公开(公告)号：US09941096B2

公开(公告)日：2018-04-10

申请号：US13609811

申请日：2012-09-11

申请人： Michael Schmidt ,  Cliff Bugge

发明人： Michael Schmidt ,  Cliff Bugge

IPC分类号： G01N1/28 ,  H01J37/30 ,  H01J37/305

CPC分类号： H01J37/3053 ,  G01N1/286 ,  G01N2001/2873 ,  H01J37/3005 ,  H01J2237/31745

摘要： A method and system for forming a planar cross-section view for an electron microscope. The method comprises directing an ion beam from an ion source toward a first surface of a sample to mill at least a portion of the sample; milling the first surface, using the ion beam, to expose a second surface in which the end of the second surface distal to the ion source is milled to a greater depth relative to a reference depth than the end of the first surface proximal to the ion source; directing an electron beam from an electron source to the second surface; and forming an image of the second surface by detecting the interaction of the electron beam with the second surface. Embodiments also include planarzing the first surface of the sample prior to forming a cross-section.

公开(公告)号：US20130186747A1

公开(公告)日：2013-07-25

申请号：US13609811

申请日：2012-09-11

申请人： Michael Schmidt ,  Cliff Bugge

发明人： Michael Schmidt ,  Cliff Bugge

IPC分类号： H01J37/305 ,  H01J37/30

CPC分类号： H01J37/3053 ,  G01N1/286 ,  G01N2001/2873 ,  H01J37/3005 ,  H01J2237/31745

摘要： A method and system for forming a planar cross-section view for an electron microscope. The method comprises directing an ion beam from an ion source toward a first surface of a sample to mill at least a portion of the sample; milling the first surface, using the ion beam, to expose a second surface in which the end of the second surface distal to the ion source is milled to a greater depth relative to a reference depth than the end of the first surface proximal to the ion source; directing an electron beam from an electron source to the second surface; and forming an image of the second surface by detecting the interaction of the electron beam with the second surface. Embodiments also include planarzing the first surface of the sample prior to forming a cross-section.

摘要翻译： 用于形成电子显微镜的平面截面图的方法和系统。 该方法包括将来自离子源的离子束引导到样品的第一表面以研磨样品的至少一部分; 使用离子束研磨第一表面以暴露第二表面，其中远离离子源的第二表面的端部相对于比靠近离子的第一表面的端部的参考深度更深的深度 资源; 将电子束从电子源引导到第二表面; 以及通过检测电子束与第二表面的相互作用形成第二表面的图像。 实施例还包括在形成横截面之前平面化样品的第一表面。

公开(公告)号：US20130307957A1

公开(公告)日：2013-11-21

申请号：US13474176

申请日：2012-05-17

申请人： Cliff Bugge ,  Brandon van Leer

发明人： Cliff Bugge ,  Brandon van Leer

IPC分类号： H04N7/18

CPC分类号： G02B21/002 ,  C07K14/415 ,  C12N15/8247 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2813 ,  H04N7/18

摘要： A method of using a scanning microscope to rapidly form a digital image of an area. The method includes performing an initial set of scans to form a guide pixel set for the area and using the guide pixel set to identify regions representing structures of interest in the area. Then, performing additional scans of the regions representing structures of interest, to gather further data to further evaluate pixels in the regions, and not scanning elsewhere in the area.

摘要翻译： 一种使用扫描显微镜快速形成区域的数字图像的方法。 该方法包括执行初始扫描集合以形成用于该区域的引导像素集合并且使用该引导像素集来识别表示该区域中感兴趣的结构的区域。 然后，对表示感兴趣的结构的区域执行附加扫描，以收集进一步的数据以进一步评估区域中的像素，并且不扫描该区域中的其他地方。

公开(公告)号：US08859998B2

公开(公告)日：2014-10-14

申请号：US13981563

申请日：2012-01-28

申请人： Jeffrey Blackwood ,  Matthew Bray ,  Corey Senowitz ,  Cliff Bugge

发明人： Jeffrey Blackwood ,  Matthew Bray ,  Corey Senowitz ,  Cliff Bugge

IPC分类号： H01J37/00 ,  H01J37/26

CPC分类号： H01J37/3056 ,  G01N1/286 ,  G01N2001/2886 ,  H01J37/261 ,  H01J2237/31745

摘要： An improved method of preparing ultra-thin TEM samples that combines backside thinning with an additional cleaning step to remove surface defects on the FIB-facing substrate surface. This additional step results in the creation of a cleaned, uniform “hardmask” that controls the ultimate results of the sample thinning, and allows for reliable and robust preparation of samples having thicknesses down to the 10 nm range.

