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公开(公告)号：US20050230604A1
公开(公告)日：2005-10-20
申请号：US10825442
申请日：2004-04-14
申请人： Richard Rowe , Raymond Blasing , Michael Fleisher , Serge Nikulin , Thomas Grudkowski , Maya Radzinski , Thomas Trawick , Scott Trosper
发明人： Richard Rowe , Raymond Blasing , Michael Fleisher , Serge Nikulin , Thomas Grudkowski , Maya Radzinski , Thomas Trawick , Scott Trosper
CPC分类号： G01V8/005 , G01S7/411 , G01S13/887 , G01S13/89
摘要： A surveillance system can include a first sensor apparatus configured to interrogate a subject, including a person and objects carried by the person, with millimeter-wave electromagnetic radiation for imaging the subject. A supplemental source provides additional information about the subject that is relatable to objects potentially carried by the person. Relational information relates the produced image signal and the subject information. The supplemental source may be a second sensor apparatus adapted to detect a given characteristic of an object potentially carried by a person in the subject position. Relational information about whether the person is carrying an object having the given characteristic may then be produced.
摘要翻译： 监视系统可以包括：第一传感器装置，其配置成用毫米波电磁辐射来询问包括人和人携带的物体的被摄体，以对被摄体成像。 补充来源提供关于该对象的附加信息，该信息与该人可能携带的对象相关。 关系信息涉及产生的图像信号和对象信息。 辅助源可以是适于检测被摄体位置中的人潜在携带的物体的给定特征的第二传感器装置。 然后可以产生关于该人是否携带具有给定特征的对象的关系信息。
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公开(公告)号：US20050232459A1
公开(公告)日：2005-10-20
申请号：US10825530
申请日：2004-04-14
申请人： Richard Rowe , Raymond Blasing , Michael Fleisher , Serge Nikulin , Thomas Grudkowski , Maya Radzinski , Thomas Trawick , Scott Trosper
发明人： Richard Rowe , Raymond Blasing , Michael Fleisher , Serge Nikulin , Thomas Grudkowski , Maya Radzinski , Thomas Trawick , Scott Trosper
CPC分类号： G01S13/887 , G01S13/86 , G01S13/89 , G01V8/005 , G01V11/00 , G06K9/00771 , G06K9/56 , G06K2209/09
摘要： A surveillance system can include a first sensor apparatus configured to interrogate a subject, including a person and objects carried by the person, with millimeter-wave electromagnetic radiation for imaging the subject. A supplemental source provides additional information about the subject that is relatable to objects potentially carried by the person. Relational information relates the produced image signal and the subject information. The supplemental source may be a second sensor apparatus adapted to detect a given characteristic of an object potentially carried by a person in the subject position. Relational information about whether the person is carrying an object having the given characteristic may then be produced.
摘要翻译： 监视系统可以包括：第一传感器装置，其配置成用毫米波电磁辐射来询问包括人和人携带的物体的被摄体，以对被摄体成像。 补充来源提供关于该对象的附加信息，该信息与该人可能携带的对象相关。 关系信息涉及产生的图像信号和对象信息。 辅助源可以是适于检测被摄体位置中的人潜在携带的物体的给定特征的第二传感器装置。 然后可以产生关于该人是否携带具有给定特征的对象的关系信息。
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公开(公告)号：US20050231417A1
公开(公告)日：2005-10-20
申请号：US10825558
申请日：2004-04-14
IPC分类号： G01S13/89
CPC分类号： G01S13/89 , G01S13/887 , G06K9/00369
摘要： An imaging system can include an antenna apparatus configured to transmit toward and receive from a subject in a subject position, millimeter-wave electromagnetic radiation. A subject may include a person and any object or objects with the person. A controller can include a transceiver configured to operate the antenna apparatus and produce an output representative of the received radiation, and a processor adapted to produce from the transceiver output, image data representative of an image of the subject. At least a first portion of an image signal representative of radiation received by an antenna apparatus may be used to produce first image data representative of a first image of at least a portion of the subject. Second image data representative of a second image having resolution that is different than that of the first image may be produced from at least a second portion of the image signal.
摘要翻译： 成像系统可以包括被配置为朝向和接收被摄体位置的毫米波电磁辐射的天线装置。 主体可以包括一个人和与该人的任何物体或物体。 控制器可以包括被配置为操作天线装置并产生代表所接收的辐射的输出的收发器，以及适于从收发器输出产生表示对象的图像的图像数据的处理器。 表示由天线装置接收的辐射的图像信号的至少第一部分可以用于产生表示对象的至少一部分的第一图像的第一图像数据。 表示具有与第一图像不同的分辨率的第二图像的第二图像数据可以从图像信号的至少第二部分产生。
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公开(公告)号：US20050231421A1
公开(公告)日：2005-10-20
申请号：US10824875
申请日：2004-04-14
CPC分类号： G06K9/00369 , G01S7/411 , G01S13/87 , G01S13/887 , G01S13/89 , G01V3/12
摘要： An imaging system can include an antenna apparatus configured to transmit toward and receive from a subject in a subject position, millimeter-wave electromagnetic radiation. A subject may include a person and any object or objects with the person. A controller can include a transceiver configured to operate the antenna apparatus and produce an output representative of the received radiation, and a processor adapted to produce from the transceiver output, image data representative of an image of the subject. At least a first portion of an image signal representative of radiation received by an antenna apparatus may be used to produce first image data representative of a first image of at least a portion of the subject. Second image data representative of a second image having resolution that is different than that of the first image may be produced from at least a second portion of the image signal.
