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公开(公告)号：US07489429B2
公开(公告)日：2009-02-10
申请号：US11674730
申请日：2007-02-14
IPC分类号： G02B26/08
CPC分类号： G02B26/101 , G02B26/105
摘要： A focused laser beam having an optical axis passes through a first lens mounted to a first galvanometer and a second lens mounted to a second galvanometer. The first galvanometer is adapted to tilt the first lens about a X axis and the second galvanometer is adapted to tilt the second lens about a Y axis. This displaces the focused laser beam in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. In a preferred embodiment, the first and second lenses are a pair of inverted positive meniscus lenses, of high index of refraction material.
摘要翻译： 具有光轴的聚焦激光束通过安装到第一电流计的第一透镜和安装到第二电流计的第二透镜。 第一电流计适于使第一透镜围绕X轴倾斜，并且第二电流计适于使第二透镜围绕Y轴倾斜。 这使得聚焦的激光束以受控的方式从光轴移位，使得能够在大的处理窗口上激光加工非常精确的几何特征。 在优选实施例中，第一透镜和第二透镜是高折射率材料的一对反向正弯月形透镜。
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公开(公告)号：US07529010B1
公开(公告)日：2009-05-05
申请号：US12190273
申请日：2008-08-12
IPC分类号： G02B26/08
CPC分类号： G02B26/101 , G02B26/105
摘要： A focused laser beam having an optical axis passes through a first lens mounted to a first galvanometer and a second lens mounted to a second galvanometer. The first galvanometer is adapted to tilt the first lens about a X axis and the second galvanometer is adapted to tilt the second lens about a Y axis. This displaces the focused laser beam in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. In a preferred embodiment, the first and second lenses are a pair of inverted positive meniscus lenses, of high index of refraction material.
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3.发明授权Diode-laser marker with one-axis scanning mirror mounted on a translatable carriage 有权具有安装在可平移滑架上的单轴扫描镜的二极管激光标记公开(公告)号：US07952603B2
公开(公告)日：2011-05-31
申请号：US12240126
申请日：2008-09-29
申请人： Sergei V. Govorkov , John H. Jerman
发明人： Sergei V. Govorkov , John H. Jerman
CPC分类号： B41J15/14 , B41J2/471 , G02B26/0858 , G02B26/105
摘要： Apparatus for marking a bitmap image on tape includes a source of a modulatable laser-beam. The beam is directed to an oscillating mirror on a carriage translatable across the width direction of the tape. The oscillating mirror directs the beam to a focusing lens mounted on the carriage. The focusing lens is arranged to focus the beam to a focal-spot on the tape. As the carriage is translated, the focal-spot is swept reciprocally in a wave-like path across the tape. Modulation of the beam is arranged such that pixels of a plurality of rows of the bitmap image are printed in one traverse of the carriage. The tape is advanced incrementally and repeated traverses of the carriage are made to complete printing of the bitmap image.
摘要翻译： 用于在磁带上标记位图图像的设备包括可调制激光束的源。 光束被引导到可跨越带的宽度方向平移的滑架上的振动反射镜。 振动镜将光束引导到安装在滑架上的聚焦透镜。 聚焦透镜被布置成将光束聚焦到胶带上的焦斑上。 当托架被翻译时，焦斑以波浪状轨迹往复扫过磁带。 布置波束的调制使得位图图像的多行的像素被打印在滑架的一个横越中。 磁带是递增的，并且重复的滑动遍历被完成打印位图图像。
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4.发明申请DIODE-LASER MARKER WITH ONE-AXIS SCANNING MIRROR MOUNTED ON A TRANSLATABLE CARRIAGE 有权具有单向扫描镜的二极管激光标记安装在可转换的载体上公开(公告)号：US20100079572A1
公开(公告)日：2010-04-01
申请号：US12240126
申请日：2008-09-29
申请人： Sergei V. Govorkov , John H. Jerman
发明人： Sergei V. Govorkov , John H. Jerman
IPC分类号： B41J2/47
CPC分类号： B41J15/14 , B41J2/471 , G02B26/0858 , G02B26/105
摘要： Apparatus for marking a bitmap image on tape includes a source of a modulatable laser-beam. The beam is directed to an oscillating mirror on a carriage translatable across the width direction of the tape. The oscillating mirror directs the beam to a focusing lens mounted on the carriage. The focusing lens is arranged to focus the beam to a focal-spot on the tape. As the carriage is translated, the focal-spot is swept reciprocally in a wave-like path across the tape. Modulation of the beam is arranged such that pixels of a plurality of rows of the bitmap image are printed in one traverse of the carriage. The tape is advanced incrementally and repeated traverses of the carriage are made to complete printing of the bitmap image.
