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公开(公告)号：US5153898A
公开(公告)日：1992-10-06
申请号：US841298
申请日：1992-02-28
申请人： Masayuki Suzuki , Noritaka Mochizuki , Setsuo Minami , Shigetaro Ogura , Yasuaki Fukuda , Yutaka Watanabe , Yasuo Kawai , Takao Kariya
发明人： Masayuki Suzuki , Noritaka Mochizuki , Setsuo Minami , Shigetaro Ogura , Yasuaki Fukuda , Yutaka Watanabe , Yasuo Kawai , Takao Kariya
CPC分类号： B82Y10/00 , G02B17/0636 , G03F7/2039 , G03F7/70033 , G03F7/70233 , G03F7/7025 , G03F7/70691 , G03F7/70866 , G03F7/70875 , G03F7/70883 , G03F7/70891
摘要： An X-ray exposure apparatus includes a stage for holding a mask having a pattern for circuit manufacturing, a stage for holding a wafer to be exposed to the pattern of the mask with X-rays, and a reflection reduction imaging system, disposed between the mask stage and the wafer stage, including a reflecting mirror arrangement, containing at least three, but not more than five, reflecting mirrors coated with multi-layer films for receiving X-rays from the mask and directing them to the wafer to expose the wafer to the pattern of the mask with the X-ray in a reduced scale.
摘要翻译： X射线曝光装置包括：用于保持具有用于电路制造的图案的掩模的台，用于将要暴露于掩模的图案的晶片用X射线保持的晶片的台，以及设置在该掩模之间的反射减少成像系统 掩模台和晶片台，包括反射镜装置，其包含涂覆有多层膜的至少三个但不多于五个的反射镜，用于从掩模接收X射线并将其引导到晶片以暴露晶片 以减小的X射线的掩模图案。
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公开(公告)号：US4626082A
公开(公告)日：1986-12-02
申请号：US647270
申请日：1984-09-04
CPC分类号： G02B3/0056 , G02B13/24 , G03B27/525
摘要： A projecting device comprising an array of axial element lens systems, wherein each element lens system includes a single bar lens having an axial length larger than the effective aperture and adapted to form an intermediate image of a pixel of the object plane and an erect image of a magnification of unity not vertically nor laterally inverted in such a manner that the light intensity on the image plane corresponding to said pixel is defined in the form of Gaussian distribution by the eclipse of the aperture. The element lens systems are arranged in a plane perpendicular to the optical axis so as to cause the light intensity distributions of said systems to mutually overlap in the peripheral areas thereof on the image plane, wherein each row of the systems in the array is displaced by a half pitch with respect to the neighboring row to constitute a staggered arrangement thereby achieving a uniform exposure distribution, integrated in time, in the scanning direction.
摘要翻译： 一种包括轴向元件透镜系统的阵列的投影装置，其中每个元件透镜系统包括具有大于有效孔径的轴向长度的单杆透镜，并且适于形成物平面的像素的中间图像和 单位的放大率不垂直或横向倒置，使得对应于所述像素的图像平面上的光强度通过孔径的日食被限定为高斯分布的形式。 元件透镜系统布置在垂直于光轴的平面中，以便使得所述系统的光强度分布在其在像平面上的周边区域中相互重叠，其中阵列中的每一系列被位移 相对于相邻行的半间距构成交错布置，从而实现在扫描方向上集成的均匀的曝光分布。
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公开(公告)号：US4431299A
公开(公告)日：1984-02-14
申请号：US134222
申请日：1980-03-26
CPC分类号： G02B3/0056 , G02B27/18 , G03B27/528
摘要： A projection apparatus for forming an image of original on a photosensitive material opposed to the plane of the original. The projection apparatus has a projecting system composed of a plurality of projection optical system arrays. Each individual projection optical system is composed of a first and a second lens coaxially disposed and having a relatively large length as compared with its effective lens diameter respectively. The first lens is an exit side telecentric lens whereas the second one is an incident side telecentric lens. The first lens forms an intermediate image of a portion of the original on a plane between the first and second lenses and the second lens reforms the intermediate image on the photosensitive material.
