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    Functional imaging using capacitive micromachined ultrasonic transducers
    3.
    发明申请
    Functional imaging using capacitive micromachined ultrasonic transducers 审中-公开
    使用电容微加工超声换能器的功能成像

    公开(公告)号：US20070287912A1

    公开(公告)日：2007-12-13

    申请号：US11803157

    申请日：2007-05-11

    申请人： Butrus Khuri-Yakub ,  Omer Oralkan ,  Ira Wygant ,  Srikant Valthllingam

    发明人： Butrus Khuri-Yakub ,  Omer Oralkan ,  Ira Wygant ,  Srikant Valthllingam

    IPC分类号： A61B8/00 ,  A61N5/067

    CPC分类号： A61B5/0059 ,  A61B5/0095 ,  A61B8/08 ,  A61B8/4483 ,  A61B8/483 ,  A61B2562/028 ,  B06B1/0292 ,  G01N29/0618 ,  G01N29/0681 ,  G01N29/2406 ,  G01N29/2418 ,  G01N29/2431 ,  G01N2291/02475

    摘要： The present invention provides an apparatus for functional imaging of an object that is compact, sensitive, and provides real-time three-dimensional images. The apparatus includes a source of non-ultrasonic energy, where the source induces generation of ultrasonic waves within the object. The source can provide any type of non-ultrasonic energy, including but not limited to light, heat, microwaves, and other electromagnetic fields. Preferably, the source is a laser. The apparatus also includes a single capacitive micromachined ultrasonic transducer (CMUT) device or an array of CMUTs. In the case of a single CMUT element, it can be mechanically scanned to simulate an array of any geometry. Among the advantages of CMUTs are tremendous fabrication flexibility and a typically wider bandwidth. Transducer arrays with high operating frequencies and with nearly arbitrary geometries can be fabricated. A method of functional imaging using the apparatus is also provided.

    摘要翻译： 本发明提供了一种用于对物体进行功能成像的装置，其是紧凑的，敏感的并且提供实时的三维图像。 该装置包括非超声能量源，其中源引起在物体内产生超声波。 源可以提供任何类型的非超声波能量，包括但不限于光，热，微波和其他电磁场。 优选地，源是激光。 该装置还包括单个电容微机械加速超声换能器（CMUT）装置或CMUT阵列。 在单个CMUT元件的情况下，可以机械扫描以模拟任何几何的阵列。 CMUT的优点之一是巨大的制造灵活性和通常更宽的带宽。 可以制造具有高工作频率和几乎任意几何形状的传​​感器阵列。 还提供了使用该装置的功能成像的方法。

    Method and system for operating capacitive membrane ultrasonic transducers
    4.
    发明申请
    Method and system for operating capacitive membrane ultrasonic transducers 有权
    用于操作电容式膜超声波换能器的方法和系统

    公开(公告)号：US20050234342A1

    公开(公告)日：2005-10-20

    申请号：US11094874

    申请日：2005-03-30

    申请人： Baris Bayram ,  Omer Oralkan ,  Butrus Khuri-Yakub

    发明人： Baris Bayram ,  Omer Oralkan ,  Butrus Khuri-Yakub

    IPC分类号： A61B8/14 ,  B06B1/02

    CPC分类号： B06B1/0292 ,  G10K9/12

    摘要： A novel operation regime for capacitive micromachined ultrasonic transducers (cMUTs). The collapse-snapback operation in which the center of the membrane makes intermittent contact with the substrate. This combines two distinct states of the membrane (in-collapse and out-of-collapse) to unleash unprecedented acoustic output pressures into the medium. The collapse-snapback operation utilizes a larger range of membrane defection profiles (both collapsed and released membrane profiles) and generates higher acoustic output pressures than the conventional operation. Collapse-snapback operation meets the extreme acoustic transmit pressure demands of the ultrasonic industry.

