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1.发明授权公开(公告)号：US08303828B2
公开(公告)日：2012-11-06
申请号：US12626380
申请日：2009-11-25
IPC分类号： B44C1/22
CPC分类号： G11B5/855
摘要： Provided is a method for manufacturing, in a simple process, a magnetic recording medium having a distinct magnetic recording pattern formed thereon. A method for manufacturing a magnetic recording medium having a magnetically-separated magnetic recording pattern MP, the method at least including; a first step of forming a first magnetic layer 11 on a non-magnetic substrate 10; a second step of forming a resist layer 12 on the first magnetic layer 11, the resist layer 12 being patterned in correspondence with the magnetic recording pattern MP; a third step of forming a second magnetic layer 13 so as to cover a surface of the first magnetic layer 11 having the resist layer 12 formed thereon; a fourth step of removing the resist layer 12 together with the second magnetic layer 13 formed thereon; and a fifth step of partially removing the first magnetic layer 11 or partially modifying magnetic property of the first magnetic layer 11.
摘要翻译： 提供了一种在简单的工艺中制造其上形成有不同的磁记录图案的磁记录介质的方法。 一种制造具有磁分离磁记录图案MP的磁记录介质的方法，该方法至少包括： 在非磁性基板10上形成第一磁性层11的第一步骤; 在第一磁性层11上形成抗蚀剂层12的第二步骤，抗蚀剂层12与磁记录图案MP对应地构图; 形成第二磁性层13以覆盖其上形成有抗蚀剂层12的第一磁性层11的表面的第三步骤; 与形成在其上的第二磁性层13一起去除抗蚀剂层12的第四步骤; 以及第五步骤，部分地去除第一磁性层11或部分地改变第一磁性层11的磁特性。
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2.发明申请公开(公告)号：US20100128378A1
公开(公告)日：2010-05-27
申请号：US12606723
申请日：2009-10-27
CPC分类号： G11B5/722 , B82Y10/00 , C23C14/165 , G11B5/743 , G11B5/82 , G11B5/855 , Y10T29/49025 , Y10T29/4903 , Y10T29/49032
摘要： A magnetic recording medium which does not easily cause a material containing Fe or Co to corrode is disclosed. The method for manufacturing a magnetic recording medium 122 includes a process of forming a magnetic layer 30 on a non-magnetic substrate 10, a process of forming a recessed area 65 in the magnetic layer 30, a process of forming a corrosion-resistant film 60 to cover an exposure surface 65c of the recessed area 65, and a process of forming a magnetic recording pattern made of the magnetically separated magnetic layer 30 by forming a non-magnetic layer 40 to fill in the recessed area 65.
摘要翻译： 公开了不容易引起含有Fe或Co的材料腐蚀的磁记录介质。 磁记录介质122的制造方法包括在非磁性基板10上形成磁性层30的工序，在磁性层30中形成凹部65的工序，形成耐腐蚀膜60的工序 以覆盖凹陷区域65的曝光表面65c，以及通过形成非磁性层40以填充凹陷区域65来形成由磁分离的磁性层30制成的磁记录图案的过程。
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公开(公告)号：US08250736B2
公开(公告)日：2012-08-28
申请号：US12606723
申请日：2009-10-27
CPC分类号： G11B5/722 , B82Y10/00 , C23C14/165 , G11B5/743 , G11B5/82 , G11B5/855 , Y10T29/49025 , Y10T29/4903 , Y10T29/49032
摘要： A magnetic recording medium which does not easily cause a material containing Fe or Co to corrode is disclosed. The method for manufacturing a magnetic recording medium 122 includes a process of forming a magnetic layer 30 on a non-magnetic substrate 10, a process of forming a recessed area 65 in the magnetic layer 30, a process of forming a corrosion-resistant film 60 to cover an exposure surface 65c of the recessed area 65, and a process of forming a magnetic recording pattern made of the magnetically separated magnetic layer 30 by forming a non-magnetic layer 40 to fill in the recessed area 65.
