公开(公告)号：US5233175A

公开(公告)日：1993-08-03

申请号：US934704

申请日：1992-08-24

申请人： Milton R. Latta ,  Timothy S. Gardner

发明人： Milton R. Latta ,  Timothy S. Gardner

IPC分类号： G11B7/00 ,  G11B7/0045 ,  G11B7/125 ,  G11B7/135

CPC分类号： G11B7/1356 ,  G11B7/126

摘要： An optoelectronic system for controlling laser drive current to produce a power level at the target independent of changes in the transmissivity of a beamsplitter positioned in the optical path between the laser source and the target. A second beamsplitter with transmissivity and reflectivity factors matched to the first beamsplitter is used to direct portions of light to two photodetectors. The two photodetectors are connected to circuits which produce a signal proportional to the power transmitted by the first beamsplitter divided by the power reflected by the second beamsplitter, that quotient multiplied by the sum of the photodetector signals to produce a final detection signal which is used as input to the servo control of laser drive current.

摘要翻译： 一种光电子系统，用于控制激光驱动电流，以产生位于激光源和目标之间的光路中的分束器的透射率变化的目标处的功率电平。 具有与第一分束器匹配的透射率和反射率因子的第二分束器用于将部分光引导到两个光电检测器。 两个光电检测器连接到电路，其产生与由第一分束器传输的功率成比例的信号除以由第二分束器反射的功率的信号，该商与光电检测器信号的和乘以产生最终检测信号，其被用作 输入到激光驱动电流的伺服控制。

公开(公告)号：US4516832A

公开(公告)日：1985-05-14

申请号：US391099

申请日：1982-06-23

申请人： Kantilal Jain ,  Milton R. Latta

发明人： Kantilal Jain ,  Milton R. Latta

IPC分类号： G03B27/54 ,  G02B3/00 ,  G02B6/06 ,  G03F7/20 ,  G02B5/14

CPC分类号： G02B27/0911 ,  G02B27/0961 ,  G02B3/0056 ,  G02B3/0075 ,  G02B6/06 ,  G03F7/70058

摘要： A laser light source for a high resolution projection lithography system and transforming optical apparatus which transforms the laser light into an optically equivalent self-luminous curved line source. The transforming optical apparatus comprises a two-dimensional array of fly's eye lenses positioned to intercept light from the light source and to produce a series of point sources having a selected numerical aperture. An optical fiber array is positioned so that the imput end of each fiber receives the light output from one of the lenses in the array. The position of the fibers is chosen so that light from the lenses underfills the fibers to preserve the numerical aperture. The output ends of the fibers are arranged in position to produce a curved line source of a desired shape. Alternate embodiments are described in which lens arrays can be selectively positioned to change the numerical aperture of the transforming optical apparatus.

摘要翻译： 用于高分辨率投影光刻系统的激光源和将激光转换成光学等效的自发光曲线源的变换光学装置。 变换光学装置包括飞眼镜片的二维阵列，其被定位成拦截来自光源的光并产生具有选定数值孔径的一系列点光源。 定位光纤阵列使得每个光纤的输入端接收阵列中的一个透镜的光输出。 选择纤维的位置使得来自透镜的光底部填充纤维以保持数值孔径。 纤维的输出端被布置在适当位置以产生所需形状的曲线源。 描述了替代实施例，其中可以选择性地定位透镜阵列以改变变换光学装置的数值孔径。

公开(公告)号：US4645338A

公开(公告)日：1987-02-24

申请号：US727644

申请日：1985-04-26

申请人： Anthony Juliana, Jr. ,  Milton R. Latta ,  Glenn V. Sincerbox ,  Carlton G. Willson

发明人： Anthony Juliana, Jr. ,  Milton R. Latta ,  Glenn V. Sincerbox ,  Carlton G. Willson

IPC分类号： H01L21/30 ,  G01B11/00 ,  G03F7/207 ,  G03F9/00 ,  H01L21/027 ,  H01L21/67 ,  H01L21/68 ,  G01B11/27

CPC分类号： G03F9/7049

摘要： An apparatus and process for determining focus correction for a lithographic tool are provided. A periodic surface relief structure containing focus information is illuminated so that diffraction beams are generated. An object is translated orthogonally to the periodic structure to cause a change in the intensity of the diffracted beams. Focus correction is determined based upon the changes in the intensity of the diffracted beams.

