公开(公告)号：US20130113370A1

公开(公告)日：2013-05-09

申请号：US13586717

申请日：2012-08-15

Applicant: Massood Tabib-Azar

Inventor： Massood Tabib-Azar

IPC: H01J17/04

CPC classification number: H01J17/04 ,  H01J17/066 ,  H01J17/16

Abstract: In some aspects, a micro-plasma device comprises a plasma gas enclosure containing at least one plasma gas, a plasma generation circuit interfaced with the plasma gas enclosure, and a plurality of electrodes interfaced with the plasma gas enclosure. In other aspects, a micro-plasma circuitry apparatus comprises a first layer having plasma generating electrodes, a second layer having a cavity formed therein, and a third layer having a circuit formed therein. The circuit includes a micro-plasma circuit (MPC) that includes one or more micro-plasma devices (MPDs). A metallic layer covers the MPC except at locations of the MPDs. The first layer is bonded to the second layer and the second layer is bonded to the third layer, thereby forming an enclosure that contains at least one plasma gas.

Abstract translation: 在一些方面，微等离子体装置包括含有至少一种等离子体气体的等离子体气体外壳，与等离子体气体外壳接口的等离子体产生电路以及与等离子体气体外壳相接合的多个电极。 在其他方面，微等离子体电路装置包括具有等离子体产生电极的第一层，其中形成有空腔的第二层和在其中形成电路的第三层。 该电路包括包含一个或多个微等离子体器件（MPD）的微等离子体电路（MPC）。 金属层覆盖MPC，除了MPD的位置。 第一层结合到第二层，第二层结合到第三层，从而形成包含至少一种等离子体气体的外壳。

公开(公告)号：US20120255932A1

公开(公告)日：2012-10-11

申请号：US13249093

申请日：2011-09-29

Applicant: Massood Tabib-Azar ,  Carlos H. Mastrangelo

Inventor： Massood Tabib-Azar ,  Carlos H. Mastrangelo

IPC: C23C16/50 ,  C23C16/56 ,  H05H1/24 ,  C23C16/455 ,  B44C1/22

CPC classification number: H05H1/32 ,  H05H2245/124

Abstract: A nanofabrication device in an example includes a conducting nanotip and a gas microchannel adjacent to the nanotip and configured to deliver a gas to the nanotip. The nanofabrication device can be used for controlled and localized etching and/or deposition of material from a substrate.

Abstract translation: 在一个实例中的纳米制造装置包括与纳米尖端相邻并且被配置为将气体输送到纳米尖端的导电纳米尖端和气体微通道。 该纳米加工装置可以用于来自基底的材料的受控和局部蚀刻和/或沉积。

公开(公告)号：US08563885B2

公开(公告)日：2013-10-22

申请号：US12943575

申请日：2010-11-10

Applicant: Massood Tabib-Azar

Inventor： Massood Tabib-Azar

IPC: H01H57/00

CPC classification number: H01H1/0094 ,  H01H59/0009

Abstract: Nanoelectromechanical devices use a cantilevered beam supported by a base. The cantilevered beam is constructed with a nanoscale gap (e.g., less than 10 nm) separating the cantilevered beam from an electrical structure. A low voltage (e.g., less than 2 volts) applied to the cantilevered beam can cause the beam to bend and make contact with the electrical structure. High switching speeds (e.g., less than 10 ns) can be provided. The electrical structure can be a second cantilevered beam or another structure.

Abstract translation: 纳米机电装置使用由基座支撑的悬臂梁。 悬臂梁由从电气结构分离悬臂梁的纳米尺度间隙（例如小于10nm）构成。 施加到悬臂梁的低电压（例如，小于2伏特）可导致光束弯曲并与电结构接触。 可以提供高切换速度（例如，小于10ns）。 电结构可以是第二悬臂梁或另一结构。

公开(公告)号：US08729412B2

公开(公告)日：2014-05-20

申请号：US12987804

申请日：2011-01-10

Applicant: Massood Tabib-Azar

Inventor： Massood Tabib-Azar

IPC: H01H57/00

CPC classification number: B81C1/00142 ,  H01H1/0094 ,  H01H1/20 ,  H01H59/0009 ,  H01L21/28 ,  H03K19/02

Abstract: Nanoelectromechanical logic devices can include a plurality of flexible bridges having control and logic electrodes. Voltages applied to control electrodes can be used to control flexing of the bridges. The logic electrodes can provide logical functions of the applied voltages.