摘要翻译： 一种投影装置，用于在与原稿的平面相对的感光材料上形成原稿的图像。 投影装置具有由多个投影光学系统阵列构成的投影系统。 每个单独的投影光学系统由分别与其有效透镜直径相比同轴布置并具有相对较大长度的第一和第二透镜组成。 第一透镜是出射侧远心透镜，而第二透镜是入射侧远心透镜。 第一透镜在第一和第二透镜之间的平面上形成原稿的一部分的中间图像，并且第二透镜改变感光材料上的中间图像。
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公开(公告)号：US4426132A
公开(公告)日：1984-01-17
申请号：US500804
申请日：1983-06-07
申请人： Atsuo Tsunoda , Koyo Midorikawa , Hidetoshi Murase , Mikio Suzuta , Masazumi Moriwaki , Noritaka Mochizuki , Setsuo Minami , Yoshiya Matsui
发明人： Atsuo Tsunoda , Koyo Midorikawa , Hidetoshi Murase , Mikio Suzuta , Masazumi Moriwaki , Noritaka Mochizuki , Setsuo Minami , Yoshiya Matsui
CPC分类号： G02B3/0062 , G03B27/525 , G02B3/0012 , G02B3/0056 , G02B3/0068
摘要： A projecting device is disclosed which has plural element lens systems arranged in at least two rows in a staggered fashion in two grooved blocks, with one row displaced relative to the adjacent row by a distance equal to half the pitch of the adjacent row. Each lens system is composed of at least one bar lens for imaging a part of the object as a part of the corresponding image. An opaque elastomer material fills the space between the rows for preventing light from entering into the space while allowing the positional relation between the rows to be fine-adjusted.
摘要翻译： 公开了一种投影装置，其具有多个元件透镜系统，其以交错的方式布置在至少两行中的两个凹槽块中，一行相对于相邻行移位等于相邻行的间距的一半的距离。 每个透镜系统由至少一个条形透镜组成，用于将物体的一部分成像为相应图像的一部分。 不透明的弹性体材料填充行之间的空间，以防止光进入空间，同时允许行之间的位置关系被微调。
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公开(公告)号：US4368975A
公开(公告)日：1983-01-18
申请号：US240835
申请日：1981-03-05
申请人： Yoshiya Matsui , Setsuo Minami , Noritaka Mochizuki , Isao Harumoto , Atsuo Tsunoda , Shiro Hirai , Masami Ohkubo
发明人： Yoshiya Matsui , Setsuo Minami , Noritaka Mochizuki , Isao Harumoto , Atsuo Tsunoda , Shiro Hirai , Masami Ohkubo
IPC分类号： G03B27/50 , G02B3/00 , G02B13/22 , G02B13/24 , G02B27/18 , G03G15/04 , G03G15/047 , G03B27/48
摘要： This specification discloses a projection device in which a plurality of element lens systems for projecting a part area of an object onto a predetermined part area on the image plane at erect one-to-one magnification are arranged parallel to one another in a plane perpendicular to the optical axis. Each element lens system is a telecentric system comprising three thin lenses of the same shape arranged in the direction of the optical axis, and an intermediate lens is provided at a position deviated from the intermediate point between the object side lens and the image plane side lens. A light absorbing member for extinguishing any light rays exceeding the effective lens diameter is provided between the lenses, and the light intensity distribution on the image plane of each element lens system is controlled substantially to Gauss distribution form by aperture eclipse and, even if there is any error in the arrangement interval, the exposure amount distribution in the arrangement direction superposed on the image plane is uniform.
摘要翻译： 本说明书公开了一种投影装置，其中用于将物体的一部分区域以直立的一对一放大率在像面上的预定部分区域投影的多个元件透镜系统在垂直于...的平面中彼此平行地布置 光轴。 每个元件透镜系统是一种远心系统，包括沿光轴方向布置的相同形状的三个薄透镜，并且在偏离物侧透镜和像平面侧透镜之间的中间点的位置处设置中间透镜 。 在透镜之间设置用于熄灭超过有效透镜直径的光线的光吸收部件，并且每个元件透镜系统的像面上的光强度分布基本上由孔眼日蚀控制为高斯分布形式，并且即使存在 布置间隔中的任何误差，叠加在图像平面上的排列方向上的曝光量分布是均匀的。
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公开(公告)号：US4252423A
公开(公告)日：1981-02-24
申请号：US116751
申请日：1980-01-30
CPC分类号： G03B27/525 , G02B27/18 , G02B3/005 , G02B3/0056 , G02B3/0068
摘要： An ommateal image projector of a type, in which a single or a plurality of rows of the so-called bar lenses having a longer length in the direction of its optical axis than the effective lens diameter thereof are arranged, each bar lens projecting a partial image of an object to be projected onto a mirror surface, and the partial image formed on this mirror surface forming again this partial image onto the image projecting surface by the same bar lens. The entire image of the object is formed on the projecting surface by row of the bar lenses, and the total image thus formed is an erected image.
