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1.发明申请PLASMA GENERATING DEVICE AND FILM DEPOSITION METHOD IN WHICH THE PLASMA GENERATING DEVICE IS USED 审中-公开使用等离子体生成装置的等离子体生成装置和膜沉积方法公开(公告)号：US20090266703A1
公开(公告)日：2009-10-29
申请号：US11997697
申请日：2006-07-31
申请人： Nan Jiang , Hong-Xing Wang , Akio Hiraki , Masanori Haba
发明人： Nan Jiang , Hong-Xing Wang , Akio Hiraki , Masanori Haba
CPC分类号： H01J37/32596 , C23C14/0036 , C23C14/0605 , C23C16/26 , H05H1/48
摘要： Problem: To generate long plasma easily at low cost and to perform a plurality of film deposition methods using a single plasma generating device.Means for Solving the Problem A plasma generating device is provided with, in the vacuum inside thereof, a cylindrical electrode comprising an opening in a part thereof and generating plasma therein when gas is introduced thereinto and a direct-current negative voltage is applied thereto.
摘要翻译： 问题：以低成本容易地产生长等离子体并且使用单个等离子体产生装置执行多个成膜方法。 解决问题的手段等离子体产生装置在其内部的真空中设置有圆柱形电极，该圆柱形电极包括其一部分中的开口并在其中引入气体并在其中施加直流负电压时产生等离子体。
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公开(公告)号：US08421330B2
公开(公告)日：2013-04-16
申请号：US12912303
申请日：2010-10-26
申请人： Masanori Haba , Nan Jiang , Hong-Xing Wang , Akio Hiraki
发明人： Masanori Haba , Nan Jiang , Hong-Xing Wang , Akio Hiraki
IPC分类号： H01J1/30
CPC分类号： H01J1/304 , H01J2329/00
摘要： A carbon film of the present invention has an elongated needle shape whose radius decreases toward a tip. The shape is, preferably, a shape in which a field concentration coefficient β in the Fowler-Nordheim equation is expressed by h/r where r denotes the radius in an arbitrary position and h denotes height from the arbitrary position to the tip.
摘要翻译： 本发明的碳膜具有朝向尖端的半径减小的细长针状。 形状优选为场浓度系数＆bgr; 在Fowler-Nordheim方程中用h / r表示，其中r表示任意位置的半径，h表示从任意位置到尖端的高度。
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公开(公告)号：US07839067B2
公开(公告)日：2010-11-23
申请号：US11500988
申请日：2006-08-09
申请人： Masanori Haba , Nan Jiang , Hong-Xing Wang , Akio Hiraki
发明人： Masanori Haba , Nan Jiang , Hong-Xing Wang , Akio Hiraki
IPC分类号： H01J1/02
CPC分类号： H01J1/304 , H01J2329/00
摘要： A carbon film of the present invention has an elongated needle shape whose radius decreases toward a tip. The shape is, preferably, a shape in which a field concentration coefficient β in the Fowler-Nordheim equation is expressed by h/r where r denotes the radius in an arbitrary position and h denotes height from the arbitrary position to the tip.
摘要翻译： 本发明的碳膜具有朝向尖端的半径减小的细长针状。 形状优选为场浓度系数＆bgr; 在Fowler-Nordheim方程中用h / r表示，其中r表示任意位置的半径，h表示从任意位置到尖端的高度。
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公开(公告)号：US20070035227A1
公开(公告)日：2007-02-15
申请号：US11500988
申请日：2006-08-09
申请人： Masanori Haba , Nan Jiang , Hong-Xing Wang , Akio Hiraki
发明人： Masanori Haba , Nan Jiang , Hong-Xing Wang , Akio Hiraki
CPC分类号： H01J1/304 , H01J2329/00
摘要： A carbon film of the present invention has an elongated needle shape whose radius decreases toward a tip. The shape is, preferably, a shape in which a field concentration coefficient β in the Fowler-Nordheim equation is expressed by h/r where r denotes the radius in an arbitrary position and h denotes height from the arbitrary position to the tip.
