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公开(公告)号：US5891806A
公开(公告)日：1999-04-06
申请号：US842897
申请日：1997-04-17
CPC分类号： G03F7/70091 , G03F7/702 , G03F7/7035 , G03F7/70358 , Y10S438/942
摘要： Apparatus and methods are disclosed for increasing the illuminance at a mask used for proximity-type microlithography and for achieving increases in throughput. A mask defining a pattern is illuminated by an illumination optical system. The pattern is transferred to a workpiece separated from the mask by a prescribed standoff. The mask and workpiece can be relatively moved in a scan direction. With respect to the illumination optical system, the workpiece-side numerical aperture in a first direction on the plane of the mask is different from the workpiece-side numerical aperture in a second direction, perpendicular to the first direction, on the plane of the mask. A reflective-type relay optical system can be included that comprises first and second spherical mirrors that do not produce chromatic aberrations.
摘要翻译： 公开了用于增加用于接近型微光刻的掩模的照度和用于实现生产量增加的装置和方法。 定义图案的掩模由照明光学系统照亮。 将图案转移到与掩模分开的工件中，以规定的间距。 掩模和工件可以沿扫描方向相对移动。 相对于照明光学系统，在掩模的平面上的第一方向上的工件侧数值孔径在垂直于第一方向的第二方向上与工件侧数值孔径不同于掩模的平面 。 可以包括反射型中继光学系统，其包括不产生色差的第一和第二球面镜。
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公开(公告)号：US20090248447A1
公开(公告)日：2009-10-01
申请号：US12409945
申请日：2009-03-24
CPC分类号： G06Q50/24 , G06F19/321 , G16H15/00
摘要： A report generation support system has a storage that previously stores body-area information identifying various areas of a human body, and a display that displays a report generation screen, a medical image, and the body-area information. This report generation support system records a string into a radiology report in response to an operation of inputting the string and, in response to an operation of designating at least one medical image and the body-area information that are displayed, links the designated medical image and body-area information to the radiology report. Consequently, search of previous radiology reports connected to various areas of a human body is facilitated.
摘要翻译： 报告生成支持系统具有预先存储识别人体各个区域的身体区域信息的存储器以及显示报告生成屏幕，医疗图像和身体区域信息的显示器。 该报告生成支持系统响应于输入字符串的操作而将字符串记录到放射学报告中，并且响应于指定至少一个医学图像的操作和显示的身体区域信息，链接指定的医学图像 和放射学报告的身体区域信息。 因此，有助于搜索连接到人体各个领域的以前的放射学报告。
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公开(公告)号：US20090132499A1
公开(公告)日：2009-05-21
申请号：US12274782
申请日：2008-11-20
IPC分类号： G06F17/30
CPC分类号： G16H50/70 , G06F19/00 , G06F19/321 , G16H15/00
摘要： Specified types of words are extracted from a plurality of radiology reports archived in an archive configured to archive a plurality of radiology reports. The words extracted from a single radiology report are stored in combination. In response to an input operation using an operating part of inputting the specified types of words, combinations including the specified types of words as one part are searched. A list of the specified types of words included as the other part in the searched combinations is generated. In response to an input operation using the operating part of selecting any word from the word list, a list of radiology reports including the inputted word and the selected word is generated. In response to an input operation using the operating part of selecting any report from the radiology report list, the selected radiology report is outputted from the archive to a display.
摘要翻译： 从存档在归档多个放射学报告的归档中的多个放射学报告中提取指定类型的单词。 从单个放射学报告中提取的单词组合存储。 响应于使用输入指定类型的单词的操作部分的输入操作，搜索包括指定类型的单词作为一个部分的组合。 生成包含在搜索组合中作为其他部分的指定类型的单词的列表。 响应于使用操作部分选择来自单词列表的任何单词的输入操作，生成包括所输入的单词和所选择的单词的放射学报告的列表。 响应于使用从放射学报告列表选择任何报告的操作部分的输入操作，所选择的放射学报告从存档输出到显示器。
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公开(公告)号：US08244684B2
公开(公告)日：2012-08-14
申请号：US12274782
申请日：2008-11-20
申请人： Yutaka Ando , Osamu Kawaguchi , Nobuhiro Tsukamoto , Tomotaka Kasamatsu , Hirofumi Fujii , Hiromasa Yamagishi , Hikaru Futami , Masato Shibuya
发明人： Yutaka Ando , Osamu Kawaguchi , Nobuhiro Tsukamoto , Tomotaka Kasamatsu , Hirofumi Fujii , Hiromasa Yamagishi , Hikaru Futami , Masato Shibuya
IPC分类号： G06F17/00
CPC分类号： G16H50/70 , G06F19/00 , G06F19/321 , G16H15/00
摘要： Specified types of words are extracted from a plurality of radiology reports archived in an archive configured to archive a plurality of radiology reports. The words extracted from a single radiology report are stored in combination. In response to an input operation using an operating part of inputting the specified types of words, combinations including the specified types of words as one part are searched. A list of the specified types of words included as the other part in the searched combinations is generated. In response to an input operation using the operating part of selecting any word from the word list, a list of radiology reports including the inputted word and the selected word is generated. In response to an input operation using the operating part of selecting any report from the radiology report list, the selected radiology report is outputted from the archive to a display.
