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    Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD
    1.
    发明授权
    Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD 有权
    用于MOCVD的蒸发器和用于MOCVD的原料溶液的蒸发方法

    公开(公告)号：US07744698B2

    公开(公告)日：2010-06-29

    申请号：US10310578

    申请日：2002-12-05

    申请人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

    发明人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

    IPC分类号： C23C16/00

    CPC分类号： C23C16/4486 ,  C23C16/409

    摘要： Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod 10 has a spiral groove 60 formed in the external periphery closer to the vaporizing section 22, the rod i0 being inserted into the cylindrical hollow portion.

    摘要翻译： 公开了由分散部8和蒸发部22构成的蒸发器。分散部8包括用于将载气3在压力下导入气体通道的气体导入口4，将原料溶液5a，5b供给到 气体通道和用于将含有原料溶液的载气输送到汽化部分22的气体出口7.蒸发部分22包括蒸发管20，其一端连接到MOCVD系统的反应管，并具有另一端 连接到分散部8的气体出口7，以及用于加热蒸发管20的加热装置。蒸发部22用于加热和蒸发从分散部8输送的含有载气3的原料溶液。分散部8 包括具有圆柱形中空部分的分散部分主体1和具有小于圆柱形内径的外径的杆10 l中空部分。 杆10具有形成在更靠近蒸发部22的外周中的螺旋槽60，杆i0插入到圆筒形中空部中。

    Dispenser For Carburetor, Carburetor For Mocvd Using the Dispenser For Carburetor, and Carrier Gas Vaporizing Method
    3.
    发明申请
    Dispenser For Carburetor, Carburetor For Mocvd Using the Dispenser For Carburetor, and Carrier Gas Vaporizing Method 审中-公开
    化油器，化油器，化油器，用于化油器，化油器和载气气化法

    公开(公告)号：US20080210086A1

    公开(公告)日：2008-09-04

    申请号：US10569137

    申请日：2004-08-23

    申请人： Masayuki Toda ,  Masaki Kusuhara

    发明人： Masayuki Toda ,  Masaki Kusuhara

    IPC分类号： B01D53/22 ,  C10J1/12

    CPC分类号： C23C16/4481

    摘要： An object of the present invention is to provide a disperser for vaporizer capable of preventing a fluid dispersion from being crystallized when a carrier gas into which thin-film forming materials are dispersed is injected from a terminus end injection port, a vaporizer for MOCVD using the disperser for vaporizer, and a carrier gas vaporizing method. A plurality of thin-film forming materials are dispersed into a carrier gas introduced into a gas passage by a dispersion section located in a midway portion of a gas passage 35 into which the carrier gas is introduced. An air flow substantially along the injection direction of carrier gas into which the plurality of thin-film forming materials injected from an terminus end injection port 35b are dispersed is injected from an air flow injection port 38 formed near the terminus end injection port 35b located in the downstream end portion of the gas passage 35.

    摘要翻译： 本发明的目的是提供一种用于蒸发器的分散器，其能够在从终端注入口注入分散了薄膜形成材料的载气时，防止流体分散结晶，使用MOCVD的蒸发器 蒸发器用分散器和载气蒸发法。 多个薄膜形成材料通过位于导入载气的气体通道35的中间部分的分散部分分散到引入气体通道的载气中。 从终端注入口35b​​附近形成的多个成膜材料分散在其中的基本上沿着载气的注入方向的气流从形成在末端注入口35b​​附近的空气流注入口38注入 位于气体通道35的下游端部。

    Vaporizing apparatus and film forming apparatus provided with vaporizing apparatus
    4.
    发明授权
    Vaporizing apparatus and film forming apparatus provided with vaporizing apparatus 有权
    具有蒸发装置的蒸发装置和成膜装置

    公开(公告)号：US08486196B2

    公开(公告)日：2013-07-16

    申请号：US12601314

    申请日：2008-05-15

    申请人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

    发明人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

    IPC分类号： C23C16/00 ,  F01M11/03 ,  B01D21/24 ,  B01D24/38 ,  B01D29/88 ,  B01D33/70

    CPC分类号： C23C16/407 ,  C23C16/4486

    摘要： Because an evaporating apparatus for use in an MOCVD film deposition system has a structure in which a plurality of gas passages brings in a gas from the upper direction, the apparatus has a difficulty to position a jet nozzle, and the apparatus is incapable of accurately controlling the pressure and flow rate of a carrier gas mixed with a raw material solution to be issued into an evaporating unit, and it is thus difficult to highly accurately control the composition of MOCVD films. A plurality of gas passages is arranged on a flat, disk-shaped plate. With this configuration, the accurate positioning of the jet nozzle can be made easier, and the composition of MOCVD films can be controlled highly accurately.

    摘要翻译： 由于用于MOCVD膜沉积系统的蒸发装置具有多个气体通道从上方引入气体的结构，所以该装置难以定位喷嘴，并且该装置不能精确地控制 与要发放到蒸发单元中的原料溶液混合的载气的压力和流速，因此难以高精度地控制MOCVD膜的组成。 多个气体通道设置在平坦的盘形板上。 利用这种结构，可以使喷嘴的精确定位变得更容易，并且可以高精度地控制MOCVD膜的组成。

    VAPORIZING APPARATUS AND FILM FORMING APPARATUS PROVIDED WITH VAPORIZING APPARATUS
    5.
    发明申请
    VAPORIZING APPARATUS AND FILM FORMING APPARATUS PROVIDED WITH VAPORIZING APPARATUS 有权
    蒸气装置蒸发装置和成膜装置