摘要翻译： 本发明的碳膜具有朝向尖端的半径减小的细长针状。 该形状优选为Fowler-Nordheim方程中的场浓度系数β由h / r表示的形状，其中r表示任意位置的半径，h表示从任意位置到尖端的高度。
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公开(公告)号：US08518542B2
公开(公告)日：2013-08-27
申请号：US12471496
申请日：2009-05-26
申请人： Akio Hiraki , Masanori Haba , Hong-Xing Wang
发明人： Akio Hiraki , Masanori Haba , Hong-Xing Wang
IPC分类号： B32B9/00
CPC分类号： B82Y40/00 , B82Y30/00 , C01B32/05 , C01B32/16 , Y10T428/23957 , Y10T428/30
摘要： The present invention provides a carbon film that is remarkably excellent in current voltage (IV) characteristics. This is achieved by way of a carbon film structure, two or more carbon film assembly units 12 are formed on a substrate 10. The carbon film assembly units 12 comprise: a stem-like carbon film 14 which is made into a film in the shape of a long and thin needle; and a branch-like carbon film cluster 16 which is made into a film so as to surround the stem-like carbon film 14 from the halfway to the lower part of this stem-like carbon film 14. The stem-like carbon film 14 has the shape of a long and thin needle having a configuration which has a spiral streak-like step part 18 towards the distal end at the circumference face of a near tip and in which the radius becomes small as going to the distal end.
摘要翻译： 本发明提供一种在电流（IV）特性方面非常优异的碳膜。 这通过碳膜结构实现，在基板10上形成两个或更多个碳膜组件单元12.碳膜组件单元12包括：杆状碳膜14，其制成形状为膜 长针细针 以及从该棒状碳膜14的中途到下部，将树脂状碳膜14从树脂状碳膜14包围而形成薄膜状的分支状碳膜簇16.该茎状碳膜14具有 长而细的针的形状，其具有在近尖端的圆周面处朝向远端的螺旋条纹状台阶部18，并且其中半径变得小到进入远端的构造。
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公开(公告)号：US20100304077A1
公开(公告)日：2010-12-02
申请号：US12471496
申请日：2009-05-26
申请人： Hong-Xing Wang , Akio Hiraki , Masanori Haba
发明人： Hong-Xing Wang , Akio Hiraki , Masanori Haba
CPC分类号： B82Y40/00 , B82Y30/00 , C01B32/05 , C01B32/16 , Y10T428/23957 , Y10T428/30
摘要： The present invention provides a carbon film that is remarkably excellent in current voltage (IV) characteristics. This is achieved by way of a carbon film structure, two or more carbon film assembly units 12 are formed on a substrate 10. The carbon film assembly units 12 comprise: a stem-like carbon film 14 which is made into a film in the shape of a long and thin needle; and a branch-like carbon film cluster 16 which is made into a film so as to surround the stem-like carbon film 14 from the halfway to the lower part of this stem-like carbon film 14. The stem-like carbon film 14 has the shape of a long and thin needle having a configuration which has a spiral streak-like step part 18 towards the distal end at the circumference face of a near tip and in which the radius becomes small as going to the distal end.
摘要翻译： 本发明提供一种在电流（IV）特性方面非常优异的碳膜。 这通过碳膜结构实现，在基板10上形成两个或更多个碳膜组件单元12.碳膜组件单元12包括：杆状碳膜14，其制成形状为膜 长针细针 以及从该棒状碳膜14的中途到下部，将树脂状碳膜14从树脂状碳膜14包围而形成薄膜状的分支状碳膜簇16.该茎状碳膜14具有 长而细的针的形状，其具有在近尖端的圆周面处朝向远端的螺旋条纹状台阶部18，并且其中半径变得小到进入远端的构造。
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公开(公告)号：US20050275329A1
公开(公告)日：2005-12-15
申请号：US11002984
申请日：2004-12-03
申请人： Akio Hiraki , Masanori Haba
发明人： Akio Hiraki , Masanori Haba
CPC分类号： H01J63/06 , B82Y10/00 , H01J1/304 , H01J2201/30469
摘要： This field electron emission device comprises a linear conductor wire having concave/convex on its surface and an electron emitter having electron conductivity formed on the concave/convex surface of the conductor wire. Preferably, the concave/convex is formed by a channeling performed to the surface of the conductor wire. Preferably, the electron emitter is composed of microscopic linear materials composed of selected one or combination of carbon nano-tube, carbon nano-wall, carbon fiber, graphite fiber, amorphous carbon fiber and diamond fiber.
