Apparatus made of silica for semiconductor device fabrication
    1.
    发明授权
    Apparatus made of silica for semiconductor device fabrication 失效
    由二氧化硅制成的用于半导体器件制造的器件

    公开(公告)号:US5395452A

    公开(公告)日:1995-03-07

    申请号:US77645

    申请日:1993-06-17

    摘要: In a apparatus made of silica such as a heating furnace, a wafer basket, stick or the like used for semiconductor device fabrication, a first silica layer on the side faced to a semiconductor wafer contains a large amount of the OH group, and a second silica layer on the opposed side contains a small amount of the OH group. With this structure, it is possible to reduce the amount of impurities released through the first silica layer, and to suppress the deformation of the apparatus by the second silica layer. Also, by holding a third silica layer between the first and second silica layers, it is possible to further reduce the amount of impurities released from the first silica layer.

    摘要翻译: 在用于半导体器件制造的加热炉,晶圆筐,棒等二氧化硅的装置中,与半导体晶片相对的一侧的第一二氧化硅层含有大量的OH基,第二 相对侧的二氧化硅层含有少量的OH基。 通过这种结构,可以减少通过第一二氧化硅层释放的杂质的量,并且抑制第二二氧化硅层的装置的变形。 此外,通过在第一和第二二氧化硅层之间保持第三二氧化硅层,可以进一步减少从第一二氧化硅层释放的杂质的量。

    Method for fabricating a semiconductor device including a step for
cleaning a semiconductor substrate
    2.
    发明授权
    Method for fabricating a semiconductor device including a step for cleaning a semiconductor substrate 失效
    用于制造半导体器件的方法,包括用于清洁半导体衬底的步骤

    公开(公告)号:US5176756A

    公开(公告)日:1993-01-05

    申请号:US750582

    申请日:1991-08-28

    IPC分类号: H01L21/304 H01L21/306

    CPC分类号: H01L21/02052

    摘要: A method for fabricating a semiconductor device comprises the steps of cleaning a semiconductor substrate in a cleaning liquid essentially consisted of a mixture of an ammonia water having a composition of 29 percent by weight, a hydrogen peroxide aqueous solution having a composition of 31 percent by weight and a deionized water. The cleaning liquid contains the ammonia water and the hydrogen peroxide aqueous solution with respective volume parts such that the volume part of the ammonia is set equal to or smaller than 30 parts with respect to the deionized water of 1000 parts, the volume part of the ammonia water is set equal to or smaller than the volume part of the hydrogen peroxide aqueous solution, and the volume part of the hydrogen peroxide aqueous solution is set equal to or smaller than 100 parts with respect to the deionized water of 1000 parts. The volume part of the hydrogen peroxide aqueous solution is further set equal to or smaller than a boundary composition Y2 represented asY.sub.2 =0.25 X.sub.3 -2.75 X.sub.2 +13.5 X-10,where X represents the volume part of the ammonia water in 1000 parts of the deionized water.

    Method for rinsing plate-shaped articles and cleaning bath and cleaning
equipment used in the same
    3.
    发明授权
    Method for rinsing plate-shaped articles and cleaning bath and cleaning equipment used in the same 失效
    漂洗板状物品及清洗浴及其使用的清洗设备的方法

    公开(公告)号:US5927302A

    公开(公告)日:1999-07-27

    申请号:US527979

    申请日:1995-09-14

    摘要: A plate-shaped article is immersed in a cleaning liquid filling a cleaning bath having an overflowing surface through which the cleaning liquid flows out, and is rinsed out. In the cleaning bath, streams mostly being directed away from a predetermined plane approximately perpendicular to the overflowing surface are formed. The plate-shaped article is then brought into the cleaning liquid having the stream maintaining a state where the plate-shaped article intersects the predetermined plane and the surfaces of the plate-shaped article are in approximately parallel to the streams mostly being directed away from the predetermined plane on the surface of the cleaning liquid.