摘要翻译： 用于在磁带上标记位图图像的设备包括可调制激光束的源。 光束被引导到可跨越带的宽度方向平移的滑架上的振动反射镜。 振动镜将光束引导到安装在滑架上的聚焦透镜。 聚焦透镜被布置成将光束聚焦到胶带上的焦斑上。 当托架被翻译时，焦斑以波浪状轨迹往复扫过磁带。 布置波束的调制使得位图图像的多行的像素被打印在滑架的一个横越中。 磁带是递增的，并且重复的滑动遍历被完成打印位图图像。
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5.发明申请BANDWIDTH-LIMITED AND LONG PULSE MASTER OSCILLATOR POWER OSCILLATOR LASER SYSTEMS 有权BANDWIDTH有限公司和长脉冲主振荡器功率振荡器激光系统公开(公告)号：US20080291962A1
公开(公告)日：2008-11-27
申请号：US12170249
申请日：2008-07-09
申请人： Sergei V. Govorkov , Alexander O.W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
发明人： Sergei V. Govorkov , Alexander O.W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译： 激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。 功率振荡器包括用于限制可放大的辐射带宽的光学装置。 与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。 功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。
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6.发明授权Speckle reduction in laser illuminated projection displays having a one-dimensional spatial light modulator 失效具有一维空间光调制器的激光照射投影显示器中的斑点减少公开(公告)号：US07413311B2
公开(公告)日：2008-08-19
申请号：US11238202
申请日：2005-09-29
IPC分类号： G03B21/14
CPC分类号： G03B21/2033 , G02B26/0808 , G02B26/105 , G02B27/48 , H04N9/3132
摘要： A projection display including a one-dimensional light modulator includes an optical arrangement for projecting light from a laser onto the modulator in the form of a line of light. Light from the laser is divided to create in effect a two-dimensional array of mutually incoherent light sources. Light from one axis of the array is projected onto the modulator to form the length of the line of light and light from the other axis of the array is projected onto the modulator to form the width of the line of light. Division of the light is accomplished without the use of any moving component.
摘要翻译： 包括一维光调制器的投影显示器包括用于以光线形式将来自激光的光投射到调制器上的光学装置。 将来自激光器的光分割成实际上产生相互不相干的光源的二维阵列。 将来自阵列的一个轴的光投影到调制器上以形成光线的长度，并且将来自阵列的另一个轴的光投影到调制器上以形成光线的宽度。 光的分割是在不使用任何移动部件的情况下完成的。
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公开(公告)号：US20080151948A1
公开(公告)日：2008-06-26
申请号：US11643114
申请日：2006-12-21
IPC分类号： H01S3/10
CPC分类号： H01S5/026 , H01S5/028 , H01S5/041 , H01S5/0604 , H01S5/1032 , H01S5/125 , H01S5/3211 , H01S5/4031
摘要： A frequency-doubled, edge-emitting semiconductor laser includes a separate confinement heterostructure surmounted by a waveguide including a converting layer of a periodically poled, optically nonlinear material. Fundamental radiation generated in the heterostructure is directionally coupled from the heterostructure into the waveguide, is converted to second-harmonic radiation in the converting layer and is delivered from the waveguide as output radiation. In one example, a distributed Bragg grating is included at an interface between the heterostructure and the waveguide for facilitating coupling of fundamental radiation from the heterostructure into the waveguide.
