摘要:
This producing method includes: a preparing step of preparing a pair of ceramic sintered bodies at least one of which is formed by a reaction sintering method and contains free silicon; a forming step of interposing a joining slurry between the joined surfaces of the pair of ceramic sintered bodies and thereafter drying the joining slurry, to form a fine particle layer, the joining slurry obtained by dispersing fine particles containing a carbon element in an organic solvent; and a joining step of heating the pair of ceramic sintered bodies in an inert atmosphere with the pair of ceramic sintered bodies held so that the fine particle layer is pressurized, to introduce the free silicon into the fine particle layer, thereby forming a joining layer containing at least silicon carbide so that the pair of ceramic sintered bodies are joined to each other, to obtain the ceramic joined body.
摘要:
Non-destructive analysis is carried out by irradiating an object with X-rays, for example, so that the X-rays from the object are incident on an analyzer crystal. The analyzer crystal can be of a transmission-type or a reflection-type. A pre-crystal device is used to make the radiation monochromated and parallelized. Atomic lattice planes of the pre-crystal device are approximately parallel with the atomic lattice planes of the analyzer crystal so as to use the angular analysis capability of the analyzer crystal. The thickness of the analyzer crystal is fixed. For example, for a transmission-type analyzer crystal, the thickness is such that irradiation with monochromatic parallel X-rays in the absence of the object results in a condition in which either one of (a) X-rays along a forward diffraction direction and (b) X-rays along a diffraction direction obtained by dynamical diffraction by the transmission type analyzer crystal have an intensity of nearly zero as compared to the intensity of the other with respect to the monochromatic parallel X-rays. At least one or both of an X-ray dark-field image and an X-ray bright-field are obtained.
摘要:
A composite material according the invention includes boron carbide, silicon carbide, and silicon as main components, wherein an average grain diameter of boron carbide grains of the composite material is 10 μm or more and 30 μm or less.
摘要:
The object of the present invention is to provide a rare-earth oxide sintered body having low sintering temperature and high density. A boron compound is added at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (B2O3) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, the mixed powder is formed and sintered.
摘要翻译:本发明的目的是提供一种具有低烧结温度和高密度的稀土氧化物烧结体。 当将氧化硼(B 2 O 3 O 3)转化为氧化硼(B 2 O 3 O 3)时,以0.06mol%以上且小于25mol%的比例加入硼化合物 La,Nd,Sm,Eu,Gd,Dy,Ho,Er,Tm,Yb,Lu和Sc中的至少一种,形成并烧结混合粉末。
摘要:
Sanitary wares having a controlled surface are disclosed which are less likely to be stained or soiled and/or possess excellent gloss. The first sanitary ware comprises a sanitary ware body and a surface glaze layer provided on the sanitary ware body, wherein the surface glaze layer has a center line average roughness Ra of less than 0.07 &mgr;m. This sanitary ware is advantageous in that stains or soils are much less likely to be adhered to the surface thereof and, even when adhered to the surface thereof, can be removed by a weak water stream. The second sanitary ware comprises a sanitary ware body and a surface glaze layer provided on the sanitary ware body, wherein the surface glaze layer has a kurtosis Rku of less than 2.70. This sanitary ware advantageously possesses excellent surface gloss. The third sanitary ware comprises a sanitary ware body and a surface glaze layer provided on the sanitary ware body, wherein the surface of the surface glaze layer consists essentially of a vitreous component and is free from silica particles having a particle diameter of not less than 10 &mgr;m. This sanitary ware is advantageous in that stains or soils are less likely to be adhered to the surface thereof.
摘要:
A corrosion-resistant member includes a ceramic member containing yttrium oxide as a main component, containing cerium element, and obtained by firing under a nonoxidizing atmosphere. The corrosion-resistant member that has high corrosion-resistant characteristics and includes a ceramic member having a low volume resistivity can be provided.
摘要:
The present invention provides an electrostatic chuck in which the surface can be kept smooth after being exposed to plasma, so as to protect a material to be clamped such as a silicon wafer from being contaminated with particles, and which is excellent in clamping and releasing a material to be clamped and easy to manufacture by low-temperature firing. The electrostatic chuck includes a dielectric material in which alumina is 99.4 wt % or more, and titanium oxide is more than 0.2 wt % and equal to or less than 0.6 wt %, wherein the electrostatic chuck's volume resistivity is 108-1011 Ωcm in room temperature, and wherein the titanium oxide segregates in boundaries of particles of the alumina.
摘要:
A ceramic member having a high density, small grain diameter, and excellent plasma resistance is provided. The ceramic member is constituted of a fine structure composed of fine grains, which is a ceramic member comprising an yttria as a main component and obtained through firing, wherein the ceramic member has an open porosity, as determined through a measurement by the Archimedes method, of less than 0.5%. By diminishing open voids, sites which is an origin of plasma erosion can be diminished. Thus, a ceramic member having excellent plasma resistance can be provided. By inhibiting abnormal grain growth to form a ceramic member constituted of stall grains, particle contamination by dusting can be reduced. Thus, plasma resistance and preventing particulate contamination can be improved.
摘要:
An electrostatic chuck includes a ceramic member containing yttrium oxide as a main component, containing cerium element and obtained by firing under a nonoxidizing atmosphere. The electrostatic chuck that has high corrosion resistant characteristics and includes a ceramic member having a low volume resistivity with a strong attracting force that utilize the Johnsen-Rahbeck force can be obtained.
摘要:
A rare-earth oxide sintered body, or corrosion-resistant material, having low sintering temperature and high density is prepared by adding a boron compound at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (B2O3) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, after which the mixed powder is formed and sintered. The sintered body comprises at least one of La2O3, Nd2O3, Sm2O3, Eu2O3, Gd2O3, Dy2O3, Ho2O3, Er2O3, Tm2O3, Yb2O3, Lu2O3, and Sc2O3, and at least one of Ln3BO6 (Ln=La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Lu), and Sc3BO6 as a main constituent crystal thereof.
摘要翻译:通过在转化为氧化硼(B 2 O 3)中添加比例为0.06摩尔%以上且小于25摩尔%的硼化合物,制备具有低烧结温度和高密度的稀土氧化物烧结体或耐腐蚀材料 )到La,Nd,Sm,Eu,Gd,Dy,Ho,Er,Tm,Yb,Lu和Sc中的至少一种的氧化物粉末,之后形成混合粉末并烧结。 烧结体包括La 2 O 3,Nd 2 O 3,Sm 2 O 3,Eu 2 O 3,Gd 2 O 3,Dy 2 O 3,Ho 2 O 3,Er 2 O 3,Tm 2 O 3,Yb 2 O 3,Lu 2 O 3和Sc 2 O 3中的至少一种,Ln 3 BO 6(L n = La,Nd,Sm, Gd,Dy,Ho,Er,Tm,Yb和Lu)和Sc3BO6作为其主要构成晶体。