摘要翻译： 提供了一种用于确定光刻工具的聚焦校正的装置和方法。 包含焦点信息的周期性表面浮雕结构被照亮，从而产生衍射光束。 物体与周期性结构正交地折射以引起衍射光束的强度的变化。 基于衍射光束强度的变化来确定聚焦校正。

公开(公告)号：US4444456A

公开(公告)日：1984-04-24

申请号：US391100

申请日：1982-06-23

申请人： Kantilal Jain ,  Milton R. Latta ,  Glenn T. Sincerbox

发明人： Kantilal Jain ,  Milton R. Latta ,  Glenn T. Sincerbox

IPC分类号： G02B27/00 ,  G02B5/32 ,  G03H1/00

CPC分类号： G02B5/32 ,  G03F7/70091 ,  G03F7/7015 ,  G02B13/22

摘要： Apparatus for producing a line source of a desired shape from a radiation source such as a laser comprising means for directing the radiation source along a predetermined path as a playback beam to impinge upon a hologram at a predetermined angle to produce a continuous self-luminous source of the desired shape. The hologram is recorded upon a substrate coated with a photosensitive material by interference between recording and object beams derived from the same source of coherent radiation. The recording beam is directed toward the substrate at an orientation and angle so that the playback beam is a conjugate of the recording beam. The object beam is directed to the substrate over a path which includes a diffuser plate covered with an opaque material in all areas except for a continuation area which defines the desired shape. The part of the object beam which impinges upon the substrate is limited by an aperture comprising a sector of an annulus which defines the numerical aperture of the radiation source.

摘要翻译： 用于从诸如激光器的辐射源产生所需形状的线源的装置，包括用于沿预定路径引导辐射源作为重放光束以预定角度撞击全息图以产生连续自发光源的装置 的所需形状。 全息图通过记录和源自同一相干光源的物体光束之间的干涉记录在涂有感光材料的基底上。 记录光束以取向和角度指向基板，使得重放光束是记录光束的共轭。 物体光束通过一条路径被引导到基板，该路径包括在除了限定期望形状的连续区域之外的所有区域中用不透明材料覆盖的漫射板。 物体光束撞击在基板上的部分被包含限定辐射源的数值孔径的环形区段的孔所限制。

公开(公告)号：US4295145A

公开(公告)日：1981-10-13

申请号：US974632

申请日：1978-12-29

申请人： Milton R. Latta

发明人： Milton R. Latta

IPC分类号： B41J2/44 ,  G02F1/11 ,  G02F1/33 ,  G03G15/04 ,  G06K15/12 ,  G01D15/14

CPC分类号： G06K15/1271

摘要： In those high speed laser scanning systems, particularly those used in printing, employing an acousto-optical modulator driven at two or more carrier frequencies for scanning with a plurality of focussed beams simultaneously in order to reduce the required deflection scan rate and to better the rise and fall times of the waveforms, unwanted intermodulation effects arise. These undesirable intermodulation effects can be reduced or largely eliminated by increasing the difference in the carrier frequencies such that the diffracted beam spacing is increased considerably and utilizing either a scan line interlace scheme or a staggered beam scheme to maintain the required scan line spacing. In the latter case, the modulator is situated with the direction of propogation of the acousto-waves between zero and 90 degrees to the direction of image pattern scanning. The angle is made sufficiently large as to make one light beam spot in one scanning line lag a corresponding spot in the adjacent line. In a further approach the two techniques are combined.

