular analysis capability of the analyzer crystal. The thickness of the analyzer crystal is fixed. For example, for a transmission-type analyzer crystal, the thickness is such that irradiation with monochromatic parallel X-rays in the absence of the object results in a condition in which either one of (a) X-rays along a forward diffraction direction and (b) X-rays along a diffraction direction obtained by dynamical diffraction by the transmission type analyzer crystal have an intensity of nearly zero as compared to the intensity of the other with respect to the monochromatic parallel X-rays. At least one or both of an X-ray dark-field image and an X-ray bright-field are obtained.

    摘要翻译: 例如通过用X射线照射物体来进行非破坏性分析,使得来自物体的X射线入射到分析器晶体上。 分析仪晶体可以是透射型或反射型。 使用预晶装置使辐射单色化并平行化。 预分析器晶体的原子晶格面近似平行于分析器晶体的原子晶格面,以便使用分析器晶体的角度分析能力。 分析器晶体的厚度是固定的。 例如,对于透射型分析仪晶体,厚度使得在没有物体的情况下用单色平行X射线照射导致以下条件:(a)沿着前向衍射方向的X射线和 (b)通过透射型分析仪晶体的动态衍射获得的沿衍射方向的X射线与其他相对于单色平行X射线的强度相比具有几乎为零的强度。 获得X射线暗场图像和X射线亮场中的至少一个或两个。

    Sanitary ware and process for producing the same
    5.
    发明授权
    Sanitary ware and process for producing the same 失效
    卫生洁具和生产过程

    公开(公告)号:US06548162B1

    公开(公告)日:2003-04-15

    申请号:US09490894

    申请日:2000-01-27

    IPC分类号: B32B516

    摘要: Sanitary wares having a controlled surface are disclosed which are less likely to be stained or soiled and/or possess excellent gloss. The first sanitary ware comprises a sanitary ware body and a surface glaze layer provided on the sanitary ware body, wherein the surface glaze layer has a center line average roughness Ra of less than 0.07 &mgr;m. This sanitary ware is advantageous in that stains or soils are much less likely to be adhered to the surface thereof and, even when adhered to the surface thereof, can be removed by a weak water stream. The second sanitary ware comprises a sanitary ware body and a surface glaze layer provided on the sanitary ware body, wherein the surface glaze layer has a kurtosis Rku of less than 2.70. This sanitary ware advantageously possesses excellent surface gloss. The third sanitary ware comprises a sanitary ware body and a surface glaze layer provided on the sanitary ware body, wherein the surface of the surface glaze layer consists essentially of a vitreous component and is free from silica particles having a particle diameter of not less than 10 &mgr;m. This sanitary ware is advantageous in that stains or soils are less likely to be adhered to the surface thereof.

    摘要翻译: 公开了具有受控表面的卫生用品,其不太可能被染色或污染和/或具有优异的光泽。 第一卫生洁具包括卫生洁具主体和设置在卫生洁具主体上的表面釉层,其中表面釉层的中心线平均粗糙度Ra小于0.07μm。 这种卫生洁具的优点在于,污渍或土壤不太可能附着在其表面上,并且即使当粘附到其表面时也可以通过弱水流除去。 第二卫生洁具包括卫生洁具主体和设置在卫生洁具主体上的表面釉层,其中表面釉层的峭度Rku小于2.70。 这种卫生洁具有利地具有优异的表面光泽度。 第三卫生洁具包括卫生洁具主体和设置在卫生洁具主体上的表面釉层,其中表面釉层的表面主要由玻璃质成分组成,不含粒径不小于10的二氧化硅颗粒 妈妈 这种卫生洁具的优点在于,污渍或污垢不太可能附着在其表面上。

    Electrostatic chuck
    7.
    发明授权
    Electrostatic chuck 有权
    静电吸盘

    公开(公告)号:US07907383B2

    公开(公告)日:2011-03-15

    申请号:US12086967

    申请日:2007-02-08

    IPC分类号: H01T23/00 C04B35/00

    摘要: The present invention provides an electrostatic chuck in which the surface can be kept smooth after being exposed to plasma, so as to protect a material to be clamped such as a silicon wafer from being contaminated with particles, and which is excellent in clamping and releasing a material to be clamped and easy to manufacture by low-temperature firing. The electrostatic chuck includes a dielectric material in which alumina is 99.4 wt % or more, and titanium oxide is more than 0.2 wt % and equal to or less than 0.6 wt %, wherein the electrostatic chuck's volume resistivity is 108-1011 Ωcm in room temperature, and wherein the titanium oxide segregates in boundaries of particles of the alumina.