摘要翻译： 成像系统可以包括被配置为朝向和接收被摄体位置的毫米波电磁辐射的天线装置。 主体可以包括一个人和与该人的任何物体或物体。 控制器可以包括被配置为操作天线装置并产生代表所接收的辐射的输出的收发器，以及适于从收发器输出产生表示对象的图像的图像数据的处理器。 表示由天线装置接收的辐射的图像信号的至少第一部分可以用于产生表示对象的至少一部分的第一图像的第一图像数据。 表示具有与第一图像不同的分辨率的第二图像的第二图像数据可以从图像信号的至少第二部分产生。
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公开(公告)号：US06701259B2
公开(公告)日：2004-03-02
申请号：US09905607
申请日：2001-07-13
申请人： Amos Dor , Maya Radzinski
发明人： Amos Dor , Maya Radzinski
IPC分类号： G01N2195
CPC分类号： H01L22/20
摘要： A method and associated apparatus of analyzing defects on semiconductor wafers. The method includes identifying defects on the semiconductor wafer. Defect inspection information is created within a defect source identifier client. The defect inspection information containing information regarding the identified defects. The defect inspection information is transmitted through a network to a defect source identifier server. Defect source information is derived at the defect source identifier server in response to the defect inspection information. The defect source information is transmitted from the defect source identifier server to the defect source identifier client. The defect source information is utilized at the defect source identifier client. In one aspect, the utilizing the defect solution information involves displaying defect solutions to the defect at the defect source identifier client in response to the defect solution information. In another aspect, utilizing the defect solution information involves altering the operation of the wafer processing system.
摘要翻译： 一种分析半导体晶片缺陷的方法和相关设备。 该方法包括识别半导体晶片上的缺陷。 在缺陷源标识客户端内创建缺陷检查信息。 缺陷检查信息包含关于所识别的缺陷的信息。 缺陷检查信息通过网络发送到缺陷源标识服务器。 缺陷源信息是根据缺陷检测信息在缺陷源标识服务器导出的。 缺陷源信息从缺陷源标识服务器发送到缺陷源标识客户端。 在缺陷源标识客户端使用缺陷源信息。 在一个方面，利用缺陷解决方案信息涉及在故障源标识客户端处响应缺陷解决方案信息显示缺陷解决方案。 另一方面，利用缺陷解决方案信息涉及改变晶片处理系统的操作。
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6.发明授权Method and apparatus for providing communication between a defect source identifier and a tool data collection and control system 失效用于提供缺陷源标识符和工具数据收集和控制系统之间的通信的方法和装置公开(公告)号：US06714884B2
公开(公告)日：2004-03-30
申请号：US09978300
申请日：2001-10-15
申请人： Amos Dor , Maya Radzinski
发明人： Amos Dor , Maya Radzinski
IPC分类号： G06F1900
摘要： A method and apparatus for providing communication between a defect source identifier and a tool data collection and control system. The defect source identifier collects wafer data until a defect is identified. Upon identification of a defect, a request is sent to the tool data collection and control system to request data of the tool parameters at the time the defect occurred. The tool data collection and control system retrieves the tool parameters and communicates them to the defect source identifier through a network. The tool parameters are processed by the defect source identifier to extract certain wafer data. The selected wafer data is communicated to the tool data collection and control system and is used to execute a prediction model to predict failure possible of the tool elements.
摘要翻译： 一种用于在缺陷源标识符和工具数据收集和控制系统之间提供通信的方法和装置。 缺陷源标识符收集晶片数据，直到识别到缺陷。 在识别出缺陷时，向工具数据采集和控制系统发送请求，以在缺陷发生时请求工具参数的数据。 工具数据采集和控制系统检索工具参数，并通过网络将其传送到缺陷源标识符。 工具参数由缺陷源标识符处理以提取某些晶片数据。 所选择的晶片数据被传送到工具数据收集和控制系统，并且用于执行预测模型以预测工具元件的可能失效。
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公开(公告)号：US06744266B2
公开(公告)日：2004-06-01
申请号：US09905609
申请日：2001-07-13
申请人： Amos Dor , Maya Radzinski
发明人： Amos Dor , Maya Radzinski
IPC分类号： G01R31305
CPC分类号： H01L22/20
摘要： A method and associated apparatus for creating a defect knowledge library containing case study information of wafer defects on semiconductor wafers. The method comprises creating a database entry that contains a case study of a specific defect including defect information that comprises one or more defect images and storing the database entry for subsequent access. The database entries are stored on a server and are accessible by a plurality of clients.
摘要翻译： 一种用于创建包含半导体晶片上的晶片缺陷的案例研究信息的缺陷知识库的方法和相关联的装置。 该方法包括创建数据库条目，该数据库条目包含特定缺陷的案例研究，所述缺陷包括缺陷信息，所述缺陷信息包括一个或多个缺陷图像并存储用于后续访问的数据 数据库条目存储在服务器上，可由多个客户机访问。
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