摘要翻译： 该场电子发射器件包括在其表面上具有凹/凸的线性导体线和在导线的凹/凸表面上形成的具有电子传导性的电子发射器。 优选地，通过对导体线的表面进行沟槽来形成凹/凸。 优选地，电子发射体是由选自碳纳米管，碳纳米壁，碳纤维，石墨纤维，无定形碳纤维和金刚石纤维中选择的一种或组合构成的微观线性材料组成的。
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公开(公告)号：US20120194057A1
公开(公告)日：2012-08-02
申请号：US13380741
申请日：2010-02-23
IPC分类号： H01J1/14
CPC分类号： H01J35/065 , H01J2201/30469 , H01J2235/068
摘要： Provided are an electron emitting body having a high electron beam density and an X-ray emitting device embedding the electron emitting body. The electron emitting body has a substrate, the surface of which forms a concave surface, and a carbon film comprising a large number of projections made of carbon and expanded two-dimensionally. The carbon crystal grows such that first a swell portion (22) gradually becomes larger and then a needle-like portion (23) grows from the head of the swell portion (22). The needle-like portion (23) has a graphene sheet obliquely wound therearound in a multi-layer fashion and has a hollow inside. The axis of a carbon projection (21) thus formed is substantially orthogonal to a line tangent to the concave surface (11), so that the axes of a plurality of the carbon projections (21) intersect with each other at the focal point (F) of the concave surface (11).
摘要翻译： 提供具有高电子束密度的电子发射体和嵌入电子发射体的X射线发射装置。 电子发射体具有其表面形成凹面的基板和由碳制成的多个突起二维膨胀的碳膜。 碳晶体生长成使得首先使隆起部分（22）逐渐变大，然后从该隆起部分（22）的头部开始形成针状部分（23）。 针状部（23）具有以多层方式倾斜缠绕的石墨烯片，在其内部具有中空。 这样形成的碳突起（21）的轴线基本上垂直于与凹面（11）相切的线，使得多个碳突起（21）的轴线在焦点（F）处彼此相交 ）的凹面（11）。
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公开(公告)号：US07432643B2
公开(公告)日：2008-10-07
申请号：US11058362
申请日：2005-02-16
申请人： Masanori Haba , Hirokazu Fujii
发明人： Masanori Haba , Hirokazu Fujii
IPC分类号： H01J1/62
摘要： A lighting device of the present invention has a wire-shaped cathode provided along an axial direction, a phosphor-coated anode that opposes to the wire-shaped cathode in the axial direction and a vacuum sealing tube that vacuum-seals these cathode and anode, wherein the wire-shaped cathode has a wire and a carbon film provided on the entire circumference of this wire, and the phosphor-coated anode has an anode section and a phosphor section provided on this anode section.
摘要翻译： 本发明的照明装置具有沿轴向设置的线状阴极，与轴线方向的线状阴极相对的荧光体涂覆的阳极和真空密封阴极和阳极的真空密封管， 其特征在于，所述线状阴极具有设置在该导线的整个圆周上的导线和碳膜，并且所述荧光体涂覆的阳极具有设置在该阳极部上的阳极部和荧光体部。
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10.发明申请公开(公告)号：US20110115363A1
公开(公告)日：2011-05-19
申请号：US13055560
申请日：2009-07-30
IPC分类号： H01J9/02
CPC分类号： H01J35/065 , H01J1/304 , H01J3/021 , H01J2201/30453 , H01J2235/062
摘要： An electron emitter includes a guard electrode 13 on the outer circumferential side of a carbon film structure 10 which is formed on a substrate 7 by plasma CVD method. This guard electrode 13 includes a curved surface portion (a curved surface portion that curves from top toward a side opposite to the film-forming direction) 13a convex in a film-forming direction of the carbon film structure 10. A curvature radius R1 of an outer-circumferential-side portion of the curved surface portion 13a is larger than or equal to a curvature radius R2 of a carbon-film-structure-side portion of the curved surface portion 13a.
摘要翻译： 电子发射体在碳膜结构体10的外周侧具有通过等离子体CVD法在基板7上形成的保护电极13。 该保护电极13包括在碳膜结构体10的成膜方向上凸出的曲面部（从顶部朝向与成膜方向相反的一侧弯曲的曲面部）13a。曲率半径R1为 曲面部13a的外周侧部分大于或等于曲面部分13a的碳膜结构侧部分的曲率半径R2。
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