    公开(公告)号：US20100173073A1

    公开(公告)日：2010-07-08

    申请号：US12601314

    申请日：2008-05-15

    申请人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

    发明人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

    IPC分类号： C23C16/455 ,  C23C16/00

    CPC分类号： C23C16/407 ,  C23C16/4486

    摘要： Because an evaporating apparatus for use in an MOCVD film deposition system has a structure in which a plurality of gas passages brings in a gas from the upper direction, the apparatus has a difficulty to position a jet nozzle, and the apparatus is incapable of accurately controlling the pressure and flow rate of a carrier gas mixed with a raw material solution to be issued into an evaporating unit, and it is thus difficult to highly accurately control the composition of MOCVD films. A plurality of gas passages is arranged on a flat, disk-shaped plate. With this configuration, the accurate positioning of the jet nozzle can be made easier, and the composition of MOCVD films can be controlled highly accurately.

    摘要翻译： 由于用于MOCVD膜沉积系统的蒸发装置具有多个气体通道从上方引入气体的结构，所以该装置难以定位喷嘴，并且该装置不能精确地控制 与要发放到蒸发单元中的原料溶液混合的载气的压力和流速，因此难以高精度地控制MOCVD膜的组成。 多个气体通道设置在平坦的盘形板上。 利用这种结构，可以使喷嘴的精确定位变得更容易，并且可以高精度地控制MOCVD膜的组成。

    Evaporation method and evaporator
    6.
    发明申请
    Evaporation method and evaporator 审中-公开
    蒸发法和蒸发器

    公开(公告)号：US20060160360A1

    公开(公告)日：2006-07-20

    申请号：US10561512

    申请日：2004-06-21

    申请人： Masayuki Toda ,  Masaki Kusuhara

    发明人： Masayuki Toda ,  Masaki Kusuhara

    IPC分类号： H01L21/44

    CPC分类号： C23C16/4481

    摘要： A vaporization method and a vaporizer capable of greatly reducing the number of fine particles scattered in a film after film formation. A raw material solution is brought into contact with a heated carrier gas and carried to a subsequent step. The vaporizer includes: a vaporization chamber; a carrier gas passage communicating with the vaporization chamber; a raw material solution lead-in port through which the raw material solution is led into the passage; and elements for heating the carrier gas.

    摘要翻译： 蒸发法和蒸发器，其能够大大减少成膜后在膜中散射的微粒的数量。 使原料溶液与加热的载气接触并携带到随后的步骤。 蒸发器包括：蒸发室; 与气化室连通的载气通道; 原料溶液引入口，原料溶液通过该原料溶液引入通道; 以及用于加热载气的元件。

    Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD
    9.
    发明授权
    Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD 有权
    用于MOCVD的蒸发器和用于MOCVD的原料溶液的蒸发方法

    公开(公告)号：US06931203B2

    公开(公告)日：2005-08-16

    申请号：US10310564

    申请日：2002-12-05

    申请人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

    发明人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

    IPC分类号： H01L21/31 ,  C23C16/40 ,  C23C16/448 ,  H01L21/8242 ,  H01L27/108 ,  F22B29/06 ,  F02M15/04

    CPC分类号： C23C16/4486 ,  C23C16/409

    摘要： Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod 10 has a spiral groove 60 formed in the external periphery closer to the vaporizing section 22, the rod 10 being inserted into the cylindrical hollow portion.

    摘要翻译： 公开了由分散部8和蒸发部22构成的蒸发器。分散部8包括用于将载气3在压力下导入气体通道的气体导入口4，供给原料溶液5a，5b的装置 和用于将含有原料溶液的载气输送到汽化部分22的气体出口7.蒸发部分22包括蒸发管20，其一端连接到MOCVD系统的反应管，并具有 另一端连接到分散部8的气体出口7，以及加热装置，用于加热蒸发管20.蒸发部22用于加热和蒸发从分散部8输送的含有载气3的原料溶液。分散 部分8包括具有圆柱形中空部分的分散部分主体1和具有小于圆柱形内径的外径的杆10 cal中空部分。 杆10具有形成在更靠近蒸发部分22的外周中的螺旋槽60，杆10插入到圆柱形中空部分中。

    VAPORIZER
    10.
    发明申请
    VAPORIZER 审中-公开
    蒸气器

    公开(公告)号：US20130291797A1

    公开(公告)日：2013-11-07

    申请号：US13991756

    申请日：2011-12-21

    申请人： Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Masayuki Toda

    发明人： Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Masayuki Toda

    IPC分类号： C23C16/448

    CPC分类号： C23C16/4481 ,  B01D1/00

    摘要： Provided is a vaporizer that can reduce ripples, particles, and a carbon content of a film and can supply a raw material capable of forming a film having a desired composition. Moreover, a vaporizer is obtained that sufficient vaporization can be performed without heating more than necessary and temperature management can be facilitated. A vaporizer includes a vaporizer main body (3) into which a carrier gas having a film forming liquid material dispersed is introduced and a heater main body (4) disposed in the vaporizer main body (3). The shape of the inlet portion of the heater main body is in a cone.

    摘要翻译： 提供一种蒸发器，其可以减少膜的波纹，颗粒和碳含量，并且可以提供能够形成具有期望组成的膜的原料。 此外，获得能够在不需要加热的情况下进行充分蒸发的蒸发器，并且可以促进温度管理。 蒸发器包括：蒸发器主体（3），引入分散有成膜液体材料的载气和设置在蒸发器主体（3）中的加热器主体（4）。 加热器主体的入口部分的形状为锥形。