公开(公告)号：US07591177B2

公开(公告)日：2009-09-22

申请号：US12368599

申请日：2009-02-10

申请人： Masato Sugimoto ,  Akifumi Hayashi

发明人： Masato Sugimoto ,  Akifumi Hayashi

IPC分类号： G01F1/68

CPC分类号： G01F1/6847 ,  G01F5/00 ,  G05D7/0635

摘要： A low cost, compact, high performance flow sensor that can be made small in size even for use in a large flow rate and a mass flow controller using the same are provided. The flow sensor includes a bypass passage, a sensor passage, and a bridge circuit including heat-generating resistance wires that constitute a part of the bridge circuit and are wound around the sensor passage. The flow sensor determines a total flow rate of a fluid that flows in a branched manner through the bypass passage and the sensor passage at a predetermined flow ratio. The total flow rate is determined by detecting, as an unbalance of the bridge circuit, heat transfer caused by the fluid flowing through the sensor passage and is outputted as a sensor output of the flow sensor. In the flow sensor, the bypass passage includes a plurality of fine flow passages each having a cross-section defined by a substantially linear edge and a curve in contact with the substantially linear edge. The ratio of the equivalent hydraulic diameter (d) of the fine flow passages to the common logarithm of the length (T) of the fine flow passages is 0.27 or less. The flow sensor is installed in the mass flow controller.

摘要翻译： 提供了一种低成本，紧凑，高性能的流量传感器，其可以在大流量下使用而尺寸较小，并且使用该流量传感器的质量流量控制器。 流量传感器包括旁通通道，传感器通道和包括构成桥接电路的一部分并且缠绕在传感器通道上的发热电阻线的桥接电路。 流量传感器以预定的流量比确定以分支方式流过旁通通道和传感器通道的流体的总流量。 通过检测由流经传感器通道的流体引起的热传递作为流量传感器的传感器输出而输出作为桥接电路的不平衡来确定总流量。 在流量传感器中，旁路通道包括多个细流动通道，每个细流动通道具有由基本线性的边缘限定的横截面和与基本线性边缘接触的曲线。 细流动通道的等效水力直径（d）与细流动通道的长度（T）的常用对数之比为0.27以下。 流量传感器安装在质量流量控制器中。

公开(公告)号：US20090199633A1

公开(公告)日：2009-08-13

申请号：US12368599

申请日：2009-02-10

申请人： Masato Sugimoto ,  Akifumi Hayashi

发明人： Masato Sugimoto ,  Akifumi Hayashi

IPC分类号： G01F1/68

CPC分类号： G01F1/6847 ,  G01F5/00 ,  G05D7/0635

摘要： A low cost, compact, high performance flow sensor that can be made small in size even for use in a large flow rate and a mass flow controller using the same are provided. The flow sensor includes a bypass passage, a sensor passage, and a bridge circuit including heat-generating resistance wires that constitute a part of the bridge circuit and are wound around the sensor passage. The flow sensor determines a total flow rate of a fluid that flows in a branched manner through the bypass passage and the sensor passage at a predetermined flow ratio. The total flow rate is determined by detecting, as an unbalance of the bridge circuit, heat transfer caused by the fluid flowing through the sensor passage and is outputted as a sensor output of the flow sensor. In the flow sensor, the bypass passage includes a plurality of fine flow passages each having a cross-section defined by a substantially linear edge and a curve in contact with the substantially linear edge. The ratio of the equivalent hydraulic diameter (d) of the fine flow passages to the common logarithm of the length (T) of the fine flow passages is 0.27 or less. The flow sensor is installed in the mass flow controller.

摘要翻译： 提供了一种低成本，紧凑，高性能的流量传感器，其可以在大流量下使用而尺寸较小，并且使用该流量传感器的质量流量控制器。 流量传感器包括旁通通道，传感器通道和包括构成桥接电路的一部分并且缠绕在传感器通道上的发热电阻线的桥接电路。 流量传感器以预定的流量比确定以分支方式流过旁通通道和传感器通道的流体的总流量。 通过检测由流经传感器通道的流体引起的热传递作为流量传感器的传感器输出而输出作为桥接电路的不平衡来确定总流量。 在流量传感器中，旁路通道包括多个细流动通道，每个细流动通道具有由基本线性的边缘限定的横截面和与基本线性边缘接触的曲线。 细流动通道的等效水力直径（d）与细流动通道的长度（T）的常用对数之比为0.27以下。 流量传感器安装在质量流量控制器中。

