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1.发明授权Method and system for automated on-chip material and structural certification of MEMS devices 有权MEMS器件自动化芯片材料和结构认证的方法和系统公开(公告)号：US06567715B1
公开(公告)日：2003-05-20
申请号：US09553989
申请日：2000-04-19
IPC分类号： G06F1900
CPC分类号： B81C99/005
摘要： A new approach toward MEMS quality control and materials characterization is provided by a combined test structure measurement and mechanical response modeling approach. Simple test structures are cofabricated with the MEMS devices being produced. These test structures are designed to isolate certain types of physical response, so that measurement of their behavior under applied stress can be easily interpreted as quality control and material properties information.
摘要翻译： 通过组合的测试结构测量和机械响应建模方法提供了MEMS质量控制和材料表征的新方法。 简单的测试结构与正在生产的MEMS器件共同构成。 这些测试结构设计用于隔离某些类型的物理响应，从而可以轻易地将其在施加的应力下的行为测量解释为质量控制和材料属性信息。
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公开(公告)号：US06211599B1
公开(公告)日：2001-04-03
申请号：US09366505
申请日：1999-08-03
IPC分类号： H02N100
CPC分类号： F16H31/005 , F03G7/06 , F16H31/007 , H02K7/07 , H02N1/008 , Y10T74/1529
摘要： A microelectromechanical (MEM) ratcheting apparatus is disclosed which includes an electrostatic or thermal actuator that drives a moveable member in the form of a ring gear, stage, or rack. Motion is effected by one or more reciprocating pawls driven by the actuator in a direction that is parallel to, in line with, or tangential to the path. The reciprocating pawls engage indexing elements (e.g. teeth or pins) on the moveable member to incrementally move the member along a curved or straight path with the ability to precisely control and determine the position of the moveable member. The MEM apparatus can be formed on a silicon substrate by conventional surface micromachining methods.
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公开(公告)号：US06313562B1
公开(公告)日：2001-11-06
申请号：US09779969
申请日：2001-02-09
IPC分类号： H02N1000
CPC分类号： F16H31/005 , F03G7/06 , F16H31/007 , H02K7/07 , H02N1/008 , Y10T74/1529
摘要： A microelectromechanical (MEM) ratcheting apparatus is disclosed which includes an electrostatic or thermal actuator that drives a moveable member in the form of a ring gear, stage, or rack. Motion is effected by one or more reciprocating pawls driven by the actuator in a direction that is parallel to, in line with, or tangential to the path. The reciprocating pawls engage indexing elements (e.g. teeth or pins) on the moveable member to incrementally move the member along a curved or straight path with the ability to precisely control and determine the position of the moveable member. The MEM apparatus can be formed on a silicon substrate by conventional surface micromachining methods.
摘要翻译： 公开了一种微机电（MEM）棘轮装置，其包括驱动环形齿轮，平台或机架形式的可移动部件的静电或热致动器。 运动由一个或多个由致动器驱动的往复式棘爪实现，该往复式棘爪沿着与路径平行，相对或相切的方向。 往复式棘爪接合在可移动构件上的分度元件（例如齿或销），以沿着弯曲或直线路径递增地移动构件，具有精确地控制和确定可移动构件的位置的能力。 可以通过常规的表面微加工方法在硅衬底上形成MEM装置。
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公开(公告)号：US06133670A
公开(公告)日：2000-10-17
申请号：US340994
申请日：1999-06-24
IPC分类号： B81B3/00 , G01P15/125 , H02N1/00
CPC分类号： H02N1/008 , B81B3/0021 , G01P15/125 , B81B2201/033 , B81B2203/051 , G01P2015/0814
摘要： A compact electrostatic comb actuator is disclosed for microelectromechanical (MEM) applications. The actuator is based upon a plurality of meshed electrostatic combs, some of which are stationary and others of which are moveable. One or more restoring springs are fabricated within an outline of the electrostatic combs (i.e. superposed with the moveable electrostatic combs) to considerably reduce the space required for the actuator. Additionally, a truss structure is provided to support the moveable electrostatic combs and prevent bending or distortion of these combs due to unbalanced electrostatic forces or external loading. The truss structure formed about the moveable electrostatic combs allows the spacing between the interdigitated fingers of the combs to be reduced to about one micron or less, thereby substantially increasing the number of active fingers which can be provided in a given area. Finally, electrostatic shields can be used in the actuator to substantially reduce unwanted electrostatic fields to further improve performance of the device. As a result, the compact electrostatic comb actuator of the present invention occupies only a fraction of the space required for conventional electrostatic comb actuators, while providing a substantial increase in the available drive force (up to one-hundred times).
摘要翻译： 公开了用于微机电（MEM）应用的紧凑型静电梳状致动器。 致动器基于多个网状静电梳，其中一些是静止的，其中一些是可移动的。 在静电梳的轮廓内（即与可移动的静电梳重叠）中制造一个或多个复原弹簧，以显着减少致动器所需的空间。 此外，提供桁架结构以支撑可移动的静电梳，并且由于不平衡的静电力或外部负载而防止这些梳子的弯曲或变形。 围绕可移动静电梳形成的桁架结构允许梳子的叉指之间的间隔减小到约一微米或更小，从而基本上增加了可以在给定区域中提供的活动手指的数量。 最后，可以在致动器中使用静电屏蔽以显着减少不需要的静电场，以进一步提高装置的性能。 结果，本发明的紧凑型静电梳状致动器仅占用常规静电梳状致动器所需的空间的一小部分，同时提供可用的驱动力（高达一百倍）的显着增加。
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5.发明授权
公开(公告)号：US6082208A
公开(公告)日：2000-07-04
申请号：US53569
申请日：1998-04-01
CPC分类号： B81C1/00198 , F16H19/00 , B81B2201/035 , B81B2203/06 , Y10S310/06 , Y10T74/19614 , Y10T74/19619
摘要： A process for forming complex microelectromechanical (MEM) devices having five layers or levels of polysilicon, including four structural polysilicon layers wherein mechanical elements can be formed, and an underlying polysilicon layer forming a voltage reference plane. A particular type of MEM device that can be formed with the five-level polysilicon process is a MEM transmission for controlling or interlocking mechanical power transfer between an electrostatic motor and a self-assembling structure (e.g. a hinged pop-up mirror for use with an incident laser beam). The MEM transmission is based on an incomplete gear train and a bridging set of gears that can be moved into place to complete the gear train to enable power transfer. The MEM transmission has particular applications as a safety component for surety, and for this purpose can incorporate a pin-in-maze discriminator responsive to a coded input signal.