Abstract translation: 纳米机电逻辑器件可以包括具有控制和逻辑电极的多个柔性桥。 施加到控制电极的电压可用于控制桥的弯曲。 逻辑电极可提供施加电压的逻辑功能。

公开(公告)号：US20110168530A1

公开(公告)日：2011-07-14

申请号：US12943575

申请日：2010-11-10

Applicant: Massood Tabib-Azar

Inventor： Massood Tabib-Azar

IPC: H01H59/00 ,  B05D5/12

CPC classification number: H01H1/0094 ,  H01H59/0009

Abstract: Nanoelectromechanical devices use a cantilevered beam supported by a base. The cantilevered beam is constructed with a nanoscale gap (e.g., less than 10 nm) separating the cantilevered beam from an electrical structure. A low voltage (e.g., less than 2 volts) applied to the cantilevered beam can cause the beam to bend and make contact with the electrical structure. High switching speeds (e.g., less than 10 ns) can be provided. The electrical structure can be a second cantilevered beam or another structure.

Abstract translation: 纳米机电装置使用由基座支撑的悬臂梁。 悬臂梁由从电气结构分离悬臂梁的纳米尺度间隙（例如小于10nm）构成。 施加到悬臂梁的低电压（例如，小于2伏特）可导致光束弯曲并与电结构接触。 可以提供高切换速度（例如，小于10ns）。 电结构可以是第二悬臂梁或另一结构。

公开(公告)号：US07640226B2

公开(公告)日：2009-12-29

申请号：US11561212

申请日：2006-11-17

Applicant: Massood Tabib-Azar

Inventor： Massood Tabib-Azar

IPC: G06N5/00

CPC classification number: B81C1/00142 ,  B82Y10/00 ,  B82Y15/00 ,  B82Y30/00 ,  H01L51/0048 ,  H01L51/0595

Abstract: Systems and methods for simultaneously creating a plurality of carbon nanotubes on substrates and across large wafers via employing vapor deposition of material on the surface of the substrate and fluid flow to aid in and direct the growth of the nanotubes in pre-specified locations and directions. In addition, the nanotubes created can be used as gas and chemical sensors, electronic switches, resonators, and non-volatile memory devices.

Abstract translation: 用于通过在衬底的表面上使用材料的气相沉积和流体流来同时在衬底上和跨越大晶片上形成多个碳纳米管的系统和方法，以帮助和指导纳米管在预定位置和方向上的生长。 此外，所创建的纳米管可用作气体和化学传感器，电子开关，谐振器和非易失性存储器件。

公开(公告)号：US20090288599A1

公开(公告)日：2009-11-26

申请号：US11561212

申请日：2006-11-17

Applicant: Massood Tabib-Azar

Inventor： Massood Tabib-Azar

IPC: B05C11/00 ,  C23C16/00

CPC classification number: B81C1/00142 ,  B82Y10/00 ,  B82Y15/00 ,  B82Y30/00 ,  H01L51/0048 ,  H01L51/0595

Abstract: Systems and methods for simultaneously creating a plurality of carbon nanotubes on substrates and across large wafers via employing vapor deposition of material on the surface of the substrate and fluid flow to aid in and direct the growth of the nanotubes in pre-specified locations and directions. In addition, the nanotubes created can be used as gas and chemical sensors, electronic switches, resonators, and non-volatile memory devices.

