摘要:
A case management method that reduces the number of manual operations, prevents manual errors, guarantees updated data, and enables knowledge of the present location of a storage file. In the case management method, case information involving a processing deadline is input to the management computer. At least one event, which is a task including a single operation and involving the processing deadline or a task including a series of operations and involving the processing deadline, is generated. Workflows, which are series of operations performed in a section that is determined beforehand in accordance with the type of generated event, are stored in a database. A predetermined workflow is selected from the stored workflow. An event pool storing the generated event in association with the selected predetermined workflow is generated in the database.
摘要:
A period for a long-term exposure signal is discriminated from a period for a short-term exposure signal. Based on a discrimination signal, an AGC gain selector switches a set value for the gain and a knee point selector switches a set value for the knee point, thereby independently controlling the gain and the knee point for each of the long-term exposure signal and the short-term exposure signal.
摘要:
A display screen for a small-sized display device with a touch panel function includes: a Fresnel lens sheet including a Fresnel lens portion and configured to convert image light projected from an image light source into light substantially parallel to the substantial normal direction of a screen surface and emit the converted light; and a light control sheet located on the image light exiting side of the Fresnel lens sheet. The light control sheet includes: unit light transmissive portions constituting part of the image light exiting surface of the light control sheet, the unit light transmissive portions extending in the transverse direction of the screen; and unit light absorbing portions constituting part of the image light exiting surface of the light control sheet, the unit light absorbing portions extending in the transverse direction of the screen, the unit light transmissive portions and the unit light absorbing portions being alternately arranged.
摘要:
To expose interconnection patterns of a target wring width by detecting the focus position variation and the sensitivity variation separately to correct the exposure condition without previous calculation of the correction magnitude which is optimal for exposure of the wring width of interconnection patterns of the target size of a semiconductor device, the first exposure management pattern 18 having interconnection patterns which are disposed with a certain interval and disposed so that the variation in the exposure quantity on the semiconductor substrate affects the interconnection width but the variation in focus position which occurs when the semiconductor substrate is exposed does not affect the interconnection width and the second exposure management pattern 16 having interconnection patterns which are disposed with a certain interval different from that of the first exposure management pattern and disposed so that both focus variation and exposure quantity variation affect the interconnection width are exposed on a semiconductor substrate WH, and the interconnection width of the interconnection patterns are measured to detect the variation magnitude of the focus position and the exposure quantity.
摘要:
A pair of output terminals for measurement of lateral misalignment are formed on an interlayer insulating film, and a series resistance circuit is formed between the pair of output terminals by connecting plural lower layers exposed to plural windows for detection of the lateral misalignment to plural upper layers formed on the interlayer insulating film, so as to measure a synthetic resistance between the pair of output terminals. Similarly, a pair of output terminals for measurement of longitudinal misalignment are formed on the interlayer insulating film, and a series resistance circuit is formed between the pair of output terminals by connecting plural lower layers exposed to plural windows for detection of the longitudinal misalignment to plural upper layers formed on the interlayer insulating film, so as to measure a synthetic resistance between the pair of output terminals. From a change in the synthetic resistance in each series resistance circuit, the misalignment between the interlayer insulating film and the upper layer both in the lateral direction and in the longitudinal direction is measured.
摘要:
An apparatus for spraying a photo-resist comprises a resist supply reservoir, a pump and a supply line from the pump to a nozzle. Further provided is a standby receptacle into which an end portion of the nozzle is inserted when not being utilized in a spraying operation. The standby receptacle is supplied with N.sub.2 gas, bubbled through a solvent which is held at a bottom portion of the container, surrounded by an air space. The nozzle rests in a nozzle holder so as to be exposed to the internal atmosphere of the container for preventing clogging of the nozzle due to drying of the solvent when the nozzle is not in use.