    摘要翻译： 电容式微加工超声换能器（cMUT）的新颖操作方案。 折叠回击操作，其中膜的中心与衬底间歇接触。 这结合了膜的两种截然不同的状态（塌陷和失真），以释放出前所未有的声输出压力进入介质。 塌陷 - 回弹操作利用更大范围的膜缺陷曲线（两个折叠和释放的膜轮廓），并产生比常规操作更高的声输出压力。 塌陷 - 回弹操作满足超声波行业的极端声学传输压力要求。

    Acousto-optic bragg cell
    5.
    发明授权
    Acousto-optic bragg cell 失效
    声光布拉格单元

    公开(公告)号：US4735476A

    公开(公告)日：1988-04-05

    申请号：US777205

    申请日：1985-09-18

    申请人： Brian L. Heffner ,  Gordon S. Kino ,  William P. Risk, III ,  Butrus Khuri-Yakub

    发明人： Brian L. Heffner ,  Gordon S. Kino ,  William P. Risk, III ,  Butrus Khuri-Yakub

    IPC分类号： G02F1/335 ,  G02B6/10

    CPC分类号： G02F1/335

    摘要： A Bragg cell device for use as a tap in optical systems. In one embodiment an acoustic transducer is secured to a surface of an acoustic transmission medium, which is adjustably secured in hertzian contact with a surface of a waveguide. Bulk acoustic waves at frequencies above about 1 GHz are transmitted from the transducer through the transmission medium into the waveguide along a propagation path wherein the acoustic wavefronts intersect a light path in the waveguide at an angle which satisfies Bragg conditions, producing deflection of light out of the light path. Preferably, the transmission medium is also an optical conductor and is oriented upon the waveguide to receive the deflected light and transmit it to a polished optical window on the transmission medium. A grating transducer is secured on the transmission medium to detect acoustic signals reflected in the transmission medium. During position adjustment of the transmission medium and the waveguide, proper positioning is confirmed by a detected decrease in reflected acoustic signals, indicating the signals are entering the waveguide. In another embodiment, a grating transducer is deposited directly on a surface of a waveguide in a configuration to launch acoustic waves into the waveguide at an angle necessary to produce deflection of light from optical paths in the waveguide. When the waveguide comprises an optical fiber, the grating transducer conforms to the curvature of the fiber surface, thereby focusing acoustic signals from the transducer onto the fiber core.

    摘要翻译： 用作光学系统中的水龙头的布拉格单元装置。 在一个实施例中，声换能器被固定到声传播介质的表面，声传播介质可以与波导的表面以赫兹接触方式可调节地固定。 频率高于约1GHz的体声波沿着传播路径从传感器通过传输介质传输到波导中，其中声波前沿波导中的光路以满足布拉格条件的角度相交，产生光的偏转 光路。 优选地，传输介质也是光导体并且被定向在波导上以接收偏转的光并将其传输到传输介质上的抛光的光学窗口。 光栅传感器被固定在传输介质上以检测在传输介质中反射的声信号。 在传输介质和波导的位置调整期间，通过检测到的反射声信号的减小来确认适当的定位，指示信号正在进入波导。 在另一个实施例中，将光栅换能器直接沉积在波导表面上，以将波形以波导中的光路产生偏转所需的角度发射到波导中。 当波导包括光纤时，光栅传感器符合光纤表面的曲率，从而将来自换能器的声学信号聚焦到光纤芯上。

    Apparatus and method for phased subarray imaging
    6.
    发明申请
    Apparatus and method for phased subarray imaging 有权
    用于相位子阵列成像的装置和方法

    公开(公告)号：US20070208254A1

    公开(公告)日：2007-09-06

    申请号：US11709347

    申请日：2007-02-21

    申请人： Jeremy Johnson ,  Mustafa Karaman ,  Butrus Khuri-Yakub

    发明人： Jeremy Johnson ,  Mustafa Karaman ,  Butrus Khuri-Yakub

    IPC分类号： A61B8/14

    CPC分类号： A61B8/14 ,  G01S7/52046 ,  G01S15/8915 ,  G01S15/8927 ,  G01S15/8993

    摘要： An invention for coherent array image formation and restoration is taught. The invention is applicable for both 2D and 3D imaging using either 1D or 2D arrays, respectively. A transducer array is subdivided into subarrays, each subarray having a number of adjacent array elements. All elements of each subarray transmit and receive in parallel. The signals received from each subarray are delayed and summed to form scan lines, or beams. The low-beam-rate beams formed from each subarray are upsampled and interpolated prior to forming high-beam-rate images. Depending on the subarray geometry, a subarray-dependent restoration filter is also applied to the subarray beams. The restored beams from each subarray are combined to form the final high-beam-rate image. The invention significantly reduces the front-end hardware complexity compared to conventional methods such as full phased array imaging with comparable image quality.