摘要翻译： 一种类型的投影图像投影仪，其中布置了单列或多列所谓的条形透镜，其在其光轴方向上的长度比其有效透镜直径更长，每个条形透镜突出部分 要投影到镜面上的物体的图像，以及形成在该镜面上的部分图像，通过相同的条形透镜将该部分图像再次形成在图像投影面上。 物体的整个图像通过条形透镜的一排形成在突出表面上，并且由此形成的总图像是竖立的图像。
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公开(公告)号：US4402572A
公开(公告)日：1983-09-06
申请号：US166964
申请日：1980-07-08
申请人： Atsuo Tsunoda , Koyo Midorikawa , Hidetoshi Murase , Mikio Suzuta , Masazumi Moriwaki , Noritaka Mochizuki , Setsuo Minami , Yoshiya Matsui
发明人： Atsuo Tsunoda , Koyo Midorikawa , Hidetoshi Murase , Mikio Suzuta , Masazumi Moriwaki , Noritaka Mochizuki , Setsuo Minami , Yoshiya Matsui
CPC分类号： G02B3/0056 , G02B13/24 , G03B27/525
摘要： This specification discloses a projection device in which bar lenses of plastic, each having a great length in the direction of its optical axis as compared with its effective diameter, of the lenses are arranged in the form of a predetermined array. The bar lenses are shielded from the outside atmosphere by a holding member capable of easily setting the lenses. Further, transparent plates, such as glass plates or the like, are provided at the incidence end and the emergence end to seal the holding member, so that there occurs no deterioration of the predetermined optical performance resulting from variations in the environmental humidity which would otherwise cause variations in the plastic material.
摘要翻译： 本说明书公开了一种投影装置，其中透镜的条形透镜在其光轴的方向上与其有效直径相比具有大的长度，以预定阵列的形式布置。 条形透镜通过能够容易地设置透镜的保持构件与外界气氛隔离。 此外，在入射端和出射端设置透明板，例如玻璃板等，以密封保持构件，从而不会由于环境湿度的变化而导致的预定光学性能的劣化，否则将导致环境湿度的变化。 造成塑料材料的变化。
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公开(公告)号：US4512641A
公开(公告)日：1985-04-23
申请号：US359482
申请日：1982-03-18
摘要： A compound eye projection device includes a first lens and a second lens equal in shape and power. These two lenses are disposed with their optical axis being coincident with each other and together constitute an element lens system. A plurality of such element lens systems are arranged in a line form in a predetermined direction to thereby form a projection device.
摘要翻译： 复合眼睛投影装置包括第一透镜和形状和功率相等的第二透镜。 这两个透镜被设置成它们的光轴彼此重合并且一起构成元件透镜系统。 多个这样的元件透镜系统以预定方向以直线形式布置，从而形成投影装置。
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公开(公告)号：US4350431A
公开(公告)日：1982-09-21
申请号：US166849
申请日：1980-07-08
申请人： Noritaka Mochizuki , Setsuo Minami , Yoshiya Matsui , Atsuo Tsunoda , Koyo Midorikawa , Hidetoshi Murase , Mikio Suzuta , Masazumi Moriwaki
发明人： Noritaka Mochizuki , Setsuo Minami , Yoshiya Matsui , Atsuo Tsunoda , Koyo Midorikawa , Hidetoshi Murase , Mikio Suzuta , Masazumi Moriwaki
CPC分类号： G02B3/0062 , G02B27/18 , G02B3/0075 , G03B27/522 , G02B27/0018 , G02B3/0056 , G02B3/0087
摘要： A projecting device having an array, in a plane perpendicular to the optical axis, of plural element lens systems each axially provided with two bar lenses of an axial length larger than the effective diameter thereof, characterized by the presence of an intermediate ring positioned between two bar lenses for extracting the effective beam emerging from the first bar lens and entering the second bar lens and providing a determined light intensity distribution on the projection plane.
摘要翻译： 一种投影装置，具有在与光轴垂直的平面中的多个元件透镜系统的阵列，每个元件透镜系统各自轴向设置有两个长度大于其有效直径的杆状透镜，其特征在于，存在位于两个 用于提取从第一条形透镜出射并进入第二条形透镜的有效光束并在投影平面上提供确定的光强度分布。
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公开(公告)号：US4289377A
公开(公告)日：1981-09-15
申请号：US23268
申请日：1979-03-23
IPC分类号： G03B27/50 , G02B9/08 , G02B17/08 , G02B27/18 , G03B21/00 , G03B21/28 , G03B27/52 , G03G15/04 , H04N9/31 , G03B27/48 , G02B27/10 , G02B27/28
CPC分类号： H04N9/31 , G03B21/00 , G03B27/527 , G03B27/528
摘要： In a projecting apparatus which focuses the image of an object on an intermediate mirror through a lens array and finally projects the reflected image onto a projection plane again through said lens array, a polarizing beam splitter is provided between the object plane and the lens array to reduce the light loss and to compactize the apparatus.
摘要翻译： 在将物体的图像通过透镜阵列聚焦在中间镜上的投影装置中，最后通过所述透镜阵列将反射的图像再次投影到投影平面上，在物平面和透镜阵列之间设置偏振分束器， 降低光损耗并使设备压实。
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