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公开(公告)号:US20090114507A1
公开(公告)日:2009-05-07
申请号:US11983353
申请日:2007-11-07
IPC分类号: B65G47/04 , B65G65/02 , B65H1/00 , B66C13/22 , H01L21/677
CPC分类号: B65G15/14 , B65G47/901 , H01L21/6773 , H01L21/67733 , H01L21/67736
摘要: A transport system is provided to move an article from a conveyance section to a location. The conveyance section transports the article using a pair of transport belts. A lift lowers the article downward between the pair of transport belts. A hoist translates the article beneath the conveyance section to the location while supporting the article from above. The article may include a FOUP, semiconductor wafer, substrate for the manufacture of display devices or photovoltaics. The hoist may comprise a carriage and a gripper configured to grasp and vertically move the article while suspended beneath the carriage.
摘要翻译: 提供运送系统以将物品从运输部分移动到位置。 输送部使用一对输送带输送物品。 升降机在一对传送带之间向下降低物品。 起重机将运输工具下方的物品翻译到位置,同时从上方支撑物品。 该物品可以包括用于制造显示装置或光伏的FOUP,半导体晶片,衬底。 起重机可以包括托架和夹具,构造成在悬架在托架下方时抓住并垂直移动物品。
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公开(公告)号:US07445111B2
公开(公告)日:2008-11-04
申请号:US11764161
申请日:2007-06-15
申请人: Barry Kitazumi , Michael D. Brain , Mihir Parikh
发明人: Barry Kitazumi , Michael D. Brain , Mihir Parikh
IPC分类号: B65G15/50
CPC分类号: B65G17/123 , B65G15/14 , B65G2201/0297 , H01L21/67706 , H01L21/67715 , H01L21/6773 , Y10S414/14
摘要: A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, inclined and declined conveyance sections. The articles are conveyed between a pair of vertical belts while being supported by protrusions extending from the vertical belts. The vertical belts are guided using a multiplicity of vertical rollers that are configurable into straight, curvilinear and dynamically changing conveyance sections. Multiple conveyance sections can be joined end to end to transport articles over complex paths and over long distances. The articles conveyed may include semiconductor wafers.
摘要翻译: 一种用于沿着包括直的,曲线的,水平的,倾斜的和倾斜的输送段输送路径输送物品的运输系统。 物品在一对垂直带之间输送,同时由从垂直带延伸的突起支撑。 使用多个可配置成直线,曲线和动态变化的输送部分的垂直辊来引导垂直带。 多个输送部分可以端对端地连接,以通过复杂的路径和长距离运输物品。 所传送的物品可以包括半导体晶片。
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公开(公告)号:US20080156618A1
公开(公告)日:2008-07-03
申请号:US12002850
申请日:2007-12-18
申请人: Michael D. Brain
发明人: Michael D. Brain
CPC分类号: B65G37/005 , B65G37/02 , B65G2201/0297 , H01L21/67276 , H01L21/67715 , H01L21/67733 , H01L21/67736 , H01L21/67769
摘要: Systems and methods are provided for transporting articles throughout a fabrication facility according to assigned priority levels. Systems of the present invention are directed to conveyor systems that may include parallel conveyors and nodes where articles can be switched between conveyors. Accordingly, high priority articles can be routed around traffic by switching between parallel conveyors and/or lower priority articles can be rerouted or buffered to make a chosen route for a high priority article less congested. Methods are directed to selecting the most appropriate route for an article amongst the various possible routing alternatives.
摘要翻译: 提供了系统和方法,用于根据分配的优先级别在整个制造设施中运输物品。 本发明的系统涉及可包括平行输送机和节点的输送机系统,其中物品可以在输送机之间切换。 因此,高优先级的物品可以通过在并行输送机之间切换来绕过交通工具,和/或可以重新路由或缓冲较低优先级的物品,以便为较不拥挤的高优先级物品选择所选择的路线。 方法涉及在各种可能的路线选择中选择物品的最合适的路线。
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公开(公告)号:US5166884A
公开(公告)日:1992-11-24
申请号:US797714
申请日:1991-11-25
IPC分类号: G03F7/20 , H01L21/673
CPC分类号: H01L21/67294 , G03F7/70541 , G03F7/7075 , G03F7/70991
摘要: A system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.
