Substrate holding apparatus, polishing apparatus, and polishing method
    5.
    发明申请
    Substrate holding apparatus, polishing apparatus, and polishing method 有权
    基板保持装置,抛光装置和抛光方法

    公开(公告)号:US20080318499A1

    公开(公告)日:2008-12-25

    申请号:US12222909

    申请日:2008-08-19

    IPC分类号: B24B1/00

    CPC分类号: B24B37/32

    摘要: A substrate holding apparatus prevents a substrate from slipping out and allows the substrate to be polished stably. The substrate holding apparatus has a top ring body for holding and pressing a substrate against a polishing surface, and a retainer ring for pressing the polishing surface, the retainer ring being disposed on an outer circumferential portion of the top ring body. The retainer ring includes a first member made of a magnetic material and a second member having a magnet disposed on a surface thereof which is held in abutment against the first member.

    摘要翻译: 基板保持装置防止基板滑出并允许基板被稳定地抛光。 基板保持装置具有用于将基板保持并压靠在研磨面上的顶环体,以及用于按压研磨面的保持环,保持环设置在顶环体的外周部。 保持环包括由磁性材料制成的第一构件和具有设置在其表面上的磁体的第二构件,该磁体保持抵靠第一构件。

    Direct-feed ballpoint writing implement

    公开(公告)号:US06755587B2

    公开(公告)日:2004-06-29

    申请号:US10394018

    申请日:2003-03-24

    申请人: Makoto Fukushima

    发明人: Makoto Fukushima

    IPC分类号: B43K710

    CPC分类号: B43K7/01 B43K7/10 B43K23/126

    摘要: A direct-feed ballpoint writing implement includes a barrel internally provided with an ink tank, a grooved member placed in a front part of the barrel and provided with a groove for guiding air and ink, an ink feed member pressed in the grooved member, a barrel tip fixedly joined to a front end part of the grooved member, a ball holder inserted in the barrel tip and put on a front end part of the ink feed member, and a ball held in a front end part of the ball holder. A compression spring may be extended at least between the ink feed member and the ball in the ball holder.

    Substrate holding apparatus, polishing apparatus, and polishing method
    10.
    发明授权
    Substrate holding apparatus, polishing apparatus, and polishing method 有权
    基板保持装置,抛光装置和抛光方法

    公开(公告)号:US08485866B2

    公开(公告)日:2013-07-16

    申请号:US13587371

    申请日:2012-08-16

    IPC分类号: B24B29/00 B24B47/02

    CPC分类号: B24B37/32

    摘要: A substrate holding apparatus prevents a substrate from slipping out and allows the substrate to be polished stably. The substrate holding apparatus has a top ring body for holding and pressing a substrate against a polishing surface, and a retainer ring for pressing the polishing surface, the retainer ring being disposed on an outer circumferential portion of the top ring body. The retainer ring includes a first member made of a magnetic material and a second member having a magnet disposed on a surface thereof which is held in abutment against the first member.

    摘要翻译: 基板保持装置防止基板滑出并允许基板被稳定地抛光。 基板保持装置具有用于将基板保持并压靠在研磨面上的顶环体,以及用于按压研磨面的保持环,保持环设置在顶环体的外周部。 保持环包括由磁性材料制成的第一构件和具有设置在其表面上的磁体的第二构件,该磁体保持抵靠第一构件。