公开(公告)号：US06567715B1

公开(公告)日：2003-05-20

申请号：US09553989

申请日：2000-04-19

申请人： Michael B. Sinclair ,  Maarten P. DeBoer ,  Norman F. Smith ,  Brian D. Jensen ,  Samuel L. Miller

发明人： Michael B. Sinclair ,  Maarten P. DeBoer ,  Norman F. Smith ,  Brian D. Jensen ,  Samuel L. Miller

IPC分类号： G06F1900

CPC分类号： B81C99/005

摘要： A new approach toward MEMS quality control and materials characterization is provided by a combined test structure measurement and mechanical response modeling approach. Simple test structures are cofabricated with the MEMS devices being produced. These test structures are designed to isolate certain types of physical response, so that measurement of their behavior under applied stress can be easily interpreted as quality control and material properties information.

摘要翻译： 通过组合的测试结构测量和机械响应建模方法提供了MEMS质量控制和材料表征的新方法。 简单的测试结构与正在生产的MEMS器件共同构成。 这些测试结构设计用于隔离某些类型的物理响应，从而可以轻易地将其在施加的应力下的行为测量解释为质量控制和材料属性信息。

公开(公告)号：US06721094B1

公开(公告)日：2004-04-13

申请号：US09800047

申请日：2001-03-05

申请人： Michael B. Sinclair ,  Maarten P. DeBoer ,  Norman F. Smith

发明人： Michael B. Sinclair ,  Maarten P. DeBoer ,  Norman F. Smith

IPC分类号： G02B2122

CPC分类号： G01B9/04 ,  G01B9/02082 ,  G02B21/14 ,  G02B21/22

摘要： Disclosed is a long working distance interference microscope suitable for three-dimensional imaging and metrology of MEMS devices and test structures on a standard microelectronics probe station. The long working distance of 10-30 mm allows standard probes or probe cards to be used. This enables nanometer-scale 3-D height profiles of MEMS test structures to be acquired across an entire wafer. A well-matched pair of reference/sample objectives is not required, significantly reducing the cost of this microscope, as compared to a Linnik microinterferometer.

摘要翻译： 公开了一种长工作距离干涉显微镜，适用于标准微电子探针台上的MEMS器件和测试结构的三维成像和计量。 10-30 mm的长工作距离允许使用标准探头或探针卡。 这使得能够在整个晶片上获取MEMS测试结构的纳米级3-D高度分布。 与Linnik微型干涉仪相比，不需要很好匹配的参考/样品目标对，显着降低了该显微镜的成本。

公开(公告)号：US4136813A

公开(公告)日：1979-01-30

申请号：US782257

申请日：1977-03-28

申请人： Norman F. Smith

发明人： Norman F. Smith

IPC分类号： B23K31/02 ,  B23K1/00 ,  B23K1/19 ,  B23K1/20 ,  B23K35/22

CPC分类号： B23K1/203 ,  B23K1/19

摘要： In a method of joining a pair of parts, wherein one of the parts is formed of a carbon-containing material and the other formed of a metal at least at its surface to be joined to said one part, the parts are first assembled with the surfaces to be joined in the required joining position, with a brazing material and a flux being provided at or adjacent the surfaces to be joined. The flux is chosen so that when raised to an elevated temperature above the melting point of the brazing material, it is capable of reacting with oxides and carbon at the surface of said one part, while the brazing material is chosen so as to be capable of being heated to said elevated temperature without decomposition. The assembly is then heated at least to said elevated temperature in a non-oxidizing atmosphere so as to melt the brazing material and cause the flux to react with surface oxides and carbon on said one part whereby, on cooling, a brazed joint is produced between the parts.

摘要翻译： 在接合一对部件的方法中，其中一个部件由含碳材料形成，另一个部分由至少在其表面上形成的金属形成，以与所述一个部件接合，首先将部件与 要在所需的接合位置接合的表面，钎焊材料和焊剂设置在待接合的表面上或邻近待连接的表面。 选择焊剂，使得当升高到高于钎料的熔点的高温时，其能够在所述一部分的表面处与氧化物和碳反应，同时选择钎焊材料以能够 被加热到所述升高的温度而不分解。 然后将组件在非氧化性气氛中至少加热至所述升高温度，以熔化钎焊材料，并使助熔剂与所述一部分上的表面氧化物和碳反应，由此在冷却时，在 零件。