    摘要翻译： 教导了相干阵列图像形成和恢复的发明。 本发明分别适用于使用1D或2D阵列的2D和3D成像。 换能器阵列被细分为子阵列，每个子阵列具有多个相邻的阵列元件。 每个子阵列的所有元素并行传输和接收。 从每个子阵列接收的信号被延迟并相加以形成扫描线或光束。 在形成高光束速率图像之前，从每个子阵列形成的低光束速率光束被上采样和内插。 根据子阵列几何，子阵列依赖的恢复滤波器也被应用于子阵列波束。 来自每个子阵列的恢复的波束被组合以形成最终的高光束速率图像。 与常规方法相比，本发明显着降低了前端硬件复杂性，例如具有可比较图像质量的全相控阵列成像。

    Capacitive ultrasonic transducers with isolation posts
    7.
    发明申请
    Capacitive ultrasonic transducers with isolation posts 有权
    具有隔离柱的电容式超声换能器

    公开(公告)号：US20050228285A1

    公开(公告)日：2005-10-13

    申请号：US10817381

    申请日：2004-04-01

    申请人： Yongli Huang ,  Butrus Khuri-Yakub

    发明人： Yongli Huang ,  Butrus Khuri-Yakub

    IPC分类号： A61B8/14 ,  B06B1/02

    CPC分类号： B06B1/0292

    摘要： A capacitive ultrasonic transducer is described which include one or more cells including a cavity defined by a membrane electrode supported spaced from a support electrode by insulating walls with a patterned isolation layer having isolation posts or areas located in said cavity to prevent the electrodes for coming into contact during operation of the transducer, and to minimize the accumulation of charge as compared to a non-patterned isolation layer for preventing contact of the electrodes during operation of the transducer.

    摘要翻译： 描述了一种电容式超声波换能器，其包括一个或多个电池，其包括由支撑电极间隔开的隔离电极限定的空腔，绝缘壁与图案化隔离层具有位于所述空腔中的隔离柱或区域，以防止电极进入 在传感器的操作期间接触，并且与非图案化隔离层相比最小化电荷的累积，以防止在换能器的操作期间电极的接触。

    Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame
    8.
    发明申请
    Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame 有权
    具有支撑框架的沟槽隔离电容微机械超声波换能器阵列

    公开(公告)号：US20080048211A1

    公开(公告)日：2008-02-28

    申请号：US11880459

    申请日：2007-07-20

    申请人： Butrus Khuri-Yakub ,  Xuefeng Zhuang ,  Arif Ergun

    发明人： Butrus Khuri-Yakub ,  Xuefeng Zhuang ,  Arif Ergun

    IPC分类号： H01L27/10 ,  H01L21/00

    CPC分类号： H01L27/1203 ,  B06B1/0292

    摘要： A one or two-dimensional capacitive micro-machined ultrasonic transducer (CMUT) array with supporting frame is provided. The CMUT array has at least three array elements deposited on a conductive substrate. The invention also has at least one CMUT cell in the array element, a conductive top layer deposited to a top side of the element, and a conductive via disposed within the elements. The via is isolated from the conductive top layer and conducts with the substrate. There are at least two isolation trenches in the conductive substrate, and the trenches are disposed between adjacent vias to conductively isolating the vias. A substrate region between the trenches forms a mechanical support frame. At least one conductive electrode is deposited to a bottom surface of the conductive substrate, where the electrode conducts with the via. The support frame eliminates the need for a carrier wafer in the process steps.

    摘要翻译： 提供具有支撑框架的一维或二维电容微加工超声波换能器（CMUT）阵列。 CMUT阵列具有沉积在导电衬底上的至少三个阵列元件。 本发明还具有阵列元件中的至少一个CMUT单元，沉积到元件的顶侧的导电顶层和设置在元件内的导电通孔。 通孔与导电顶层隔离并与衬底导通。 在导电衬底中存在至少两个隔离沟槽，并且沟槽被布置在相邻的通孔之间以导电隔离通孔。 沟槽之间的衬底区域形成机械支撑框架。 至少一个导电电极沉积到导电基底的底表面上，其中电极与通孔导通。 支撑框架消除了在工艺步骤中对载体晶片的需要。