摘要翻译： 在这些高速激光扫描系统中，特别是在打印中使用的那些系统中，采用以两个或多个载波频率驱动的声光调制器同时用多个聚焦光束进行扫描，以便减少所需的偏转扫描速率和更好的上升 和波形的下降时间，产生不期望的互调效应。 可以通过增加载波频率的差异来减少或大大地消除这些不期望的互调效应，使得衍射波束间隔显着增加并且利用扫描线交错方案或交错波束方案来维持所需的扫描线间隔。 在后一种情况下，调制器位于与声波扫描方向成0度和90度之间的声波的传播方向。 使得角度足够大，以使得一条扫描线中的一个光束点滞后于相邻线中的对应点。 在另一种方法中，组合了两种技术。

公开(公告)号：US5625609A

公开(公告)日：1997-04-29

申请号：US403166

申请日：1995-03-13

申请人： Milton R. Latta ,  Hal J. Rosen ,  Kurt A. Rubin ,  Wade Wai-Chung Tang

发明人： Milton R. Latta ,  Hal J. Rosen ,  Kurt A. Rubin ,  Wade Wai-Chung Tang

IPC分类号： G11B7/1378 ,  G11B7/00 ,  G11B7/005 ,  G11B7/24 ,  G11B7/252

CPC分类号： G11B7/24 ,  G11B7/005 ,  G11B2007/0013

摘要： A multiple data layer optical disk drive system has fixed aberration correction and uses a disk with maximum interlayer spacing for reduced interlayer crosstalk. In one embodiment the multiple data layer disk has a substrate with a thickness that is reduced by approximately one-half the thickness of the spacer layer that separates the first and last data layers. The disk is designed to operate with a lens that has spherical aberration correction to compensate for the thickness of a conventional single data layer disk. This allows the disk drive to handle multiple data layer disks as well as to be backward compatible and thus handle conventional single data layer disks. The thickness of the substrate material plus one-half the thickness of the spacer layer material (which may have a different index of refraction than the substrate material) is equivalent, for purposes of spherical aberration correction, to the thickness of the substrate material used in the conventional single data layer disk. The focused spot with minimum spherical aberration is thus located at the middle of the spacer layer rather than on the first data layer. The spacer layer thickness is selected so that when the focused spot is located on either the first or last data layer there is some deliberately designed spherical aberration, although an amount that is acceptable. As a result the thickness of the spacer layer can be significantly increased to thereby reduce interlayer crosstalk. In another embodiment that substrate thickness and spacer layer thickness are selected and then the lens is corrected for spherical aberration corresponding to the thickness of substrate material plus one-half the thickness of spacer layer material.

摘要翻译： 多数据层光盘驱动系统具有固定的像差校正，并且使用具有最大层间距的盘来减少层间串扰。 在一个实施例中，多数据层盘具有基板，其厚度减小了分隔第一和最后数据层的间隔层的厚度的大约二分之一。 该盘被设计成与具有球面像差校正的透镜一起工作以补偿常规单个数据层盘的厚度。 这允许磁盘驱动器处理多个数据层磁盘以及向后兼容，从而处理传统的单个数据层磁盘。 衬底材料的厚度加上间隔层材料的厚度的一半（与衬底材料相比可能具有不同的折射率）相当于用于球面像差校正的基底材料的厚度 传统的单数据层磁盘。 因此，具有最小球面像差的聚焦点位于间隔层的中间而不是位于第一数据层上。 选择间隔层厚度，使得当聚焦点位于第一或最后数据层上时，存在一些故意设计的球面像差，尽管可接受的量。 结果，间隔层的厚度可以显着增加，从而减少层间串扰。 在另一个实施例中，选择衬底厚度和间隔层厚度，然后针对与衬底材料的厚度加上间隔层材料的厚度的一半的球面像差校正透镜。

