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12 条记录 (耗时 0.016 秒)

    Flow sensor and mass flow controller using the same
    1.
    发明授权
    Flow sensor and mass flow controller using the same 有权
    流量传感器和质量流量控制器使用相同

    公开(公告)号：US07591177B2

    公开(公告)日：2009-09-22

    申请号：US12368599

    申请日：2009-02-10

    申请人： Masato Sugimoto ,  Akifumi Hayashi

    发明人： Masato Sugimoto ,  Akifumi Hayashi

    IPC分类号： G01F1/68

    CPC分类号： G01F1/6847 ,  G01F5/00 ,  G05D7/0635

    摘要： A low cost, compact, high performance flow sensor that can be made small in size even for use in a large flow rate and a mass flow controller using the same are provided. The flow sensor includes a bypass passage, a sensor passage, and a bridge circuit including heat-generating resistance wires that constitute a part of the bridge circuit and are wound around the sensor passage. The flow sensor determines a total flow rate of a fluid that flows in a branched manner through the bypass passage and the sensor passage at a predetermined flow ratio. The total flow rate is determined by detecting, as an unbalance of the bridge circuit, heat transfer caused by the fluid flowing through the sensor passage and is outputted as a sensor output of the flow sensor. In the flow sensor, the bypass passage includes a plurality of fine flow passages each having a cross-section defined by a substantially linear edge and a curve in contact with the substantially linear edge. The ratio of the equivalent hydraulic diameter (d) of the fine flow passages to the common logarithm of the length (T) of the fine flow passages is 0.27 or less. The flow sensor is installed in the mass flow controller.

    摘要翻译： 提供了一种低成本，紧凑，高性能的流量传感器，其可以在大流量下使用而尺寸较小，并且使用该流量传感器的质量流量控制器。 流量传感器包括旁通通道，传感器通道和包括构成桥接电路的一部分并且缠绕在传感器通道上的发热电阻线的桥接电路。 流量传感器以预定的流量比确定以分支方式流过旁通通道和传感器通道的流体的总流量。 通过检测由流经传感器通道的流体引起的热传递作为流量传感器的传感器输出而输出作为桥接电路的不平衡来确定总流量。 在流量传感器中，旁路通道包括多个细流动通道，每个细流动通道具有由基本线性的边缘限定的横截面和与基本线性边缘接触的曲线。 细流动通道的等效水力直径（d）与细流动通道的长度（T）的常用对数之比为0.27以下。 流量传感器安装在质量流量控制器中。

    FLOW SENSOR AND MASS FLOW CONTROLLER USING THE SAME
    2.
    发明申请
    FLOW SENSOR AND MASS FLOW CONTROLLER USING THE SAME 有权
    流量传感器和大流量控制器使用它

    公开(公告)号：US20090199633A1

    公开(公告)日：2009-08-13

    申请号：US12368599

    申请日：2009-02-10

    申请人： Masato Sugimoto ,  Akifumi Hayashi

    发明人： Masato Sugimoto ,  Akifumi Hayashi

    IPC分类号： G01F1/68

    CPC分类号： G01F1/6847 ,  G01F5/00 ,  G05D7/0635

    摘要： A low cost, compact, high performance flow sensor that can be made small in size even for use in a large flow rate and a mass flow controller using the same are provided. The flow sensor includes a bypass passage, a sensor passage, and a bridge circuit including heat-generating resistance wires that constitute a part of the bridge circuit and are wound around the sensor passage. The flow sensor determines a total flow rate of a fluid that flows in a branched manner through the bypass passage and the sensor passage at a predetermined flow ratio. The total flow rate is determined by detecting, as an unbalance of the bridge circuit, heat transfer caused by the fluid flowing through the sensor passage and is outputted as a sensor output of the flow sensor. In the flow sensor, the bypass passage includes a plurality of fine flow passages each having a cross-section defined by a substantially linear edge and a curve in contact with the substantially linear edge. The ratio of the equivalent hydraulic diameter (d) of the fine flow passages to the common logarithm of the length (T) of the fine flow passages is 0.27 or less. The flow sensor is installed in the mass flow controller.

    摘要翻译： 提供了一种低成本，紧凑，高性能的流量传感器，其可以在大流量下使用而尺寸较小，并且使用该流量传感器的质量流量控制器。 流量传感器包括旁通通道，传感器通道和包括构成桥接电路的一部分并且缠绕在传感器通道上的发热电阻线的桥接电路。 流量传感器以预定的流量比确定以分支方式流过旁通通道和传感器通道的流体的总流量。 通过检测由流经传感器通道的流体引起的热传递作为流量传感器的传感器输出而输出作为桥接电路的不平衡来确定总流量。 在流量传感器中，旁路通道包括多个细流动通道，每个细流动通道具有由基本线性的边缘限定的横截面和与基本线性边缘接触的曲线。 细流动通道的等效水力直径（d）与细流动通道的长度（T）的常用对数之比为0.27以下。 流量传感器安装在质量流量控制器中。

    Method for producing an acceleration sensor
    7.
    发明授权
    Method for producing an acceleration sensor 失效
    加速度传感器的制造方法

    公开(公告)号：US06615465B2

    公开(公告)日：2003-09-09

    申请号：US09573542

    申请日：2000-05-19

    申请人： Tetsuro Otsuchi ,  Masato Sugimoto ,  Tetsuyoshi Ogura ,  Yoshihiro Tomita ,  Osamu Kawasaki

