公开(公告)号：US20130087287A1

公开(公告)日：2013-04-11

申请号：US13534446

申请日：2012-06-27

申请人： Min HUR ,  Jae Ok LEE ,  Woo Seok KANG ,  Dae-Hoon LEE ,  Kwan-Tae KIM ,  Young-Hoon SONG

发明人： Min HUR ,  Jae Ok LEE ,  Woo Seok KANG ,  Dae-Hoon LEE ,  Kwan-Tae KIM ,  Young-Hoon SONG

IPC分类号： B05C9/00

CPC分类号： H01J37/32844 ,  B01D53/32 ,  B01D53/70 ,  B01D2257/2047 ,  B01D2257/2066 ,  B01D2258/0216 ,  B01D2259/818 ,  C23C16/4412 ,  H01J37/32348 ,  H01J37/32541 ,  H01J37/32568 ,  H01J37/32834 ,  H05H1/2406 ,  H05H2001/2462 ,  H05H2245/1215 ,  Y02C20/30 ,  Y02P70/605

摘要： Provided is a plasma reactor for removal of contaminants, which is installed between a process chamber and a vacuum pump and removes contaminants emitted from a process chamber. The plasma reactor includes: at least one dielectric body that forms a plasma generation space therein; a ground electrode connected to at least one end of the dielectric body; and at least one driving electrode fixed to an outer peripheral surface of the dielectric body, and connected to an AC power supply unit to receive an AC driving voltage. The ground electrode has a non-uniform diameter along the lengthwise direction of the plasma reactor.

摘要翻译： 提供了一种用于去除污染物的等离子体反应器，其被安装在处理室和真空泵之间并且去除从处理室排出的污染物。 等离子体反应器包括：在其中形成等离子体产生空间的至少一个绝缘体; 连接到电介质体的至少一端的接地电极; 以及至少一个驱动电极，其固定到所述电介质体的外周表面，并且连接到AC电源单元以接收AC驱动电压。 接地电极沿着等离子体反应器的长度方向具有不均匀的直径。

公开(公告)号：US20090031703A1

公开(公告)日：2009-02-05

申请号：US12134557

申请日：2008-06-06

申请人： Dae-Hoon LEE ,  Kwan-Tae Kim ,  Young-Hoon Song ,  Min-Suk Cha ,  Jae-Ok Lee

发明人： Dae-Hoon LEE ,  Kwan-Tae Kim ,  Young-Hoon Song ,  Min-Suk Cha ,  Jae-Ok Lee

IPC分类号： F01N3/033 ,  F01N3/021

CPC分类号： F01N3/36 ,  F01N3/023 ,  F01N3/025 ,  F01N3/0253 ,  F01N3/0275 ,  F01N3/035 ,  F01N3/106 ,  F01N3/30 ,  F01N13/0097 ,  F01N2240/14 ,  F01N2240/28 ,  F01N2390/02 ,  H05H1/48

摘要： A plasma burner and a diesel particulate filter (DPF) trap that can effectively oxidize and remove a particulate material (PM) within an exhaust gas by preheating fuel and mixing the fuel with the exhaust gas are provided. The DPF includes: a filter that is connected to an exhaust conduit at a side opposite to that of an engine; a plasma burner that is provided within the exhaust conduit between the engine and the filter, and that includes a fuel inlet that supplies fuel and a flame vent that projects a flame by a plasma discharge, and that heats exhaust gas; and a fuel inflow conduit that connects the fuel inlet and a fuel tank.

摘要翻译： 提供了等离子体燃烧器和柴油微粒过滤器（DPF）捕集器，其可以通过预热燃料和将燃料与废气混合而有效地氧化和去除废气中的颗粒物质（PM）。 DPF包括：与发动机相反侧的排气管连接的过滤器; 设置在发动机和过滤器之间的排气管道内的等离子燃烧器，其包括供给燃料的燃料入口和通过等离子体放电而投射火焰的火焰口，并且对排气进行加热; 以及连接燃料入口和燃料箱的燃料流入管道。