公开(公告)号：US20070191807A1

公开(公告)日：2007-08-16

申请号：US10586698

申请日：2005-01-21

申请人： Akifumi Hayashi ,  Yoshinori Katayama ,  Tomoaki Ishida

发明人： Akifumi Hayashi ,  Yoshinori Katayama ,  Tomoaki Ishida

IPC分类号： A61F13/15

CPC分类号： A61F13/49413

摘要： In an absorbent article 1 including a liquid-permeable topsheet 2 positioned at a surface that contacts with a human body; a non liquid-permeable backsheet 3 positioned at a surface opposite to the topsheet 2; and an absorbent body 4 provided between the topsheet 2 and the backsheet 3, a three-dimensional gather 6 is formed by a folding portion 32 at which the backsheet 3 is folded up to the topsheet 2 side along both side portions in a longitudinal direction of the absorbent body 4, and a nonwoven fabric at least partially adhered to this folding portion 32. The three-dimensional gather 6 has a free end 62 structured with the nonwoven fabric.

摘要翻译： 在吸收性物品1中，包括位于与人体接触的表面的液体可渗透的顶片2; 位于与顶片2相对的表面的非透液性底片3; 以及设置在顶片2和底片3之间的吸收体4，通过折叠部分32形成三维褶皱6，在该折叠部分32处，底片3沿着纵向方向的两个侧部折叠到顶片2侧 吸收体4和至少部分地粘附到该折叠部32的无纺布。三维褶6具有由无纺布构成的自由端62。

公开(公告)号：US07979165B2

公开(公告)日：2011-07-12

申请号：US11688345

申请日：2007-03-20

申请人： Takao Gotoh ,  Akifumi Hayashi ,  Tohru Matsuoka ,  Shigehiro Suzuki ,  Yoshiyuki Furukawa ,  Makoto Tanaka

发明人： Takao Gotoh ,  Akifumi Hayashi ,  Tohru Matsuoka ,  Shigehiro Suzuki ,  Yoshiyuki Furukawa ,  Makoto Tanaka

IPC分类号： G05D7/06 ,  G01F1/66

CPC分类号： G01F25/0007 ,  G01F1/6847 ,  G01F5/00 ,  G01F15/043 ,  G05D7/0635 ,  Y10T137/0324 ,  Y10T137/7759

摘要： A method for calibrating a mass flow controller comprising a calibrating valve disposed on the most upstream side of a path, a mass flow rate control valve mechanism, a tank provided at the path on the upstream side of the mass flow rate control valve mechanism, a mass-flow-rate-sensing means, a pressure-sensing means, a means for controlling the mass flow rate control valve mechanism, and a mass flow rate calibration control means, the method comprising the steps of (1) permitting a fluid at a set mass flow rate to flow through the path, (2) setting the mass flow rate control valve mechanism at a degree of opening that the mass flow rate of the fluid is equal to the set mass flow rate, (3) closing the calibrating valve, (4) measuring the pressure and mass flow rate of the fluid after a fluid flow from the tank is stabilized, (5) determining a variation ratio of the pressure and mass flow rate to reference pressure and mass flow rate measured by the same procedures in an initial state, and (6) performing calibration depending on the variation ratio.

摘要翻译： 一种用于校准质量流量控制器的方法，所述质量流量控制器包括设置在路径的最上游侧的校准阀，质量流量控制阀机构，设置在质量流量控制阀机构的上游侧的路径上的罐， 质量流量检测装置，压力感测装置，用于控制质量流量控制阀机构的装置和质量流量校准控制装置，所述方法包括以下步骤：（1）允许流体在 设定质量流量流过路径，（2）将质量流量控制阀机构设定在开度为流体质量流量等于设定质量流量的程度，（3）关闭校准阀 ，（4）测量流体从罐中流出后的流体的压力和质量流量是否稳定，（5）确定压力和质量流量与参考压力和质量流量的变化率，通过相同的程序测量 在初始状态下， 和（6）根据变化率执行校准。

公开(公告)号：US07679558B2

公开(公告)日：2010-03-16

申请号：US11808687

申请日：2007-06-12

申请人： Shigeru Imafuku ,  Mikio Nagahara ,  Shunichi Mizuochi ,  Akifumi Hayashi ,  Tomoyuki Kurata

发明人： Shigeru Imafuku ,  Mikio Nagahara ,  Shunichi Mizuochi ,  Akifumi Hayashi ,  Tomoyuki Kurata

IPC分类号： G01S1/00

CPC分类号： G01S19/29 ,  G01S19/23

摘要： A terminal device includes a plurality of search channel sections which search for a positioning satellite, a candidate reception frequency calculation section which calculates a candidate reception frequency of a first acquisition target satellite by causing the search channel sections to perform the correlation accumulation process for a first accumulation time, a candidate frequency confirmation section which confirms reliability of the candidate reception frequency by causing the search channel sections to perform the correlation accumulation process for a second accumulation time longer than the first accumulation time, a final frequency calculation section which calculates a final frequency by causing the search channel sections to perform the correlation accumulation process for a third accumulation time longer than the second accumulation time, and a first difference calculation section which calculates a difference between an estimated synchronization frequency corresponding to each first acquisition target satellite and the final frequency.