摘要翻译: 一种安装有用于携带诸如半导体晶片的物品的可移动容器的系统,其包括用于存储容器中物品的身份,状态和历史的非易失性存储器。 此外,该系统包括用于将数据从存储器传送到与处理载体中的物品的处理站相关联的信息处理器的装置。 在优选实施例中,该系统包括数据处理能力,并且都从数据处理站接收数据并传输数据。
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公开(公告)号:US20090000908A1
公开(公告)日:2009-01-01
申请号:US12218625
申请日:2008-07-15
申请人: Michael D. Brain , Chun-Chieh Lin
发明人: Michael D. Brain , Chun-Chieh Lin
CPC分类号: B65G37/005 , B65G37/02 , B65G2201/0297 , H01L21/67276 , H01L21/67715 , H01L21/67769
摘要: A system for buffering articles in transport is provided. The system comprises a buffer module configured to buffer articles and a computing system. The buffer module includes a first conveyor configured to transport the articles and a transference node configured to transfer the articles between the first conveyor and an external location. The computing system is configured to maintain an inventory list including a present location of each of the articles buffered by the buffer module. The computing system is further configured to control operation of the buffer module to transfer a selected article among the buffered articles to the external location.
摘要翻译: 提供了一种用于在运输中缓冲物品的系统。 该系统包括被配置为缓冲物品和计算系统的缓冲模块。 缓冲器模块包括构造成输送物品的第一传送器和被配置成在第一传送器和外部位置之间传送物品的传送节点。 计算系统被配置为维护包括由缓冲器模块缓冲的每个文章的当前位置的清单列表。 计算系统还被配置为控制缓冲器模块的操作以将缓冲的物品中的所选物品传送到外部位置。
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公开(公告)号:US07281623B1
公开(公告)日:2007-10-16
申请号:US11406569
申请日:2006-04-18
申请人: Barry Kitazumi , Michael D. Brain , Mihir Parikh
发明人: Barry Kitazumi , Michael D. Brain , Mihir Parikh
IPC分类号: B65G15/50
CPC分类号: B65G17/123 , B65G15/14 , B65G2201/0297 , H01L21/67706 , H01L21/67715 , H01L21/6773 , Y10S414/14
摘要: A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, inclined and declined conveyance sections. The articles are conveyed between a pair of vertical belts while being supported by protrusions extending from the vertical belts. The vertical belts are guided using a multiplicity of vertical rollers that are configurable into straight, curvilinear and dynamically changing conveyance sections. Multiple conveyance sections can be joined end to end to transport articles over complex paths and over long distances. The articles conveyed may include semiconductor wafers.
摘要翻译: 一种用于沿着包括直的,曲线的,水平的,倾斜的和倾斜的输送段输送路径输送物品的运输系统。 物品在一对垂直带之间输送,同时由从垂直带延伸的突起支撑。 使用多个可配置成直线,曲线和动态变化的输送部分的垂直辊来引导垂直带。 多个输送部分可以端对端地连接,以通过复杂的路径和长距离运输物品。 所传送的物品可以包括半导体晶片。
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公开(公告)号:US4974166A
公开(公告)日:1990-11-27
申请号:US458767
申请日:1989-12-29
IPC分类号: B23Q41/00 , B23Q41/02 , B65G1/137 , B65G49/07 , B65G61/00 , G03F7/20 , G05B19/418 , G06Q50/00 , H01L21/00 , H01L21/02 , H01L21/673 , H01L21/677
CPC分类号: H01L21/67294 , G03F7/70525 , G03F7/70541 , G03F7/7075 , G03F7/70991 , G05B19/4183 , H01L21/67276 , G05B2219/31002 , G05B2219/31286 , G05B2219/31323 , G05B2219/31432 , Y02P90/08 , Y02P90/10 , Y02P90/24 , Y02P90/28 , Y02P90/285
摘要: A system for storing transporting and processing articles includes a plurality of transportable containers, each transportable container having an interior region adapted to receive a plurality of articles and data processing device provided on the transportable container for receiving, storing, transmitting and displaying information related to the articles received by the corresponding transportable container. A plurality of workstations are adapted to receive one of the transportable containers and to process selected ones of the articles. The workstation also verifies that at least one of the articles in the transportable container has arrived at the appropriate workstation and communicates with a central processing unit to receive and transmit status information and processing information, and to transmit information stored by the data processing device provided on the transportable container. The system may also include a storage station for receiving said transportable container, for providing communication between the data processing devices provided on the transportable container and the central processing unit, and for making a backup copy of the information stored by said data processing device.