    摘要翻译: 本发明提供了一种静电卡盘,其中表面可以在暴露于等离子体之后保持光滑,以保护待被夹持的材料如硅晶片免受颗粒污染,并且夹紧和释放 待夹紧的材料并通过低温烧制容易制造。 静电卡盘包括氧化铝为99.4重量%以上,氧化钛大于0.2重量%且为0.6重量%以下的电介质材料,其中静电卡盘的体积电阻率为108-1011质量% 室温,其中氧化钛在氧化铝颗粒的边界分离。

    Ceramic member and corrosion-resisting member
    8.
    发明授权
    Ceramic member and corrosion-resisting member 失效
    陶瓷构件和耐腐蚀构件

    公开(公告)号:US07799719B2

    公开(公告)日:2010-09-21

    申请号:US12009146

    申请日:2008-01-16

    IPC分类号: C04B35/505

    摘要: A ceramic member having a high density, small grain diameter, and excellent plasma resistance is provided. The ceramic member is constituted of a fine structure composed of fine grains, which is a ceramic member comprising an yttria as a main component and obtained through firing, wherein the ceramic member has an open porosity, as determined through a measurement by the Archimedes method, of less than 0.5%. By diminishing open voids, sites which is an origin of plasma erosion can be diminished. Thus, a ceramic member having excellent plasma resistance can be provided. By inhibiting abnormal grain growth to form a ceramic member constituted of stall grains, particle contamination by dusting can be reduced. Thus, plasma resistance and preventing particulate contamination can be improved.

    摘要翻译: 提供了具有高密度,小粒径和优异的等离子体电阻的陶瓷构件。 陶瓷构件由微细晶粒构成,微细晶粒是以氧化钇为主要成分并通过烧制获得的陶瓷构件,其中陶瓷构件具有通过阿基米德法测定的孔隙率, 小于0.5%。 通过减少开放空隙,可以减少等离子体侵蚀的原因。 因此,可以提供具有优异等离子体电阻的陶瓷构件。 通过抑制异常晶粒生长以形成由失速颗粒构成的陶瓷构件,可以减少由粉尘引起的颗粒污染。 因此,可以提高等离子体电阻和防止颗粒污染。

    Rare-earth oxide sintered body and manufacturing method
    10.
    发明授权
    Rare-earth oxide sintered body and manufacturing method 失效
    稀土氧化物烧结体及其制造方法

    公开(公告)号:US07670982B2

    公开(公告)日:2010-03-02

    申请号:US12283507

    申请日:2008-09-12

    IPC分类号: C04B35/50

    摘要: A rare-earth oxide sintered body, or corrosion-resistant material, having low sintering temperature and high density is prepared by adding a boron compound at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (B2O3) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, after which the mixed powder is formed and sintered. The sintered body comprises at least one of La2O3, Nd2O3, Sm2O3, Eu2O3, Gd2O3, Dy2O3, Ho2O3, Er2O3, Tm2O3, Yb2O3, Lu2O3, and Sc2O3, and at least one of Ln3BO6 (Ln=La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Lu), and Sc3BO6 as a main constituent crystal thereof.

    摘要翻译: 通过在转化为氧化硼(B 2 O 3)中添加比例为0.06摩尔%以上且小于25摩尔%的硼化合物,制备具有低烧结温度和高密度的稀土氧化物烧结体或耐腐蚀材料 )到La,Nd,Sm,Eu,Gd,Dy,Ho,Er,Tm,Yb,Lu和Sc中的至少一种的氧化物粉末,之后形成混合粉末并烧结。 烧结体包括La 2 O 3,Nd 2 O 3,Sm 2 O 3,Eu 2 O 3,Gd 2 O 3,Dy 2 O 3,Ho 2 O 3,Er 2 O 3,Tm 2 O 3,Yb 2 O 3,Lu 2 O 3和Sc 2 O 3中的至少一种,Ln 3 BO 6(L n = La,Nd,Sm, Gd,Dy,Ho,Er,Tm,Yb和Lu)和Sc3BO6作为其主要构成晶体。