公开(公告)号：US20160300842A1

公开(公告)日：2016-10-13

申请号：US14681884

申请日：2015-04-08

Applicant: Micron Technology, Inc.

Inventor： Sanh D. Tang ,  Wolfgang Mueller ,  Sourabh Dhir ,  Dylan R. MacMaster

IPC: H01L27/108 ,  H01L21/311 ,  H01L23/528 ,  H01L21/02 ,  H01L29/06 ,  H01L21/768 ,  H01L21/762

CPC classification number: H01L27/10805 ,  H01L21/02068 ,  H01L21/31111 ,  H01L21/743 ,  H01L21/762 ,  H01L21/76831 ,  H01L21/76897 ,  H01L23/528 ,  H01L27/10808 ,  H01L27/1085 ,  H01L27/10855 ,  H01L27/10885 ,  H01L27/10888 ,  H01L27/10891 ,  H01L29/0649 ,  H01L29/7391

Abstract: A method of forming contacts for a semiconductor device structure comprises forming contact holes extending into neighboring semiconductive pillars and into a nitride material of nitride-capped electrodes. Composite structures are formed within the contact holes and comprise oxide structures over sidewalls of the contact holes and nitride structures over the oxide structures. Conductive structures are formed over inner sidewalls of the composite structures. Additional nitride-capped electrodes are formed over the conductive structures and extend perpendicular to the nitride-capped electrodes. Pairs of nitride spacers are formed over opposing sidewalls of the additional nitride-capped electrodes and are separated from neighboring pairs of nitride spacers by apertures extending to upper surfaces of a portion of the neighboring semiconductive pillars. Portions of the oxide structures are removed to expose sidewalls of the portion of the neighboring semiconductive pillars. Semiconductor device structures and additional methods are also described.

Abstract translation: 形成用于半导体器件结构的触点的方法包括形成延伸到相邻的半导体柱中的接触孔，并形成氮化物覆盖的电极的氮化物材料。 复合结构形成在接触孔内并且包括在接触孔的侧壁上的氧化物结构和氧化物结构上的氮化物结构。 导电结构形成在复合结构的内侧壁上。 附加的氮化物封盖的电极形成在导电结构之上并垂直于氮化物封盖的电极延伸。 一对氮化物间隔物形成在另外的氮化物覆盖的电极的相对侧壁上，并且通过延伸到相邻半导体柱的一部分的上表面的孔与相邻的氮化物间隔物相分离。 去除部分氧化物结构以暴露相邻半导体柱的部分的侧壁。 还描述了半导体器件结构和附加方法。

公开(公告)号：US09564442B2

公开(公告)日：2017-02-07

申请号：US14681884

申请日：2015-04-08

Applicant: Micron Technology, Inc.

Inventor： Sanh D. Tang ,  Wolfgang Mueller ,  Sourabh Dhir ,  Dylan R. MacMaster

IPC: H01L21/8238 ,  H01L27/108 ,  H01L21/768 ,  H01L21/311 ,  H01L21/762 ,  H01L21/02 ,  H01L29/06 ,  H01L23/528

CPC classification number: H01L27/10805 ,  H01L21/02068 ,  H01L21/31111 ,  H01L21/743 ,  H01L21/762 ,  H01L21/76831 ,  H01L21/76897 ,  H01L23/528 ,  H01L27/10808 ,  H01L27/1085 ,  H01L27/10855 ,  H01L27/10885 ,  H01L27/10888 ,  H01L27/10891 ,  H01L29/0649 ,  H01L29/7391

Abstract: A method of forming contacts for a semiconductor device structure comprises forming contact holes extending into neighboring semiconductive pillars and into a nitride material of nitride-capped electrodes. Composite structures are formed within the contact holes and comprise oxide structures over sidewalls of the contact holes and nitride structures over the oxide structures. Conductive structures are formed over inner sidewalls of the composite structures. Additional nitride-capped electrodes are formed over the conductive structures and extend perpendicular to the nitride-capped electrodes. Pairs of nitride spacers are formed over opposing sidewalls of the additional nitride-capped electrodes and are separated from neighboring pairs of nitride spacers by apertures extending to upper surfaces of a portion of the neighboring semiconductive pillars. Portions of the oxide structures are removed to expose sidewalls of the portion of the neighboring semiconductive pillars. Semiconductor device structures and additional methods are also described.

Abstract translation: 形成用于半导体器件结构的触点的方法包括形成延伸到相邻的半导体柱中的接触孔，并形成氮化物覆盖的电极的氮化物材料。 复合结构形成在接触孔内并且包括在接触孔的侧壁上的氧化物结构和氧化物结构上的氮化物结构。 导电结构形成在复合结构的内侧壁上。 附加的氮化物封盖的电极形成在导电结构之上并垂直于氮化物封盖的电极延伸。 一对氮化物间隔物形成在另外的氮化物覆盖的电极的相对侧壁上，并且通过延伸到相邻半导体柱的一部分的上表面的孔与相邻的氮化物间隔物相分离。 去除部分氧化物结构以暴露相邻半导体柱的部分的侧壁。 还描述了半导体器件结构和附加方法。