摘要翻译： 公开了不容易引起含有Fe或Co的材料腐蚀的磁记录介质。 磁记录介质122的制造方法包括在非磁性基板10上形成磁性层30的工序，在磁性层30中形成凹部65的工序，形成耐腐蚀膜60的工序 以覆盖凹陷区域65的曝光表面65c，以及通过形成非磁性层40以填充凹陷区域65来形成由磁分离的磁性层30制成的磁记录图案的过程。
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4.发明申请METHOD OF PRODUCING MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING AND REPRODUCING APPARATUS 审中-公开制造磁记录介质和磁记录和再现装置的方法公开(公告)号：US20120044596A1
公开(公告)日：2012-02-23
申请号：US13255450
申请日：2010-03-08
CPC分类号： G11B5/855
摘要： There is provided a method of producing a magnetic recording medium having a magnetically separated magnetic recording pattern formed therein, without oxidizing or halogenating a surface of a magnetic layer, and also without contaminating the surface with dust and without complicating a production process,the method of producing a magnetic recording medium characterized by including, in this order: a step of forming a magnetic layer (2) on top of a non-magnetic substrate (1); a step of forming a mask layer (3) for forming a magnetic recording pattern on top of the magnetic layer (2); and a step of irradiating an ion beam (10) onto regions in the magnetic layer (2) which are not covered by the mask layer (3), removing an upper layer portion of the magnetic layer (2) at that regions (7), and reforming magnetic properties of a lower layer portion (8), wherein two or more types of positive ions having different masses are used for the ion beam (10), and an ion gun for forming the ion beam has a positive electrode that forces out positive ions from an ion source towards a substrate side, and a negative electrode that accelerates the positive ions towards the substrate side.
摘要翻译： 提供了一种制造磁性记录介质的方法，其中形成有磁分离的磁记录图案，而不会使磁性层的表面氧化或卤化，并且也不会使灰尘污染表面而不会使生产过程复杂化， 制造磁记录介质，其特征在于以下顺序包括：在非磁性基板（1）的顶部上形成磁性层（2）的步骤; 在所述磁性层（2）的顶部形成用于形成磁记录图案的掩模层（3）的步骤; 以及将离子束（10）照射到未被掩模层（3）覆盖的磁性层（2）中的区域上的步骤，在该区域（7）除去磁性层（2）的上层部分， ，并且对离子束（10）使用两种以上具有不同质量的正离子的下层部（8）的磁性，并且用于形成离子束的离子枪具有正极 从离子源朝向衬底侧的正离子，以及将正离子加速到衬底侧的负极。
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5.发明授权公开(公告)号：US08007860B2
公开(公告)日：2011-08-30
申请号：US12574319
申请日：2009-10-06
IPC分类号： G11B5/82
摘要： There is provided a method for manufacturing a magnetic recording medium which can easily produce a magnetic recording medium, the magnetic recording medium having a plurality of magnetically separated recording layers suitable as the recording layers in a discrete track medium or patterned medium, and also having excellent surface flatness, in which spaces between the adjacent recording layers are filled in with a non-magnetic material.Such a method for manufacturing a magnetic recording medium is a method for manufacturing a magnetic recording medium (10) including: a step for forming a magnetic layer on top of a non-magnetic substrate (1), and then forming a resist pattern constituted of a non-magnetic material on top of the magnetic layer; a step for forming a concave section (4a), which is to become a separation layer (5), and a plurality of recording layers (4) that are magnetically separated in plan view by the concave section (4a) by removing the magnetic layer that is exposed from the resist pattern; and a step for forming the separation layer (5) by melting the resist pattern to prepare a melted resist and filling in the concave section (4a) with the melted resist, followed by curing of the melted resist.
摘要翻译： 提供了一种制造能够容易地制造磁记录介质的磁记录介质的方法，该磁记录介质具有多个在离散轨道介质或图案介质中适合作为记录层的磁分离记录层，并且还具有优异的 表面平坦度，其中相邻记录层之间的空间用非磁性材料填充。 这种制造磁记录介质的方法是一种制造磁记录介质的方法，包括：在非磁性基板（1）的顶部上形成磁性层的步骤，然后形成由 在磁性层顶部的非磁性材料; 用于形成要成为分离层（5）的凹部（4a）的步骤和通过凹部（4a）在平面图中通过除去磁性层而磁性分离的多个记录层（4） 从抗蚀剂图案露出; 以及通过熔融抗蚀剂图案形成分离层（5）以制备熔融的抗蚀剂并用熔融的抗蚀剂填充到凹部（4a）中，随后熔融的抗蚀剂固化的步骤。
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6.发明授权公开(公告)号：US08355223B2
公开(公告)日：2013-01-15
申请号：US12556187
申请日：2009-09-09
申请人： Shinichi Ishibashi , Akira Yamane
发明人： Shinichi Ishibashi , Akira Yamane
摘要： The present invention provides a magnetic recording medium that has sufficient recording/reproducing characteristics and good write characteristics and can correspond to high recording density, and a method of manufacturing the same. A magnetic recording medium 1 includes a plurality of magnetic recording patterns 2 that is magnetically separated from each other. Each of the magnetic recording patterns 2 includes a low-coercivity region 2a and a high-coercivity region 2b having a coercivity higher than the low-coercivity region, and the high-coercivity region 2b is arranged at the center of the low-coercivity region 2a in a plan view.