Abstract translation: 用于通过在衬底的表面上使用材料的气相沉积和流体流来同时在衬底上和跨越大晶片上形成多个碳纳米管的系统和方法，以帮助和指导纳米管在预定位置和方向上的生长。 此外，所创建的纳米管可用作气体和化学传感器，电子开关，谐振器和非易失性存储器件。

公开(公告)号：US08643275B2

公开(公告)日：2014-02-04

申请号：US13586717

申请日：2012-08-15

Applicant: Massood Tabib-Azar

Inventor： Massood Tabib-Azar

IPC: H01J17/04

CPC classification number: H01J17/04 ,  H01J17/066 ,  H01J17/16

Abstract: In some aspects, a micro-plasma device comprises a plasma gas enclosure containing at least one plasma gas, a plasma generation circuit interfaced with the plasma gas enclosure, and a plurality of electrodes interfaced with the plasma gas enclosure. In other aspects, a micro-plasma circuitry apparatus comprises a first layer having plasma generating electrodes, a second layer having a cavity formed therein, and a third layer having a circuit formed therein. The circuit includes a micro-plasma circuit (MPC) that includes one or more micro-plasma devices (MPDs). A metallic layer covers the MPC except at locations of the MPDs. The first layer is bonded to the second layer and the second layer is bonded to the third layer, thereby forming an enclosure that contains at least one plasma gas.

Abstract translation: 在一些方面，微等离子体装置包括含有至少一种等离子体气体的等离子体气体外壳，与等离子体气体外壳接口的等离子体产生电路以及与等离子体气体外壳相接合的多个电极。 在其他方面，微等离子体电路装置包括具有等离子体产生电极的第一层，其中形成有空腔的第二层和在其中形成电路的第三层。 该电路包括包含一个或多个微等离子体器件（MPD）的微等离子体电路（MPC）。 金属层覆盖MPC，除了MPD的位置。 第一层结合到第二层，第二层结合到第三层，从而形成包含至少一种等离子体气体的外壳。

公开(公告)号：US20140021982A1

公开(公告)日：2014-01-23

申请号：US12987804

申请日：2011-01-10

Applicant: Massood Tabib-Azar

Inventor： Massood Tabib-Azar

IPC: H03K19/02 ,  H01L21/28

CPC classification number: B81C1/00142 ,  H01H1/0094 ,  H01H1/20 ,  H01H59/0009 ,  H01L21/28 ,  H03K19/02

Abstract: Nanoelectromechanical logic devices can include a plurality of flexible bridges having control and logic electrodes. Voltages applied to control electrodes can be used to control flexing of the bridges. The logic electrodes can provide logical functions of the applied voltages.

Abstract translation: 纳米机电逻辑器件可以包括具有控制和逻辑电极的多个柔性桥。 施加到控制电极的电压可用于控制桥的弯曲。 逻辑电极可提供施加电压的逻辑功能。

公开(公告)号：US06069419A

公开(公告)日：2000-05-30

申请号：US097384

申请日：1998-06-16

Applicant: Massood Tabib-Azar

Inventor： Massood Tabib-Azar

IPC: H02N1/00 ,  H02K7/00 ,  H02K7/06

CPC classification number: H02N1/004

Abstract: A micro-actuator includes a movable member having fins that are elastically mounted thereto, and a reciprocating actuator. In rotational micro-actuators embodying the invention, the fins are attached to a peripheral surface of a rotor, and the actuator moves to compress the fins toward the peripheral surface of the rotor. This imparts a rotational force which rotates the rotor. In linear micro-actuators, fins can be attached to a movable member which is arranged to move along a track. Actuators positioned along the track can cause the fins on the movable member to compress, thereby moving the movable member along the track. In alternate linear micro-actuators, the actuators can be located on the movable member, and the fins can be located on the track. Rotational and linear micro-actuators embodying the invention could also be configured to operate in opposing directions.

Abstract translation: 微型致动器包括具有弹性地安装在其上的翅片的可动构件和往复式致动器。 在实施本发明的旋转微型致动器中，翅片附接到转子的外围表面，并且致动器移动以朝向转子的外周表面压缩翅片。 这赋予旋转转子的旋转力。 在线性微致动器中，翅片可以附接到可沿着轨道移动的可动构件。 沿着轨道定位的致动器可以使可动构件上的翅片压缩，从而沿着轨道移动可动构件。 在替代的线性微致动器中，致动器可以位于可动构件上，并且翅片可以位于轨道上。 体现本发明的旋转和线性微致动器还可以被配置成在相反的方向上操作。