摘要:
In a apparatus made of silica such as a heating furnace, a wafer basket, stick or the like used for semiconductor device fabrication, a first silica layer on the side faced to a semiconductor wafer contains a large amount of the OH group, and a second silica layer on the opposed side contains a small amount of the OH group. With this structure, it is possible to reduce the amount of impurities released through the first silica layer, and to suppress the deformation of the apparatus by the second silica layer. Also, by holding a third silica layer between the first and second silica layers, it is possible to further reduce the amount of impurities released from the first silica layer.
摘要:
A method for fabricating a semiconductor device comprises the steps of cleaning a semiconductor substrate in a cleaning liquid essentially consisted of a mixture of an ammonia water having a composition of 29 percent by weight, a hydrogen peroxide aqueous solution having a composition of 31 percent by weight and a deionized water. The cleaning liquid contains the ammonia water and the hydrogen peroxide aqueous solution with respective volume parts such that the volume part of the ammonia is set equal to or smaller than 30 parts with respect to the deionized water of 1000 parts, the volume part of the ammonia water is set equal to or smaller than the volume part of the hydrogen peroxide aqueous solution, and the volume part of the hydrogen peroxide aqueous solution is set equal to or smaller than 100 parts with respect to the deionized water of 1000 parts. The volume part of the hydrogen peroxide aqueous solution is further set equal to or smaller than a boundary composition Y2 represented asY.sub.2 =0.25 X.sub.3 -2.75 X.sub.2 +13.5 X-10,where X represents the volume part of the ammonia water in 1000 parts of the deionized water.
摘要:
A plate-shaped article is immersed in a cleaning liquid filling a cleaning bath having an overflowing surface through which the cleaning liquid flows out, and is rinsed out. In the cleaning bath, streams mostly being directed away from a predetermined plane approximately perpendicular to the overflowing surface are formed. The plate-shaped article is then brought into the cleaning liquid having the stream maintaining a state where the plate-shaped article intersects the predetermined plane and the surfaces of the plate-shaped article are in approximately parallel to the streams mostly being directed away from the predetermined plane on the surface of the cleaning liquid.
摘要:
A plate-shaped article is immersed in a cleaning liquid filling a cleaning bath having an overflowing surface through which the cleaning liquid flows out, and is rinsed out. In the cleaning bath, streams mostly being directed away from a predetermined plane approximately perpendicular to the overflowing surface are formed. The plate-shaped article is then brought into the cleaning liquid having the stream maintaining a state where the plate-shaped article intersects the predetermined plane and the surfaces of the plate-shaped article are in approximately parallel to the streams mostly being directed away from the predetermined plane on the surface of the cleaning liquid.
摘要:
A production process of a poly(arylene sulfide), including (a) a polymerization step of polymerizing at least one sulfur source selected from the group consisting of alkali metal sulfides and alkali metal hydrosulfides and a dihalo-aromatic compound in an organic amide solvent to form a polymer; (b) a separation step of separating the polymer from a liquid reaction mixture containing the polymer formed after the polymerization step; (c) a washing step of washing the polymer with at least one washing liquid selected from the group consisting of water, an organic solvent and a mixed solution of water and an organic solvent as desired; and (d) an aqueous oxidizing solution treatment step of treating the polymer by bringing the polymer into contact with an aqueous oxidizing solution.
摘要:
Disclosed is a technique for achieving a required herbicidal effect using a small amount of a herbicide. Specifically disclosed are: a granular fertilizer containing a herbicidal agrochemical, which is characterized in that the granular fertilizer has been impregnated or coated with pyroxasulfone; and a weed eradication method which is characterized by applying the granular fertilizer to fields.
摘要:
An excavation machine having a cutter head with a large diameter while making it possible to excavate excavation objects such as hard bedrock etc. with high efficiency is provided. The excavation machine comprises an outer circumference cutter head 20 having a circular opening and being rotated and contacted to excavation objects and a small diameter cutter head 23 disposed in the opening and rotatable independently from the outer circumference cutter head. Rotation centers of the rotation disk and the rotation plate are gapped and the gap is shorter than a rotation radius of the small diameter cutter head.
摘要:
A spectral image acquiring apparatus includes an optical filter on which light is incident; an image sensor including a two-dimensionally disposed pixel array for detecting the light via the optical filter; and a signal processing unit generating a difference-value image based on a detection signal from the image sensor. The optical filter includes a diffraction grating having a lattice pattern corresponding to one or more pixels on the image sensor. The signal processing unit calculates a difference value in an amount of received light between two adjacent pixels based on the detection signal from the image sensor, and generates the difference-value image based on the difference value. The difference value between the two adjacent pixels is varied depending on a difference in an interference point on the image sensor corresponding to a diffraction angle of the light that has passed through the diffraction grating.
摘要:
Disclosed is a liquid droplet recognition apparatus for detecting liquid droplets attached to a front surface of a transparent member. The apparatus includes an image pickup apparatus that picks up a vertically polarized light image and a horizontally polarized light image at the front surface of the transparent member from a side of a rear surface of the transparent member; and a signal processing unit that determines whether the liquid droplets are attached to the front surface of the transparent member based on a polarized-light image ratio composed of the vertically polarized light image and the horizontally polarized light image picked up by the image pickup apparatus.
摘要:
An object identifying apparatus is disclosed, including: an imaging part, and an object identification processing part. The imaging part receives two polarized lights having a different polarization direction included in light reflected from the object existing in the image pickup area and captures two polarization images. The object identification processing part conducts an identification process for identifying the object existing at a place corresponding to each of multiple process areas in the image pickup area by using the two polarization images captured by the imaging part.