    Method and system for operating capacitive membrane ultrasonic transducers
    9.
    发明申请
    Method and system for operating capacitive membrane ultrasonic transducers 审中-公开
    用于操作电容式膜超声波换能器的方法和系统

    公开(公告)号：US20050219953A1

    公开(公告)日：2005-10-06

    申请号：US11078795

    申请日：2005-03-10

    申请人： Baris Bayram ,  Edward Haeggstrom ,  Goksen Yaralioglu ,  Butrus Khuri-Yakub

    发明人： Baris Bayram ,  Edward Haeggstrom ,  Goksen Yaralioglu ,  Butrus Khuri-Yakub

    IPC分类号： B06B1/02 ,  H04B1/02

    CPC分类号： B06B1/0292

    摘要： A capacitive membrane ultrasonic transducer system and method of operation is described. The transducers are operated in the collapsed mode. In this mode the membrane is first subjected to a voltage higher than the collapse voltage, therefore initially collapsing the membrane onto the substrate. Then, a bias voltage is applied having an amplitude between the collapse and snapback voltages. At this bias voltage, the center of the membrane still contacts the substrate. By applying driving AC voltage or voltage pulses harmonic membrane motion is obtained in a circular ring concentric to the center. In this regime, between collapse and snapback, the cMUT has a higher eletromechanical coupling efficiency than it has when it is operated in the conventional pre-collapse mode.

    摘要翻译： 描述了一种电容式膜超声换能器系统及其操作方法。 换能器在折叠模式下运行。 在该模式中，膜首先经受高于塌陷电压的电压，因此最初将膜塌陷到基底上。 然后，施加具有在崩溃和回弹电压之间的幅度的偏置电压。 在该偏置电压下，膜的中心仍接触基板。 通过施加驱动AC电压或电压脉冲，在与中心同心的圆环中获得谐波膜运动。 在这种情况下，在崩溃和回弹之间，cMUT具有比在常规的预塌陷模式下操作时更高的电机耦合效率。

    Apparatus and method for phased subarray imaging
    10.
    发明申请
    Apparatus and method for phased subarray imaging 审中-公开
    用于相位子阵列成像的装置和方法

    公开(公告)号：US20050101867A1

    公开(公告)日：2005-05-12

    申请号：US10696592

    申请日：2003-10-28

    申请人： Jeremy Johnson ,  Mustafa Karaman ,  Butrus Khuri-Yakub

    发明人： Jeremy Johnson ,  Mustafa Karaman ,  Butrus Khuri-Yakub

    IPC分类号： A61B8/14 ,  G01S7/52 ,  G01S15/89

    CPC分类号： G01S15/8927 ,  A61B8/14 ,  G01S7/52046 ,  G01S15/8915 ,  G01S15/8993

    摘要： An invention for coherent array image formation and restoration is taught. The invention is applicable for both 2D and 3D imaging using either ID or 2D arrays, respectively. A transducer array is subdivided into subarrays, each subarray having a number of adjacent array elements. All elements of each subarray transmit and receive in parallel. The signals received from each subarray are delayed and summed to form scan lines, or beams. The low-beam-rate beams formed from each subarray are upsampled and interpolated prior to forming high-beam-rate images. Depending on the subarray geometry, a subarray-dependent restoration filter is also applied to the subarray beams. The restored beams from each subarray are combined to form the final high-beam-rate image. The invention significantly reduces the front-end hardware complexity compared to conventional methods such as full phased array imaging with comparable image quality.

    摘要翻译： 教导了相干阵列图像形成和恢复的发明。 本发明分别适用于使用ID或2D阵列的2D和3D成像。 换能器阵列被细分为子阵列，每个子阵列具有多个相邻的阵列元件。 每个子阵列的所有元素并行传输和接收。 从每个子阵列接收的信号被延迟并相加以形成扫描线或光束。 在形成高光束速率图像之前，从每个子阵列形成的低光束速率光束被上采样和内插。 根据子阵列几何，子阵列依赖的恢复滤波器也被应用于子阵列波束。 来自每个子阵列的恢复的波束被组合以形成最终的高光束速率图像。 与常规方法相比，本发明显着降低了前端硬件复杂性，例如具有可比较图像质量的全相控阵列成像。