摘要翻译： 从存档在归档多个放射学报告的归档中的多个放射学报告中提取指定类型的单词。 从单个放射学报告中提取的单词组合存储。 响应于使用输入指定类型的单词的操作部分的输入操作，搜索包括指定类型的单词作为一个部分的组合。 生成包含在搜索组合中作为其他部分的指定类型的单词的列表。 响应于使用操作部分选择来自单词列表的任何单词的输入操作，生成包括所输入的单词和所选择的单词的放射学报告的列表。 响应于使用从放射学报告列表选择任何报告的操作部分的输入操作，所选择的放射学报告从存档输出到显示器。
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公开(公告)号：US08090170B2
公开(公告)日：2012-01-03
申请号：US12039237
申请日：2008-02-28
申请人： Masato Shibuya , Kenichi Niwa , Hirobumi Nonaka
发明人： Masato Shibuya , Kenichi Niwa , Hirobumi Nonaka
IPC分类号： G06K9/00
CPC分类号： G06F19/321 , G06F19/00
摘要： A medical image observation device relating to the present invention receives enhanced image data having a plurality of medical images, and splits the enhanced image data into a plurality of single image data each containing only one medical image, based on system information of the enhanced image data. According to the present invention, it is possible to make a medical image observation device accurately display an image without depending on system information of enhanced image data.
摘要翻译： 本发明涉及的医疗用图像观察装置，接收具有多个医学图像的增强图像数据，根据增强图像数据的系统信息，将增强图像数据分割为仅包含一个医学图像的多个单个图像数据 。 根据本发明，可以使医疗图像观察装置精确地显示图像而不依赖于增强图像数据的系统信息。
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公开(公告)号：US20050190505A1
公开(公告)日：2005-09-01
申请号：US10901214
申请日：2004-07-29
申请人： Shinji Fujimoto , Masato Shibuya , Hisashi Kaneko , Tsuneyori Ino , Yukihiro Komura , Mitsuhiro Izumi , Kei Funabashi
发明人： Shinji Fujimoto , Masato Shibuya , Hisashi Kaneko , Tsuneyori Ino , Yukihiro Komura , Mitsuhiro Izumi , Kei Funabashi
CPC分类号： G11B5/5569 , G11B5/54
摘要： A magnetic disk device comprises a magnetic disk in which a data zone is formed. An actuator has a voice coil and a head slider carrying a magnetic head, the actuator being swung to move the magnetic head over the disk between an innermost position of the data zone and an outermost position of the data zone. A magnet has a magnetization center and is opposed to the voice coil so that a voice coil motor which swings the actuator is formed, the magnet having a north pole and a south pole confronting each other via the magnetization center. The magnetic disk device is provided so that a deviation of a center of the voice coil from the magnetization center when the magnetic head is in the innermost position of the data zone is substantially equal to a deviation of the center of the voice coil from the magnetization center when the magnetic head is in the outermost position of the data zone.
摘要翻译： 磁盘装置包括形成数据区的磁盘。 致动器具有音圈和携带磁头的磁头滑块，所述致动器摆动以使磁头在数据区的最内位置和数据区的最外位置之间的磁盘上移动。 磁体具有磁化中心并且与音圈相对，从而形成摆动致动器的音圈电动机，磁体具有通过磁化中心彼此相对的北极和南极。 提供磁盘装置，使得当磁头处于数据区的最内位置时，音圈的中心与磁化中心的偏差基本上等于音圈的中心与磁化的偏差 当磁头位于数据区的最外侧位置时居中。
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公开(公告)号：US5847812A
公开(公告)日：1998-12-08
申请号：US874687
申请日：1997-06-13
申请人： Hiroshi Ooki , Masato Shibuya , Kazuya Okamoto , Soichi Owa
发明人： Hiroshi Ooki , Masato Shibuya , Kazuya Okamoto , Soichi Owa
CPC分类号： G03F7/70075 , G03F7/2022 , G03F7/2053 , G03F7/70358 , G03F7/70475
摘要： Projection exposure systems and methods are disclosed that achieve higher light intensities and reduce the time required for each exposure in multiple exposures of non-linear resists such as a two-photon-absorption resist. Using spatial redistribution of laser light, an illumination optical system forms an illumination region that illuminates only a portion of the pattern on a mask with spatially coherent light from a light source. The system forms the entire mask pattern on a substrate by repeating a non-linear exposure while moving the illumination region and the mask pattern relative to one another. To exploit temporal redistribution of laser light, an illumination optical system employs a pulsed-oscillation-type laser light source to form a mask pattern while varying the light intensity profile on a mask.