公开(公告)号：US5253236A

公开(公告)日：1993-10-12

申请号：US770560

申请日：1991-10-03

申请人： Milton R. Latta ,  Timothy C. Strand ,  James M. Zavislan

发明人： Milton R. Latta ,  Timothy C. Strand ,  James M. Zavislan

IPC分类号： G11B7/09 ,  G11B7/135 ,  G11B11/105 ,  G11B21/00

CPC分类号： G11B7/1381 ,  G11B11/10576 ,  G11B7/0908 ,  G11B7/0909 ,  G11B7/0912 ,  G11B7/0916

摘要： A mask is used to remove substantially all of the first order diffraction components of a reflected light beam which are generated as the beam crosses grooved data tracks in an optical media. The mask may comprise a transparent substrate with an opaque layer having a pair of circular apertures or a bow-tie shaped aperture. The apertures are located outside the regions of interference between the diffracted components and the undiffracted component. The layer may be made of a reflective material for reflecting diffracted components of the reflected beam to a tracking error sensor. The layer may be made of a holographic material for deflecting the diffracted components to a tracking error sensor.

摘要翻译： 掩模用于去除当光束穿过光学介质中的带槽数据轨道时产生的反射光束的基本上所有的一级衍射分量。 掩模可以包括具有不透明层的透明基底，该不透明层具有一对圆形孔或弓形孔。 这些孔位于衍射部件和未衍射部件之间的干涉区域的外侧。 该层可以由用于将反射光束的衍射分量反射到跟踪误差传感器的反射材料制成。 该层可以由全息材料制成，用于将衍射成分偏转到跟踪误差传感器。

公开(公告)号：US4784447A

公开(公告)日：1988-11-15

申请号：US25691

申请日：1987-03-13

申请人： Milton R. Latta ,  Timothy C. Strand

发明人： Milton R. Latta ,  Timothy C. Strand

IPC分类号： G11B7/09 ,  G02B7/28 ,  G11B7/085 ,  G11B7/12 ,  G11B7/135 ,  G02B5/32

CPC分类号： G11B7/1362 ,  G11B7/08547 ,  G11B7/12

摘要： A holographic mirror is used in an optical storage head to diffract a laser beam perpendicularly to the optical medium and also to focus the beam onto the optical medium. The mirror can also function to cause circularization of a collimated laser beam of elliptical cross-section.

公开(公告)号：US4547044A

公开(公告)日：1985-10-15

申请号：US481011

申请日：1983-03-31

申请人： Kantilal Jain ,  Milton R. Latta

发明人： Kantilal Jain ,  Milton R. Latta

IPC分类号： G02B19/00 ,  G02B27/09 ,  G03F7/20 ,  G02B3/06

CPC分类号： G02B27/0927 ,  G02B19/0019 ,  G02B19/0028 ,  G02B19/0047 ,  G02B27/09 ,  G02B27/0977 ,  G03F7/70058

摘要： An apparatus forming a wedge shaped mirror tunnel makes the intensity distribution across a light beam uniform. A light beam is directed along a predetermined path through a cylindrical lens to focus the beam to a line at a particular point P. A plane mirror is placed along the predetermined path near point P so that the beam is folded onto itself. A plurality of cascaded optical means of this type, each stage of which comprises a focusing lens and a reflective surface, is used to achieve the beam uniformity needed for the chosen application. In each of the cascaded stages, the reflective surface is positioned at the appropriate angle to fold the beam upon itself.

摘要翻译： 形成楔形反射镜隧道的装置使得光束之间的强度分布均匀。 光束沿着预定路径被引导通过柱面透镜，以将光束聚焦到特定点P处的线。平面镜沿着P点附近的预定路径放置，使得光束被折叠到自身上。 这种类型的多个级联光学装置，其每个级包括聚焦透镜和反射表面，用于实现所选应用所需的光束均匀性。 在每个级联级中，反射表面以适当的角度定位，以将梁自身折叠。