摘要翻译： 本发明提供了具有足够的记录/再现特性和良好写入特性并且可以对应于高记录密度的磁记录介质及其制造方法。 磁记录介质1包括彼此磁分离的多个磁记录图案2。 每个磁记录图案2包括低矫顽力区域2a和具有高于低矫顽力区域的矫顽力的高矫顽力区域2b，并且高矫顽力区域2b布置在低矫顽力区域的中心 2a在平面图中。
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7.发明申请公开(公告)号：US20100067141A1
公开(公告)日：2010-03-18
申请号：US12556187
申请日：2009-09-09
申请人： Shinichi Ishibashi , Akira Yamane
发明人： Shinichi Ishibashi , Akira Yamane
摘要： The present invention provides a magnetic recording medium that has sufficient recording/reproducing characteristics and good write characteristics and can correspond to high recording density, and a method of manufacturing the same. A magnetic recording medium 1 includes a plurality of magnetic recording patterns 2 that is magnetically separated from each other. Each of the magnetic recording patterns 2 includes a low-coercivity region 2a and a high-coercivity region 2b having a coercivity higher than the low-coercivity region, and the high-coercivity region 2b is arranged at the center of the low-coercivity region 2a in a plan view.
摘要翻译： 本发明提供了具有足够的记录/再现特性和良好写入特性并且可以对应于高记录密度的磁记录介质及其制造方法。 磁记录介质1包括彼此磁分离的多个磁记录图案2。 每个磁记录图案2包括低矫顽力区域2a和具有高于低矫顽力区域的矫顽力的高矫顽力区域2b，高矫顽力区域2b布置在低矫顽力区域的中心 2a在平面图中。
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公开(公告)号：US09931816B2
公开(公告)日：2018-04-03
申请号：US13120991
申请日：2009-09-30
申请人： Masahiro Tomamoto , Michiharu Eta , Hidetaka Oda , Tatsuya Takaya , Yasuo Yamazaki , Hiroshi Takimoto , Shinichi Ishibashi , Keiji Takagi , Daisuke Nagata , Takahide Nakamura , Toru Sakurabayashi , Katsutoshi Fujiwara , Mitsuharu Noda , Yasuhiko Ogiso , Takahide Fujii
发明人： Masahiro Tomamoto , Michiharu Eta , Hidetaka Oda , Tatsuya Takaya , Yasuo Yamazaki , Hiroshi Takimoto , Shinichi Ishibashi , Keiji Takagi , Daisuke Nagata , Takahide Nakamura , Toru Sakurabayashi , Katsutoshi Fujiwara , Mitsuharu Noda , Yasuhiko Ogiso , Takahide Fujii
CPC分类号： B32B17/064 , B65H18/28 , B65H2801/61 , Y10T428/26
摘要： A glass roll reliably prevents a glass film from breaking from an end surface of the glass film as an origin of breakage. The glass roll is formed by winding the glass film into a roll while superposing the glass film on a protective sheet. The glass film is formed by an overflow downdraw method to have a thickness of 1 μm or more and 200 μm or less, and has each end surface in a width direction formed as a cut surface cut by laser splitting.