摘要翻译： 一种用于形成具有五层或多层多晶硅的复合微机电（MEM）器件的方法，包括可形成机械元件的四个结构多晶硅层，以及形成电压参考平面的下层多晶硅层。 可以使用五电平多晶硅工艺形成的特定类型的MEM器件是用于控制或互锁静电电动机和自组装结构之间的机械功率传递的MEM传输（例如，铰链式弹出式反射镜，用于与 入射激光束）。 MEM传动基于不完整的齿轮系和可以移动到位的桥接齿轮组，以完成齿轮系以实现功率传递。 MEM传输具有特定应用作为保证的安全部件，为此，可以根据编码的输入信号结合引入迷宫识别器。
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6.发明授权
公开(公告)号：US4197898A
公开(公告)日：1980-04-15
申请号：US935160
申请日：1978-08-21
申请人： Samuel L. Miller
发明人： Samuel L. Miller
CPC分类号： B22D23/10
摘要： A method and apparatus for controlling the cooling rate at the bottom of molds used in the electroslag remelting process as the ingots solidify therein to provide a slow cooling and eliminate butt cracking in the bottoms of such ingots.
摘要翻译： 一种用于控制在电渣重熔过程中使用的模具底部的冷却速度的方法和装置，因为锭固化在其中以提供缓慢冷却并消除这种锭的底部的对接裂纹。
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7.发明授权Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement 有权非常紧凑，高稳定性的静电执行器，具有无接触自限位移公开(公告)号：US06507138B1
公开(公告)日：2003-01-14
申请号：US09615008
申请日：2000-07-11
IPC分类号： H02N100
CPC分类号： G01P15/125 , B81B3/0021 , B81B2201/033 , B81B2203/051 , G01P2015/0814 , H02N1/008
摘要： A compact electrostatic actuator is disclosed for microelectromechanical (MEM) applications. The actuator utilizes stationary and moveable electrodes, with the stationary electrodes being formed on a substrate and the moveable electrodes being supported above the substrate on a frame. The frame provides a rigid structure which allows the electrostatic actuator to be operated at high voltages (up to 190 Volts) to provide a relatively large actuation force compared to conventional electrostatic comb actuators which are much larger in size. For operation at its maximum displacement, the electrostatic actuator is relatively insensitive to the exact value of the applied voltage and provides a self-limiting displacement.
摘要翻译： 公开了用于微机电（MEM）应用的小型静电致动器。 致动器利用固定和可移动电极，其中固定电极形成在基板上，并且可移动电极被支撑在框架上的基板上。 框架提供刚性结构，其允许静电致动器在高电压（高达190伏特）下操作，以提供比现有尺寸更大的传统静电梳状致动器相对较大的致动力。 为了在其最大位移操作，静电致动器对施加电压的精确值相对不敏感，并提供自限位移。
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8.发明授权Process for suppression of noise and fumes generated by plasma-arc cutting operation 失效用于抑制由等离子弧切割操作产生的噪音和烟雾的过程
公开(公告)号：US4087670A
公开(公告)日：1978-05-02
申请号：US521406
申请日：1974-11-06
申请人： Samuel L. Miller
发明人： Samuel L. Miller
摘要： Noise, fuels and potentially dangerous light emissions generated by a plasma-arc cutting operation are suppressed by carrying out the operation with a solid layer of water surrounding the space between the hot effluent discharge of the torch and the workpiece. To localize the layer of water immediately under the discharge nozzle of the torch, a jacket is provided around the lower end of the torch which continually is receiving and discharging water through a skirt guidance member depending from the jacket thus providing a contained volume of moving water around the space involved which immerses the end of the nozzle. A water layer is also provided under the workpiece which receives water leaking around the skirt member and through the kerf created by the torch under its nozzle. Water from under the workpiece is circulated through a separator to remove unwanted materials introduced by the cutting operation. The skirt member is preferably composed of a pliant material such as asbestos cloth, rubber, or brush bristles. However, more rigid material with a partial bottom may be utilized.
摘要翻译： 通过在割炬的热流出物和工件之间的空间周围的固体水层进行操作来抑制由等离子弧切割操作产生的噪声，燃料和潜在的危险的光照射。 为了将水层定位在割炬的排放喷嘴正下方，在割炬的下端周围设置护套，该护套不断地通过裙部引导构件接收和排出水，从而从护套上取下，从而提供容纳的移动水 围绕浸入喷嘴端部的相关空间。 在工件下面还设有水层，其接收围绕裙部件泄漏的水并且通过其喷嘴下方的割炬产生的切口。 来自工件下方的水通过分离器循环以除去由切割操作引入的不需要的材料。 裙部件优选由诸如石棉布，橡胶或刷毛之类的柔软材料组成。 然而，可以使用具有部分底部的更刚性的材料。
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