摘要翻译： 一种终端设备包括搜索定位卫星的多个搜索频道部分，候选接收频率计算部分，其通过使搜索频道部分执行第一采集目标卫星的相关累积处理来计算第一采集目标卫星的候选接收频率 累积时间，候选频率确认部，其通过使搜索频道部对于比第一累积时间长的第二累积时间进行相关累积处理来确认候选接收频率的可靠性;最终频率计算部，其计算最终频率 通过使搜索频道部分对比第二累积时间长的第三累积时间执行相关累积处理，以及第一差分计算部分，其计算估计的同步频率对应t o每个首次采集目标卫星和最终频率。

公开(公告)号：US07887527B2

公开(公告)日：2011-02-15

申请号：US10586698

申请日：2005-01-21

申请人： Akifumi Hayashi ,  Yoshinori Katayama ,  Tomoaki Ishida

发明人： Akifumi Hayashi ,  Yoshinori Katayama ,  Tomoaki Ishida

IPC分类号： A61F13/15 ,  A61F13/20

CPC分类号： A61F13/49413

摘要： In an absorbent article 1 including a liquid-permeable topsheet 2 positioned at a surface that contacts with a human body; a non liquid-permeable backsheet 3 positioned at a surface opposite to the topsheet 2; and an absorbent body 4 provided between the topsheet 2 and the backsheet 3, a three-dimensional gather 6 is formed by a folding portion 32 at which the backsheet 3 is folded up to the topsheet 2 side along both side portions in a longitudinal direction of the absorbent body 4, and a nonwoven fabric at least partially adhered to this folding portion 32. The three-dimensional gather 6 has a free end 62 structured with the nonwoven fabric.

摘要翻译： 在吸收性物品1中，包括位于与人体接触的表面的液体可渗透的顶片2; 位于与顶片2相对的表面的非透液性底片3; 以及设置在顶片2和底片3之间的吸收体4，通过折叠部分32形成三维褶皱6，在该折叠部分32处，底片3沿着纵向方向的两个侧部折叠到顶片2侧 吸收体4和至少部分地粘附到该折叠部32的无纺布。三维褶6具有由无纺布构成的自由端62。

公开(公告)号：US20100037959A1

公开(公告)日：2010-02-18

申请号：US12514527

申请日：2007-11-13

申请人： Takayuki Kamaishi ,  Eiichi Komori ,  Susumu Yamauchi ,  Akifumi Hayashi

发明人： Takayuki Kamaishi ,  Eiichi Komori ,  Susumu Yamauchi ,  Akifumi Hayashi

IPC分类号： H01L21/67

CPC分类号： G01F15/005 ,  G01F1/68 ,  G05D7/0635 ,  Y10T137/0396 ,  Y10T137/8593

摘要： A method of supplying a process gas comprises a step in which there is generated a process gas that is polymerizable depending on a temperature, and a step in which the thus generated process gas is supplied to a processing apparatus 4 configured to perform a predetermined process to an object to be processed W under a reduced-pressure atmosphere. When the process gas is supplied to the processing apparatus 4, a flow rate of the process gas is controlled by using a mass flow-rate control unit of a lower differential pressure type having a diaphragm 80, in which an appropriate operation range of a supply pressure is set lower than the atmospheric pressure. Thus, a supply rate (actual flow rate) of a process gas such as an HF gas that is polymerizable depending on a temperature can be precisely controlled in a stable manner.