    发明人： Tetsuro Otsuchi ,  Masato Sugimoto ,  Tetsuyoshi Ogura ,  Yoshihiro Tomita ,  Osamu Kawasaki

    IPC分类号： H04R1700

    CPC分类号： G01P15/0891 ,  G01L5/0052 ,  G01P1/127 ,  G01P15/0802 ,  G01P15/0922 ,  G01R31/2834 ,  G01R31/30 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49789

    摘要： A method for producing an acceleration sensor comprising an electromechanical transducer having a piezoelectric element includes providing at least two piezoelectric substrates where each has two opposing main surfaces. The piezoelectric element is formed by directly connecting one of the main surfaces of one of the at least two piezoelectric substrates with an opposing one of the main surfaces of another one of the at least two piezoelectric substrates. Supporters are provided to support the electromechanical transducer and are directly connected to the at least two piezoelectric substrates composing the piezoelectric element. Electrodes that extend continuously from the unconnected main surfaces of the at least two piezoelectric substrates composing the piezoelectric element to surfaces of the supporters are then formed.

    摘要翻译： 一种用于制造包括具有压电元件的机电换能器的加速度传感器的方法包括提供至少两个压电基片，其中每个具有两个相对的主表面。 压电元件通过将至少两个压电基片之一的主表面中的一个直接连接到至少两个压电基片中另一个的相对的一个主表面而形成。 提供支撑器以支持机电换能器并且直接连接到构成压电元件的至少两个压电基板。 然后形成从构成压电元件的至少两个压电基板的未连接的主表面连续延伸到支撑体的表面的电极。

    Piezoelectric resonator and method for fabricating the same
    9.
    发明授权
    Piezoelectric resonator and method for fabricating the same 有权
    压电谐振器及其制造方法

    公开(公告)号：US06243933B1

    公开(公告)日：2001-06-12

    申请号：US09303682

    申请日：1999-05-03

    申请人： Masato Sugimoto ,  Katsu Takeda ,  Yoshihiro Tomita ,  Osamu Kawasaki

    发明人： Masato Sugimoto ,  Katsu Takeda ,  Yoshihiro Tomita ,  Osamu Kawasaki

    IPC分类号： H04R1700

    CPC分类号： H03H9/177 ,  H03H3/04 ,  H03H9/02031 ,  H03H9/0207 ,  H03H9/176 ,  Y10T29/42 ,  Y10T29/49004

    摘要： A wafer with a reversed domain is prepared for two piezoelectric single crystal plates and of about the same thickness by using direct bonding without any adhesive. Driving electrodes are formed on two principal planes of the wafer with a reversed domain to provide a piezoelectric resonator. A piezoelectric resonator having the structure with a reversed polarization and using odd-order vibration modes vibrating with a fundamental wave has a wavelength of a thickness thereof and suppresses scattering of the thickness of the domains with a reversed polarization. In the direct bonding, the axes of the spontaneous polarization of the two piezoelectric single crystal plates are reverse to each other and crystalline axes other than the axes of polarization are shifted intentionally by an angle other than zero. Thus, spurious modes are suppressed in a simple way.

    摘要翻译： 对于两个压电单晶板制备具有反向畴的晶片，并且通过直接接合而没有任何粘合剂制备大约相同的厚度。 在晶片的两个主平面上形成驱动电极，具有反向的畴，以提供压电谐振器。 具有反极化结构和使用基波振荡的奇数振动模式的压电谐振器具有其厚度的波长，并且抑制具有反向偏振的畴的厚度的散射。 在直接接合中，两个压电单晶板的自发极化的轴线彼此相反，并且除偏振轴之外的结晶轴有意地以不同于零的角度移动。 因此，以简单的方式抑制杂散模式。

    Surface acoustic wave device and method of manufacturing the same
    10.
    发明授权
    Surface acoustic wave device and method of manufacturing the same 失效
    表面声波装置及其制造方法

    公开(公告)号：US6018211A

    公开(公告)日：2000-01-25

    申请号：US921499

    申请日：1997-09-02

    申请人： Akihiro Kanaboshi ,  Masato Sugimoto ,  Yutaka Taguchi ,  Kazuo Eda

    发明人： Akihiro Kanaboshi ,  Masato Sugimoto ,  Yutaka Taguchi ,  Kazuo Eda

    IPC分类号： H03H9/05 ,  H01L41/08

    CPC分类号： H03H9/1092

    摘要： A surface acoustic wave device is manufactured by directly or indirectly bonding a lid to a substrate having a surface acoustic wave element to seal the element under the lid. The lid is made of at least one material selected from the group comprising lithium niobate, lithium tantalete, lithium borate, glass and quartz. The substrate is made of at least one material selected from the group comprising quartz, lithium niobate, lithium tantalete and lithium borate.

    摘要翻译： 通过将盖直接或间接地接合到具有表面声波元件的基板上来密封盖下的元件来制造表面声波装置。 该盖由选自铌酸锂，钽酸锂，硼酸锂，玻璃和石英的组中的至少一种材料制成。 衬底由选自石英，铌酸锂，钽酸锂和硼酸锂的组中的至少一种材料制成。