STRUCTURES AND METHODS FOR DICING SEMICONDUCTOR DEVICES

    公开(公告)号:US20230290684A1

    公开(公告)日:2023-09-14

    申请号:US17690981

    申请日:2022-03-09

    CPC classification number: H01L21/78 H01L23/585 H01L27/108

    Abstract: Structures and methods for separating semiconductor wafers into individual dies are disclosed. A semiconductor wafer or panel can include a crack assist structure in a scribe junction. The crack assist structure can include a plurality of vertical walls extending at least partially through a thickness of the wafer. In some embodiments, the plurality of vertical walls can be coupled to a weak interface. The weak interface can guide cracks that form during the dicing process in a direction along the walls, away from active circuitry. After dicing, the resulting semiconductor devices can include a plurality of vertical walls extending at least partially through a thickness of the semiconductor device. Each of the plurality of vertical walls can include at least a portion extending substantially parallel to a sidewall of the semiconductor device.

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