    摘要翻译: 将板状物品浸渍在填充有清洗液流过的溢流面的清洗液的清洗液中,并将其清洗干净。 在清洗槽中,形成大致垂直于溢出表面的预定平面远离的流。 然后将板状制品带入具有保持板状制品与预定平面相交的状态的流的清洁液体中,并且板状制品的表面大致平行于大致与远离 在清洁液表面上的预定平面。

    Method for rinsing plate-shaped articles
    4.
    发明授权
    Method for rinsing plate-shaped articles 失效
    漂洗板状物品的方法

    公开(公告)号:US5474616A

    公开(公告)日:1995-12-12

    申请号:US44064

    申请日:1993-04-06

    摘要: A plate-shaped article is immersed in a cleaning liquid filling a cleaning bath having an overflowing surface through which the cleaning liquid flows out, and is rinsed out. In the cleaning bath, streams mostly being directed away from a predetermined plane approximately perpendicular to the overflowing surface are formed. The plate-shaped article is then brought into the cleaning liquid having the stream maintaining a state where the plate-shaped article intersects the predetermined plane and the surfaces of the plate-shaped article are in approximately parallel to the streams mostly being directed away from the predetermined plane on the surface of the cleaning liquid.

    摘要翻译: 将板状物品浸渍在填充有清洗液流过的溢流面的清洗液的清洗液中,并将其清洗干净。 在清洗槽中,形成大致垂直于溢出表面的预定平面远离的流。 然后将板状制品带入具有保持板状制品与预定平面相交的状态的流的清洁液体中,并且板状制品的表面大致平行于大致与远离 在清洁液表面上的预定平面。

    Production process of poly(arylene sulfide) and poly(arylene sulfide)
    5.
    发明授权
    Production process of poly(arylene sulfide) and poly(arylene sulfide) 有权
    聚(亚芳基硫醚)和聚(亚芳基硫醚)的生产工艺

    公开(公告)号:US09096723B2

    公开(公告)日:2015-08-04

    申请号:US13989714

    申请日:2011-10-18

    IPC分类号: C08G75/16 C08G75/02

    CPC分类号: C08G75/16 C08G75/02

    摘要: A production process of a poly(arylene sulfide), including (a) a polymerization step of polymerizing at least one sulfur source selected from the group consisting of alkali metal sulfides and alkali metal hydrosulfides and a dihalo-aromatic compound in an organic amide solvent to form a polymer; (b) a separation step of separating the polymer from a liquid reaction mixture containing the polymer formed after the polymerization step; (c) a washing step of washing the polymer with at least one washing liquid selected from the group consisting of water, an organic solvent and a mixed solution of water and an organic solvent as desired; and (d) an aqueous oxidizing solution treatment step of treating the polymer by bringing the polymer into contact with an aqueous oxidizing solution.

    摘要翻译: 一种聚(亚芳基硫醚)的制造方法,包括(a)聚合步骤,将选自碱金属硫化物和碱金属氢硫化物中的至少一种硫源和二卤代芳族化合物在有机酰胺溶剂中聚合, 形成聚合物; (b)从含有聚合步骤后形成的聚合物的液体反应混合物分离聚合物的分离步骤; (c)洗涤步骤,根据需要用至少一种选自水,有机溶剂和水与有机溶剂的混合溶液的洗涤液洗涤聚合物; 和(d)通过使聚合物与氧化水溶液接触来处理聚合物的水性氧化溶液处理步骤。

    EXCAVATION MACHINE
    7.
    发明申请
    EXCAVATION MACHINE 有权
    挖掘机

    公开(公告)号:US20140084668A1

    公开(公告)日:2014-03-27

    申请号:US14112793

    申请日:2012-06-27

    IPC分类号: E21D9/11

    CPC分类号: E21D9/112

    摘要: An excavation machine having a cutter head with a large diameter while making it possible to excavate excavation objects such as hard bedrock etc. with high efficiency is provided. The excavation machine comprises an outer circumference cutter head 20 having a circular opening and being rotated and contacted to excavation objects and a small diameter cutter head 23 disposed in the opening and rotatable independently from the outer circumference cutter head. Rotation centers of the rotation disk and the rotation plate are gapped and the gap is shorter than a rotation radius of the small diameter cutter head.