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公开(公告)号：US20110177347A1
公开(公告)日：2011-07-21
申请号：US13121306
申请日：2009-09-30
申请人： Masahiro Tomamoto , Michiharu Eta , Hidetaka Oda , Tatsuya Takaya , Yasuo Yamazaki , Hiroshi Takimoto , Shinichi Ishibashi , Keiji Takagi , Daisuke Nagata , Takahide Nakamura , Toru Sakurabayashi , Katsutoshi Fujiwara , Mitsuharu Noda , Yasuhiko Ogiso , Takahide Fujii
发明人： Masahiro Tomamoto , Michiharu Eta , Hidetaka Oda , Tatsuya Takaya , Yasuo Yamazaki , Hiroshi Takimoto , Shinichi Ishibashi , Keiji Takagi , Daisuke Nagata , Takahide Nakamura , Toru Sakurabayashi , Katsutoshi Fujiwara , Mitsuharu Noda , Yasuhiko Ogiso , Takahide Fujii
IPC分类号： B32B17/06
CPC分类号： B65D85/672 , B32B17/064 , B65D57/00 , B65D85/30 , B65D85/48 , Y10T428/24
摘要： Provided is a glass roll utilizing a flanged roll core, and reliably inhibiting a glass film from breaking from an end portion in a width direction thereof as an origin of breakage. A glass roll (1) is formed by winding a glass film (4) and a cushion sheet (5), under a state of being superposed, around a roll core (3) including a flange (2) at each end portion thereof, in which an end portion in a width direction of the glass film (4) is separated from the flange (2) on each side in the width direction of the glass film (4), and the cushion sheet (5) is extended beyond the end portion in the width direction of the glass film (4) to the flange (2) side, to thereby form an extension portion (5a).
摘要翻译： 提供一种利用凸缘辊芯的玻璃辊，并且可靠地阻止玻璃膜从其宽度方向的端部破裂为断裂的原因。 玻璃辊（1）通过在叠置的状态下将玻璃膜（4）和缓冲片（5）卷绕在其每个端部处包括凸缘（2）的辊芯（3）上而形成， 其中玻璃膜（4）的宽度方向上的端部与玻璃膜（4）的宽度方向上的每一侧上的凸缘（2）分离，并且缓冲片（5）延伸超过 将玻璃膜（4）的宽度方向的端部延伸到凸缘（2）侧，从而形成延伸部（5a）。
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10.发明授权Reflective mask blank, reflective mask and methods of producing the mask blank and the mask 有权反光面罩坯料，反光罩和生产面罩坯料和面膜的方法公开(公告)号：US07981573B2
公开(公告)日：2011-07-19
申请号：US12116550
申请日：2008-05-07
IPC分类号： G03F1/00
摘要： A reflective mask blank has a substrate (11) on which a reflective layer (12) for reflecting exposure light in a short-wavelength region including an extreme ultraviolet region and an absorber layer (16) for absorbing the exposure light are successively formed. The absorber layer (16) has an at least two-layer structure including as a lower layer an exposure light absorbing layer (14) formed by an absorber for the exposure light in the short-wavelength region including the extreme ultraviolet region and as an upper layer a low-reflectivity layer (15) formed by an absorber for inspection light used in inspection of a mask pattern. The upper layer is made of a material containing tantalum (Ta), boron (B), and nitrogen (N). The content of B is 5 at % to 30 at %. The ratio of Ta and N (Ta:N) falls within a range of 8:1 to 2:7. Alternatively, the reflective mask blank has a substrate on which a multilayer reflective film and an absorber layer are successively formed. In this case, the absorber layer is made of a material containing tantalum (Ta), boron (B), and nitrogen (N). The content of B is 5 at % to 25 at %. The ratio of Ta and N (Ta:N) falls within a range of 8:1 to 2:7.
摘要翻译： 反射掩模板具有基板（11），在基板（11）上依次形成反射层（12），反射层（12）用于反射在包括极紫外区域的短波长区域中的曝光和用于吸收曝光光的吸收层（16）。 吸收层（16）具有至少两层结构，其包括作为下层的曝光用光吸收层（14），该曝光用光吸收层由包含极紫外区域的短波长区域中的曝光用光的吸收体形成， 层叠由用于检查掩模图案的检查光的吸收体形成的低反射率层（15）。 上层由含有钽（Ta），硼（B）和氮（N）的材料制成。 B的含量为5原子％至30原子％。 Ta和N（Ta：N）的比例落在8:1-2:7的范围内。 或者，反射掩模坯料具有依次形成有多层反射膜和吸收体层的基板。 在这种情况下，吸收层由含有钽（Ta），硼（B）和氮（N）的材料制成。 B的含量为5原子％至25原子％。 Ta和N（Ta：N）的比例落在8:1-2:7的范围内。
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