摘要翻译： 一种改进的制备超薄TEM样品的方法，其结合了背面变薄与额外的清洁步骤，以去除面向FIB的衬底表面上的表面缺陷。 这个额外的步骤导致创建一个清洁，统一的“硬掩模”来控制样品稀化的最终结果，并且允许对厚度低至10nm范围的样品进行可靠和鲁棒的准备。

公开(公告)号：US20140217283A1

公开(公告)日：2014-08-07

申请号：US13981563

申请日：2012-01-28

申请人： Jeffrey Blackwood ,  Matthew Bray ,  Corey Senowitz ,  Cliff Bugge

发明人： Jeffrey Blackwood ,  Matthew Bray ,  Corey Senowitz ,  Cliff Bugge

IPC分类号： H01J37/26

CPC分类号： H01J37/3056 ,  G01N1/286 ,  G01N2001/2886 ,  H01J37/261 ,  H01J2237/31745

摘要： An improved method of preparing ultra-thin TEM samples that combines backside thinning with an additional cleaning step to remove surface defects on the FIB-facing substrate surface. This additional step results in the creation of a cleaned, uniform “hardmask” that controls the ultimate results of the sample thinning, and allows for reliable and robust preparation of samples having thicknesses down to the 10 nm range.

摘要翻译： 一种改进的制备超薄TEM样品的方法，其结合了背面变薄与额外的清洁步骤，以去除面向FIB的衬底表面上的表面缺陷。 这个额外的步骤导致创建一个清洁，统一的“硬掩模”来控制样品稀化的最终结果，并且允许对厚度低至10nm范围的样品进行可靠和鲁棒的准备。

公开(公告)号：US08502172B1

公开(公告)日：2013-08-06

申请号：US13533870

申请日：2012-06-26

申请人： Cliff Bugge ,  Greg Clark ,  Todd Hanson ,  Scott Edward Fuller ,  Jason Donald

发明人： Cliff Bugge ,  Greg Clark ,  Todd Hanson ,  Scott Edward Fuller ,  Jason Donald

IPC分类号： H01J37/30

CPC分类号： H01J37/30 ,  H01J37/28 ,  H01J37/3045 ,  H01J2237/2811 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749 ,  Y10T428/24488 ,  Y10T428/24802

摘要： A method and system for forming and using a fiducial on a sample to locate an area of interest on the sample, the method comprising forming a fiducial by depositing a block of material on a sample proximal to an area of interest on the sample, the block of material extending from the surface of the sample to a detectable extent above the surface of the sample; and milling, using a charged particle beam, a predetermined pattern into at least two exposed faces of the block of material; subsequent to forming the fiducial, detecting the location of the area of interest by detecting the location of the fiducial; and subsequent to detecting the location of the area of interest, imaging or milling the area of interest with a charged particle beam.

摘要翻译： 一种用于在样品上形成和使用基准以定位样品上的感兴趣区域的方法和系统，所述方法包括通过在样品上靠近感兴趣区域的样品上沉积材料块形成基准，所述块 的材料从样品的表面延伸到样品表面上方的可检测范围; 并使用带电粒子束将预定图案研磨成材料块的至少两个暴露面; 在形成基准之后，通过检测基准的位置来检测感兴趣区域的位置; 并且随后检测感兴趣区域的位置，用带电粒子束成像或研磨感兴趣区域。

公开(公告)号：US09041793B2

公开(公告)日：2015-05-26

申请号：US13474176

申请日：2012-05-17

申请人： Cliff Bugge ,  Brandon van Leer

发明人： Cliff Bugge ,  Brandon van Leer

IPC分类号： H04N7/18 ,  H01J37/22 ,  H01J37/26 ,  H01J37/28 ,  G02B21/00

CPC分类号： G02B21/002 ,  C07K14/415 ,  C12N15/8247 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2813 ,  H04N7/18

摘要： A method of using a scanning microscope to rapidly form a digital image of an area. The method includes performing an initial set of scans to form a guide pixel set for the area and using the guide pixel set to identify regions representing structures of interest in the area. Then, performing additional scans of the regions representing structures of interest, to gather further data to further evaluate pixels in the regions, and not scanning elsewhere in the area.

摘要翻译： 一种使用扫描显微镜快速形成区域的数字图像的方法。 该方法包括执行初始扫描集合以形成用于该区域的引导像素集合并且使用该引导像素集来识别表示该区域中感兴趣的结构的区域。 然后，对表示感兴趣的结构的区域执行附加扫描，以收集进一步的数据以进一步评估区域中的像素，并且不扫描该区域中的其他地方。