公开(公告)号：US20110031394A1

公开(公告)日：2011-02-10

申请号：US12525908

申请日：2008-02-06

Applicant: William Ralph Knowles ,  Rae Knowles ,  Milos Toth

Inventor： William Ralph Knowles ,  Rae Knowles ,  Milos Toth

IPC: G01N23/00

CPC classification number: H01J37/3056 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2605 ,  H01J2237/31732 ,  H01J2237/3174

Abstract: The current invention includes methods and apparatuses for processing, that is, altering and imaging, a sample in a high pressure charged particle beam system. Embodiments of the invention include a cell in which the sample is positioned during high pressure charged particle beam processing. The cell reduces the amount of gas required for processing, thereby allowing rapid introduction, exhaustion, and switching between gases and between processing and imaging modes. Maintaining the processes gases within the cell protects the sample chamber and column from contact with the gases. In some embodiments, the temperature of the cell walls and the sample can be controlled.

Abstract translation: 本发明包括用于处理的方法和装置，即改变和成像高压带电粒子束系统中的样品。 本发明的实施例包括其中样品在高压带电粒子束处理期间被定位的单元。 电池减少处理所需的气体量，从而允许气体之间以及处理和成像模式之间的快速引入，耗尽和切换。 维持过程中的气体保护样品室和色谱柱不与气体接触。 在一些实施方案中，可以控制细胞壁和样品的温度。

公开(公告)号：US08299432B2

公开(公告)日：2012-10-30

申请号：US12264805

申请日：2008-11-04

Applicant: Milos Toth ,  William Ralph Knowles ,  Rae Knowles, legal representative

Inventor： Milos Toth ,  William Ralph Knowles

IPC: G01N23/00

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/2444 ,  H01J2237/24445 ,  H01J2237/2449 ,  H01J2237/2605 ,  H01J2237/2802

Abstract: A scanning transmission electron microscope operated with the sample in a high pressure environment. A preferred detector uses gas amplification by converting either scattered or unscattered transmitted electrons to secondary electrons for efficient gas amplification.

Abstract translation: 扫描透射电子显微镜在高压环境下与样品一起操作。 优选的检测器通过将散射或未散射的透射电子转换成二次电子来进行气体放大，用于有效的气体放大。

公开(公告)号：US08921811B2

公开(公告)日：2014-12-30

申请号：US12525908

申请日：2008-02-06

Applicant: Milos Toth ,  Rae Knowles

Inventor： Milos Toth ,  William Ralph Knowles

IPC: G01N23/00 ,  H01J37/305 ,  H01J37/301

CPC classification number: H01J37/3056 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2605 ,  H01J2237/31732 ,  H01J2237/3174

Abstract: The current invention includes methods and apparatuses for processing, that is, altering and imaging, a sample in a high pressure charged particle beam system. Embodiments of the invention include a cell in which the sample is positioned during high pressure charged particle beam processing. The cell reduces the amount of gas required for processing, thereby allowing rapid introduction, exhaustion, and switching between gases and between processing and imaging modes. Maintaining the processes gases within the cell protects the sample chamber and column from contact with the gases. In some embodiments, the temperature of the cell walls and the sample can be controlled.

Abstract translation: 本发明包括用于处理的方法和装置，即改变和成像高压带电粒子束系统中的样品。 本发明的实施例包括其中样品在高压带电粒子束处理期间被定位的单元。 电池减少处理所需的气体量，从而允许气体之间以及处理和成像模式之间的快速引入，耗尽和切换。 维持过程中的气体保护样品室和色谱柱不与气体接触。 在一些实施方案中，可以控制细胞壁和样品的温度。

公开(公告)号：US20100108881A1

公开(公告)日：2010-05-06

申请号：US12264805

申请日：2008-11-04

Applicant: MILOS TOTH ,  Rae Knowles ,  William Ralph Knowles

Inventor： MILOS TOTH ,  Rae Knowles ,  William Ralph Knowles

IPC: G01N23/00 ,  G12B21/00

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/2444 ,  H01J2237/24445 ,  H01J2237/2449 ,  H01J2237/2605 ,  H01J2237/2802

Abstract: A scanning transmission electron microscope operated with the sample in a high pressure environment. A preferred detector uses gas amplification by converting either scattered or unscattered transmitted electrons to secondary electrons for efficient gas amplification.

Abstract translation: 扫描透射电子显微镜在高压环境下与样品一起操作。 优选的检测器通过将散射或未散射的透射电子转换成二次电子来进行气体放大，用于有效的气体放大。

公开(公告)号：US07791020B2

公开(公告)日：2010-09-07

申请号：US12059850

申请日：2008-03-31

Applicant: Marek Uncovsky ,  Milos Toth ,  William Ralph Knowles

Inventor： Marek Uncovsky ,  Milos Toth ,  William Ralph Knowles

IPC: H01J37/244 ,  H01J37/28 ,  H01J37/252

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J47/06 ,  H01J2237/24445 ,  H01J2237/2448 ,  H01J2237/2605

Abstract: A novel detector for a charged particle beam system which includes multiple gas amplification stages. The stages are typically defined by conductors to which voltage are applied relative to the sample or to a previous stage. By creating cascades of secondary electrons in multiple stages, the gain can be increased without causing dielectric breakdown of the gas.

Abstract translation: 一种用于带电粒子束系统的新型检测器，其包括多个气体放大级。 这些级通常由相对于样品施加电压的导体或前一级定义。 通过在多级中产生二级电子级联，可以增加增益，而不会导致气体的介质击穿。

公开(公告)号：US07541580B2

公开(公告)日：2009-06-02

申请号：US11731743

申请日：2007-03-30

Applicant: William Ralph Knowles ,  Milos Toth

Inventor： William Ralph Knowles ,  Milos Toth

IPC: H01J37/252

CPC classification number: G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2003 ,  H01J2237/2449 ,  H01J2237/2608

Abstract: A detector for use with a high pressure SEM, such as an ESEM® environmental SEM from FEI Company, extends the effective detection space above the PLA, thereby increasing secondary signal amplification without increasing working distance or pressure. Embodiments can therefore provide improved resolution and can operate at lower gas pressures.

Abstract translation: 用于高压SEM的检测器，如来自FEI公司的ESEM环境SEM，扩展了PLA上方的有效检测空间，从而在不增加工作距离或压力的情况下增加了二次信号放大。 因此，实施例可以提供改进的分辨率并且可以在较低的气体压力下操作。