METHOD FOR TREATING HIGH HYDROPHOBIC SURFACE OF SUBSTRATE
    4.
    发明申请
    METHOD FOR TREATING HIGH HYDROPHOBIC SURFACE OF SUBSTRATE 审中-公开
    用于处理基底高表面的方法

    公开(公告)号:US20100330278A1

    公开(公告)日:2010-12-30

    申请号:US12862611

    申请日:2010-08-24

    IPC分类号: C23C16/30

    摘要: There is provided a method for treating a surface of a substrate, comprising forming a layer, such as a mixed self-assembled monolayer (SAM), on the surface via chemical vapor deposition (CVD) with a CF3-functionalized organic silane and a CH3-functionalized organic silane, wherein the length of a carbon chain of the CH3-functional organic silane is shorter than a carbon chain of the CF3-functionalized organic silane.

    摘要翻译: 提供了一种用于处理基材表面的方法,包括通过化学气相沉积(CVD)与CF 3官能化的有机硅烷和CH 3在表面上形成诸如混合的自组装单层(SAM)的层 官能化的有机硅烷,其中CH 3官能的有机硅烷的碳链的长度短于CF 3官能化的有机硅烷的碳链。