摘要翻译： 公开了投射曝光系统和方法，其实现更高的光强度并减少在多次曝光非线性抗蚀剂（例如双光子吸收抗蚀剂）中每次曝光所需的时间。 使用激光的空间重新分配，照明光学系统形成照明区域，其仅使用来自光源的空间相干光照射掩模上的图案的一部分。 该系统通过在相对于彼此移动照明区域和掩模图案的同时重复非线性曝光来在基板上形成整个掩模图案。 为了利用激光的时间再分配，照明光学系统采用脉冲振荡型激光光源来形成掩模图案，同时改变掩模上的光强度分布。
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8.发明授权Projection optical apparatus capable of measurement and compensation of distortion affecting reticle/wafer alignment 失效能够测量和补偿影响光罩/晶片对准的失真的投影光学装置
公开(公告)号：US4943733A
公开(公告)日：1990-07-24
申请号：US436745
申请日：1989-11-15
申请人： Susumu Mori , Masato Shibuya
发明人： Susumu Mori , Masato Shibuya
CPC分类号： G03F7/706 , G03F7/70633 , G03F7/70691 , G03F9/70
摘要： A projection optical apparatus has a projection optical system for projecting an image of a reticle pattern on a stage-mounted semi-conductor wafer and includes a light-emitting surface of the stage. A photoelectric detector receives light from the light-emitting surface through the projection optical system and the reticle. The stage is moved to move a projected image of the light-emitting surface relative to the reticle, and the positional relation between the projected image of the light-emitting surface and the reticle is determined. Numerical apertures of various components of the projection optical apparatus are set for optimal performance.
摘要翻译： 投影光学装置具有投影光学系统，用于将分划板图案的图像投影在载置半导体晶片上并且包括该台的发光表面。 光电检测器通过投影光学系统和掩模版接收来自发光表面的光。 移动舞台以相对于光罩移动发光表面的投影图像，并且确定发光表面和掩模版的投影图像之间的位置关系。 设置投影光学装置的各种部件的数值孔径以获得最佳性能。
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公开(公告)号：US4619508A
公开(公告)日：1986-10-28
申请号：US726232
申请日：1985-04-23
申请人： Masato Shibuya , Makoto Uehara
发明人： Masato Shibuya , Makoto Uehara
CPC分类号： G03F7/70583 , G02B19/0014 , G02B19/0047 , G02B3/0056 , G02B3/0062 , G03F7/70075 , G02B2006/0098
摘要： An illumination optical arrangement comprises light source means emitting a coherent light beam, and means for forming a substantially incoherent light source from the coherent light beam. The incoherent light source forming means includes means for periodically deflecting the coherent light beam and scanning a predetermined scanning area by the coherent light beam, and optical means for forming a plurality of optical paths for directing the coherent light beam passed through the predetermined scanning area to a plurality of different secondary scanning areas. Each of the plurality of secondary scanning areas is scanned by the periodically deflected coherent light beam.
摘要翻译： 照明光学装置包括发射相干光束的光源装置和用于从相干光束形成基本上非相干光源的装置。 非相干光源形成装置包括用于周期性偏转相干光束并通过相干光束扫描预定扫描区域的装置，以及用于形成用于将通过预定扫描区域的相干光束引导到多个光路的光学装置 多个不同的二次扫描区域。 多个次扫描区域中的每一个被周期性偏转的相干光束扫描。
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公开(公告)号：US09464412B2
公开(公告)日：2016-10-11
申请号：US13550756
申请日：2012-07-17
摘要： According to one embodiment, a water demand optimization system includes a management terminal, a measuring apparatus, a demand information generating unit and a water-supply control apparatus. The management terminal drives customer equipment, which performs an operation using water, in a time zone in which a power unit rate is low. The measuring apparatus measures an amount of water used in a dwelling unit. The demand information generating unit generates water demand based on the amount of water. The water-supply control apparatus controls a pump in a manner to meet water demand and to minimize a treatment cost in a water purification plant and a cost for conveyance of clear water with reference to a variation in the power unit rate.
摘要翻译： 根据一个实施例，水需求优化系统包括管理终端，测量装置，需求信息生成单元和供水控制装置。 在电力单位利率低的时区，管理终端驱动使用水进行操作的客户设备。 测量装置测量在住宅单元中使用的水量。 需求信息生成单元基于水量生成用水需求。 供水控制装置参照功率单位率的变化，以满足用水需求的方式控制泵并使水净化装置的处理成本最小化，以及输送清水的成本。
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