摘要翻译： 提供处理气体的方法包括产生根据温度可聚合的处理气体的步骤，以及将由此产生的处理气体供给到被配置为执行预定处理的处理装置4的步骤 在减压气氛下待处理的物体W。 当处理气体被供应到处理装置4时，通过使用具有隔膜80的具有较低压差类型的质量流量控制单元来控制处理气体的流量，其中供应的适当操作范围 压力设定为低于大气压力。 因此，可以稳定地精确地控制可根据温度聚合的诸如HF气体的处理气体的供给速率（实际流量）。

公开(公告)号：US07505773B2

公开(公告)日：2009-03-17

申请号：US11257046

申请日：2005-10-25

申请人： Akifumi Hayashi

发明人： Akifumi Hayashi

IPC分类号： G01S5/00

CPC分类号： G01S19/09 ,  G01S5/0027 ,  G01S19/30

摘要： A positioning system capable of reducing the volume of data communication in a server positioning system is provided. A terminal device has the information for a positioning transmitting section and can transmit information for positioning containing the actually measured current positioning basic information and/or the estimated basic information to the positioning device. The amount of the estimated basic information is smaller than the amount of the current positioning basic information, thus, the amount of information that the terminal device transmits to the positioning device becomes smaller in the case where the terminal device transmits the estimated basic information with respect to the position information satellite having the difference within the allowable range compared to the case where it transmits only the actually measured current positioning basic information with respect to all of the position information satellites.

摘要翻译： 提供了能够减少服务器定位系统中的数据通信量的定位系统。 终端装置具有用于定位发送部的信息，并且能够向定位装置发送包含实际测量的当前定位基本信息和/或估计基本信息的定位信息。 估计基本信息的量小于当前定位基本信息量，因此终端设备向定位设备发送的信息量在终端设备传送估计基本信息的情况下变小 与仅发送关于所有位置信息卫星的实际测量的当前定位基本信息的情况相比，具有在允许范围内的差异的位置信息卫星。

公开(公告)号：US20060089155A1

公开(公告)日：2006-04-27

申请号：US11257043

申请日：2005-10-25

申请人： Akifumi Hayashi

发明人： Akifumi Hayashi

IPC分类号： H04Q7/20

CPC分类号： G01S19/05 ,  G01S19/50

摘要： A positioning system that reduces an increase in a terrain information transmission/reception processing burden on a recording unit of a terminal device such as a GPS receiver is provided. An information provision device can store terrain information. By way of a divided terrain information obtainment unit, the terminal device can acquire one piece of the divided terrain information, which corresponds to a rough determined position indicated in the rough determined position information, from the information provision device. Furthermore, by way of the high-accuracy determined position information generation unit, the terminal device can generate the high-accuracy determined position information using elevation information included in the divided terrain information.

摘要翻译： 提供一种降低诸如GPS接收机的终端设备的记录单元上的地形信息发送/接收处理负担增加的定位系统。 信息提供装置可以存储地形信息。 通过分割地形信息获取单元，终端设备可以从信息提供设备获取与粗略确定位置信息中指示的粗略确定位置相对应的一条划分的地形信息。 此外，通过高精度确定位置信息生成单元，终端装置可以使用包含在划分的地形信息中的高程信息来生成高精度确定位置信息。

公开(公告)号：US07812764B2

公开(公告)日：2010-10-12

申请号：US12418883

申请日：2009-04-06

申请人： Shunichi Mizuochi ,  Akifumi Hayashi

发明人： Shunichi Mizuochi ,  Akifumi Hayashi

IPC分类号： G01S1/00

CPC分类号： G01S19/09 ,  G01S19/23 ,  G01S19/24 ,  G01S19/29 ,  G01S19/30

摘要： A terminal apparatus includes a control unit and a positioning device. The control unit determines a first satellite-to-be-acquired from among a plurality of SPS satellites, and generates an initial search frequency for the first satellite-to-be-acquired. The positioning device has a plurality of search units, and is configured to acquire the first satellite-to-be-acquired using the plurality of search units. The control unit determines first difference information, which is a difference between the initial search frequency and the frequency at which the first satellite-to-be-acquired is acquired. The control unit generates corrected search frequencies for other SPS satellites, using the first difference information. The positioning device acquires other necessary SPS satellites using the corresponding corrected search frequencies. The terminal apparatus can acquire SPS satellites accurately even when there has been a frequency shift in the terminal apparatus since the last positioning.

摘要翻译： 终端装置包括控制单元和定位装置。 所述控制单元从多个SPS卫星中确定要获取的第一卫星，并且生成用于所述第一待卫星的初始搜索频率。 定位装置具有多个搜索单元，并且被配置为使用多个搜索单元获取要获取的第一卫星。 控制单元确定第一差分信息，其是初始搜索频率与获取第一待卫星的频率之间的差。 所述控制单元使用所述第一差分信息来生成其他SPS卫星的校正搜索频率。 定位装置使用对应的校正搜索频率来获取其它必要的SPS卫星。 终端装置即使在终端装置中自上次定位以来发生频移时，也能够准确地获取SPS卫星。