摘要翻译: 用于存储运输和处理物品的系统包括多个可运输容器,每个可运输容器具有适于容纳多个物品的内部区域和设置在可运输容器上的数据处理装置,用于接收,存储,传送和显示与 由相应的运输容器收到的物品。 多个工作站适于接收可移动容器中的一个并处理所选物品中的一个。 工作站还验证可运输容器中的至少一个物品已经到达适当的工作站并与中央处理单元通信以接收和发送状态信息和处理信息,并且传送由提供的数据处理装置存储的信息 运输容器。 该系统还可以包括用于接收所述可移动容器的存储站,用于提供在可运输容器上提供的数据处理设备与中央处理单元之间的通信,以及用于制作由所述数据处理设备存储的信息的备份副本。
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公开(公告)号:US20090038917A1
公开(公告)日:2009-02-12
申请号:US12231791
申请日:2008-09-04
申请人: Barry Kitazumi , Michael D. Brain , Mihir Parikh
发明人: Barry Kitazumi , Michael D. Brain , Mihir Parikh
CPC分类号: B65G17/123 , B65G15/14 , B65G2201/0297 , H01L21/67706 , H01L21/67715 , H01L21/6773 , Y10S414/14
摘要: A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, inclined and declined conveyance sections. The articles are conveyed between a pair of vertical belts while being supported by protrusions extending from the vertical belts. The vertical belts are guided using a multiplicity of vertical rollers that are configurable into straight, curvilinear and dynamically changing conveyance sections. Multiple conveyance sections can be joined end to end to transport articles over complex paths and over long distances. The articles conveyed may include semiconductor wafers.
摘要翻译: 一种用于沿着包括直的,曲线的,水平的,倾斜的和倾斜的输送段输送路径输送物品的运输系统。 物品在一对垂直带之间输送,同时由从垂直带延伸的突起支撑。 使用多个可配置成直线,曲线和动态变化的输送部分的垂直辊来引导垂直带。 多个输送部分可以端对端地连接,以通过复杂的路径和长距离运输物品。 所传送的物品可以包括半导体晶片。
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公开(公告)号:US5570990A
公开(公告)日:1996-11-05
申请号:US147372
申请日:1993-11-05
申请人: Anthony C. Bonora , Bruce A. Richardson , Michael D. Brain , Edward J. Cortez , Barney H. Huang
发明人: Anthony C. Bonora , Bruce A. Richardson , Michael D. Brain , Edward J. Cortez , Barney H. Huang
IPC分类号: G03F7/20 , H01L21/677 , G06F15/50
CPC分类号: G03F7/70541 , G03F7/70741 , G03F7/7075 , H01L21/67775 , Y10S414/14
摘要: A human guided mobile loader stocker developed to mechanically assist in SMIF container movement. The assist includes a pushcart, a semi-motorized transport arm, a processor, and communication devices. A group of containers are placed on the cart using the arm. The cart is pushed to a semiconductor processing tool where the arm is used to transfer containers to and from the port of the processing tool. The processor and communication devices are used for inventory control and guiding the container to the port of the processing tool.
摘要翻译: 开发了用于机械协助SMIF集装箱运动的人造导向移动式装载机储料器。 辅助包括一个手推车,一个半电动运输臂,一个处理器和通讯装置。 使用手臂将一组容器放在购物车上。 推车被推到半导体处理工具,其中臂用于将容器运送到加工工具的端口和从处理工具的端口传送。 处理器和通信设备用于库存控制,并将容器引导到处理工具的端口。
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公开(公告)号:US5097421A
公开(公告)日:1992-03-17
申请号:US54212
申请日:1987-05-18
IPC分类号: B65G43/00 , G03F7/20 , G05B15/02 , H01L21/02 , H01L21/027 , H01L21/304 , H01L21/673 , H01L21/677
CPC分类号: H01L21/67294 , G03F7/70541 , G03F7/7075 , G03F7/70991
摘要: Disclosed is a system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.
摘要翻译: 公开了一种系统,其安装有用于承载诸如半导体晶片的物品的可运输容器,该系统包括用于存储容器中物品的身份,状态和历史的非易失性存储器。 此外,该系统包括用于将数据从存储器传送到与处理载体中的物品的处理站相关联的信息处理器的装置。 在优选实施例中,该系统包括数据处理能力,并且都从数据处理站接收数据并传输数据。
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