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公开(公告)号：US20080025353A1
公开(公告)日：2008-01-31
申请号：US11494896
申请日：2006-07-28
CPC分类号： H01S5/02252 , H01S3/08059 , H01S5/0071 , H01S5/141 , H01S5/4062
摘要： A wavelength-locking arrangement for a diode-laser bar includes a cylindrical fast-axis collimating lens and a fast-axis corner reflector. An optical filter is located between the cylindrical lens and the corner reflector for defining the locked wavelength. The corner reflector provides that radiation emitted by each of the diode-lasers and collimated by the cylindrical lens is reflected back to the cylindrical lens and is focused by the cylindrical lens back into the diode-laser from which the radiation was emitted, independent of the fast-axis alignment of the diode-laser with the cylindrical lens.
摘要翻译： 用于二极管激光棒的波长锁定装置包括圆柱形快轴准直透镜和快轴拐角反射器。 光学滤光器位于柱面透镜和角反射器之间，用于限定锁定的波长。 角反射器提供由二极管激光器发射的并由柱面透镜校准的辐射被反射回到柱面透镜，并且被柱面透镜聚焦回放射辐射的二极管激光器，独立于 二极管激光器与柱面透镜的快速对准。
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9.发明申请Amorphous silicon crystallization using combined beams from optically pumped semiconductor lasers 失效使用光泵浦半导体激光器的组合光束进行非晶硅结晶公开(公告)号：US20080014685A1
公开(公告)日：2008-01-17
申请号：US11487798
申请日：2006-07-17
CPC分类号： B23K26/0604 , B23K26/0613 , B23K2101/40
摘要： An amorphous silicon layer on a glass substrate is crystallized by concentrating CW radiation from a number of OPS-lasers into a line of light on the layer. The layer is moved with respect to the line of light to control the dwell time of the line on any location on the layer and to crystallize an extended area of the layer.
摘要翻译： 通过将来自多个OPS激光器的CW辐射集中到该层上的光线中，玻璃基板上的非晶硅层被结晶。 该层相对于光线移动，以控制该层在该层上任何位置上的停留时间并使该层的延伸区域结晶。
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公开(公告)号：US06690703B1
公开(公告)日：2004-02-10
申请号：US10211971
申请日：2002-08-02
IPC分类号： H01S3225
CPC分类号： H01S3/225 , H01S3/08 , H01S3/2308 , H01S3/2366
摘要： A molecular fluorine laser includes a discharge chamber filled with a gas mixture including molecular fluorine and a buffer gas and not including a laser active rare gas, multiple electrodes within the discharge chamber defining a discharge region therebetween connected to a pulsed discharge circuit for applying discharge pulses to the electrodes for energizing the gas mixture, and a resonator including the discharge chamber for generating an oscillator laser beam at a wavelength around 157 nm and a bandwidth of less than 0.6 pm. The laser further includes a power amplifier for increasing the energy of the attenuated oscillator laser beam to a second predetermined energy for lithographic processing, a line-narrowing unit for reducing the bandwidth, a low intensity suppressor module to suppress the weaker lines of the F2-laser, and a synchronization unit to synchronize the oscillator and amplifier.
摘要翻译： 分子氟激光器包括：填充有分子氟和缓冲气体并且不包括激光活性稀有气体的气体混合物的放电室，放电室内的多个电极限定其间连接到脉冲放电电路的放电区域，用于施加放电脉冲 到用于激励气体混合物的电极，以及包括用于产生波长约157nm和带宽小于0.6μm的振荡器激光束的放电室的谐振器。 激光器还包括用于将衰减振荡器激光束的能量增加到用于光刻处理的第二预定能量的功率放大器，用于减小带宽的线窄变换单元，用于抑制F2- 激光器和同步单元来同步振荡器和放大器。
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