    摘要翻译: 提供了具有大直径的切割头的挖掘机,同时能够高效率地挖掘诸如硬质基岩等挖掘对象。 挖掘机包括具有圆形开口并与挖掘物体旋转接触的外圆周切割头20和设置在开口中并与外周切割头独立旋转的小直径刀头23。 旋转盘和旋转板的旋转中心被间隙并且间隙比小直径刀头的旋转半径短。

    Spectral image acquiring apparatus
    8.
    发明授权
    Spectral image acquiring apparatus 有权
    光谱图像采集装置

    公开(公告)号:US08593631B2

    公开(公告)日:2013-11-26

    申请号:US13275572

    申请日:2011-10-18

    IPC分类号: G01J3/40 G01J3/45 G01B9/02

    摘要: A spectral image acquiring apparatus includes an optical filter on which light is incident; an image sensor including a two-dimensionally disposed pixel array for detecting the light via the optical filter; and a signal processing unit generating a difference-value image based on a detection signal from the image sensor. The optical filter includes a diffraction grating having a lattice pattern corresponding to one or more pixels on the image sensor. The signal processing unit calculates a difference value in an amount of received light between two adjacent pixels based on the detection signal from the image sensor, and generates the difference-value image based on the difference value. The difference value between the two adjacent pixels is varied depending on a difference in an interference point on the image sensor corresponding to a diffraction angle of the light that has passed through the diffraction grating.

    摘要翻译: 光谱图像获取装置包括光入射的滤光器; 图像传感器,包括用于经由滤光器检测光的二维布置的像素阵列; 以及信号处理单元,其基于来自图像传感器的检测信号生成差值图像。 光学滤波器包括具有对应于图像传感器上的一个或多个像素的格子图案的衍射光栅。 信号处理单元基于来自图像传感器的检测信号计算两个相邻像素之间的接收光量的差值,并基于差值生成差值图像。 两个相邻像素之间的差值取决于对应于已经通过衍射光栅的光的衍射角的图像传感器上的干涉点的差异。

    Liquid droplet recognition apparatus, raindrop recognition apparatus, and on-vehicle monitoring apparatus
    9.
    发明授权
    Liquid droplet recognition apparatus, raindrop recognition apparatus, and on-vehicle monitoring apparatus 有权
    液滴识别装置,雨滴识别装置和车载监视装置

    公开(公告)号:US08466960B2

    公开(公告)日:2013-06-18

    申请号:US12693864

    申请日:2010-01-26

    IPC分类号: H04N7/18

    摘要: Disclosed is a liquid droplet recognition apparatus for detecting liquid droplets attached to a front surface of a transparent member. The apparatus includes an image pickup apparatus that picks up a vertically polarized light image and a horizontally polarized light image at the front surface of the transparent member from a side of a rear surface of the transparent member; and a signal processing unit that determines whether the liquid droplets are attached to the front surface of the transparent member based on a polarized-light image ratio composed of the vertically polarized light image and the horizontally polarized light image picked up by the image pickup apparatus.

    摘要翻译: 公开了一种用于检测附着在透明构件前表面上的液滴的液滴识别装置。 该装置包括从透明构件的后表面侧在透明构件的前表面拾取垂直偏振光图像和水平偏振光图像的图像拾取装置; 以及信号处理单元,其基于由垂直偏振光图像和由图像拾取装置拾取的水平偏振光图像组成的偏振光图像比,确定液滴是否附着到透明构件的前表面。